利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

135 条记录 (耗时 0.038 秒)

    Multilayered magnetic sensor having conductive layer within megnetic layer
    1.
    发明授权
    Multilayered magnetic sensor having conductive layer within megnetic layer 失效
    多层磁传感器在磁性层内具有导电层

    公开(公告)号：US5838154A

    公开(公告)日：1998-11-17

    申请号：US615954

    申请日：1996-03-14

    申请人： Takeshi Morikawa ,  Yuji Nishibe ,  Hideya Yamadera ,  Yutaka Nonomura ,  Masaharu Takeuchi ,  Jiro Sakata

    发明人： Takeshi Morikawa ,  Yuji Nishibe ,  Hideya Yamadera ,  Yutaka Nonomura ,  Masaharu Takeuchi ,  Jiro Sakata

    IPC分类号： G01D5/20 ,  G01R33/02 ,  H01L43/00

    CPC分类号： G01R33/02

    摘要： A magnetic sensor element 1 includes a substrate 10, a conductive layer 12 of a conductive material, and a magnetic layer 11 of a magnetic material, which encloses the conductive layer 12. AC is applied to the element from a drive power source 50, and a detector 60 detects an impedance change due to an external magnetic field. The magnetic layer 11 is bestowed with magnetic anisotropy in a direction orthogonal to the direction of energization of the element 1. With the provision of the conductive layer 12 of conductive material and also with magnetic anisotropy imparted to the magnetic layer 1, the element 1 may be made a low resistivity element. A reactance change and a resistance change of the element due to an external magnetic field change, thus can be effectively detected in drive frequencies two orders of magnitude lower than in the case of a prior art magnetic sensor element. The magnetic anisotropy of the magnetic layer 11 is controlled to prevent magnetic field detection dynamic range variations with drive frequency.

    摘要翻译： 磁传感器元件1包括衬底10，导电材料的导电层12和磁性材料的磁性层11，其包围导电层12.AC从驱动电源50施加到元件，并且 检测器60检测由外部磁场引起的阻抗变化。 磁性层11在与元件1的通电方向正交的方向上具有磁各向异性。通过提供导电材料的导电层12以及赋予磁性层1的磁各向异性，元件1可以 制成低电阻率元件。 由于外部磁场变化引起的元件的电抗变化和电阻变化，因此可以在比现有技术的磁性传感器元件的情况下低两个数量级的驱动频率中被有效地检测。 控制磁性层11的磁各向异性以防止磁场检测与驱动频率的动态范围变化。

    Force transducer and method of fabrication thereof
    2.
    发明授权
    Force transducer and method of fabrication thereof 失效
    力传感器及其制造方法

    公开(公告)号：US5773728A

    公开(公告)日：1998-06-30

    申请号：US625528

    申请日：1996-03-29

    申请人： Kouji Tsukada ,  Takeshi Morikawa ,  Yutaka Nonomura ,  Sanae Tokumitsu ,  Masaharu Takeuchi ,  Kazuyoshi Kawaguchi

    发明人： Kouji Tsukada ,  Takeshi Morikawa ,  Yutaka Nonomura ,  Sanae Tokumitsu ,  Masaharu Takeuchi ,  Kazuyoshi Kawaguchi

    IPC分类号： G01B7/16 ,  G01L1/18 ,  G01L9/00 ,  G01L9/04 ,  H01L29/84 ,  G01L1/16

    CPC分类号： G01L1/18

    摘要： the present invention provides a force transducer having high compression fracture strength and high detection sensitivity, thus satisfying both detection precision and reliability, and also a method of fabricating such a force transducer. The force transducer is so constructed that a compression force is transferred via a pressure transfer block to narrow strain gages, which protrude from the surface of a silicon substrate and provide a small pressure-bearing area. Therefore, large compression strains act on the strain gages and thus the detection sensitivity is increased. When the compression force exceeds a predetermined value, the pressure transfer block comes into contact with the surface of the silicon crystal, thus improving the fracture strength of the strain gages. These narrow, protruding strain gages can be fabricated easily by a single mesa etching process.

    摘要翻译： 本发明提供一种具有高压缩断裂强度和高检测灵敏度的力传感器，从而满足检测精度和可靠性，以及制造这种力传感器的方法。 力传感器被构造成通过压力传递块将压缩力传递到从硅衬底的表面突出的窄应变计，并提供小的承压面积。 因此，大的压缩应变作用在应变片上，因此检测灵敏度增加。 当压缩力超过预定值时，压力传递块与硅晶体的表面接触，从而提高应变计的断裂强度。 这些窄的，突出的应变计可以通过单个台面蚀刻工艺容易地制造。

    Vibration-sensing device method of adjusting the same and angular velocity sensor taking advantage of the same
    3.
    发明授权
    Vibration-sensing device method of adjusting the same and angular velocity sensor taking advantage of the same 失效
    振动感应装置的调整方法和角速度传感器的优点相同

    公开(公告)号：US5635642A

    公开(公告)日：1997-06-03

    申请号：US518840

    申请日：1995-08-24

    申请人： Yutaka Nonomura ,  Takeshi Morikawa ,  Masayuki Okuwa ,  Kouji Tsukada

    发明人： Yutaka Nonomura ,  Takeshi Morikawa ,  Masayuki Okuwa ,  Kouji Tsukada

    IPC分类号： G01C19/56 ,  G01C19/5628 ,  G01P3/44

    CPC分类号： G01C19/5607

    摘要： A vibration-sensing device (10) with high sensitivity includes a torsion bar (16) fixed on both ends thereof to a frame, a tuning fork-shaped vibrating member (12) joined with and supported by the torsion bar (16), and first and second torsion vibrating bodies (14,15) symmetrically projected from the torsion bar (16). The torsion bar (16), the tuning fork-shaped vibrating member (12), and the torsion vibrating bodies (14,15) constitute a torsion vibrating system. The application of an angular velocity to the vibration-sensing device (10) under the condition of plane vibrations of first and second vibrating tines (12a, 12b) of the first tuning fork-shaped vibrating member (12) along an X axis generates Coriolis forces to drive torsion vibration of the first tuning fork-shaped vibrating member (12) round the torsion bar (16), thereby driving torsion vibration corresponding to the angular velocity in the torsion vibrating system. The torsion vibration is amplified by the first and second torsion vibrating bodies (14,15) and detected by torsion vibration-detecting piezoelectric elements (20a,20b) attached to the torsion vibrating bodies (14,15). An angular velocity sensor using the vibration-sensing device, and a method of adjusting the sensitivity of the device are also provided.

    摘要翻译： 具有高灵敏度的振动检测装置（10）包括固定在其框架上的扭杆（16），与扭杆（16）接合并由扭杆（16）支撑的音叉形振动件（12），以及 从扭杆（16）对称地突出的第一和第二扭转振动体（14,15）。 扭杆（16），音叉形振动部件（12）和扭转振动体（14,15）构成扭转振动系统。 在第一音叉形振动件（12）的X轴的第一和第二振动尖（12a，12b）的平面振动的条件下，沿着X轴向角度速度施加角速度产生科里奥利 驱动第一音叉形振动件（12）在扭力杆（16）周围的扭转振动的力，由此驱动与扭转振动系统中的角速度相对应的扭转振动。 扭转振动由第一和第二扭转振动体（14,15）放大，并通过安装在扭转振动体（14,15）上的扭转振动检测压电元件（20a，20b）检测。 还提供了使用振动感测装置的角速度传感器和调节装置的灵敏度的方法。

    Force transducer and pressure detecting circuit using the same
    4.
    发明授权
    Force transducer and pressure detecting circuit using the same 失效
    力传感器和压力检测电路使用相同

    公开(公告)号：US5349873A

    公开(公告)日：1994-09-27

    申请号：US92480

    申请日：1993-07-16

    申请人： Yoshiteru Omura ,  Kouji Tsukada ,  Yutaka Nonomura ,  Takeshi Morikawa

    发明人： Yoshiteru Omura ,  Kouji Tsukada ,  Yutaka Nonomura ,  Takeshi Morikawa

    IPC分类号： G01L1/16 ,  G01L1/18 ,  G01L9/00 ,  G01L9/06 ,  G01L9/08 ,  G01L23/10 ,  G01L23/22 ,  G01L9/04 ,  G01L1/75

    CPC分类号： G01L9/0052 ,  G01L1/18 ,  G01L9/0058 ,  G01L9/065 ,  Y10S73/04

    摘要： A force transducer comprising: a silicon semiconductor having a crystal face of (110); a pair of input-output shared electrodes mounted on the crystal face of the silicon semiconductor in mutual confronting relationship in a direction of of the crystal or a direction equivalent to the direction of ; a force transmission block connected to the crystal face of the silicon semiconductor for transmitting a force W perpendicularly to the crystal face; and a support bed supporting the silicon semiconductor and connected to the silicon semiconductor at a face opposite to the crystal face to which the force transmission block is connected, whereby a voltage corresponding to the force W and to be measured is output from the input-output shared electrodes when the force W is applied perpendicularly to the crystal face of the silicon semiconductor via the force transmission block while a current flows in the silicon semiconductor via the input-output shared electrodes.

    摘要翻译： 一种力传感器，包括：具有（110）的晶面的硅半导体; 在晶体的<110>方向或与<110>方向相等的方向上以相互面对的关系安装在硅半导体的晶面上的一对输入输出共享电极; 连接到所述硅半导体的所述晶面的力传递块，用于垂直于所述晶体面传递力W; 以及支撑硅半导体并且在与与所述力传递块连接的晶面相对的面处与所述硅半导体连接的支撑床，由此从所述输入输出输出与所述力W对应的电压 当电流经由输入 - 输出共享电极在硅半导体中流动时，通过力传递块垂直于硅半导体的晶面施加力W时的共用电极。

    Force transducer
    5.
    发明授权
    Force transducer 失效
    力传感器

    公开(公告)号：US5341688A

    公开(公告)日：1994-08-30

    申请号：US995826

    申请日：1992-12-23

    申请人： Takeshi Morikawa ,  Kouji Tsukada ,  Yutaka Nonomura ,  Yoshiteru Omura

    发明人： Takeshi Morikawa ,  Kouji Tsukada ,  Yutaka Nonomura ,  Yoshiteru Omura

    IPC分类号： G01L1/18 ,  H01L29/84 ,  G01L1/16

    CPC分类号： G01L1/18

    摘要： A force transducer comprises: an N-type silicon single crystal having a crystal face of (110) on which a force is applied; a pair of first electrodes and a pair of second electrodes mounted on the crystal face of (110) of the N-type silicon single crystal, the first electrodes facing in a direction angularly spaced by 135 degrees from a direction of of the crystal, and the second electrodes being angularly spaced by 90 degrees from the first electrodes, one of the pairs of first and second electrodes being adapted to serve as input electrodes and the other being adapted to serve as output electrodes; a force transmission block connected to the crystal face of (110) of the N-type silicon single crystal for transmitting the force perpendicularly to the crystal face; and a support bed supporting the N-type silicon single crystal and connected to the N-type silicon single crystal at a face opposite to the crystal face to which the force transmission block is connected, the support bed being in the form of a planar structure having a horizontal cross-sectional shape with a short axis and a long axis.

    摘要翻译： 力传感器包括：具有施加力的晶体面（110）的N型硅单晶; 一对第一电极和一对第二电极，其安装在所述N型硅单晶的（110）的晶面上，所述第一电极面向与所述N型单晶的（001）的方向成角度地间隔135度的方向 并且所述第二电极与所述第一电极成角度地间隔90度，所述一对第一和第二电极中的一个适于用作输入电极，另一个适于用作输出电极; 连接到所述N型硅单晶的（110）的晶面的力传递块，用于垂直于所述晶面传递所述力; 以及支撑N型硅单晶并且在与所述力传递块连接的晶面相对的面上与所述N型硅单晶相连的支撑床，所述支撑床为平面结构 具有短轴和长轴的水平横截面形状。

    Vibration-sensing gyro
    6.
    发明授权
    Vibration-sensing gyro 无效
    振动陀螺仪

    公开(公告)号：US5585562A

    公开(公告)日：1996-12-17

    申请号：US640399

    申请日：1996-04-30

    申请人： Nobuo Kurata ,  Nobuyoshi Sugitani ,  Takashi Ozaki ,  Kenji Harada ,  Kimitoshi Tsuji ,  Yutaka Nonomura ,  Takeshi Morikawa ,  Masayuki Okuwa ,  Kouji Tsukada

    发明人： Nobuo Kurata ,  Nobuyoshi Sugitani ,  Takashi Ozaki ,  Kenji Harada ,  Kimitoshi Tsuji ,  Yutaka Nonomura ,  Takeshi Morikawa ,  Masayuki Okuwa ,  Kouji Tsukada

    IPC分类号： G01C19/5607 ,  G01P9/04

    CPC分类号： G01C19/5607

    摘要： A vibration-sensing gyro composed of a light alloy such as duralumin includes a base and a first pair of tines projecting parallel to each other from the base. Piezoelectric elements are mounted on the root of the side faces of the first pair of tines to excite the first pair of tines along an X axis. The vibrations of the first pair of tines along the X axis are then propagated to a second pair of tines to vibrate the second pair of tines along the X axis. Piezoelectric elements are mounted on the root of the upper and the lower faces of the second pair of tines to detect vibrations of the second pair of tines along an Y axis. When the second pair of tines receives the Coriolis force based on an angular velocity .omega. around a Z axis and vibrates along the Y axis, the vibrations along the Y axis are detected as electric signals (alternating current voltages) by piezoelectric effects of the piezoelectric elements.

    摘要翻译： 由诸如硬铝的轻合金构成的振动感测陀螺包括基部和从底部彼此平行地突出的第一对尖齿。 压电元件安装在第一对尖齿的侧面的根部上，以沿X轴激发第一对尖齿。 沿着X轴的第一对尖齿的振动然后传播到第二对尖齿，以使第二对尖齿沿X轴振动。 压电元件安装在第二对尖齿的上表面和下表面的根部上，以检测第二对尖齿沿着Y轴的振动。 当第二对尖齿接收基于围绕Z轴的角速度ω的科里奥利力并且沿着Y轴振动时，通过压电元件的压电效应将沿着Y轴的振动检测为电信号（交流电压） 。

    Vibration-sensing element and vibration-sensing gyro using the same
    7.
    发明授权
    Vibration-sensing element and vibration-sensing gyro using the same 失效
    振动传感元件和振动感应陀螺仪使用相同

    公开(公告)号：US5533397A

    公开(公告)日：1996-07-09

    申请号：US329385

    申请日：1994-10-26

    申请人： Nobuyoshi Sugitani ,  Masayuki Okuwa ,  Takeshi Morikawa ,  Yutaka Nonomura

    发明人： Nobuyoshi Sugitani ,  Masayuki Okuwa ,  Takeshi Morikawa ,  Yutaka Nonomura

    IPC分类号： G01C19/56 ,  G01C19/5607 ,  H03H9/02 ,  H03H9/24 ,  G01P9/04

    CPC分类号： G01C19/5607

    摘要： The invention provides a vibration-sensing gyro, where resonance frequencies of tines are adjusted adequately in a simple manner. A vibration-sensing gyro (10) of the invention is made of a light alloy plate like duralumin and includes a first tine (14) and a second tine (16) disposed parallel to each other and projecting from a base (12). When the first tine (14) has a length l1, a width w1 along the X axis, and a thickness t1 and the second tine (16) has a length l2, a width w2 along the X axis, and a thickness t2 (=t1), the first tine (14) and the second tine (16) hold the relationship of l2/.sqroot.t2=l1/.sqroot.w1. In other words, the tines (14,16) and the base (12) are manufactured to satisfy this relationship. Such definition of the dimensions makes a resonance frequency fx1 of the first tine along the X axis coincide with a resonance frequency fy 2 of the second tine 16 along the Y axis.

    摘要翻译： 本发明提供了一种振动感测陀螺仪，其中以简单的方式适当地调节尖齿的共振频率。 本发明的振动感应陀螺仪（10）由轻质合金板如硬铝制成，并包括彼此平行并从底座（12）伸出的第一齿（14）和第二齿（16）。 当第一齿（14）具有长度l1时，沿X轴的宽度w1和厚度t1和第二齿16具有长度l2，沿X轴的宽度w2和厚度t2（= t1），第一齿（14）和第二齿（16）保持l2 / 2ROOT t2 = l1 / 2ROOT w1的关系。 换句话说，制造齿（14,16）和基座（12）以满足这种关系。 尺寸的这种定义使得沿着X轴的第一齿的共振频率fx1与第二齿16沿Y轴的共振频率fy 2一致。