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    Sample holder, sample suction device using the same, and sample processing method
    1.
    发明授权
    Sample holder, sample suction device using the same, and sample processing method 有权
    样品架，采样装置及样品处理方法

    公开(公告)号：US08347744B2

    公开(公告)日：2013-01-08

    申请号：US12088669

    申请日：2006-09-28

    申请人： Takeshi Muneishi ,  Toshihiko Uemura ,  Katsuya Okumura

    发明人： Takeshi Muneishi ,  Toshihiko Uemura ,  Katsuya Okumura

    IPC分类号： G01M19/00

    CPC分类号： H01L21/6875 ,  H01L21/68757

    摘要： Because a sample holder 100 is composed of a plurality of convex parts 1 provided on a top face of a base substance 2, and the plurality of convex parts 1 are spherical surfaces 1a formed of a single crystal or amorphous material, frictional wear of the sample at contact parts between a sample 4 and the convex parts 1 is reduced, thereby making it possible to inhibit particle generation. Further, because a joining layer 3 is formed of a single crystal or amorphous material, there is no defect that particles scattered on the sample holder 100 fill up it, which makes it possible to easily keep it in a clean state by cleaning, and it is possible to effectively reduce reattachment of particles to the sample 4.

    摘要翻译： 由于样品保持器100由设置在基体2的顶面上的多个凸部1构成，多个凸部1是由单晶或非晶材料形成的球面1a，所以样品的摩擦磨损 在样品4与凸部1之间的接触部分被还原，从而可以抑制颗粒的产生。 此外，由于接合层3由单晶或非晶材料形成，所以不存在散布在样品架100上的颗粒填充的缺陷，这使得可以通过清洁容易地将其保持在清洁状态，并且其 可以有效地减少颗粒到样品4的再附着。

    Sample Holder, Sample Suction Device Using the Same, and Sample Processing Method
    2.
    发明申请
    Sample Holder, Sample Suction Device Using the Same, and Sample Processing Method 有权
    样品持有人，使用其的样品吸引装置和样品处理方法

    公开(公告)号：US20090293647A1

    公开(公告)日：2009-12-03

    申请号：US12088669

    申请日：2006-09-28

    申请人： Takeshi Muneishi ,  Toshihiko Uemura ,  Katsuya Okumura

    发明人： Takeshi Muneishi ,  Toshihiko Uemura ,  Katsuya Okumura

    IPC分类号： G01N1/14 ,  B01L3/00

    CPC分类号： H01L21/6875 ,  H01L21/68757

    摘要： Because a sample holder 100 is composed of a plurality of convex parts 1 provided on a top face of a base substance 2, and the plurality of convex parts 1 are spherical surfaces 1a formed of a single crystal or amorphous material, frictional wear of the sample at contact parts between a sample 4 and the convex parts 1 is reduced, thereby making it possible to inhibit particle generation. Further, because a joining layer 3 is formed of a single crystal or amorphous material, there is no defect that particles scattered on the sample holder 100 fill up it, which makes it possible to easily keep it in a clean state by cleaning, and it is possible to effectively reduce reattachment of particles to the sample 4.

    摘要翻译： 由于样品保持器100由设置在基体2的顶面上的多个凸部1构成，多个凸部1是由单晶或非晶材料形成的球面1a，所以样品的摩擦磨损 在样品4与凸部1之间的接触部分被还原，从而可以抑制颗粒的产生。 此外，由于接合层3由单晶或非晶材料形成，所以不存在散布在样品架100上的颗粒填充的缺陷，这使得可以通过清洁容易地将其保持在清洁状态，并且其 可以有效地减少颗粒到样品4的再附着。

    SAMPLE HOLDING TOOL, SAMPLE SUCTION DEVICE USING THE SAME AND SAMPLE PROCESSING METHOD USING THE SAME
    3.
    发明申请
    SAMPLE HOLDING TOOL, SAMPLE SUCTION DEVICE USING THE SAME AND SAMPLE PROCESSING METHOD USING THE SAME 审中-公开
    样品保持工具，使用该样品的样品吸收装置和使用该样品的样品处理方法

    公开(公告)号：US20100144147A1

    公开(公告)日：2010-06-10

    申请号：US11996938

    申请日：2006-07-28

    申请人： Takeshi Muneishi ,  Katsuya Okumura

    发明人： Takeshi Muneishi ,  Katsuya Okumura

    IPC分类号： H01L21/683 ,  H02N13/00 ,  H01L21/30 ,  B05C13/02 ,  B23Q3/15 ,  B23B31/28

    CPC分类号： H02N13/00 ,  H01L21/6838 ,  H01L21/68735 ,  Y10T279/23

    摘要： A sample holding tool is provided with a base plate, a plurality of convex portions formed on the base plate so as to stick out from the upper face thereof; and at least one holding plate having a plurality of curved face portions corresponding to the convex portions, with a lower face concave portion of each of the curved face portions being made in contact with the tip portion of each of the convex portions, so that a sample is supported on the upper face convex portion of each of the curved face portions; thus, since the sample is supported by the curved face portion of the holding plate, the contact area to the sample is made very small so that it becomes possible to greatly reduce pointed peak portions, scratches and the like at contact portions between the sample and the curved face portions. Consequently, generation of particles due to abrasion of the sample can be reduced and the particles are reduced from intruding into scratches and voids and occasionally readhering to the sample.

    摘要翻译： 样品保持工具设置有基板，形成在基板上以从其上表面伸出的多个凸部; 以及至少一个保持板，其具有与所述凸部对应的多个曲面部，所述弯曲面部的下表面凹部与所述凸部的前端部抵接， 样品被支撑在每个弯曲面部分的上表面凸部上; 因此，由于样品被保持板的曲面部支撑，所以与样品的接触面积变得非常小，从而可以大大减少样品与样品的接触部分的尖峰部分，划痕等。 曲面部分。 因此，可以减少由于样品的磨损而产生的颗粒，并且使颗粒从侵入划痕和空隙中减少并偶尔重新附着到样品上。