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1.发明授权公开(公告)号：US08389197B2
公开(公告)日：2013-03-05
申请号：US11994602
申请日：2006-06-30
Applicant: Takako Hirosaki , Daiju Shiono , Taku Hirayama , Hideo Hada
Inventor： Takako Hirosaki , Daiju Shiono , Taku Hirayama , Hideo Hada
CPC classification number: G03F7/0397 , C07C67/343 , C07C69/712 , C07C2603/74 , G03F7/0045
Abstract: The present invention provides a positive resist composition and a resist pattern forming method that are capable of forming a resist pattern with a reduced level of roughness. The positive resist composition includes the compound represented by the general formula (I) below. The present invention also provides the resist pattern forming method using the positive resist composition above. [wherein, in formula (I), R11 and R12 each represents, independently, an alkyl group of 1 to 10 carbon atoms or an aromatic hydrocarbon group, and may include a hetero atom in the structure thereof; R21 to R24 each represents, independently, a hydrogen atom or an acid dissociable, dissolution inhibiting group, and two of the R21 to R24 represents a hydrogen atom and the others represents an acid dissociable, dissolution inhibiting group; X is a group represented by general formulas (Ia) or (Ib) below].
Abstract translation: 本发明提供能够形成具有降低的粗糙度的抗蚀剂图案的正型抗蚀剂组合物和抗蚀剂图案形成方法。 正型抗蚀剂组合物包括由下述通式（I）表示的化合物。 本发明还提供了使用上述正型抗蚀剂组合物的抗蚀剂图案形成方法。 式（I）中，R 11和R 12分别独立地表示1〜10个碳原子的烷基或芳香族烃基，其结构中可以含有杂原子; R21〜R24各自独立地表示氢原子或酸解离的溶解抑制基团，R21〜R24中的两个表示氢原子，其余表示酸解离，溶解抑制基团。 X为下述通式（Ia）或（Ib）表示的基团。
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公开(公告)号：US20070259273A1
公开(公告)日：2007-11-08
申请号：US11572630
申请日：2005-07-25
Applicant: Daiju Shiono , Taku Hirayama , Hideo Hada
Inventor： Daiju Shiono , Taku Hirayama , Hideo Hada
IPC: G03F1/00
CPC classification number: G03F7/0045 , G03F7/0392
Abstract: A positive resist composition including a base material for a pattern-forming material (A), which contains a protector (X1) of a polyhydric phenol compound (x) having two or more phenolic hydroxyl groups and a molecular weight of 300 to 2,500, in which a portion of the phenolic hydroxyl groups are protected with an acid-dissociable, dissolution-inhibiting group, and an acid generator component (B) that generates an acid upon exposure, wherein the component (B) contains an onium salt-based acid generator (B1) with an alkylsulfonate ion as an anion.
Abstract translation: 含有图案形成材料（A）的基材的正型抗蚀剂组合物，其含有具有两个或多个酚羟基并且分子量为300〜2,500的多元酚化合物（x）的保护剂（X1） 其中一部分酚羟基被酸解离的溶解抑制基团和在暴露时产生酸的酸产生剂组分（B）保护，其中组分（B）含有鎓盐酸产生剂 （B1）与烷基磺酸根离子作为阴离子。
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3.发明授权Compound, method for producing same, positive resist composition and method for forming resist pattern 失效化合物，其制造方法，正性抗蚀剂组合物和形成抗蚀剂图案的方法
公开(公告)号：US07960089B2
公开(公告)日：2011-06-14
申请号：US12067255
申请日：2006-09-13
Applicant: Daiju Shiono , Takahiro Dazai , Taku Hirayama , Kohei Kasai , Hideo Hada
Inventor： Daiju Shiono , Takahiro Dazai , Taku Hirayama , Kohei Kasai , Hideo Hada
CPC classification number: C07C69/712 , C07C59/70 , C07C59/72 , C07C2601/14 , C07C2603/74 , G03F7/0392
Abstract: A compound of the present invention is a compound represented by a general formula (A-1) [wherein, R′ represents a hydrogen atom or an acid-dissociable, dissolution-inhibiting group, provided that at least one R′ group is an acid-dissociable, dissolution-inhibiting group, R11 to R17 each represent an alkyl group of 1 to 10 carbon atoms or an aromatic hydrocarbon group, which may include a hetero atom within the structure; g and j each represent an integer of 1 or greater, and k and q each represent an integer of 0 or greater, provided that g+j+k+q is not greater than 5; a represents an integer from 1 to 3; b represents an integer of 1 or greater, and l and m each represent an integer of 0 or greater, provided that b+l+m is not greater than 4; c represents an integer of 1 or greater, and n and o each represent an integer of 0 or greater, provided that c+n+o is not greater than 4; and A represents a group represented by a general formula (Ia) shown below, a group represented by a general formula (Ib) shown below, or an aliphatic cyclic group].
Abstract translation: 本发明化合物是由通式（A-1）表示的化合物[其中，R'表示氢原子或酸解离的溶解抑制基团，条件是至少一个R'基团为酸 可溶解抑制基团，R 11至R 17各自表示1-10个碳原子的烷基或芳族烃基，其可以包括结构内的杂原子; g和j分别表示1以上的整数，k和q各自表示0以上的整数，条件是g + j + k + q不大于5; a表示1〜3的整数， b表示1或更大的整数，并且l和m各自表示0或更大的整数，条件是b + 1 + m不大于4; c表示1或更大的整数，n和o各自表示0或更大的整数，条件是c + n + o不大于4; A表示由下述通式（Ia）表示的基团，由下述通式（Ib）表示的基团或脂族环基]表示。
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公开(公告)号：US07897319B2
公开(公告)日：2011-03-01
申请号：US11572630
申请日：2005-07-25
Applicant: Daiju Shiono , Taku Hirayama , Hideo Hada
Inventor： Daiju Shiono , Taku Hirayama , Hideo Hada
CPC classification number: G03F7/0045 , G03F7/0392
Abstract: A positive resist composition including a base material for a pattern-forming material (A), which contains a protector (X1) of a polyhydric phenol compound (x) having two or more phenolic hydroxyl groups and a molecular weight of 300 to 2,500, in which a portion of the phenolic hydroxyl groups are protected with an acid-dissociable, dissolution-inhibiting group, and an acid generator component (B) that generates an acid upon exposure, wherein the component (B) contains an onium salt-based acid generator (B1) with an alkylsulfonate ion as an anion.
Abstract translation: 含有图案形成材料（A）的基材的正型抗蚀剂组合物，其含有具有两个或多个酚羟基并且分子量为300〜2,500的多元酚化合物（x）的保护剂（X1） 其中一部分酚羟基被酸解离的溶解抑制基团和在暴露时产生酸的酸产生剂组分（B）保护，其中组分（B）含有鎓盐酸产生剂 （B1）与烷基磺酸根离子作为阴离子。
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公开(公告)号：US07851129B2
公开(公告)日：2010-12-14
申请号：US11718091
申请日：2005-09-30
Applicant: Daiju Shiono , Taku Hirayama , Toshiyuki Ogata , Hideo Hada
Inventor： Daiju Shiono , Taku Hirayama , Toshiyuki Ogata , Hideo Hada
CPC classification number: G03F7/0045 , G03F7/0392 , G03F7/0397 , Y10S430/106 , Y10S430/114
Abstract: This resist composition is a resist composition containing a compound in which a portion or all of hydrogen atoms of phenolic hydroxyl groups in a polyhydric phenol compound (a) having two or more phenolic hydroxyl groups and having a molecular weight of 300 to 2,500 are substituted with at least one selected from the group consisting of acid dissociable dissolution inhibiting groups represented by the following general formulas (p1) and (p2) wherein R1 and R2 each independently represents a branched or cyclic alkyl group, and may contain a hetero atom in the structure; R3 represents a hydrogen atom or a lower alkyl group; and n′ represents an integer of 1 to 3.
Abstract translation: 该抗蚀剂组合物是含有下述化合物的抗蚀剂组合物，其中具有两个以上酚羟基并且分子量为300〜2,500的多元酚化合物（a）中的酚羟基的一部分或全部氢原子被取代为 选自由以下通式（p1）和（p2）表示的酸解离溶解抑制基团中的至少一种，其中R 1和R 2各自独立地表示支链或环状烷基，并且可以在结构中含有杂原子 ; R3表示氢原子或低级烷基; n'表示1〜3的整数。
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公开(公告)号：US07901865B2
公开(公告)日：2011-03-08
申请号：US11574805
申请日：2005-09-02
Applicant: Taku Hirayama , Daiju Shiono , Hideo Hada
Inventor： Taku Hirayama , Daiju Shiono , Hideo Hada
CPC classification number: G03F7/0392 , G03F7/0045 , G03F7/0048 , Y10S430/114
Abstract: A resist composition that includes a base material component (A), which contains acid-dissociable, dissolution-inhibiting groups and exhibits increased alkali solubility under the action of acid, an acid generator component (B) that generates acid on exposure, and an organic solvent (C), in which the components (A) and (B) are dissolved in the organic solvent (C), wherein the base material component (A) contains a protected form (A1) of a polyhydric phenol compound (a) having two or more phenolic hydroxyl groups and a molecular weight within a range from 300 to 2,500, in which either a portion of, or all of, the phenolic hydroxyl groups are protected with acid-dissociable, dissolution-inhibiting groups, and the organic solvent (C) comprises an alcohol.
Abstract translation: 一种抗蚀剂组合物，其包含基质成分（A），其含有酸解离的溶解抑制基团，并且在酸的作用下显示出增加的碱溶解性，在曝光时产生酸的酸产生剂组分（B）和有机 其中组分（A）和（B）溶解在有机溶剂（C）中的溶剂（C），其中基材组分（A）含有多元酚化合物（a）的保护形式（A1） 两个或更多个酚羟基和分子量在300-2,500的范围内，其中酚羟基的一部分或全部被酸解离的溶解抑制基团保护，并且有机溶剂（ C）包含醇。
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7.发明授权Compound, positive resist composition and method of forming resist pattern 失效化合物，正性抗蚀剂组合物和形成抗蚀剂图案的方法
公开(公告)号：US07862981B2
公开(公告)日：2011-01-04
申请号：US11917458
申请日：2006-06-07
Applicant: Daiju Shiono , Taku Hirayama , Hideo Hada
Inventor： Daiju Shiono , Taku Hirayama , Hideo Hada
CPC classification number: C07C69/712 , C07C2603/74 , G03F7/0392 , G03F7/0397
Abstract: A compound including a polyhydric phenol compound represented by general formula (I) shown below (wherein R11 to R17 each independently represents an alkyl group of 1 to 10 carbon atoms or aromatic hydrocarbon group which may contain a hetero atom in the structure thereof, and X represents an aliphatic cyclic group) and having a molecular weight of 300 to 2,500, in which some or all of the hydrogen atoms of the phenolic hydroxyl groups are substituted with acid dissociable, dissolution inhibiting groups; a positive resist composition containing the compound; and a method of forming a resist pattern using the positive resist composition.
Abstract translation: 含有下述通式（I）表示的多元酚化合物的化合物（其中，R 11〜R 17各自独立地表示碳原子数1〜10的烷基或其结构中可含有杂原子的芳香族烃基，X 代表脂族环基），其分子量为300-2,500，其中酚羟基的一些或全部氢原子被酸解离的溶解抑制基团取代; 含有该化合物的正性抗蚀剂组合物; 以及使用正性抗蚀剂组合物形成抗蚀剂图案的方法。
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8.发明申请
公开(公告)号：US20100009284A1
公开(公告)日：2010-01-14
申请号：US11917458
申请日：2006-06-07
Applicant: Daiju Shiono , Taku Hirayama , Hideo Hada
Inventor： Daiju Shiono , Taku Hirayama , Hideo Hada
IPC: G03F7/20 , C07C39/17 , C07C69/712 , G03F7/004
CPC classification number: C07C69/712 , C07C2603/74 , G03F7/0392 , G03F7/0397
Abstract: A compound including a polyhydric phenol compound represented by general formula (I) shown below (wherein R11 to R17 each independently represents an alkyl group of 1 to 10 carbon atoms or aromatic hydrocarbon group which may contain a hetero atom in the structure thereof, and X represents an aliphatic cyclic group) and having a molecular weight of 300 to 2,500, in which some or all of the hydrogen atoms of the phenolic hydroxyl groups are substituted with acid dissociable, dissolution inhibiting groups; a positive resist composition containing the compound; and a method of forming a resist pattern using the positive resist composition.
Abstract translation: 含有下述通式（I）表示的多元酚化合物的化合物（其中，R 11〜R 17各自独立地表示碳原子数1〜10的烷基或其结构中可含有杂原子的芳香族烃基，X 代表脂族环基），其分子量为300-2,500，其中酚羟基的一些或全部氢原子被酸解离的溶解抑制基团取代; 含有该化合物的正性抗蚀剂组合物; 以及使用正性抗蚀剂组合物形成抗蚀剂图案的方法。
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9.发明申请
公开(公告)号：US20090202939A1
公开(公告)日：2009-08-13
申请号：US12299371
申请日：2007-03-20
Applicant: Daiju Shiono , Taku Hirayama , Hideo Hada
Inventor： Daiju Shiono , Taku Hirayama , Hideo Hada
IPC: G03F7/004 , C07C69/612 , G03F7/20
CPC classification number: C07C69/712 , C07C2603/74 , G03F7/0045 , G03F7/0392
Abstract: Disclosed are a compound that can be used for a resist composition, a positive resist composition that includes the compound, and a method for forming a resist pattern.Specifically disclosed is a compound represented by a formula (A-1). In the formula (A-1), R11 to R17 each represents an alkyl group or an aromatic hydrocarbon group; g and j each represents an integer of 1 or greater, and k and q each represents an integer of 0 or greater, provided that g+j+k+q is not greater than 5; b represents an integer of 1 or greater, and l and m each represents an integer of 0 or greater, provided that b+l+m is not greater than 4; c represents an integer of 1 or greater, and n and o each represents an integer of 0 or greater, provided that c+n+o is not greater than 4; A represents a trivalent aromatic cyclic group, alkyl group or aliphatic cyclic group, or a trivalent organic group having an aromatic cyclic group or an aliphatic cyclic group; and Z represents a group represented by a formula (z1). In the formula (z1), Y represents an alkylene group, a divalent aromatic hydrocarbon group or aliphatic cyclic group, or a divalent organic group having an aromatic hydrocarbon group or an aliphatic cyclic group; and R′ represents an acid dissociable, dissolution inhibiting group.
Abstract translation: 公开了可用于抗蚀剂组合物的化合物，包含该化合物的正型抗蚀剂组合物和形成抗蚀剂图案的方法。 具体公开的是由式（A-1）表示的化合物。 式（A-1）中，R 11〜R 17表示烷基或芳香族烃基， g和j各自表示1或更大的整数，并且k和q各自表示0或更大的整数，条件是g + j + k + q不大于5; b表示1或更大的整数，并且l和m各自表示0或更大的整数，条件是b + 1 + m不大于4; c表示1或更大的整数，并且n和o各自表示0或更大的整数，条件是c + n + o不大于4; A表示三价芳族环状基团，烷基或脂肪族环状基团，或具有芳香族环状基团或脂肪族环状基团的三价有机基团， Z表示由式（z1）表示的基团。 式（z1）中，Y表示亚烷基，二价芳香族烃基或脂肪族环状基团，或具有芳香族烃基或脂肪族环状基团的二价有机基团， 并且R'表示酸解离，溶解抑制基团。
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10.发明申请
公开(公告)号：US20090117488A1
公开(公告)日：2009-05-07
申请号：US11994602
申请日：2006-06-30
Applicant: Takako Hirosaki , Daiju Shiono , Taku Hirayama , Hideo Hada
Inventor： Takako Hirosaki , Daiju Shiono , Taku Hirayama , Hideo Hada
CPC classification number: G03F7/0397 , C07C67/343 , C07C69/712 , C07C2603/74 , G03F7/0045
Abstract: The present invention provides a positive resist composition and a resist pattern forming method that are capable of forming a resist pattern with a reduced level of roughness. The positive resist composition includes the compound represented by the general formula (I) below. The present invention also provides the resist pattern forming method using the positive resist composition above. [wherein, in formula (I), R11 and R12 each represents, independently, an alkyl group of 1 to 10 carbon atoms or an aromatic hydrocarbon group, and may include a hetero atom in the structure thereof; R21 to R24 each represents, independently, a hydrogen atom or an acid dissociable, dissolution inhibiting group, and two of the R21 to R24 represents a hydrogen atom and the others represents an acid dissociable, dissolution inhibiting group; X is a group represented by general formulas (Ia) or (Ib) below].
Abstract translation: 本发明提供能够形成具有降低的粗糙度的抗蚀剂图案的正型抗蚀剂组合物和抗蚀剂图案形成方法。 正型抗蚀剂组合物包括由下述通式（I）表示的化合物。 本发明还提供了使用上述正型抗蚀剂组合物的抗蚀剂图案形成方法。 式（I）中，R 11和R 12分别独立地表示1〜10个碳原子的烷基或芳香族烃基，其结构中可以含有杂原子; R21〜R24各自独立地表示氢原子或酸解离的溶解抑制基团，R21〜R24中的两个表示氢原子，其余表示酸解离，溶解抑制基团。 X为下述通式（Ia）或（Ib）表示的基团。
