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公开(公告)号：US20100164028A1
公开(公告)日：2010-07-01
申请号：US12722079
申请日：2010-03-11
IPC分类号： H01L29/84
CPC分类号： H01L29/84 , G01L9/0042 , G01L9/0054
摘要： A semiconductor pressure sensor includes a cavity disposed in one silicon substrate of a SOI substrate having two silicon substrates bonded to each other with an oxide film therebetween and a diaphragm formed from the other silicon substrate and the oxide film, wherein the oxide film, bordering the cavity, of the diaphragm includes an arc-shaped section at the boundary portion to the one silicon substrate defining the inner wall side surface of the cavity, the arc-shaped section having the same diameter as the diameter of the cavity in the one silicon substrate and reducing the cavity diameter from the boundary portion toward the diaphragm center.
摘要翻译： 半导体压力传感器包括设置在具有两个硅衬底的SOI衬底的一个硅衬底中的氧化膜之间具有氧化物膜的空腔和由另一硅衬底和氧化物膜形成的膜片，其中，氧化膜与 隔膜的空腔包括在限定空腔的内壁侧表面的一个硅衬底的边界部分处的弧形部分，该弧形部分具有与一个硅衬底中的腔的直径相同的直径 并且将腔体直径从边界部分朝向隔膜中心减小。
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公开(公告)号：US08552513B2
公开(公告)日：2013-10-08
申请号：US12722079
申请日：2010-03-11
IPC分类号： H01L29/84
CPC分类号： H01L29/84 , G01L9/0042 , G01L9/0054
摘要： A semiconductor pressure sensor includes a cavity disposed in one silicon substrate of a SOI substrate having two silicon substrates bonded to each other with an oxide film therebetween and a diaphragm formed from the other silicon substrate and the oxide film, wherein the oxide film, bordering the cavity, of the diaphragm includes an arc-shaped section at the boundary portion to the one silicon substrate defining the inner wall side surface of the cavity, the arc-shaped section having the same width as the width of the cavity at a desired section in the one silicon substrate and reducing the width of the cavity from the boundary portion toward the diaphragm center.
摘要翻译： 半导体压力传感器包括设置在具有两个硅衬底的SOI衬底的一个硅衬底中的氧化膜之间具有氧化物膜的空腔和由另一硅衬底和氧化物膜形成的膜片，其中，氧化膜与 隔膜的空腔包括在限定空腔的内壁侧表面的一个硅衬底的边界部分处的弧形部分，该弧形部分具有与在所需部分处的空腔宽度相同的宽度 一个硅衬底，并且从边界部分向隔膜中心减小空腔的宽度。
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公开(公告)号：US06710476B2
公开(公告)日：2004-03-23
申请号：US09903048
申请日：2001-07-11
IPC分类号： H02K3116
摘要： The invention provides an electromagnetic reciprocal drive mechanism having a movable part that is simple to manufacture, dimensionally stable and inexpensive. The device has; a permanent magnet cluster 3, and a spider 4 and retainer 5 that concentrically support the permanent magnet cluster 3, an outer laminated core 6 provided adjacent to the permanent magnet cluster 3, and an electromagnetic coil 8 wound around the outer laminated core 6. An adhesive paper sheet 13 having an adhesive layer 11 on an inner surface and which can be impregnated with an adhesive 12 is wrapped around an outer periphery of the permanent magnet cluster 3, the spider 4 and the retainer 5. The adhesive 12 is then impregnated into the adhesive paper sheet 13 and solidified. In the adhesive paper sheet 13 and the adhesive layer 11 is formed of a plurality of small holes. By impregnating application of a small amount of the adhesive 12 into the adhesive paper sheet 13 and then solidifying, the outer periphery of the spider 4, the retainer 5 and the permanent magnet cluster 3 is reinforced by the adhesive paper sheet 13. Therefore not only is manufacture simple, but it can be constructed inexpensively.
摘要翻译： 本发明提供了一种具有易于制造，尺寸稳定和便宜的可移动部件的电磁往复驱动机构。 设备有; 永久磁铁簇3以及同心地支撑永磁体簇3的蜘蛛4和保持器5，与永久磁铁簇3相邻设置的外层叠铁心6和卷绕在外层叠铁芯6上的电磁线圈8。 在内表面上具有粘合剂层11并且可以浸渍有粘合剂12的粘合纸片13缠绕在永磁体簇3，蜘蛛4和保持器5的外周。然后将粘合剂12浸渍 粘合纸13并固化。 在粘合纸13中，粘合剂层11由多个小孔形成。 通过将少量的粘合剂12浸渍在粘合纸13中然后固化，则由粘合纸片13增强了蜘蛛4，保持器5和永磁体簇3的外周。因此，不仅 制造简单，但可以廉价构造。
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公开(公告)号：USD611856S1
公开(公告)日：2010-03-16
申请号：US29326478
申请日：2008-10-20
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公开(公告)号：USD611855S1
公开(公告)日：2010-03-16
申请号：US29326476
申请日：2008-10-20
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公开(公告)号：US06668862B2
公开(公告)日：2003-12-30
申请号：US10128726
申请日：2002-04-23
申请人： Kazuo Maezawa , Takayuki Minagawa , Hideto Urasawa
发明人： Kazuo Maezawa , Takayuki Minagawa , Hideto Urasawa
IPC分类号： F16K1514
CPC分类号： F16K15/021 , Y10T137/7879 , Y10T137/7908 , Y10T137/791
摘要： A fluid bearing mechanism using a one-way valve with such a simple structure that high processing accuracy is not required. A one-way valve 6 includes a valve base 7; an abutting portion 11 protruding inwardly, formed with a small communication hole 12 in a center thereof; a moveable element 8 which is moveable inside the valve base 7 in an axial direction; and a retaining body 9 for retaining the moveable element 8 between the abutting portion 11 and itself inside the valve base 7. The retaining body 9 includes ventilation grooves 8b, 9c for communicating an inside with an outside of the valve base 7. When the piston 2 is moved toward the compressing direction, the moveable element 8 is shifted toward the inside of the piston 2 due to the inner pressure of the cylinder 1 and its inertial force, thus opening the small communication hole 12.
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