HEATING APPARATUS, HEATING METHOD, AND COMPUTER READABLE STORAGE MEDIUM
    1.
    发明申请
    HEATING APPARATUS, HEATING METHOD, AND COMPUTER READABLE STORAGE MEDIUM 有权
    加热装置,加热方法和计算机可读存储介质

    公开(公告)号:US20110233187A1

    公开(公告)日:2011-09-29

    申请号:US13153660

    申请日:2011-06-06

    IPC分类号: H05B3/68

    摘要: A disclosed heating apparatus for heating a substrate on which a film is coated includes a process chamber having a gas supply opening for supplying a first gas to the process chamber and a gas evacuation opening for evacuating the first gas from the process chamber; a heating plate that is arranged in the process chamber and includes a heating element for heating the substrate; plural protrusions arranged on the heating plate so as to support the substrate; plural suction holes formed in the heating plate so as to attract by suction the substrate toward the heating plate; and a gas inlet adapted to supply a second gas to a gap between the heating plate and the substrate supported by the plural protrusions.

    摘要翻译: 公开的用于加热其上涂覆有薄膜的基板的加热装置包括具有用于向处理室供应第一气体的气体供给开口的处理室和用于从处理室排出第一气体的排气开口; 加热板,其设置在所述处理室中并且包括用于加热所述基板的加热元件; 多个突起,布置在所述加热板上以支撑所述基板; 多个吸入孔,形成在加热板中,以便通过吸引衬底吸引加热板; 以及气体入口,其适于将第二气体供应到由所述多个突起支撑的所述加热板和所述基板之间的间隙。

    HEAT-TREATING APPARATUS, HEAT-TREATING METHOD AND STORAGE MEDIUM
    5.
    发明申请
    HEAT-TREATING APPARATUS, HEAT-TREATING METHOD AND STORAGE MEDIUM 有权
    热处理设备,热处理方法和储存介质

    公开(公告)号:US20090098297A1

    公开(公告)日:2009-04-16

    申请号:US12244885

    申请日:2008-10-03

    IPC分类号: B05D3/04 B05C11/06

    摘要: A straightening plate provided in its central part with a gas exhaust opening is disposed under a face plate serving as a heating plate. A temperature-reducing purge ring is disposed between the face plate and the straightening plate. The temperature-reducing purge ring has an outside diameter substantially equal to that of the straightening plate and is provided in its inner circumference with plural gas jetting holes. The temperature-reducing purge ring is disposed close to the face plate such that a thin gap is formed between the temperature-reducing purge ring and the face plate. When a cooling gas is jetted radially inward through the gas jetting holes of the temperature-reducing purge ring, a vacuum is created between the lower surface of the face plate and the upper surface of the temperature-reducing purge ring. Consequently, a large amount of air is sucked into the space between the face plate and the straightening plate and flows together with the cooling gas, so that the face plate can be rapidly cooled.

    摘要翻译: 在其中央部设置有排气口的矫直板设置在作为加热板的面板的下方。 在面板和矫正板之间设置减温清洗环。 减温清洗环的外径基本上等于矫直板的外径,并且在其内周设有多个气体喷射孔。 减温清洗环设置在面板附近,使得在减温清洗环和面板之间形成薄的间隙。 当冷却气体径向向内喷射通过减温清洗环的气体喷射孔时,在面板的下表面和减温清洗环的上表面之间产生真空。 因此,大量的空气被吸入到面板和矫正板之间的空间中并与冷却气体一起流动,使得面板能够被快速冷却。