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公开(公告)号：US08698315B2
公开(公告)日：2014-04-15
申请号：US13596859
申请日：2012-08-28
申请人： Yoshiyuki Hata , Yutaka Nonomura , Teruhisa Akashi , Hirofumi Funabashi , Motohiro Fujiyoshi , Yoshiteru Omura
发明人： Yoshiyuki Hata , Yutaka Nonomura , Teruhisa Akashi , Hirofumi Funabashi , Motohiro Fujiyoshi , Yoshiteru Omura
CPC分类号： B81C1/00825 , B81B2201/0235 , B81B2203/033 , B81B2203/0392 , G01C19/5762 , G01C19/5769 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/0814 , G01P2015/084
摘要： When forming a trench of a narrow width in a thick semiconductor layer, a trench can be formed without the occurrence of semiconductor residue. In this Specification, a semiconductor device in which a trench is formed in a semiconductor layer is disclosed. In the semiconductor layer of the semiconductor device, a compensation pattern which compensates for sudden changes in the width of the trench is formed at a place at which the width of the trench changes suddenly. In the semiconductor layer of the above-described semiconductor device, since a compensation pattern is formed at a place at which the trench width changes suddenly, in the case where forming the trench using a deep RIE method, the occurrence of steep inclined portions arising from semiconductor residue can be prevented. Consequently, when forming a trench of a narrow width in a thick semiconductor layer, the occurrence of semiconductor residue can be prevented.
摘要翻译： 当在厚半导体层中形成窄宽度的沟槽时，可以形成沟槽而不会发生半导体残渣。 在本说明书中，公开了在半导体层中形成沟槽的半导体器件。 在半导体器件的半导体层中，在沟槽宽度急剧变化的地方形成补偿沟槽宽度突然变化的补偿图案。 在上述半导体器件的半导体层中，由于在沟槽宽度突然变化的地方形成补偿图案，所以在使用深RIE法形成沟槽的情况下，由于 可以防止半导体残渣。 因此，当在厚半导体层中形成窄宽度的沟槽时，可以防止发生半导体残渣。
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公开(公告)号：US08368196B2
公开(公告)日：2013-02-05
申请号：US12710571
申请日：2010-02-23
IPC分类号： H01L23/02
CPC分类号： B81B3/001 , B81B2201/025 , G01P15/125 , G01P15/18
摘要： The micro device includes a support substrate, and a movable structure configured to move with respect to the support substrate. At least one of the support substrate and the movable structure is provided with at least one protrusion protruding towards the other of the support substrate and the movable structure. Further, a base portion extending into the one of the support substrate and the movable structure is provided integrally with the at least one protrusion. With this configuration, the protrusion is securely held by the base portion, and the detachment of the protrusion can therefore be prevented even after repeated collisions between the support substrate and the movable structure via the protrusion.
摘要翻译： 微型装置包括支撑基板和被配置为相对于支撑基板移动的可移动结构。 支撑基板和可移动结构中的至少一个设置有至少一个朝着支撑基板和可移动结构中的另一个突出的突起。 此外，延伸到支撑基板和可移动结构中的一个的基部与所述至少一个突起一体设置。 通过这种构造，突起被基部牢固地保持，并且因此即使在支撑基板和可移动结构经由突起重复碰撞之后也能够防止突起的分离。
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公开(公告)号：US08707784B2
公开(公告)日：2014-04-29
申请号：US13047274
申请日：2011-03-14
申请人： Teruhisa Akashi , Yutaka Nonomura , Motohiro Fujiyoshi , Hirofumi Funabashi , Yoshiyuki Hata , Yoshiteru Omura
发明人： Teruhisa Akashi , Yutaka Nonomura , Motohiro Fujiyoshi , Hirofumi Funabashi , Yoshiyuki Hata , Yoshiteru Omura
IPC分类号： G01C19/56
CPC分类号： G01C19/574 , G01P15/125 , G01P15/18 , G01P2015/082
摘要： A structure having a first movable portion displaced perpendicular to a substrate surface and a second movable portion displaced parallel to the substrate surface is realized by a laminated structure employing a nested structure for the first portion and the second portion. The laminated structure is provided with inner and outer movable portions. A y spring is connected to the outer portion, and the outer portion is supported in a y-axis direction by the y spring at a height apart from an outer substrate. A z spring is connected to the inner portion, and the inner portion is supported in a z-axis direction by the z spring at a height apart from the outer substrate. The outer portion and the z spring are at different heights from the substrate, and the z spring overpasses across the outer portion at a height apart from the outer movable portion.
摘要翻译： 具有垂直于基板表面移动的第一可移动部分和平行于基板表面移动的第二可移动部分的结构通过采用用于第一部分和第二部分的嵌套结构的层压结构实现。 层叠结构设置有内部和外部可移动部分。 y弹簧连接到外部，并且外部部分通过y弹簧以与外部基板隔开的高度在y轴方向上支撑。 z弹簧连接到内部，并且内部通过z弹簧以与外基板隔开的高度在z轴方向上支撑。 外部部分和z弹簧与基板处于不同的高度，并且z弹簧在与外部可移动部分分开的高度处超过外部部分。
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公开(公告)号：US08816451B2
公开(公告)日：2014-08-26
申请号：US13035186
申请日：2011-02-25
申请人： Hirofumi Funabashi , Yutaka Nonomura , Yoshiyuki Hata , Motohiro Fujiyoshi , Teruhisa Akashi , Yoshiteru Omura
发明人： Hirofumi Funabashi , Yutaka Nonomura , Yoshiyuki Hata , Motohiro Fujiyoshi , Teruhisa Akashi , Yoshiteru Omura
摘要： In a MEMS structure, a first trench which penetrates the first layer, the second layer and the third layer is formed, and a second trench which penetrates the fifth layer, the forth layer and the third layer is formed. The first trench forms a first part of an outline of the movable portion in a view along the stacked direction. The second trench forms a second part of the outline of the movable portion in the view along the stacked direction. At least a part of the first trench overlaps with the first extending portion in the view along the stacked direction.
摘要翻译： 在MEMS结构中，形成贯穿第一层，第二层和第三层的第一沟槽，形成贯穿第五层，第四层和第三层的第二沟槽。 第一沟槽沿着堆叠的方向形成可动部分的轮廓的第一部分。 第二沟槽沿着堆叠方向在视图中形成可动部分的轮廓的第二部分。 第一沟槽的至少一部分沿着堆叠方向在视图中与第一延伸部分重叠。
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公开(公告)号：US08365597B2
公开(公告)日：2013-02-05
申请号：US12723971
申请日：2010-03-15
IPC分类号： G01P15/00
CPC分类号： G01C19/5719 , G01P2015/082
摘要： An apparatus with a second movable portion that moves along an x-axis direction and a z-axis direction and a first movable portion that only moves along the z-axis direction is disclosed. The apparatus is provided with a fixed portion fixed to a support portion, a plurality of first spring portions connected to the fixed portion, a first movable portion connected to the plurality of first spring portions, a second spring portion connected to the first movable portion, and a second movable portion connected to the second spring portion. A spring constant of each of the plurality of first spring portions in the z-axis direction is lower than spring constants of each of the plurality of first spring portions in the x-axis and a y-axis directions respectively, and a spring constant of the second spring portion in the x-axis direction is lower than spring constants of the second spring portion in the y-axis and the z-axis directions respectively. The first movable portion is configured to move along the z-axis but not to move along the x-axis and the y-axis nor to rotate around the z-axis, and the second movable portion is configured to move along the x-axis and the z-axis with respect to the support portion.
摘要翻译： 公开了一种具有沿x轴方向和z轴方向移动的第二可移动部分和仅沿着z轴方向移动的第一可动部分的装置。 该装置设置有固定到支撑部分的固定部分，连接到固定部分的多个第一弹簧部分，连接到多个第一弹簧部分的第一可动部分，连接到第一可动部分的第二弹簧部分， 以及与第二弹簧部连接的第二可动部。 多个第一弹簧部分中的每一个在z轴方向上的弹簧常数分别低于多个第一弹簧部分在x轴和y轴方向上的弹簧常数，弹簧常数 x轴方向上的第二弹簧部分分别低于第二弹簧部分在y轴和z轴方向上的弹簧常数。 第一可移动部分被配置为沿着z轴移动但不沿着x轴和y轴移动，也不围绕z轴旋转，并且第二可移动部分构造成沿x轴移动 和z轴相对于支撑部分。
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公开(公告)号：US20100290056A1
公开(公告)日：2010-11-18
申请号：US11989866
申请日：2006-08-01
IPC分类号： G01C19/72
CPC分类号： G01C19/721
摘要： The numbers of pulses of the CW signal and the CCW signal of the optical fiber gyro during a predetermined sampling duration are detected by samplers. An abnormality determiner determines that the optical fiber gyro is normal if at least one of the pulse numbers is greater than or equal to a threshold value. If both pulse numbers are smaller than the threshold value, the abnormality determiner determines that an abnormality, such as a circuit break, a bad connection, etc., has occurred, and outputs the result of determination to an output unit. The abnormality determiner may determine an abnormality on the basis of the presence/absence of quantization noise.
摘要翻译： 采样器检测预定采样持续时间内的CW信号的脉冲数和光纤陀螺的CCW信号。 如果脉冲数中的至少一个大于或等于阈值，则异常确定器确定光纤陀螺仪是正常的。 如果两个脉冲数都小于阈值，则异常判定部判定为发生电路断线，连接不良等异常，并将判断结果输出到输出部。 异常判定器可以基于量化噪声的存在/不存在来确定异常。
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公开(公告)号：US20100138180A1
公开(公告)日：2010-06-03
申请号：US11989767
申请日：2006-08-01
CPC分类号： B25J9/163 , G05B2219/37024 , G05B2219/37388 , G05B2219/40536 , G05B2219/41166 , G05B2219/42152
摘要： An angular velocity detected by an angular velocity sensor (10) is integrated by a small angle matrix calculator (12) and a matrix adding calculator (14), and then restored as a posture angle (angular velocity posture angle) by a matrix posture angle calculator (16). A posture matrix is calculated by a tilt angle calculator (22) and an acceleration matrix calculator (24) and an acceleration detected by an acceleration sensor (20) is restored as a posture angle (acceleration posture angle) by a matrix posture angle calculator (26). Low pass filters (18, 28) each extract a low range component, the difference between the two is calculated by a differencer (30), and only the drift amount is extracted. A subtracter (32) removes the drift amount from the angular velocity posture angle and the result is output from an output device (34). In addition, a posture angle matrix calculator (36) converts the result to a posture matrix, which it feeds back to the matrix adding calculator (14).
摘要翻译： 由角速度传感器（10）检测的角速度由小角度矩阵计算器（12）和矩阵加法运算器（14）积分，然后以姿势角（角速度姿态角）恢复矩阵姿态角 计算器（16）。 由倾斜角计算器（22）和加速度矩阵运算器（24）计算姿势矩阵，并且由矩阵姿态角计算器（20）将加速度传感器（20）检测出的加速度恢复为姿势角（加速姿势角） 26）。 低通滤波器（18,28）各自提取低范围分量，两者之间的差异由差分器（30）计算，并且仅提取漂移量。 减法器（32）从角速度姿态角度去除漂移量，结果从输出装置（34）输出。 此外，姿势角矩阵计算器（36）将结果转换成姿势矩阵，其将其反馈到矩阵添加计算器（14）。
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公开(公告)号：US20050241364A1
公开(公告)日：2005-11-03
申请号：US11075332
申请日：2005-03-09
IPC分类号： G01B3/30 , G01B21/00 , G01P15/08 , G01P15/125 , G01P21/00
CPC分类号： G01P15/125 , G01P15/0802
摘要： A structure is presented in which it is easy to adjust, to a determined value, distance between electrodes of a condenser formed in an electrostatic capacity-type displacement sensor. A displacement sensor has a conductive lower layer, an insulating layer stacked on the conductive lower layer and a conductive upper layer stacked on the insulating layer. The conductive lower layer is divided into a first lower region and a second lower region by a groove penetrating the conductive lower layer. The insulating layer is stacked on the conductive lower layer at selected portions. The conductive upper layer is stacked on the insulating layer at selected portions. The conductive upper layer has a beam connected via the insulating layer to the first lower region and the second lower region at a pair of ends of the beam. The conductive upper layer has a first upper portion forming one of electrodes of a first condenser. The first upper portion extends from a position above the first lower region to a position above the second lower region. The insulating layer is not formed between the first upper portion and the first lower region, but is formed between the first upper portion and the second lower region.
摘要翻译： 提出了一种结构，其中易于将静电电容式位移传感器中形成的电容器的电极之间的距离调整到确定的值。 位移传感器具有导电性下层，层叠在导电性下层上的绝缘层和层叠在绝缘层上的导电性上层。 导电性下层通过穿透导电性下层的沟槽被分割为第一下部区域和第二下部区域。 绝缘层在选定的部分堆叠在导电性下层上。 导电上层在选定部分堆叠在绝缘层上。 导电上层具有通过绝缘层连接到梁的一对端部处的第一下部区域和第二下部区域的梁。 导电上层具有形成第一冷凝器的电极之一的第一上部。 第一上部从第一下部区域上方的位置延伸到第二下部区域上方的位置。 绝缘层不形成在第一上部和第一下部区域之间，而是形成在第一上部和第二下部区域之间。
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9.发明申请Correction device for acceleration sensor, and output value correction method for acceleration sensor 审中-公开加速度传感器校正装置，加速度传感器的输出值校正方法公开(公告)号：US20090177425A1
公开(公告)日：2009-07-09
申请号：US11989690
申请日：2006-08-01
CPC分类号： G01P21/00
摘要： An attitude angles calculation device (14) calculates attitude angles of a robot from the output values of an acceleration sensor (10). An attitude angles comparison device (16) compares attitude angles in a specified attitude which have been set in a register (20) and the attitude angles which have been detected, and outputs their differences to a correction values calculation device (18). The correction values calculation device (18) outputs correction devices to a zero point correction device (26) or a sensitivity correction device (28), so as to eliminate these differences. If would also be acceptable to set the attitude angles which are set in the register (20) from an input device (22).
摘要翻译： 姿态角计算装置（14）根据加速度传感器（10）的输出值计算机器人的姿态角度。 姿态角比较装置（16）将在寄存器（20）中设定的规定姿态的姿势角与已检测到的姿态角进行比较，并将其差分输出到校正值计算装置（18）。 校正值计算装置（18）将校正装置输出到零点校正装置（26）或灵敏度校正装置（28），以消除这些差异。 如果也可以从输入装置（22）设置在寄存器（20）中设置的姿态角。
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公开(公告)号：US09215089B2
公开(公告)日：2015-12-15
申请号：US13502078
申请日：2009-10-14
申请人： Masanori Muroyama , Masayoshi Esashi , Shuji Tanaka , Sakae Matsuzaki , Mitsutoshi Makihata , Yutaka Nonomura , Motohiro Fujiyoshi , Takahiro Nakayama , Ui Yamaguchi , Hitoshi Yamada
发明人： Masanori Muroyama , Masayoshi Esashi , Shuji Tanaka , Sakae Matsuzaki , Mitsutoshi Makihata , Yutaka Nonomura , Motohiro Fujiyoshi , Takahiro Nakayama , Ui Yamaguchi , Hitoshi Yamada
IPC分类号： G06F13/00 , H04L12/40 , G01L1/14 , G01L5/22 , G06F13/376
CPC分类号： H04L12/40032 , G01L1/142 , G01L1/146 , G01L5/228 , G06F13/376 , H04L12/40013
摘要： A touch sensor system includes buses, a plurality of touch sensor devices disposed on the buses, and an information integrating device that is connected to all the buses and integrates information from the touch sensor device. The touch sensor device includes a sensor unit and a signal processing unit that transmits a sensor data signal generated by processing an analog sensor signal to the information integrating device through the bus. The signal processing unit includes a digital converting unit, a threshold evaluating unit that gives a start permission of the signal process when a sensor value exceeds a preset threshold, an ID adding unit that adds a transmitter identification number to the sensor signal, and a data transmitting unit that outputs the sensor data signal to a signal line of the bus. Fast responses are made possible without increasing the amount of data and host processing load while including many touch sensor elements.
摘要翻译： 触摸传感器系统包括总线，布置在总线上的多个触摸传感器装置，以及连接到所有总线并且集成来自触摸传感器装置的信息的信息集成装置。 触摸传感器装置包括传感器单元和信号处理单元，该单元通过总线将通过处理模拟传感器信号而产生的传感器数据信号发送到信息集成装置。 信号处理单元包括：数字转换单元，当传感器值超过预设阈值时给出信号处理开始许可的阈值评估单元;将传感器信号加上发射机标识号的ID添加单元，以及数据 发送单元，其将传感器数据信号输出到总线的信号线。 快速响应是可能的，而不增加数据量和主机处理负载，同时包括许多触摸传感器元件。
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