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公开(公告)号：US06953317B2
公开(公告)日：2005-10-11
申请号：US09984773
申请日：2001-10-31
CPC分类号： F04D29/522 , F04D19/042 , F04D27/008
摘要： A very safe and reliable turbo-molecular pump has been developed so that if an abnormal condition should develop on the rotor structure, it will not lead to damage to the stator or pump casing to cause a loss of vacuum in a vacuum processing system. The turbo-molecular pump has a pump casing housing a stator and a rotor therein, a vane pumping section and/or a groove pumping section formed by the stator and the rotor, and a constriction releasing structure for releasing the constriction of at least a part of the stator when an abnormal torque is applied to the stator by the rotor.
摘要翻译： 已经开发了一种非常安全可靠的涡轮分子泵，以便如果在转子结构上出现异常情况，则不会导致定子或泵壳的损坏，从而导致真空处理系统中的真空损失。 涡轮分子泵具有在其中容纳定子和转子的泵壳体，由定子和转子形成的叶片泵送部分和/或沟槽泵送部分，以及用于释放至少一部分的收缩部的收缩部分释放结构 当异常转矩由转子施加到定子时。
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公开(公告)号：US06926493B1
公开(公告)日：2005-08-09
申请号：US09473137
申请日：1999-12-28
CPC分类号： F04D19/042 , F04D27/0292 , F04D29/522 , F04D29/701
摘要： A turbo-molecular pump of high safety and reliability was presented, so that if an abnormal condition should develop on the rotor side, it will not lead to any damage to the stationary portions such as the stator or pump casing to cause loss of vacuum in a vacuum processing system. The turbo-molecular pump includes a rotor; a stator assembly surrounding the rotor; and a casing portion surrounding the stator assembly, wherein at least a partial clearance is formed between the stator assembly and the casing portion, so that, when an abnormal torque is applied from the rotor to the stator assembly, direct impact transmission is prevented from the stator assembly to the casing portion.
摘要翻译： 提出了高安全性和可靠性的涡轮分子泵，如果在转子侧出现异常状况，则不会对定子或泵壳等静止部分造成任何损坏，从而导致真空损失 真空处理系统。 涡轮分子泵包括转子; 围绕转子的定子组件; 以及围绕定子组件的壳体部分，其中在定子组件和壳体部分之间形成至少一个部分间隙，使得当从转子施加到定子组件的异常转矩时，防止直接冲击传递 定子组件到壳体部分。
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公开(公告)号：US06332752B2
公开(公告)日：2001-12-25
申请号：US09104171
申请日：1998-06-25
IPC分类号： F04D1904
CPC分类号： F04D29/522 , F04D19/042 , F04D27/008
摘要： A turbo-molecular pump of high safety and reliability has been developed so that if an abnormal condition should develop on the rotor structure, it will not lead to damage to the stator or pump casing to cause loss of vacuum in a vacuum processing system. The turbo-molecular pump comprises a pump casing housing a stator and a rotor therein, a vane pumping section and/or a groove pumping section comprised by the stator and the rotor, and a constriction releasing structure for releasing constriction of at least a part of the stator when an abnormal torque is applied to the stator by the rotor.
摘要翻译： 已经开发了具有高安全性和可靠性的涡轮分子泵，使得如果在转子结构上出现异常状况，则不会导致定子或泵壳的损坏，从而导致真空处理系统中的真空损失。 涡轮分子泵包括容纳定子和转子的泵壳体，由定子和转子组成的叶片泵送部分和/或槽泵送部分，以及用于释放至少部分的收缩部的收缩部分释放结构 当转子对定子施加异常转矩时，定子。
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公开(公告)号：US06589009B1
公开(公告)日：2003-07-08
申请号：US09592411
申请日：2000-06-13
IPC分类号： F04D1904
CPC分类号： F04D19/042 , F04D29/522 , F04D29/701
摘要： A turbo-molecular pump includes a casing having an intake port, a stator fixedly mounted in the casing, and a rotor supported in the casing for rotation relatively to the stator. The stator and the rotor make up a turbine blade pumping section and a groove pumping section for evacuating gas. A scattering prevention member is provided for preventing fragments of the rotor from being scattered through the intake port.
摘要翻译： 涡轮分子泵包括壳体，其具有进气口，固定地安装在壳体中的定子和支撑在壳体中以相对于定子旋转的转子。 定子和转子构成涡轮叶片泵送部分和用于抽空气体的槽泵送部分。 提供防止转子碎片通过进气口散射的防散射构件。
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公开(公告)号：US06220831B1
公开(公告)日：2001-04-24
申请号：US09133331
申请日：1998-08-13
IPC分类号： F04B1704
CPC分类号： F04D17/168 , F04D19/04
摘要： A turbomolecular pump comprising a rotor and a stator housed in a casing and forming an exhaust channel therebetween, and a suction port and a discharge port formed in the casing; wherein the turbomolecular pump has a valve body for opening and closing the suction port, the valve body is movable in an axial direction of the turbomolecular pump, a valve driving mechanism for driving the valve body via a valve body supporting member which extends through a throughhole formed in the rotor and/or the stator and magnetic bearing units for non-contactingly supporting the valve body supporting member within the throughhole, whereby a turbomolecular pump having a compact overall construction including valve units can be provided.
摘要翻译： 一种涡轮分子泵，包括转子和定子，其容纳在壳体中并在其间形成排气通道，以及形成在所述壳体中的吸入口和排出口。 其中所述涡轮分子泵具有用于打开和关闭所述吸入口的阀体，所述阀体可在所述涡轮分子泵的轴向方向上移动;阀驱动机构，其经由阀体支撑构件驱动所述阀体，所述阀体支撑构件延伸穿过通孔 形成在转子和/或定子和磁轴承单元中，用于在通孔内非接触地支撑阀体支撑构件，由此可以提供具有包括阀单元的紧凑整体结构的涡轮分子泵。
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公开(公告)号：US6062810A
公开(公告)日：2000-05-16
申请号：US133332
申请日：1998-08-13
CPC分类号： F04D19/04 , F04D17/168
摘要： A turbomolecular pump evacuates gas in an apparatus (or a chamber) by means of a rotor having blades and/or spiral grooves which rotates at a high speed. The turbomolecular pump includes a casing housing a rotor and a stator therein, a pumping section comprising the rotor and the stator, a valve element capable of opening or closing an intake port of the casing, and a supporting member for supporting the valve element. The supporting member extends through at least one of the rotor and the stator. The turbomolecular pump further includes an actuating mechanism for actuating the valve element, and the actuating mechanism is provided at a side opposite to the intake port with respect to the rotor.
摘要翻译： 涡轮分子泵通过具有高速旋转的叶片和/或螺旋槽的转子在装置（或室）中排出气体。 涡轮分子泵包括壳体，壳体中包括转子和定子，泵体部分包括转子和定子，能够打开或关闭壳体的进气口的阀元件和用于支撑阀元件的支撑构件。 支撑构件延伸穿过转子和定子中的至少一个。 涡轮分子泵还包括用于致动阀元件的致动机构，并且致动机构设置在相对于转子的与进气口相对的一侧。
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公开(公告)号：US06514348B2
公开(公告)日：2003-02-04
申请号：US09902766
申请日：2001-07-12
申请人： Matsutaro Miyamoto
发明人： Matsutaro Miyamoto
IPC分类号： C23C1600
CPC分类号： C23C16/45565 , C23C16/4412 , C23C16/455
摘要： A substrate processing apparatus processes a substrate introduced into a chamber under a low pressure. The substrate processing apparatus comprises a vacuum pump for evacuating a chamber and a gas ejection portion provided in the vacuum pump for ejecting a gas toward the substrate. The vacuum pump is disposed in the vicinity of or inside of the chamber. The substrate processing apparatus further comprises a gas introduction path passed through at least a portion of a rotor in the vacuum pump for introducing the gas into the gas ejection portion. The gas ejection portion in the vacuum pump comprises a valve body for closing and opening a suction port provided on a chamber side of the vacuum pump. The vacuum pump has a moving mechanism for vertically moving the valve body.
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公开(公告)号：US06398524B1
公开(公告)日：2002-06-04
申请号：US09555648
申请日：2000-06-02
IPC分类号： F04B1700
CPC分类号： F16C32/0446 , F04D19/048 , F16C2360/45
摘要： The present invention is to provide a magnetic bearing controller capable of reliably controlling the position of a floating member at a target position, even when the length of the cable connecting the magnetic bearing and the controller is changed. The magnetic bearing controller comprises: an electromagnet for supporting a floating member in a floating state; sensors (Z1, Z2) for sensing the floating position of the floating member; and a controller for supplying sensor signals and an exciting currents via cables to the sensors and electromagnets, respectively, in order to support the floating member at a predetermined floating position based on signals received from the sensors, wherein the controller comprises. a signal source (11) for supplying an AC signal to the sensors (Z1, Z2); a pair of sensor drive circuits (12) for supplying differential signals via cables (C) connected to both ends of the serially connected sensor elements (Z1, Z2); whereby the cables are disposed with balanced condition and capacitance generated by the length of the cable is canceled. The main pump section and controller of a turbo-molecular pump apparatus can be integrally formed.
摘要翻译： 本发明是提供一种能够可靠地控制浮动构件在目标位置的位置的磁轴承控制器，即使当连接磁轴承和控制器的电缆的长度改变时，磁轴承控制器包括：电磁体 用于支持浮动状态的浮动元件; 传感器（Z1，Z2），用于感测浮动部件的浮动位置; 以及控制器，用于分别通过电缆将传感器信号和激励电流提供给传感器和电磁体，以便基于从传感器接收的信号将浮动构件支撑在预定的浮动位置，其中控制器包括。 用于向传感器（Z1，Z2）提供AC信号的信号源（11）; 一对传感器驱动电路，用于通过连接到串联的传感器元件（Z1，Z2）两端的电缆（C）提供差分信号; 由此电缆以平衡的状态设置，并且由电缆的长度产生的电容被取消。 涡轮分子泵装置的主泵部分和控制器可以一体形成。
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公开(公告)号：US20090218506A1
公开(公告)日：2009-09-03
申请号：US11996701
申请日：2006-07-24
申请人： Mamoru Nakasuji , Takeshi Murakami , Tohru Satake , Tsutomu Karimata , Toshifumi Kimba , Matsutaro Miyamoto , Hiroshi Sobukawa , Satoshi Mori
发明人： Mamoru Nakasuji , Takeshi Murakami , Tohru Satake , Tsutomu Karimata , Toshifumi Kimba , Matsutaro Miyamoto , Hiroshi Sobukawa , Satoshi Mori
CPC分类号： H01J37/05 , H01J37/147 , H01J37/153 , H01J37/26 , H01J2237/057
摘要： An electron beam emitted from an electron gun (G) forms a reduced image on a sample (S) through a non-dispersion Wien-filter (5-1), an electromagnetic deflector (11-1), a beam separator (12-1), and a tablet lens (17-1) as an objective lens. The beam separator (12-1) is configured such that a distance by which a secondary electron beam passes through the beam separator is approximately three times longer than a distance by which a primary electron beam passes through the beam separator. Therefore, even if a magnetic field in the beam separator is set to deflect the primary electron beam by a small angle equal to or less than approximately 10 degrees, the secondary electron beam can be deflected by approximately 30 degrees, so that the primary and secondary electron beams are sufficiently separated. Also, since the primary electron beam is deflected by a small angle, less aberration occurs in the primary electron beam. Accordingly, since a light path length of a primary electro-optical system, it is possible to reduce the influence of space charge and the occurrence of deflection aberration.
摘要翻译： 从电子枪（G）发射的电子束通过非分散维恩滤波器（5-1），电磁偏转器（11-1），光束分离器（12- 1）和作为物镜的平板电脑镜头（17-1）。 束分离器（12-1）被构造成使得二次电子束通过分束器的距离比一次电子束通过分束器的距离大约三倍。 因此，即使将分束器中的磁场设定为使一次电子束偏转等于或小于约10度的小角度，二次电子束可以偏转大约30度，使得初级和次级 电子束充分分离。 此外，由于一次电子束以小角度偏转，所以在一次电子束中产生较小的像差。 因此，由于一次电光学系统的光路长度，可以减小空间电荷的影响和偏转像差的发生。
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公开(公告)号：US06617722B2
公开(公告)日：2003-09-09
申请号：US09950054
申请日：2001-09-12
IPC分类号： H02K2914
CPC分类号： F16C32/0446
摘要： A magnetic levitation rotating machine is provided which can stably detect the displacement and rotating speed of a rotator and, at the same time, can reduce the size of the whole apparatus, that is, can render the whole apparatus compact. The magnetic levitation rotating machine for supporting a rotator in a levitated state by magnetic force of an electromagnet or a permanent magnet comprises: a position detection plane provided in the rotator and a concave and/or a convex provided in the plane; a displacement sensor provided on the fixed side, for detecting the displacement of the plane including the concave or the convex; and a detection mechanism for detecting the displacement of the rotator and the rotating speed of the rotator from the output of the displacement sensor.
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