摘要:
A fluorine gas generator for generating highly pure fluorine gas in a stable and safe manner by electrolyzing an electrolytic bath 2 comprising hydrogen fluoride in the form of a molten mixed gas is provided which comprises an electrolytic cell 1 divided, by a partition wall 16, into an anode chamber 3 in which an anode is disposed and a cathode chamber 4 in which a cathode is disposed, pressure maintenance means for maintaining the anode chamber 3 and cathode chamber 4 at atmospheric pressure, and liquid level sensing means 5, 6 capable of sensing the levels of the electrolytic bath 2 in the anode chamber 3 and in the cathode chamber 4, respectively, at three or more level stages.
摘要:
An electrolytic apparatus for molten salt disposed on an electrolytic cell to electrolyze an electrolytic bath consisting of the mixed molten salt. The apparatus including a first heat exchanging means to heat and/or cool an electrolytic cell body. The apparatus including a support member comprising one of a flange part and an upper lid. The apparatus including a cover member. The apparatus including an electric insulating material and a gas sealing material disposed between the support member and the cover member for simultaneous electric insulation and gas sealing.
摘要:
A gas generator is provided in which the filter life is prolonged and the pressure regulating valve is thereby protected for a prolonged periods. The gas generator is intended for electrolyzing an electrolyte in an electrolytic cell to generate a gas or gases and comprises at least one absorber for absorbing an unnecessary by-products generated from the gas generator, a filter for removing the mist generated from the absorber, and at least one pressure regulating valve for adjusting the pressure in the electrolytic cell, wherein the filter is inserted downstream from the absorber and, further, the pressure regulating valve is disposed downstream from the filter.
摘要:
An apparatus for controlling a molten salt electrolyzer in which an electrolytic bath in a solid form as contained in the electrolyzer is melted to automatically attain a state allowing electrolysis, which apparatus comprises detecting means for detecting the changes in state of the electrolyzer by means of detectors fitted to the electrolyzer, and adjusting means for adjusting, after using the detecting means, the liquid electrolytic bath levels to a state allowing electrolysis.
摘要:
Fluorine gas generators are connected with semiconductor manufacturing apparatuses through a gas supplying system including a storage tank that can store a predetermined quantity of fluorine gas generated in the on-site fluorine gas generators. When one or more of the on-site fluorine gas generators are stopped, fluorine gas is supplied to the semiconductor manufacturing apparatuses from the storage tank storing a predetermined quantity of fluorine gas, so as to keep the operations of the semiconductor manufacturing apparatuses. Thereby obtained is a semiconductor manufacturing plant in which fluorine gas generated in the fluorine gas generators can be safely and stably supplied to the semiconductor manufacturing apparatuses, and with superior cost performance.
摘要:
A gas generator is provided in which the filter life is prolonged and the pressure regulating valve is thereby protected for a prolonged periods. The gas generator is intended for electrolyzing an electrolyte in an electrolytic cell to generate a gas or gases and comprises at least one absorber for absorbing an unnecessary by-products generated from the gas generator, a filter for removing the mist generated from the absorber, and at least one pressure regulating valve for adjusting the pressure in the electrolytic cell, wherein the filter is inserted downstream from the absorber and, further, the pressure regulating valve is disposed downstream from the filter.
摘要:
A fluorine/fluoride gas generator which has an electrolyte made of mixed molten salt containing hydrogen fluoride in an electrolytic cell including an anode chamber and a cathode chamber, and generates a gas containing fluorine by electrolyzing the electrolyte, includes a raw material supply pipe for supplying an electrolysis raw material, reaching the inside of the electrolyte in the electrolytic cell, a normally-closed valve provided in the middle of the raw material supply pipe, and a bypass pipe provided with a normally-open valve, joining the raw material supply pipe on the downstream side from the normally-closed valve to a gas phase area of the electrolytic cell. Accordingly, the electrolyte is prevented from being suctioned into the raw material supply pipe in the fluorine/fluoride gas generator, and solidification of the electrolyte inside the raw material supply pipe can be prevented.
摘要:
A fluorine gas generator is provided with which the gases used and/or generated, in case of leakage thereof, can be prevented from mixing together as far as possible and, even in case of gas leakage into the outside of the generator system, the leakage gas can be treated safely and in which the maintenance, exchange and other operations are easy to carry out. The generator comprises a box-shaped body containing an electrolyzer for fluorine gas generation, and the box-shaped body is divided into two or more compartments, including a compartment containing the electrolyzer.
摘要:
A fluorine/fluoride gas generator which has an electrolyte made of mixed molten salt containing hydrogen fluoride in an electrolytic cell including an anode chamber and a cathode chamber, and generates a gas containing fluorine by electrolyzing the electrolyte, includes a raw material supply pipe for supplying an electrolysis raw material, reaching the inside of the electrolyte in the electrolytic cell, a normally-closed valve provided in the middle of the raw material supply pipe, and a bypass pipe provided with a normally-open valve, joining the raw material supply pipe on the downstream side from the normally-closed valve to a gas phase area of the electrolytic cell. Accordingly, the electrolyte is prevented from being suctioned into the raw material supply pipe in the fluorine/fluoride gas generator, and solidification of the electrolyte inside the raw material supply pipe can be prevented.
摘要:
Since the system for supplying gas comprises a storage container, a compressor which pressurizes fluorine gas in the storage container, and a pressurized storing container which presses fit and stores the fluorine gas, by supplying fluorine gas or the like to the destination from this system for supplying gas, it is not necessary to change gas source such as a gas cylinder or the like. In this way, fluorine gas or the like can be supplied to the destination inexpensively and safely.