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33 条记录 (耗时 0.027 秒)

    Movable ion source assembly
    1.
    发明授权
    Movable ion source assembly 失效
    可移动离子源组件

    公开(公告)号：US06331713B1

    公开(公告)日：2001-12-18

    申请号：US09413035

    申请日：1999-10-06

    申请人： Theodore H. Smick ,  Marvin Farley ,  Geoffrey Ryding ,  Shu Satoh ,  Peter Rose

    发明人： Theodore H. Smick ,  Marvin Farley ,  Geoffrey Ryding ,  Shu Satoh ,  Peter Rose

    IPC分类号： G21F502

    CPC分类号： H01J37/3171 ,  H01J27/08 ,  H01J37/08

    摘要： An ion source assembly 10 is disclosed, the assembly comprising a source sub assembly having an ion source 20, an extraction electrode 40 and an electrically insulating high voltage bushing 60 to support the extraction electrode 40 relative to the ion source 20. The ion source assembly further includes a chamber 70 having an exit aperture to allow egress of ions to an ion implanter. The chamber 70 encloses one or more further electrodes 80,90. The source sub assembly is mounted to the chamber 70 via a hinge 150. This allows ready access to the inner walls of the chamber 70, which in turn allows easier maintenance and cleaning of the further electrodes 80,90 as well as the inner walls of the chamber 70. Preferably, a liner 160 is employed on the inner walls of the chamber 70.

    摘要翻译： 公开了一种离子源组件10，该组件包括源子组件，其具有离子源20，提取电极40和电绝缘高压衬套60，以相对于离子源20支撑引出电极40.离子源组件 还包括具有出口孔的室70，以允许离子离开离子注入机。 腔室70包围一个或多个另外的电极80,90。 源子组件通过铰链150安装到腔室70.这允许容易地进入腔室70的内壁，这反过来允许更多的维护和清洁另外的电极80,90以及内壁 腔室70优选地，在腔室70的内壁上使用衬套160。

    Indirectly heated button cathode for an ion source
    2.
    发明授权
    Indirectly heated button cathode for an ion source 有权
    用于离子源的间接加热按钮阴极

    公开(公告)号：US06878946B2

    公开(公告)日：2005-04-12

    申请号：US10259827

    申请日：2002-09-30

    申请人： Marvin Farley ,  Takao Sakase ,  Shu Satoh ,  Geoffrey Ryding ,  Peter Rose ,  Christos Christou

    发明人： Marvin Farley ,  Takao Sakase ,  Shu Satoh ,  Geoffrey Ryding ,  Peter Rose ,  Christos Christou

    IPC分类号： H01J27/00 ,  H01J37/08

    CPC分类号： H01J37/08 ,  H01J1/20 ,  H01J1/26 ,  H01J27/08 ,  H01J37/3171 ,  H01J2237/061 ,  H01J2237/082

    摘要： An indirectly heated button cathode for use in the ion source of an ion implanter has a button member formed of a slug piece mounted in a collar piece. The slug piece is thermally insulated from the collar piece to enable it to operate at a higher temperature so that electron emission is enhanced and concentrated over the surface of the slug piece. The slug piece and collar piece can be both of tungsten. Instead the slug piece may be of tantalum to provide a lower thermionic work function. The resultant concentrated plasma in the ion source is effective to enhance the production of higher charge state ions, particularly P+++ for subsequent acceleration for high energy implantation.

    摘要翻译： 用于离子注入机的离子源的间接加热纽扣阴极具有由安装在轴环件中的塞片形成的纽扣件。 芯块与套环件绝热，使其能够在更高的温度下工作，从而使电子发射增强并集中在芯块的表面上。 lug lug piece piece piece。。。。。。。。。。 替代地，块塞可以是钽以提供较低的热离子功能。 在离子源中产生的浓缩等离子体有效地增强高电荷状态离子的产生，特别是用于高能量注入的后续加速的P +++。