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    Humidity-sensitive element
    1.
    发明授权
    Humidity-sensitive element 失效
    湿度敏感元件

    公开(公告)号：US4642601A

    公开(公告)日：1987-02-10

    申请号：US361903

    申请日：1982-03-18

    申请人： Tooru Sugawara ,  Shigeki Tsuchitani ,  Noriyuki Kinjo ,  Shuichi Ohara

    发明人： Tooru Sugawara ,  Shigeki Tsuchitani ,  Noriyuki Kinjo ,  Shuichi Ohara

    IPC分类号： G01N27/12 ,  H01L7/00

    CPC分类号： G01N27/121

    摘要： The humidity-sensitive element of this invention is composed of an insulating substrate (1), a pair of electrodes (2, 3) mounted thereon, and a humidity-sensitive material (8) covering the electrodes. The humidity-sensitive material (8) has a property to change its electric resistance depending on the moisture content in the atmosphere and is formed from fine particles each having a hydrophobic core and a hydrophilic group-containing surface layer covering the core. This humidity-sensitive element exhibits a nearly linear relationship between logarithum of electric resistance and relative humidity and small hysteresis, permitting a precise measurement of relative humidity. Insulating substrate (1) and electrodes (2,3) are preferred to form from an insulating layer of silicon semiconductor and conductive monosilicon formed on it, respectively. This permits size reduction of humidity-sensitive elements or devices.

    摘要翻译： PCT No.PCT / JP81 / 00166 Sec。 371日期1982年3月18日 102（e）1982年3月18日PCT PCT 1991年7月20日PCT公布。 公开号WO82 / 00362 日本1982年2月4日。本发明的湿度敏感元件由绝缘基板（1），安装在其上的一对电极（2,3）和覆盖电极的湿度敏感材料（8）组成。 湿度敏感材料（8）具有根据大气中的水分含量而改变其电阻的性质，并且由具有疏水性芯和覆盖芯的含亲水性基团的表面层的细颗粒形成。 该湿度敏感元件表现出电阻对数相对湿度和滞后小的近似线性关系，可以精确测量相对湿度。 绝缘基板（1）和电极（2,3）优选分别从其上形成的硅半导体绝缘层和导电单晶硅形成。 这允许湿度敏感元件或器件的尺寸减小。

    Humidity sensor with improved protective layering
    2.
    发明授权
    Humidity sensor with improved protective layering 失效
    湿度传感器具有改进的保护层

    公开(公告)号：US4473813A

    公开(公告)日：1984-09-25

    申请号：US426087

    申请日：1982-09-28

    申请人： Noriyuki Kinjo ,  Shuichi Ohara ,  Toru Sugawara ,  Shigeki Tsuchitani

    发明人： Noriyuki Kinjo ,  Shuichi Ohara ,  Toru Sugawara ,  Shigeki Tsuchitani

    IPC分类号： G01N27/12 ,  H01L7/00

    CPC分类号： G01N27/121

    摘要： The invention relates to a humidity sensor of electric resistance type whose electric resistance changes in accordance with an ambient humidity, characterized by a protective film of silicone resin provided on the surface of a humidity-sensitive material, and to a method for preparing the same. The protective film of silicone resin is formed by applying a varnish of siloxanes to the humidity-sensitive material and subjecting the varnish to reaction. The varnish can be of one-part curing system or two-part curing system, and desirably the reaction of siloxanes is a cross-linking reaction. The formed protective film is not influenced by swelling or shrinking of the humidity-sensitive material, and is prevented from flowing off due to a temperature rise, or from deposition of dusts, etc.

    摘要翻译： 本发明涉及一种电阻型的湿度传感器，其电阻根据环境湿度而变化，其特征在于在湿度敏感材料的表面上设置有机硅树脂的保护膜及其制备方法。 有机硅树脂的保护膜通过将硅氧烷清漆施加到湿度敏感材料上并使清漆反应而形成。 清漆可以是单组分固化体系或两部分固化体系，并且希望的是硅氧烷的反应是交联反应。 所形成的保护膜不受湿敏材料的膨胀或收缩的影响，并且由于温度升高或灰尘等的沉积而被防止流出。

    Capacitance type accelerometer
    4.
    发明授权
    Capacitance type accelerometer 失效
    电容式加速度计

    公开(公告)号：US5392651A

    公开(公告)日：1995-02-28

    申请号：US161456

    申请日：1993-12-06

    申请人： Seiko Suzuki ,  Shigeki Tsuchitani ,  Masayuki Miki ,  Masahiro Matsumoto

    发明人： Seiko Suzuki ,  Shigeki Tsuchitani ,  Masayuki Miki ,  Masahiro Matsumoto

    IPC分类号： G01L9/00 ,  G01L9/12 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  H01L29/84 ,  H01L21/283

    CPC分类号： B81C1/00301 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/131 ,  B81B2201/0235 ,  B81B2207/095 ,  B81B2207/096 ,  G01P2015/0828

    摘要： A capacitance type accelerometer, having a fist silicon plate formed a movable electrode which is moved according to acceleration, two second silicon plates which are disposed on both sides of the first silicon plate with a certain separation distance, and thermal oxide films which are respectively disposed between the first silicon plate except the movable electrode and the two second silicon plates and stick the first silicon plate except the movable electrode and the two second silicon plates together. And further, a capacitance type accelerometer, having, a silicon plate formed a movable electrode which is moved according to acceleration, glass plates respectively mounting a conductive layer thereon which are opposite to the silicon plate with a certain separation distance and are sticked to the both side of the silicon plate except the movable electrode and leading wires which are respectively connected to the conductive layers through a groove formed between the silicon plate and the glass plates respectively deriving. These capacitance type accelerometers are made by processing and cutting a wafer by dicing saw without coming into the accelerometer of cutting chips or cutting water.

    摘要翻译： 一种电容式加速度计，其具有形成根据加速度移动的可动电极的第一硅板，分隔设置在第一硅板两侧的两个第二硅板和分别设置的热氧化膜 在除了可移动电极之外的第一硅板和两个第二硅板之间的第一硅板之间，并将除可移动电极之外的第一硅板和两个第二硅板粘合在一起。 此外，电容型加速度计具有形成有根据加速度移动的可移动电极的硅板，分别在其上分别安装与硅板相对的导电层的玻璃板，并且粘附到两者上 除了可移动电极之外的硅板的侧面以及分别通过形成在硅板和玻璃板之间的槽分别连接到导电层的导线。 这些电容式加速度计是通过切割锯切割晶片而不进入切割芯片或切割水的加速度计来制造的。

    Capacitive type semiconductor accelerometer
    5.
    发明授权
    Capacitive type semiconductor accelerometer 失效
    电容式半导体加速度计

    公开(公告)号：US5243861A

    公开(公告)日：1993-09-14

    申请号：US755838

    申请日：1991-09-06

    申请人： Benjamin Kloeck ,  Seiko Suzuki ,  Shigeki Tsuchitani ,  Masayuki Miki ,  Masahiro Matsumoto ,  Kazuo Sato ,  Akira Koide ,  Norio Ichikawa ,  Yukiko Kawai ,  Hiromichi Ebine

    发明人： Benjamin Kloeck ,  Seiko Suzuki ,  Shigeki Tsuchitani ,  Masayuki Miki ,  Masahiro Matsumoto ,  Kazuo Sato ,  Akira Koide ,  Norio Ichikawa ,  Yukiko Kawai ,  Hiromichi Ebine

    IPC分类号： B81B3/00 ,  B81B7/00 ,  G01P15/08 ,  G01P15/125

    CPC分类号： B81B7/007 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0828 ,  H01L2224/45144 ,  H01L2224/48463

    摘要： A capacitive type semiconductor accelerometer has an intermediate silicon plate of n type conductivity including a movable electrode constituting a pendulum mass formed within the intermediate silicon plate and supported thereby via a beam so as to permit movement in a direction perpendicular to its plane. A first conductive island is formed within the intermediate plate and is immovably supported thereby via a first insulating leg so as to be isolated therefrom, and an upper glass plate is anodic bonded to the intermediate silicon plate. A first stationary electrode is formed on the upper glass plate at the position facing one face of the movable electrode with a predetermined gap. A lower glass plate is anodic bonded to the intermediate silicon plate and a second stationary electrode is formed on the lower glass plate at the position facing the other face of the movable electrode with a predetermined gap. First, second and third pads are disposed in common on the lower glass plate at the outside of the intermediate silicon plate, the first pad being electrically connected to the first stationary electrode via a first thin film lead formed on the lower glass plate and the first conductive island, the second pad being electrically connected to the movable electrode via a second thin film lead formed on the lower glass plate and the intermediate silicon plate and the third pad being electrically connected to the second stationary electrode via a third thin film lead formed on the lower glass plate.

    摘要翻译： 电容式半导体加速度计具有n型导电性的中间硅板，其包括形成在中间硅板内的摆锤块的可动电极，并通过光束被支撑，以允许沿垂直于其平面的方向移动。 第一导电岛形成在中间板内，并通过第一绝缘腿不可移动地支撑，以便与之隔离，并且上玻璃板阳极接合到中间硅板。 第一固定电极形成在上玻璃板上，以与预定间隙相对的可移动电极的一个面的位置。 下玻璃板阳极接合到中间硅板上，并且在与可移动电极的另一面相对的位置处以预定间隙形成在下玻璃板上的第二固定电极。 首先，第二和第三焊盘共同设置在中间硅板的外侧的下玻璃板上，第一焊盘通过形成在下玻璃板上的第一薄膜引线和第一焊盘电连接到第一固定电极 所述第二焊盘通过形成在所述下玻璃板上的第二薄膜引线电连接到所述可动电极，并且所述中间硅板和所述第三焊盘通过形成在所述导电岛上的第三薄膜引线电连接到所述第二固定电极， 下玻璃板。

    Semiconductor acceleration sensor and vehicle control system using the same
    6.
    发明授权
    Semiconductor acceleration sensor and vehicle control system using the same 失效
    半导体加速度传感器和车辆控制系统使用相同

    公开(公告)号：US5417312A

    公开(公告)日：1995-05-23

    申请号：US147083

    申请日：1993-11-03

    申请人： Shigeki Tsuchitani ,  Seiko Suzuki ,  Tomoyuki Tanaka ,  Masayuki Miki ,  Masahiro Matsumoto ,  Norio Ichikawa ,  Hiromichi Ebine ,  Yukiko Sugisawa ,  Kanemasa Sato ,  Sadayasu Ueno ,  Yasuhiro Asano ,  Masanori Kubota ,  Masayoshi Suzuki

    发明人： Shigeki Tsuchitani ,  Seiko Suzuki ,  Tomoyuki Tanaka ,  Masayuki Miki ,  Masahiro Matsumoto ,  Norio Ichikawa ,  Hiromichi Ebine ,  Yukiko Sugisawa ,  Kanemasa Sato ,  Sadayasu Ueno ,  Yasuhiro Asano ,  Masanori Kubota ,  Masayoshi Suzuki

    IPC分类号： G01P1/00 ,  G01P15/125 ,  G01P15/13 ,  B60T8/58 ,  B60T8/72 ,  G01P15/08

    CPC分类号： G01P15/125 ,  G01P1/003 ,  G01P15/131 ,  G01P2015/0828

    摘要： A semiconductor acceleration sensor is formed by a cantilever having a conductive movable electrode of predetermined mass at one end, at least one pair of fixed conductive electrodes which are stationary with respect to the movable electrode located on opposing sides of the movable electrode, and gaps provided between the movable electrode and the fixed electrodes. To prevent the movable electrode becoming fused to the contacted fixed electrode, in a first aspect of this invention, an insulating layer is provided between the movable electrode and fixed electrodes, the layer being either on the movable electrode or on the fixed electrodes and in a second aspect the movable electrode or, preferably, the fixed electrodes, are formed of a high melting point material. In such a second aspect, to improve adhesion between the high melting point material and a substrate to which the fixed electrodes are mounted, a lower melting point material is firstly coated on the substrates. A sensor detector unit processing circuit has the output characteristic of the circuit digitally adjusted by suitable switching of a plurality of resistors, and the sensor chip and the detector unit integrated circuit may be located on a common base and mounted in a hermetically sealed chamber to prevent adverse environmental effects affecting operation of the sensor and detector unit assembly. A gas having a dew point of -40.degree. C. or lower is, advantageously, charged into the hermetically sealed chamber.

    摘要翻译： 半导体加速度传感器由具有在一端具有预定质量的导电可移动电极的悬臂形成，相对于位于可动电极的相对侧上的可动电极固定的至少一对固定导电电极和提供的间隙 在可动电极和固定电极之间。 为了防止可动电极与被接触的固定电极熔合，在本发明的第一方面中，在可动电极和固定电极之间设置绝缘层，该层位于可动电极上或固定电极上， 第二方面，可动电极或优选固定电极由高熔点材料形成。 在这样的第二方面，为了提高高熔点材料与安装有固定电极的基板之间的粘附性，首先在基板上涂覆较低熔点的材料。 传感器检测器单元处理电路具有通过多个电阻器的合适切换数字调节的电路的输出特性，并且传感器芯片和检测器单元集成电路可以位于公共基座上并且安装在气密密封的室中以防止 影响传感器和检测器单元组件运行的不利环境影响。 露点为-40℃或更低的气体有利地被装入密封的气室中。

    Capacitance type accelerometer
    8.
    发明授权
    Capacitance type accelerometer 失效
    电容式加速度计

    公开(公告)号：US5559290A

    公开(公告)日：1996-09-24

    申请号：US457491

    申请日：1995-06-01

    申请人： Seiko Suzuki ,  Shigeki Tsuchitani ,  Masayuki Miki ,  Masahiro Matsumoto

    发明人： Seiko Suzuki ,  Shigeki Tsuchitani ,  Masayuki Miki ,  Masahiro Matsumoto

    IPC分类号： G01L9/00 ,  G01L9/12 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  H01L29/84 ,  H01L21/283

    CPC分类号： B81C1/00301 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/131 ,  B81B2201/0235 ,  B81B2207/095 ,  B81B2207/096 ,  G01P2015/0828

    摘要： A capacitance type accelerometer, having a fist silicon plate formed a movable electrode which is moved according to acceleration, two second silicon plates which are disposed on both sides of the first silicon plate with a certain separation distance, and thermal oxide films which are respectively disposed between the first silicon plate except the movable electrode and the two second silicon plates and stick the first silicon plate except the movable electrode and the two second silicon plates together. And further, a capacitance type accelerometer, having, a silicon plate formed a movable electrode which is moved according to acceleration, glass plates respectively mounting a conductive layer thereon which are opposite to the silicon plate with a certain separation distance and are sticked to the both side of the silicon plate except the movable electrode and leeding wires which are respectively connected to the conductive layers through a groove formed between the silicon plate and the glass plates respectively deriving. These capacitance type accelerometers are made by processing and cutting a wafer by dicing saw without coming into the accelerometer of cutting chips or cutting water.

    摘要翻译： 一种电容式加速度计，其具有形成根据加速度移动的可动电极的第一硅板，分隔设置在第一硅板两侧的两个第二硅板和分别设置的热氧化膜 在除了可移动电极之外的第一硅板和两个第二硅板之间的第一硅板之间，并将除可移动电极之外的第一硅板和两个第二硅板粘合在一起。 此外，电容型加速度计具有形成有根据加速度移动的可移动电极的硅板，分别在其上分别安装与硅板相对的导电层的玻璃板，并且粘附到两者上 除了可移动电极之外的硅板的侧面以及分别通过形成在硅板和玻璃板之间的凹槽连接到导电层的引线。 这些电容式加速度计是通过切割锯切割晶片而不进入切割芯片或切割水的加速度计来制造的。

    Capacitance type accelerometer for air bag system
    9.
    发明授权
    Capacitance type accelerometer for air bag system 失效
    用于气囊系统的电容式加速度计

    公开(公告)号：US5350189A

    公开(公告)日：1994-09-27

    申请号：US918021

    申请日：1992-07-24

    申请人： Shigeki Tsuchitani ,  Seiko Suzuki ,  Masayuki Miki ,  Masahiro Matsumoto

    发明人： Shigeki Tsuchitani ,  Seiko Suzuki ,  Masayuki Miki ,  Masahiro Matsumoto

    IPC分类号： B60R21/16 ,  G01P1/00 ,  G01P15/125 ,  H01L21/302

    CPC分类号： G01P1/003 ,  G01P15/125 ,  G01P2015/0828

    摘要： In a capacitance type accelerometer used for an air bag system etc., a plurality of grooves crossing each other are provided on the surface of a movable electrode which is arranged to face a fixed electrode at a portion having a gap thereinbetween, and end portions of each groove open to an outside space at the portion between the movable electrode and the fixed electrode. The grooves can be provided on surface of the fixed electrodes. Ventilation between inside and outside of the facing portion is improved by opening of the grooves to outside space, and air damping which is caused at operation of the movable electrode at the gap between the electrodes is reduced, and, consequently, response speed of the movable electrode is increased.

    摘要翻译： 在用于气囊系统等的电容型加速度计等中，在可动电极的表面上设置有多个彼此交叉的槽，该可动电极的表面设置成在其间具有间隙的部分和固定电极的一部分 每个槽在可动电极和固定电极之间的部分处向外部空间开放。 沟槽可以设置在固定电极的表面上。 通过将凹槽打开到外部空间来改善面对部分的内部和外部之间的通风，并且在可动电极在电极之间的间隙操作时引起的空气阻尼减小，因此可移动的响应速度 电极增加。