公开(公告)号：US20120160155A1

公开(公告)日：2012-06-28

申请号：US13394268

申请日：2010-08-20

申请人： Toshiaki Sudo ,  Takuma Yoshioka ,  Hiroshi Kishi ,  Takeshi Fujita ,  Minoru Kanda ,  Koichi Suzuki ,  Ken Kitahara

发明人： Toshiaki Sudo ,  Takuma Yoshioka ,  Hiroshi Kishi ,  Takeshi Fujita ,  Minoru Kanda ,  Koichi Suzuki ,  Ken Kitahara

IPC分类号： C30B15/10 ,  C03B19/02 ,  C03B20/00

CPC分类号： C04B41/5022 ,  C03B5/025 ,  C03B19/02 ,  C03B19/09 ,  C03B19/095 ,  C03C17/004 ,  C03C17/02 ,  C03C2217/213 ,  C03C2218/13 ,  C03C2218/17 ,  C04B35/185 ,  C04B41/009 ,  C04B41/86 ,  C04B2235/6027 ,  C30B15/10 ,  C30B29/06 ,  C30B35/002 ,  Y02P40/57 ,  Y10T117/1032 ,  C04B41/4527

摘要： The purpose of the present invention is to provide a crucible which has high viscosity at high temperature, and can be used for a long time, and can be manufactured at low cost, and a method of manufacturing the same. The composite crucible 10 is characterized in the use of mullite (3Al2O3.2SiO2) as the basic material of the crucible. The composite crucible 10 has the crucible body 11 made of mullite material whose main component is alumina and silica, and a transparent vitreous silica layer 12 formed on the inner surface of the crucible body 11. The thickness of the transparent vitreous silica layer 12 is smaller than that of the crucible body 11. The crucible body 11 can be formed by the slip casting method, and the transparent vitreous silica layer 12 can be formed by the thermal spraying method.

摘要翻译： 本发明的目的是提供一种在高温下具有高粘度且长时间使用并且可以低成本制造的坩埚及其制造方法。 复合坩埚10的特征在于使用莫来石（3Al2O3.2SiO2）作为坩埚的基本材料。 复合坩埚10具有由主成分为氧化铝和二氧化硅的莫来石材料制成的坩埚体11和形成在坩埚体11的内表面上的透明玻璃状石英层12.透明玻璃状石英层12的厚度较小 坩埚主体11可以通过流延法形成，透明玻璃状二氧化硅层12可以通过热喷涂法形成。

公开(公告)号：US09133063B2

公开(公告)日：2015-09-15

申请号：US13394268

申请日：2010-08-20

申请人： Toshiaki Sudo ,  Takuma Yoshioka ,  Hiroshi Kishi ,  Takeshi Fujita ,  Minoru Kanda ,  Koichi Suzuki ,  Ken Kitahara

发明人： Toshiaki Sudo ,  Takuma Yoshioka ,  Hiroshi Kishi ,  Takeshi Fujita ,  Minoru Kanda ,  Koichi Suzuki ,  Ken Kitahara

IPC分类号： C30B15/10 ,  C03B19/02 ,  C03B20/00 ,  C04B41/50 ,  C03B19/09 ,  C04B35/185 ,  C04B41/00 ,  C04B41/86 ,  C30B29/06 ,  C30B35/00

CPC分类号： C04B41/5022 ,  C03B5/025 ,  C03B19/02 ,  C03B19/09 ,  C03B19/095 ,  C03C17/004 ,  C03C17/02 ,  C03C2217/213 ,  C03C2218/13 ,  C03C2218/17 ,  C04B35/185 ,  C04B41/009 ,  C04B41/86 ,  C04B2235/6027 ,  C30B15/10 ,  C30B29/06 ,  C30B35/002 ,  Y02P40/57 ,  Y10T117/1032 ,  C04B41/4527

摘要： The purpose of the present invention is to provide a crucible which has high viscosity at high temperature, and can be used for a long time, and can be manufactured at low cost, and a method of manufacturing the same. The composite crucible 10 is characterized in the use of mullite (3Al2O3.2SiO2) as the basic material of the crucible. The composite crucible 10 has the crucible body 11 made of mullite material whose main component is alumina and silica, and a transparent vitreous silica layer 12 formed on the inner surface of the crucible body 11. The thickness of the transparent vitreous silica layer 12 is smaller than that of the crucible body 11. The crucible body 11 can be formed by the slip casting method, and the transparent vitreous silica layer 12 can be formed by the thermal spraying method.

摘要翻译： 本发明的目的是提供一种在高温下具有高粘度且长时间使用并且可以低成本制造的坩埚及其制造方法。 复合坩埚10的特征在于使用莫来石（3Al2O3.2SiO2）作为坩埚的基本材料。 复合坩埚10具有由主成分为氧化铝和二氧化硅的莫来石材料制成的坩埚体11和形成在坩埚体11的内表面上的透明玻璃状石英层12.透明玻璃状石英层12的厚度较小 坩埚主体11可以通过流延法形成，透明玻璃状二氧化硅层12可以通过热喷涂法形成。

公开(公告)号：US20120141622A1

公开(公告)日：2012-06-07

申请号：US13308308

申请日：2011-11-30

申请人： Toshiaki Sudo ,  Hiroshi Kishi ,  Takeshi Fujita ,  Minoru Kanda

发明人： Toshiaki Sudo ,  Hiroshi Kishi ,  Takeshi Fujita ,  Minoru Kanda

IPC分类号： B29C35/02

CPC分类号： C03B19/095

摘要： Provided is an apparatus for manufacturing a vitreous silica crucible which has a structure which can reduce gaps between a partition wall and electrodes inserted into through-holes formed in the partition wall while enabling electrodes to move to adjust a heating temperature of arc discharge. A plate-shaped partition wall 15 is placed above the rotating mold 10. Electrodes 13 for heating and fusing are inserted into through-holes 16 penetrating in a thickness direction, and are directed toward the rotating mold 10. A rocking unit 40 is provided on an upper side of the partition wall 15 and rocks the electrodes 13 around virtual rocking axes P, and the virtual rocking axes P pass through the through-holes 16.

摘要翻译： 本发明提供一种制造石英玻璃坩埚的装置，其具有能够减少分隔壁与插入形成在隔壁中的通孔的电极之间的间隙的结构，同时使电极移动以调节电弧放电的加热温度。 板状分隔壁15被放置在旋转模具10的上方。用于加热和熔合的电极13被插入穿透厚度方向的通孔16中，并被引导到旋转模具10上。摆动单元40设置在 分隔壁15的上侧并围绕虚拟摇摆轴线P围绕电极13，并且虚拟摇摆轴线P穿过通孔16。

公开(公告)号：US20120137964A1

公开(公告)日：2012-06-07

申请号：US13308344

申请日：2011-11-30

申请人： Toshiaki Sudo ,  Hiroshi Kishi ,  Ken Kitahara

发明人： Toshiaki Sudo ,  Hiroshi Kishi ,  Ken Kitahara

IPC分类号： C30B15/10

CPC分类号： C30B15/10 ,  C03B19/095 ,  Y10T117/10 ,  Y10T117/1024 ,  Y10T117/1032

摘要： The present invention provides a vitreous silica crucible which can suppress buckling and sidewall lowering of the crucible and the generation of cracks. According to the present invention, a vitreous silica crucible is provided for pulling a silicon single crystal having a wall, the wall including a non-doped inner surface layer made of natural vitreous silica or synthetic vitreous silica, a mineralizing element-maldistributed vitreous silica layer containing dispersed island regions each containing a mineralizing element, and wherein the vitreous silica of the island regions and the vitreous silica of a surrounding region of the island regions is a combination of mineralizing element-doped natural vitreous silica and non-doped synthetic vitreous silica, or a combination of mineralizing element-doped synthetic vitreous silica and non-doped natural vitreous silica, and the inner surface layer is made of vitreous silica of a different kind from that of the island region.

摘要翻译： 本发明提供一种可以抑制坩埚的翘曲和侧壁降低以及产生裂纹的石英玻璃坩埚。 根据本发明，提供一种玻璃状石英坩埚，用于拉拔具有壁的硅单晶，所述壁包括由天然氧化硅玻璃或合成玻璃态二氧化硅制成的非掺杂内表面层，矿化元素分布不均的玻璃状石英层 含有各自含有矿化元素的分散的岛状区域，岛状区域的石英二氧化硅和岛状区域的周围区域的玻璃态二氧化硅是矿化元素掺杂天然玻璃质石英和非掺杂合成玻璃态二氧化硅的组合， 或矿化元素掺杂的合成玻璃体二氧化硅和非掺杂天然玻璃体二氧化硅的组合，并且内表面层由与岛状区域不同种类的玻璃态二氧化硅制成。

公开(公告)号：US08936684B2

公开(公告)日：2015-01-20

申请号：US13308344

申请日：2011-11-30

申请人： Toshiaki Sudo ,  Hiroshi Kishi ,  Ken Kitahara

发明人： Toshiaki Sudo ,  Hiroshi Kishi ,  Ken Kitahara

IPC分类号： C30B15/10 ,  C03B19/09

CPC分类号： C30B15/10 ,  C03B19/095 ,  Y10T117/10 ,  Y10T117/1024 ,  Y10T117/1032

摘要： The present invention provides a vitreous silica crucible which can suppress buckling and sidewall lowering of the crucible and the generation of cracks. According to the present invention, a vitreous silica crucible is provided for pulling a silicon single crystal having a wall, the wall including a non-doped inner surface layer made of natural vitreous silica or synthetic vitreous silica, a mineralizing element-maldistributed vitreous silica layer containing dispersed island regions each containing a mineralizing element, and wherein the vitreous silica of the island regions and the vitreous silica of a surrounding region of the island regions is a combination of mineralizing element-doped natural vitreous silica and non-doped synthetic vitreous silica, or a combination of mineralizing element-doped synthetic vitreous silica and non-doped natural vitreous silica, and the inner surface layer is made of vitreous silica of a different kind from that of the island region.

摘要翻译： 本发明提供一种可以抑制坩埚的翘曲和侧壁降低以及产生裂纹的石英玻璃坩埚。 根据本发明，提供一种玻璃状石英坩埚，用于拉拔具有壁的硅单晶，所述壁包括由天然氧化硅玻璃或合成玻璃态二氧化硅制成的非掺杂内表面层，矿化元素分布不均的玻璃状石英层 含有各自含有矿化元素的分散的岛状区域，岛状区域的石英二氧化硅和岛状区域的周围区域的玻璃态二氧化硅是矿化元素掺杂天然玻璃质石英和非掺杂合成玻璃态二氧化硅的组合， 或矿化元素掺杂的合成玻璃体二氧化硅和非掺杂天然玻璃体二氧化硅的组合，并且内表面层由与岛状区域不同种类的玻璃态二氧化硅制成。

公开(公告)号：US20120160159A1

公开(公告)日：2012-06-28

申请号：US13394284

申请日：2010-08-10

申请人： Toshiaki Sudo ,  Makiko Kodama ,  Minoru Kanda ,  Hiroshi Kishi

发明人： Toshiaki Sudo ,  Makiko Kodama ,  Minoru Kanda ,  Hiroshi Kishi

IPC分类号： C30B15/10 ,  C03B20/00

CPC分类号： C03B19/095 ,  C30B15/10 ,  C30B29/06 ,  C30B29/18 ,  C30B35/002 ,  Y02P40/57 ,  Y10T117/1032

摘要： The present invention provides a vitreous silica crucible which can suppress the sidewall lowering of the crucible under high temperature during pulling a silicon single crystal, and a method of manufacturing such a vitreous silica crucible. The vitreous silica crucible 10 includes an opaque vitreous silica layer 11 provided on the outer surface side of the crucible and containing numerous bubbles, and a transparent vitreous silica layer 12 provided on the inner surface side. The opaque vitreous silica layer 11 includes a first opaque vitreous silica portion 11a provided on the crucible upper portion, and a second opaque vitreous silica portion 11b provided on the crucible lower portion. The specific gravity of the second opaque vitreous silica portion 11b is 1.7 to 2.1, and the specific gravity of the first opaque vitreous silica portion 11a is 1.4 to 1.8, and smaller than that of the second opaque vitreous silica portion. The particle size distribution of the material silica powder for the first opaque vitreous silica portion 11a is wider than that of the second opaque vitreous silica portion 11b, and the material silica powder for the first opaque vitreous silica portion 11a includes more fine powder than that for the second opaque vitreous silica portion 11b.

摘要翻译： 本发明提供一种可以在拉拔硅单晶时抑制坩埚在高温下的侧壁降低的石英玻璃坩埚，以及制造这种石英玻璃坩埚的方法。 玻璃状石英玻璃坩埚10包括设置在坩埚的外表面侧并且含有大量气泡的不透明玻璃状石英层11和设置在内表面侧的透明氧化硅玻璃层12。 不透明玻璃状石英层11包括设置在坩埚上部的第一不透明玻璃状石英部分11a和设置在坩埚下部的第二不透明玻璃状石英部分11b。 第二不透玻璃状二氧化硅部11b的比重为1.7〜2.1，第一不透明玻璃状石英部11a的比重为1.4〜1.8，小于第二不透明玻璃状二氧化硅部的比重。 用于第一不透明玻璃状石英部分11a的材料二氧化硅粉末的粒度分布比第二不透明玻璃状二氧化硅部分11b的粒度分布宽，并且用于第一不透明玻璃状石英部分11a的材料二氧化硅粉末包含比 第二不透明玻璃状石英部分11b。

公开(公告)号：US08936685B2

公开(公告)日：2015-01-20

申请号：US13394284

申请日：2010-08-20

申请人： Toshiaki Sudo ,  Makiko Kodama ,  Minoru Kanda ,  Hiroshi Kishi

发明人： Toshiaki Sudo ,  Makiko Kodama ,  Minoru Kanda ,  Hiroshi Kishi

IPC分类号： C30B15/10 ,  C03B19/09 ,  C30B29/06 ,  C30B35/00 ,  C30B29/18

CPC分类号： C03B19/095 ,  C30B15/10 ,  C30B29/06 ,  C30B29/18 ,  C30B35/002 ,  Y02P40/57 ,  Y10T117/1032

摘要： The present invention provides a vitreous silica crucible which can suppress the sidewall lowering of the crucible under high temperature during pulling a silicon single crystal, and a method of manufacturing such a vitreous silica crucible. The vitreous silica crucible 10 includes an opaque vitreous silica layer 11 provided on the outer surface side of the crucible and containing numerous bubbles, and a transparent vitreous silica layer 12 provided on the inner surface side. The opaque vitreous silica layer 11 includes a first opaque vitreous silica portion 11a provided on the crucible upper portion, and a second opaque vitreous silica portion 11b provided on the crucible lower portion. The specific gravity of the second opaque vitreous silica portion 11b is 1.7 to 2.1, and the specific gravity of the first opaque vitreous silica portion 11a is 1.4 to 1.8, and smaller than that of the second opaque vitreous silica portion. The particle size distribution of the material silica powder for the first opaque vitreous silica portion 11a is wider than that of the second opaque vitreous silica portion 11b, and the material silica powder for the first opaque vitreous silica portion 11a includes more fine powder than that for the second opaque vitreous silica portion 11b.

摘要翻译： 本发明提供一种可以在拉拔硅单晶时抑制坩埚在高温下的侧壁降低的石英玻璃坩埚，以及制造这种石英玻璃坩埚的方法。 玻璃状石英玻璃坩埚10包括设置在坩埚的外表面侧并且含有大量气泡的不透明玻璃状石英层11和设置在内表面侧的透明氧化硅玻璃层12。 不透明玻璃状石英层11包括设置在坩埚上部的第一不透明玻璃状石英部分11a和设置在坩埚下部的第二不透明玻璃状石英部分11b。 第二不透玻璃状二氧化硅部11b的比重为1.7〜2.1，第一不透明玻璃状石英部11a的比重为1.4〜1.8，小于第二不透明玻璃状二氧化硅部的比重。 用于第一不透明玻璃状石英部分11a的材料二氧化硅粉末的粒度分布比第二不透明玻璃状二氧化硅部分11b的粒度分布宽，并且用于第一不透明玻璃状石英部分11a的材料二氧化硅粉末包含比 第二不透明玻璃状石英部分11b。

公开(公告)号：US08739573B2

公开(公告)日：2014-06-03

申请号：US13389392

申请日：2010-08-09

申请人： Toshiaki Sudo ,  Eriko Suzuki ,  Hiroshi Kishi ,  Takeshi Fujita

发明人： Toshiaki Sudo ,  Eriko Suzuki ,  Hiroshi Kishi ,  Takeshi Fujita

IPC分类号： C25B11/12 ,  C03B19/09 ,  C25B11/04 ,  C04B35/52

CPC分类号： C25B11/12 ,  C03B19/09 ,  C03B19/095 ,  C04B35/52 ,  C25B11/0405 ,  Y02P40/57

摘要： There are provided an apparatus and a method for manufacturing a vitreous silica crucible which can prevent the deterioration of the inner surface property in the manufacturing process of a vitreous silica crucible. The apparatus includes a mold defining an outer shape of a vitreous silica crucible, and an arc discharge unit having electrodes and a power-supply unit, wherein each of the electrodes includes a tip end directed to the mold, the other end opposite to the tip end, and a bent portion provided between the tip end and the other end.

摘要翻译： 提供了一种可以防止在石英玻璃坩埚的制造过程中内表面特性劣化的石英玻璃坩埚的制造装置和方法。 该装置包括限定二氧化硅玻璃坩埚的外形的模具和具有电极和电源单元的电弧放电单元，其中每个电极包括指向模具的尖端，与尖端相对的另一端 端部和设置在前端和另一端之间的弯曲部分。

公开(公告)号：US20120131954A1

公开(公告)日：2012-05-31

申请号：US13389392

申请日：2010-08-09

申请人： Toshiaki Sudo ,  Eriko Suzuki ,  Hiroshi Kishi ,  Takeshi Fujita

发明人： Toshiaki Sudo ,  Eriko Suzuki ,  Hiroshi Kishi ,  Takeshi Fujita

IPC分类号： C03B20/00

CPC分类号： C25B11/12 ,  C03B19/09 ,  C03B19/095 ,  C04B35/52 ,  C25B11/0405 ,  Y02P40/57

摘要： There are provided an apparatus and a method for manufacturing a vitreous silica crucible which can prevent the deterioration of the inner surface property in the manufacturing process of a vitreous silica crucible. The apparatus includes a mold defining an outer shape of a vitreous silica crucible, and an arc discharge unit having electrodes and a power-supply unit, wherein each of the electrodes includes a tip end directed to the mold, the other end opposite to the tip end, and a bent portion provided between the tip end and the other end.

摘要翻译： 提供了一种可以防止在石英玻璃坩埚的制造过程中内表面特性劣化的石英玻璃坩埚的制造装置和方法。 该装置包括限定二氧化硅玻璃坩埚的外形的模具和具有电极和电源单元的电弧放电单元，其中每个电极包括指向模具的尖端，与尖端相对的另一端 端部和设置在前端和另一端之间的弯曲部分。

公开(公告)号：US09416463B2

公开(公告)日：2016-08-16

申请号：US13148463

申请日：2010-12-13

申请人： Toshiaki Sudo ,  Hiroshi Kishi

发明人： Toshiaki Sudo ,  Hiroshi Kishi

IPC分类号： C30B35/00 ,  C30B15/10 ,  C03B19/09

CPC分类号： C30B15/10 ,  C03B19/095 ,  C30B35/002 ,  Y02P40/57 ,  Y10T117/1032

摘要： Provided is a vitreous silica crucible having a reference point, which is capable of accurately detecting the location of a defect in the vitreous silica crucible used for pulling silicon single crystal, determining a defect generating site of silicon single crystal, and investigating the cause of the defect. The reference point used for specifying the position relationship with respect to a particular part is formed in at least one site of an end portion, an inner wall and an outer wall of the crucible.

摘要翻译： 本发明提供一种具有参考点的氧化硅玻璃坩埚，其能够精确地检测用于拉拔单晶硅的玻璃状石英坩埚中的缺陷的位置，确定单晶硅的缺陷产生位置，并调查其原因 缺陷。 用于指定相对于特定部件的位置关系的参考点形成在坩埚的端部，内壁和外壁的至少一个位置中。