公开(公告)号：US20050168524A1

公开(公告)日：2005-08-04

申请号：US10995945

申请日：2004-11-24

申请人： Li Xin-Shan ,  Hironobu Kazama ,  Masami Murai ,  Koji Sumi ,  Maki Ito ,  Toshiaki Yokouchi

发明人： Li Xin-Shan ,  Hironobu Kazama ,  Masami Murai ,  Koji Sumi ,  Maki Ito ,  Toshiaki Yokouchi

IPC分类号： H01L41/08 ,  B41J2/01 ,  B41J2/045 ,  B41J2/16 ,  B44C1/22

CPC分类号： B41J2/1632 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1635 ,  B41J2/1646 ,  B41J2002/14241 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/314 ,  H01L41/319 ,  Y10T29/42 ,  Y10T29/49401

摘要： A manufacturing method of a liquid jet head having increased the durability and reliability thereof by preventing delamination of a vibration plate is provided. At least the following two steps are included: a vibration plate forming step which includes at least a step of forming a zirconium layer on one side of a passage-forming substrate by sputtering so that a degrees of orientation to a (002) plane of the surface becomes equal to 80% or more, as well as forming an insulation film made of zirconium oxide and constituting a part of the vibration plate by subjecting the zirconium layer to thermal oxidation; and a piezoelectric element forming step of forming piezoelectric elements on the vibration plate.

摘要翻译： 提供一种通过防止振动板的分层而提高其耐久性和可靠性的液体喷射头的制造方法。 至少包括以下两个步骤：振动板形成步骤，其至少包括通过溅射在通道形成基板的一侧上形成锆层的步骤，使得对（002）面的取向度 表面变得等于80％以上，并且通过对锆层进行热氧化来形成由氧化锆制成的绝缘膜并构成振动板的一部分; 以及在振动板上形成压电元件的压电元件形成步骤。

公开(公告)号：US07137179B2

公开(公告)日：2006-11-21

申请号：US10883035

申请日：2004-07-02

申请人： Toshiaki Yokouchi ,  Koji Sumi

发明人： Toshiaki Yokouchi ,  Koji Sumi

IPC分类号： H04R17/00 ,  B05D5/12 ,  H01L41/04

CPC分类号： B41J2/161 ,  B41J2/14233 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419 ,  F27B17/0025 ,  F27D5/0037 ,  H01L41/318 ,  Y10T29/42 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49401

摘要： A method of forming a piezoelectric layer includes: a drying step for forming at least one ferroelectric precursor film on a lower electrode of a substrate and drying the ferroelectric precursor film; a degreasing step for carrying the substrate into a region facing a hot plate heated to a certain temperature and for degreasing the ferroelectric precursor film in a state where the substrate is supported by a proximity pin; and a baking step for further baking the degreased ferroelectric precursor film to form the degreased ferroelectric precursor film into a ferroelectric film. The piezoelectric layer is formed by repeating the drying, degreasing, and baking steps for the ferroelectric precursor film in a predetermined number of cycles. The degreasing step includes a step of adjusting a heating temperature of the ferroelectric precursor film by adjusting a distance between the hot plate and the substrate and by lowering a temperature of space on an opposite side of the substrate from the hot plate.

摘要翻译： 形成压电层的方法包括：干燥步骤，用于在基板的下电极上形成至少一个铁电前体膜并干燥铁电前体膜; 一种脱脂步骤，用于将衬底运送到面对加热到一定温度的热板的区域中，并且用于在衬底由靠近销支撑的状态下去除铁电前体膜; 以及烘烤步骤，用于进一步烘烤脱脂铁电前体膜，以将脱脂铁电前体膜形成为铁电体膜。 通过以规定次数的周期重复强电介质前体膜的干燥，脱脂和烘烤工序来形成压电体层。 脱脂步骤包括通过调节热板和基板之间的距离并通过降低基板与热板相反的一侧的空间温度来调节铁电前体膜的加热温度的步骤。

公开(公告)号：US07411339B2

公开(公告)日：2008-08-12

申请号：US10995945

申请日：2004-11-24

申请人： Li Xin-Shan ,  Hironobu Kazama ,  Masami Murai ,  Koji Sumi ,  Maki Ito ,  Toshiaki Yokouchi

发明人： Li Xin-Shan ,  Hironobu Kazama ,  Masami Murai ,  Koji Sumi ,  Maki Ito ,  Toshiaki Yokouchi

IPC分类号： H01L41/187

CPC分类号： B41J2/1632 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1635 ,  B41J2/1646 ,  B41J2002/14241 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/314 ,  H01L41/319 ,  Y10T29/42 ,  Y10T29/49401

摘要： A manufacturing method of a liquid jet head having increased the durability and reliability thereof by preventing delamination of a vibration plate is provided. At least the following two steps are included: a vibration plate forming step which includes at least a step of forming a zirconium layer on one side of a passage-forming substrate by sputtering so that a degrees of orientation to a (002) plane of the surface becomes equal to 80% or more, as well as forming an insulation film made of zirconium oxide and constituting a part of the vibration plate by subjecting the zirconium layer to thermal oxidation; and a piezoelectric element forming step of forming piezoelectric elements on the vibration plate.

摘要翻译： 提供一种通过防止振动板的分层而提高其耐久性和可靠性的液体喷射头的制造方法。 至少包括以下两个步骤：振动板形成步骤，其至少包括通过溅射在通道形成基板的一侧上形成锆层的步骤，使得对（002）面的取向度 表面变得等于80％以上，并且通过对锆层进行热氧化来形成由氧化锆制成的绝缘膜并构成振动板的一部分; 以及在振动板上形成压电元件的压电元件形成步骤。

公开(公告)号：US20080034563A1

公开(公告)日：2008-02-14

申请号：US11826705

申请日：2007-07-18

申请人： Li Xin-Shan ,  Hironobu Kazama ,  Masami Murai ,  Koji Sumi ,  Maki Ito ,  Toshiaki Yokouchi

发明人： Li Xin-Shan ,  Hironobu Kazama ,  Masami Murai ,  Koji Sumi ,  Maki Ito ,  Toshiaki Yokouchi

IPC分类号： H01L41/22 ,  B44C1/22

CPC分类号： B41J2/1632 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1635 ,  B41J2/1646 ,  B41J2002/14241 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/314 ,  H01L41/319 ,  Y10T29/42 ,  Y10T29/49401

摘要： A manufacturing method of a liquid jet head having increased the durability and reliability thereof by preventing delamination of a vibration plate is provided. At least the following two steps are included: a vibration plate forming step which includes at least a step of forming a zirconium layer on one side of a passage-forming substrate by sputtering so that a degrees of orientation to a (002) plane of the surface becomes equal to 80% or more, as well as forming an insulation film made of zirconium oxide and constituting a part of the vibration plate by subjecting the zirconium layer to thermal oxidation; and a piezoelectric element forming step of forming piezoelectric elements on the vibration plate.

摘要翻译： 提供一种通过防止振动板的分层而提高其耐久性和可靠性的液体喷射头的制造方法。 至少包括以下两个步骤：振动板形成步骤，其至少包括通过溅射在通道形成基板的一侧上形成锆层的步骤，使得对（002）面的取向度 表面变得等于80％以上，并且通过对锆层进行热氧化来形成由氧化锆制成的绝缘膜并构成振动板的一部分; 以及在振动板上形成压电元件的压电元件形成步骤。

公开(公告)号：US20050109456A1

公开(公告)日：2005-05-26

申请号：US10883035

申请日：2004-07-02

申请人： Toshiaki Yokouchi ,  Koji Sumi

发明人： Toshiaki Yokouchi ,  Koji Sumi

IPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/135 ,  B41J2/14 ,  B41J2/16 ,  F27B17/00 ,  F27D5/00 ,  H01L41/04 ,  H01L41/08 ,  H01L41/09 ,  H01L41/187 ,  H01L41/22 ,  H01L41/318 ,  H01L41/39 ,  H02N2/00 ,  B32B31/26

CPC分类号： B41J2/161 ,  B41J2/14233 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419 ,  F27B17/0025 ,  F27D5/0037 ,  H01L41/318 ,  Y10T29/42 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49401

摘要： A method of forming a piezoelectric layer includes: a drying step for forming at least one ferroelectric precursor film on a lower electrode of a substrate and drying the ferroelectric precursor film; a degreasing step for carrying the substrate into a region facing a hot plate heated to a certain temperature and for degreasing the ferroelectric precursor film in a state where the substrate is supported by a proximity pin; and a baking step for further baking the degreased ferroelectric precursor film to form the degreased ferroelectric precursor film into a ferroelectric film. The piezoelectric layer is formed by repeating the drying, degreasing, and baking steps for the ferroelectric precursor film in a predetermined number of cycles. The degreasing step includes a step of adjusting a heating temperature of the ferroelectric precursor film by adjusting a distance between the hot plate and the substrate and by lowering a temperature of space on an opposite side of the substrate from the hot plate.

摘要翻译： 形成压电层的方法包括：干燥步骤，用于在基板的下电极上形成至少一个铁电前体膜并干燥铁电前体膜; 一种脱脂步骤，用于将衬底运送到面对加热到一定温度的热板的区域中，并且用于在衬底由靠近销支撑的状态下去除铁电前体膜; 以及烘烤步骤，用于进一步烘烤脱脂铁电前体膜，以将脱脂铁电前体膜形成为铁电体膜。 通过以规定次数的周期重复强电介质前体膜的干燥，脱脂和烘烤工序来形成压电体层。 脱脂步骤包括通过调节热板和基板之间的距离并通过降低基板与热板相反的一侧的空间温度来调节铁电前体膜的加热温度的步骤。