公开(公告)号：US08405025B2

公开(公告)日：2013-03-26

申请号：US12244188

申请日：2008-10-02

申请人： Toshifumi Honda ,  Hiroshi Makino

发明人： Toshifumi Honda ,  Hiroshi Makino

IPC分类号： G01N23/00

CPC分类号： G01N23/2251 ,  H01J37/1471 ,  H01J37/153 ,  H01J37/21 ,  H01J37/243 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/1501 ,  H01J2237/1532 ,  H01J2237/216 ,  H01J2237/2487 ,  H01J2237/2817 ,  H01J2237/2826

摘要： A scanning electron microscope includes an electron beam source which emits an electron beam, a beam current controller which controls a beam current of the electron beam, an electron beam converger which converges the electron beam on a surface of a sample, an electron beam scanner which scans the electron beam on the surface of the sample, a table which mounts the sample and moves at least in one direction, a detector which detects a secondary electron or a reflected electron emanated from the sample by the scan of the electron beam, an image former which forms an image of the sample based on a detection value of the detector, an image processor which processes the image formed by the image former. The beam current controller controls the beam current of the electron beam by changing transmittance of the electron beam in an irradiation path of the electron beam.

摘要翻译： 扫描电子显微镜包括发射电子束的电子束源，控制电子束的束电流的束流控制器，将电子束会聚在样品的表面上的电子束会聚器，电子束扫描器 扫描样品表面上的电子束，安装样品并至少沿一个方向移动的台面;检测器，其通过扫描电子束检测从样品发射的二次电子或反射电子;图像 前者，其基于检测器的检测值形成样本的图像，处理由图像形成器形成的图像的图像处理器。 束电流控制器通过改变电子束的照射路径中的电子束的透射率来控制电子束的束流。

公开(公告)号：US07432503B2

公开(公告)日：2008-10-07

申请号：US11319721

申请日：2005-12-29

申请人： Toshifumi Honda ,  Hiroshi Makino

发明人： Toshifumi Honda ,  Hiroshi Makino

IPC分类号： G01N23/00

CPC分类号： G01N23/2251 ,  H01J37/1471 ,  H01J37/153 ,  H01J37/21 ,  H01J37/243 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/1501 ,  H01J2237/1532 ,  H01J2237/216 ,  H01J2237/2487 ,  H01J2237/2817 ,  H01J2237/2826

摘要： In the present invention, in order to realize both a reduction of an image detecting time and high quality image detection in a scanning electron microscope for measurement, inspection, defect review, or the like of semiconductor wafers, a low-magnification image is taken by using a large beam current; a high-magnification image is taken by using a small beam current; control amounts for correcting a change in luminance, a focus deviation, misalignment, and visual field misalignment of taken images, which are generated due to a variation of a beam current are saved in advance in a memory of an overall control system; and these amounts are corrected every time the beam current is switched, thereby making it possible to take the images without any adjustment operation after switching the currents.

摘要翻译： 在本发明中，为了实现半导体晶片的测量，检查，缺陷检查等的扫描型电子显微镜中的图像检测时间的缩短和高质量图像检测，低倍率图像被采用 使用大束电流; 通过使用小束电流拍摄高倍率图像; 在整个控制系统的存储器中预先保存用于校正由于波束电流的变化而产生的拍摄图像的亮度变化，聚焦偏移，未对准和视场未对准的控制量; 并且每当切换电流时校正这些量，从而可以在切换电流之后进行没有任何调整操作的图像。

公开(公告)号：US20060151700A1

公开(公告)日：2006-07-13

申请号：US11319721

申请日：2005-12-29

申请人： Toshifumi Honda ,  Hiroshi Makino

发明人： Toshifumi Honda ,  Hiroshi Makino

IPC分类号： G21K7/00

CPC分类号： G01N23/2251 ,  H01J37/1471 ,  H01J37/153 ,  H01J37/21 ,  H01J37/243 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/1501 ,  H01J2237/1532 ,  H01J2237/216 ,  H01J2237/2487 ,  H01J2237/2817 ,  H01J2237/2826

摘要： In the present invention, in order to realize both a reduction of an image detecting time and high quality image detection in a scanning electron microscope for measurement, inspection, defect review, or the like of semiconductor wafers, a low-magnification image is taken by using a large beam current; a high-magnification image is taken by using a small beam current; control amounts for correcting a change in luminance, a focus deviation, misalignment, and visual field misalignment of taken images, which are generated due to a variation of a beam current are saved in advance in a memory of an overall control system; and these amounts are corrected every time the beam current is switched, thereby making it possible to take the images without any adjustment operation after switching the currents.

摘要翻译： 在本发明中，为了实现半导体晶片的测量，检查，缺陷检查等的扫描型电子显微镜中的图像检测时间的缩短和高质量图像检测，低倍率图像被采取 使用大束电流; 通过使用小束电流拍摄高倍率图像; 在整个控制系统的存储器中预先保存用于校正由于波束电流的变化而产生的拍摄图像的亮度变化，聚焦偏移，未对准和视场未对准的控制量; 并且每当切换电流时校正这些量，从而可以在切换电流之后进行没有任何调整操作的图像。

公开(公告)号：US20090039258A1

公开(公告)日：2009-02-12

申请号：US12244188

申请日：2008-10-02

申请人： Toshifumi HONDA ,  Hiroshi Makino

发明人： Toshifumi HONDA ,  Hiroshi Makino

IPC分类号： G01N23/00

CPC分类号： G01N23/2251 ,  H01J37/1471 ,  H01J37/153 ,  H01J37/21 ,  H01J37/243 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/1501 ,  H01J2237/1532 ,  H01J2237/216 ,  H01J2237/2487 ,  H01J2237/2817 ,  H01J2237/2826

摘要： A scanning electron microscope includes an electron beam source which emits an electron beam, a beam current controller which controls a beam current of the electron beam, an electron beam converger which converges the electron beam on a surface of a sample, an electron beam scanner which scans the electron beam on the surface of the sample, a table which mounts the sample and moves at least in one direction, a detector which detects a secondary electron or a reflected electron emanated from the sample by the scan of the electron beam, an image former which forms an image of the sample based on a detection value of the detector, an image processor which processes the image formed by the image former. The beam current controller controls the beam current of the electron beam by changing transmittance of the electron beam in an irradiation path of the electron beam.

摘要翻译： 扫描电子显微镜包括发射电子束的电子束源，控制电子束的束电流的束流控制器，将电子束会聚在样品的表面上的电子束会聚器，电子束扫描器 扫描样品表面上的电子束，安装样品并至少沿一个方向移动的台面;检测器，其通过扫描电子束检测从样品发射的二次电子或反射电子;图像 前者，其基于检测器的检测值形成样本的图像，处理由图像形成器形成的图像的图像处理器。 束电流控制器通过改变电子束的照射路径中的电子束的透射率来控制电子束的束流。

公开(公告)号：US20090309022A1

公开(公告)日：2009-12-17

申请号：US12480443

申请日：2009-06-08

申请人： Yasuhiro GUNJI ,  Akira Fujii ,  Hiroyuki Takahashi ,  Ryuichi Funatsu ,  Toshifumi Honda ,  Takashi Hiroi ,  Hiroshi Makino

发明人： Yasuhiro GUNJI ,  Akira Fujii ,  Hiroyuki Takahashi ,  Ryuichi Funatsu ,  Toshifumi Honda ,  Takashi Hiroi ,  Hiroshi Makino

IPC分类号： G01N23/00 ,  H01J3/14

CPC分类号： G01N23/2251 ,  G01N2223/646 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/202 ,  H01J2237/216 ,  H01J2237/2482 ,  H01J2237/2817

摘要： An object of the present invention provides an inspection apparatus and an inspection method which use an electron beam image to accurately detect a defect that is difficult to detect in an optical image, the apparatus and method also enabling prevention of a possible decrease in focus accuracy of an inspection image which affect the defect detection. To accomplish the object, the present invention includes a height measurement section which measures height of the electron beam irradiation position on the substrate after the substrate is loaded onto a movable stage, a height correction processing section which corrects the measured height, and a control section which adjusts a focus of the electron beam according to the height corrected by the height correction processing section, wherein a stage position set when the height measurement section measures the height differs from a stage position set when the substrate is irradiated with the electron beam, and the height correction processing section corrects a possible deviation in height resulting from movement from the stage position for the height measurement to the stage position for the electron beam irradiation.

摘要翻译： 本发明的目的是提供一种使用电子束图像来精确地检测光学图像中难以检测的缺陷的检查装置和检查方法，该装置和方法还能够防止可能降低聚焦精度 影响缺陷检测的检查图像。 为了实现该目的，本发明包括一个高度测量部分，其测量将基板装载到可移动平台上之后的基板上的电子束照射位置的高度，校正测量高度的高度校正处理部分，以及控制部分 其根据由高度校正处理部校正的高度来调整电子束的焦点，其中当高度测量部分测量高度时设置的台阶位置与当基板被电子束照射时设定的台位置不同，以及 高度校正处理部分校正由高度测量的台位置到用于电子束照射的台位置的运动导致的高度偏差。

公开(公告)号：US08929049B2

公开(公告)日：2015-01-06

申请号：US13811644

申请日：2011-10-27

申请人： Takashige Yagi ,  Tetsuya Tojyo ,  Hiroshi Makino

发明人： Takashige Yagi ,  Tetsuya Tojyo ,  Hiroshi Makino

IPC分类号： H01T23/00 ,  H01J27/02 ,  H05H1/24 ,  B03C3/38 ,  B03C3/62 ,  B03C3/64

CPC分类号： H01J27/022 ,  B03C3/38 ,  B03C3/62 ,  B03C3/64 ,  B03C2201/14 ,  H01T23/00 ,  H05H1/2406 ,  H05H2001/2412 ,  H05H2001/2418 ,  H05H2001/2437

摘要： Provided is an ion wind generator capable of diversifying either or both of the amount of wind or wind direction. An ion wind generator is provided with a first electrode, a second electrode having a downstream area which is arranged at a position in a plan view shifted from first electrode towards the positive side in the x direction, and a dielectric between the first electrode and the second electrode. In a plane view, the distance (d) in the x-direction from a downstream side edge of the first electrode to the downstream side edge of the downstream area differs in the y-direction which is perpendicular to the x-direction.

摘要翻译： 提供了能够使风或风向的一方或两方多样化的离子风发生器。 离子风发生器设置有第一电极，第二电极，其具有布置在从第一电极朝向x方向的正侧的平面图中的位置处的下游区域，以及第一电极和第二电极之间的电介质 第二电极。 在平面图中，从第一电极的下游侧边缘到下游侧的下游侧边缘的x方向上的距离（d）在与x方向垂直的y方向上不同。

公开(公告)号：US20140212879A1

公开(公告)日：2014-07-31

申请号：US14239409

申请日：2012-08-31

申请人： Hiroyuki Kubota ,  Hiroshi Makino ,  Takafumi Sakai ,  Eiji Ishikawa ,  Kenji Oishi

发明人： Hiroyuki Kubota ,  Hiroshi Makino ,  Takafumi Sakai ,  Eiji Ishikawa ,  Kenji Oishi

IPC分类号： C12Q1/68

CPC分类号： C12Q1/689

摘要： Provided are an oligonucleotide which realizes specific and highly sensitive detection of toxigenic C. difficile, and a method for detecting toxigenic C. difficile, the method employing the oligonucleotide.1) A primer pair containing an oligonucleotide having a nucleotide sequence represented by SEQ ID NO: 1, and an oligonucleotide having a nucleotide sequence represented by SEQ ID NO: 2; or a primer pair having complementary sequences to the nucleotide sequences. 2) A primer pair containing an oligonucleotide having a nucleotide sequence represented by SEQ ID NO: 4, and an oligonucleotide having a nucleotide sequence represented by SEQ ID NO: 5; or a primer pair having complementary sequences to the nucleotide sequences.

摘要翻译： 提供了实现特异性和高度灵敏的产生艰难梭菌的检测的寡核苷酸，以及使用该寡核苷酸的方法，用于检测致病性艰难梭菌的方法。 1）一种引物对，其含有具有由SEQ ID NO：1表示的核苷酸序列的寡核苷酸和具有由SEQ ID NO：2表示的核苷酸序列的寡核苷酸; 或与核苷酸序列具有互补序列的引物对。 2）含有具有SEQ ID NO：4所示的核苷酸序列的寡核苷酸的引物对和具有由SEQ ID NO：5表示的核苷酸序列的寡核苷酸; 或与核苷酸序列具有互补序列的引物对。

公开(公告)号：US20140117834A1

公开(公告)日：2014-05-01

申请号：US14125799

申请日：2012-06-15

申请人： Takashige Yagi ,  Hiroshi Makino ,  Tetsuya Tojo ,  Takahito Hirata

发明人： Takashige Yagi ,  Hiroshi Makino ,  Tetsuya Tojo ,  Takahito Hirata

IPC分类号： H05H1/24

CPC分类号： H05H1/2406 ,  H01T23/00 ,  H05H2001/2418 ,  H05H2001/2437

摘要： The plasma generator has the dielectric having the inner circumferential surface, and a pair of electrodes which are arranged separated from each other in the direction along the inner circumferential surface and are isolated from each other by the dielectric and which are capable of generating plasma on the inner circumferential surface by application of voltage. In the inner circumferential surface, at the positions between the pair of electrodes in a plan view, recessed portions causing electric field concentration are formed.

摘要翻译： 等离子体发生器具有内周面的电介质和一对电极，它们沿着内圆周表面的方向彼此分离，并且通过电介质彼此隔离，并且能够在 内周面通过施加电压。 在内周面上，在平面图的一对电极之间的位置形成有引起电场集中的凹部。

公开(公告)号：US20140001360A1

公开(公告)日：2014-01-02

申请号：US14002275

申请日：2012-01-27

申请人： Yuji Kasai ,  Makoto Suzuki ,  Hiroshi Makino

发明人： Yuji Kasai ,  Makoto Suzuki ,  Hiroshi Makino

IPC分类号： H01J37/05

CPC分类号： H01J37/05 ,  G01N23/2251 ,  G06T1/00 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24475 ,  H01J2237/24485 ,  H01J2237/2449 ,  H01J2237/24495

摘要： Provided is a technique to automatize a synthesis function of signal charged particles having different energies. A charged particle beam apparatus includes: a charged particle source configured to irradiate a sample with a primary charged particle ray; a first detector configured to detect a first signal electron having first energy from signal charged particles generated from the sample; a second detector configured to detect a second signal electron having second energy from signal charged particles generated from the sample; a first operation part configured to change a synthesis ratio of a signal intensity of the first signal electron and a signal intensity of the second signal electron and to generate a detected image corresponding to each synthesis ratio; a second operation part configured to calculate a ratio of signal intensities corresponding to predetermined two areas of the detected image generated for each synthesis ratio; and a third operation part configured to determine a mixture ratio to be used for acquisition of the detected image on a basis of a change of the ratio of signal intensities.

摘要翻译： 提供了一种使具有不同能量的信号带电粒子的合成功能自动化的技术。 带电粒子束装置包括：带电粒子源，被配置为用一次带电粒子射线照射样品; 第一检测器，被配置为检测从所述样品产生的信号带电粒子的具有第一能量的第一信号电子; 第二检测器，被配置为检测从样品产生的信号带电粒子的具有第二能量的第二信号电子; 第一操作部，被配置为改变第一信号电子的信号强度和第二信号电子的信号强度的合成比，并且生成与每个合成比相对应的检测图像; 第二操作部，被配置为计算与针对每个合成比生成的检测图像的预定的两个区域相对应的信号强度的比率; 以及第三操作部件，被配置为基于信号强度比的变化来确定用于获取检测到的图像的混合比率。

公开(公告)号：US20130083446A1

公开(公告)日：2013-04-04

申请号：US13638540

申请日：2011-03-17

申请人： Takashige Yagi ,  Tetsuya Tojo ,  Hiroshi Makino

发明人： Takashige Yagi ,  Tetsuya Tojo ,  Hiroshi Makino

IPC分类号： H01T23/00

CPC分类号： H01T23/00 ,  H01T19/00

摘要： Provided is an ion wind generator which is able to raise the speed of the ion wind. An ion wind generator (3) has: a first electrode (9) and a second electrode (11) which are supplied with voltage and induce an ion wind by electric discharge, and a third electrode (13) which forms an electric field for accelerating the ion wind in a downstream region of the ion wind relative to the first electrode (9) and the second electrode (11).

摘要翻译： 提供了能够提高离子风速度的离子风发生器。 离子风发生器（3）具有：通过放电而被供给电压并引起离子风的第一电极（9）和第二电极（11），以及形成用于加速的电场的第三电极（13） 离子风相对于第一电极（9）和第二电极（11）在离子风的下游区域中的离子风。