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    Piezoelectric member, piezoelectric element, and liquid discharge head and liquid discharge apparatus utilizing piezoelectric element
    1.
    发明授权
    Piezoelectric member, piezoelectric element, and liquid discharge head and liquid discharge apparatus utilizing piezoelectric element 有权
    压电元件，压电元件，以及利用压电元件的液体排出头和液体排出装置

    公开(公告)号：US07622852B2

    公开(公告)日：2009-11-24

    申请号：US12031176

    申请日：2008-02-14

    申请人： Toshihiro Ifuku ,  Tetsuro Fukui ,  Kenichi Takeda ,  Hiroshi Funakubo ,  Hiroshi Nakaki ,  Rikyu Ikariyama ,  Osami Sakata

    发明人： Toshihiro Ifuku ,  Tetsuro Fukui ,  Kenichi Takeda ,  Hiroshi Funakubo ,  Hiroshi Nakaki ,  Rikyu Ikariyama ,  Osami Sakata

    IPC分类号： H01L41/04 ,  H01L41/187

    CPC分类号： B41J2/14233 ,  B41J2202/03 ,  H01L41/0805 ,  H01L41/1875 ,  H01L41/1876 ,  H01L41/316

    摘要： The invention provides a piezoelectric film having a large piezoelectric property, and a piezoelectric element, a liquid discharge head and a liquid discharge apparatus utilizing the same. The piezoelectric film is formed by an epitaxial oxide of orientation having at least a tetragonal crystal structure, in which the oxide is a perovskite type composite oxide represented by a general formula ABO3 and contains at least domains C, D and E of [100] orientation having mutual deviation in crystal direction, where the angular deviation between [100] directions in domains C and D, in domains D and E, in domains C and E and in domains D and E are respectively 5° or less, 5° or less, 0.3° or less, and 0.3° or more, and the angular deviation between [001] directions in domains C and E and in domains D and E are respectively 1.0° or more, and 1.0° or more.

    摘要翻译： 本发明提供一种压电性能大的压电膜，以及压电元件，液体排出头和利用该压电元件的液体排出装置。 压电膜由具有至少四方晶系结构的<100>取向的外延氧化物形成，其中氧化物是由通式ABO 3表示的钙钛矿型复合氧化物，并且至少含有C，D和E的畴， 100]取向在晶体方向上具有相互偏离，其中区域C和D中的结构域C和D中的结构域D和E中的区域C和E以及区域D和E中的角度偏差分别为5°或更小，5 °或更小，0.3°以下，0.3°以上，域C，E以及区域D，E的[001]方向的角度偏差分别为1.0°以上1.0°以上。

    PIEZOELECTRIC MEMBER, PIEZOELECTRIC ELEMENT, AND LIQUID DISCHARGE HEAD AND LIQUID DISCHARGE APPARATUS UTILIZING PIEZOELECTRIC ELEMENT
    2.
    发明申请
    PIEZOELECTRIC MEMBER, PIEZOELECTRIC ELEMENT, AND LIQUID DISCHARGE HEAD AND LIQUID DISCHARGE APPARATUS UTILIZING PIEZOELECTRIC ELEMENT 有权
    压电元件，压电元件和液体放电头和液体放电器件利用压电元件

    公开(公告)号：US20080211881A1

    公开(公告)日：2008-09-04

    申请号：US12031176

    申请日：2008-02-14

    申请人： Toshihiro Ifuku ,  Tetsuro Fukui ,  Kenichi Takeda ,  Hiroshi Funakubo ,  Hiroshi Nakaki ,  Rikyu Ikariyama ,  Osami Sakata

    发明人： Toshihiro Ifuku ,  Tetsuro Fukui ,  Kenichi Takeda ,  Hiroshi Funakubo ,  Hiroshi Nakaki ,  Rikyu Ikariyama ,  Osami Sakata

    IPC分类号： H01L41/187 ,  B41J2/045

    CPC分类号： B41J2/14233 ,  B41J2202/03 ,  H01L41/0805 ,  H01L41/1875 ,  H01L41/1876 ,  H01L41/316

    摘要： The invention provides a piezoelectric film having a large piezoelectric property, and a piezoelectric element, a liquid discharge head and a liquid discharge apparatus utilizing the same. The piezoelectric film is formed by an epitaxial oxide of orientation having at least a tetragonal crystal structure, in which the oxide is a perovskite type composite oxide represented by a general formula ABO3 and contains at least domains C, D and E of [100] orientation having mutual deviation in crystal direction, where the angular deviation between [100] directions in domains C and D, in domains D and E, in domains C and E and in domains D and E are respectively 5° or less, 5° or less, 0.3° or less, and 0.3° or more, and the angular deviation between [001] directions in domains C and E and in domains D and E are respectively 1.0° or more, and 1.0° or more.

    摘要翻译： 本发明提供一种压电性能大的压电膜，以及压电元件，液体排出头和利用该压电元件的液体排出装置。 压电膜由具有至少四方晶系结构的<100>取向的外延氧化物形成，其中氧化物是由通式ABO 3 N表示的钙钛矿型复合氧化物，并且至少包含 [100]取向的结构域C，D和E在晶体方向上具有相互偏离，其中域C和D中的结构域C和D中的结构域D和E中，域C和E以及结构域D和E中的[100]方向之间的角度偏差 分别为5°以下，5°以下，0.3°以下，0.3°以上，区域C和E以及区域D，E的[001]方向的角度偏差分别为1.0°以上， 和1.0°以上。