Soft magnetic FeCo based target material
    1.
    发明申请
    Soft magnetic FeCo based target material 有权
    软磁FeCo基靶材料

    公开(公告)号:US20080112841A1

    公开(公告)日:2008-05-15

    申请号:US11983208

    申请日:2007-11-07

    CPC分类号: C22C38/10 C22C19/07

    摘要: A soft-magnetic FeCo based target material is provided which has a high saturation magnetic flux density and superior atmospheric corrosion resistance. The target material is a soft-magnetic FeCo based target material made of an FeCo based alloy. The FeCo based alloy comprises 0 to 30 at. % of one or more metal elements selected from the group consisting of B, Nb, Zr, Ta, Hf, Ti and V; and the balance being Fe and Co with unavoidable impurities. The Fe:Co atomic ratio ranges from 10:90 to 70:30. The FeCo based alloy may further comprise 0.2 at. % to 5.0 at. % of Al and/or Cr.

    摘要翻译: 提供了一种具有高饱和磁通密度和优异的耐大气腐蚀性的软磁性FeCo基靶材。 目标材料是由FeCo基合金制成的软磁性FeCo基靶材料。 FeCo基合金包含0至30at。 %的选自B,Nb,Zr,Ta,Hf,Ti和V的一种或多种金属元素; 余量为Fe和Co与不可避免的杂质。 Fe:Co原子比范围为10:90至70:30。 FeCo基合金可以进一步包含0.2at。 %至5.0 at。 Al和/或Cr的%。

    Soft magnetic FeCo based target material
    2.
    发明授权
    Soft magnetic FeCo based target material 有权
    软磁FeCo基靶材料

    公开(公告)号:US08057650B2

    公开(公告)日:2011-11-15

    申请号:US11983208

    申请日:2007-11-07

    IPC分类号: C25B11/04

    CPC分类号: C22C38/10 C22C19/07

    摘要: A soft-magnetic FeCo based target material is provided which has a high saturation magnetic flux density and superior atmospheric corrosion resistance. The target material is a soft-magnetic FeCo based target material made of an FeCo based alloy. The FeCo based alloy comprises 0 to 30 at. % of one or more metal elements selected from the group consisting of B, Nb, Zr, Ta, Hf, Ti and V; and the balance being Fe and Co with unavoidable impurities. The Fe:Co atomic ratio ranges from 10:90 to 70:30. The FeCo based alloy may further comprise 0.2 at. % to 5.0 at. % of Al and/or Cr.

    摘要翻译: 提供了一种具有高饱和磁通密度和优异的耐大气腐蚀性的软磁性FeCo基靶材。 目标材料是由FeCo基合金制成的软磁性FeCo基靶材料。 FeCo基合金包含0至30at。 %的选自B,Nb,Zr,Ta,Hf,Ti和V的一种或多种金属元素; 余量为Fe和Co与不可避免的杂质。 Fe:Co原子比范围为10:90至70:30。 FeCo基合金可以进一步包含0.2at。 %至5.0 at。 Al和/或Cr的%。

    (CoFe)Zr/Nb/Ta/Hf based target material
    3.
    发明授权
    (CoFe)Zr/Nb/Ta/Hf based target material 有权
    (CoFe)Zr / Nb / Ta / Hf基靶材料

    公开(公告)号:US08066825B2

    公开(公告)日:2011-11-29

    申请号:US11941504

    申请日:2007-11-16

    IPC分类号: H01F1/147 C23C14/34

    摘要: A (CoFe)Zr/Nb/Ta/Hf based target material is provided which is capable of achieving a high sputtering efficiency and a high sputtering effect by increasing the leakage magnetic flux in the magnetron sputtering, and a method for producing the target material. This target material is made of an Fe—Co based alloy comprising not less than 80 atomic % in total of Fe and Co having an Fe:Co atomic ratio of 80:20 to 0:100, and less than 20 atomic % of one or more selected from the group consisting of Zr, Hf, Nb and Ta. The Fe—Co based alloy comprises a Co—Fe phase being a ferromagnetic phase, and the one or more selected from the group consisting of Zr, Hf, Nb and Ta are incorporated in solid solution form into the Co—Fe phase in a total amount of 0.5 to 2 atomic %.

    摘要翻译: 提供了一种能够通过增加磁控溅射中的漏磁通量而实现高溅射效率和高溅射效果的(CoFe)Zr / Nb / Ta / Hf基靶材,以及制造目标材料的方法。 该目标材料由Fe-Co系合金构成,Fe-Co系合金的Fe:Co原子比为80:20〜0:100,Fe:Co原子比为80原子%以上,Fe:Co原子比为80原子%以下,小于20原子% 更多选自Zr,Hf,Nb和Ta。 Fe-Co基合金包含Fe-Fe相,其为铁磁相,并且选自Zr,Hf,Nb和Ta中的一种或多种,​​以固溶体形式并入Co-Fe相中 量为0.5〜2原子%。

    (CoFe)ZrNb/Ta/Hf Based Target Material and Method for Producing the Same
    4.
    发明申请
    (CoFe)ZrNb/Ta/Hf Based Target Material and Method for Producing the Same 有权
    (CoFe)ZrNb / Ta / Hf基靶材及其制造方法

    公开(公告)号:US20080138235A1

    公开(公告)日:2008-06-12

    申请号:US11941504

    申请日:2007-11-16

    摘要: A (CoFe)ZrNb/Ta/Hf based target material is provided which is capable of achieving a high sputtering efficiency and a high sputtering effect by increasing the leakage magnetic flux in the magnetron sputtering, and a method for producing the target material. This target material is made of an Fe—Co based alloy comprising not less than 80 atomic % in total of Fe and Co having an Fe:Co atomic ratio of 80:20 to 0:100, and less than 20 atomic % of one or more selected from the group consisting of Zr, Hf, Nb and Ta. The Fe—Co based alloy comprises a Co—Fe phase being a ferromagnetic phase, and the one or more selected from the group consisting of Zr, Hf, Nb and Ta are solid-solved into the Co—Fe phase in a total amount of 0.5 to 2 atomic %.

    摘要翻译: 提供了一种能够通过增加磁控溅射中的漏磁通量而实现高溅射效率和高溅射效应的(CoFe)ZrNb / Ta / Hf基靶材料,以及用于制造目标材料的方法。 该目标材料由Fe-Co系合金构成,Fe-Co系合金的Fe:Co原子比为80:20〜0:100,Fe:Co原子比为80原子%以上,Fe:Co原子比为80原子%以下,小于20原子% 更多选自Zr,Hf,Nb和Ta。 Fe-Co系合金含有铁磁相的Co-Fe相,将选自Zr,Hf,Nb和Ta中的一种以上的固体溶解在Co-Fe相中, 0.5〜2原子%。

    Method for producing sputtering target material for Ni-W based interlayer
    6.
    发明授权
    Method for producing sputtering target material for Ni-W based interlayer 有权
    用于制造Ni-W系夹层的溅射靶材的方法

    公开(公告)号:US08080201B2

    公开(公告)日:2011-12-20

    申请号:US12173337

    申请日:2008-07-15

    IPC分类号: B22F3/15

    摘要: There is provided a method for producing sputtering target materials which are used for a Ni—W based interlayer in a perpendicular magnetic recording medium. In this producing method, a Ni—W based alloy powder is prepared as a raw material powder. The alloy powder comprises 5 to 20 at % of W and the balance Ni and unavoidable impurities and is produced by gas atomization. The raw material powder is consolidated at a temperature ranging from 900 to 1150° C. This producing method makes it possible to significantly restrain expansion of the powder-filled billet in the consolidation step, thus efficiently producing Ni—W based sputtering target materials with stable qualities.

    摘要翻译: 提供了用于制造用于垂直磁记录介质中的Ni-W系夹层的溅射靶材的方法。 在该制造方法中,制作Ni-W系合金粉末作为原料粉末。 合金粉末含有5〜20原子%的W,余量为Ni和不可避免的杂质,通过气体雾化法制造。 原料粉末在900〜1150℃的温度下固化。该制造方法可以显着地抑制固结步骤中填充粉末的坯料的膨胀,从而有效地生产具有稳定的Ni-W系溅射靶材料 品质

    Method for Producing Sputtering Target Material for Ni-W Based Interlayer
    9.
    发明申请
    Method for Producing Sputtering Target Material for Ni-W Based Interlayer 有权
    用于生产Ni-W基层的溅射靶材料的方法

    公开(公告)号:US20090022614A1

    公开(公告)日:2009-01-22

    申请号:US12173337

    申请日:2008-07-15

    IPC分类号: B22F1/00

    摘要: There is provided a method for producing sputtering target materials which are used for a Ni—W based interlayer in a perpendicular magnetic recording medium. In this producing method, a Ni—W based alloy powder is prepared as a raw material powder. The alloy powder comprises 5 to 20 at % of W and the balance Ni and unavoidable impurities and is produced by gas atomization. The raw material powder is consolidated at a temperature ranging from 900 to 1150° C. This producing method makes it possible to significantly restrain expansion of the powder-filled billet in the consolidation step, thus efficiently producing Ni—W based sputtering target materials with stable qualities.

    摘要翻译: 提供了用于制造用于垂直磁记录介质中的Ni-W系夹层的溅射靶材的方法。 在该制造方法中,制作Ni-W系合金粉末作为原料粉末。 合金粉末含有5〜20原子%的W,余量为Ni和不可避免的杂质,通过气体雾化法制造。 原料粉末在900〜1150℃的温度下固化。该制造方法可以显着地抑制固结步骤中填充粉末的坯料的膨胀,从而有效地生产具有稳定的Ni-W系溅射靶材料 品质

    Cr-doped FeCoB based target material and method for producing the same
    10.
    发明授权
    Cr-doped FeCoB based target material and method for producing the same 失效
    Cr掺杂的FeCoB基靶材及其制造方法

    公开(公告)号:US07780826B2

    公开(公告)日:2010-08-24

    申请号:US11893111

    申请日:2007-08-14

    IPC分类号: C25B11/04

    摘要: There is disclosed a method for producing a Cr-doped FeCoB based target material that can be used efficiently in magnetron sputtering processes and has a low magnetic permeability. In the method for producing the target material, there are firstly provided raw-materials of two or more kinds of FeCoB based alloy powders which are different in composition from each other, wherein at least one of the FeCoB based alloy powders comprises Fe and Co in a total amount of 60 atom % or more such that Fe:Co atomic ratio is within a range of 70:30 to 40:60, and comprises Cr in an amount which is from 15 to 25 atom % greater than B. Then, the two or more kinds of the FeCoB based alloy powder are mixed and consolidated to form a target material.

    摘要翻译: 公开了一种可以有效地用于磁控溅射工艺中的具有低Cr掺杂FeCoB的靶材料的制造方法,并具有低磁导率。 在目标材料的制造方法中,首先提供两种以上的FeCoB系合金粉末的组成不同的原料,其中至少一种FeCoB系合金粉末含有Fe和Co 总计为60原子%以上,Fe:Co原子比在70:30〜40:60的范围内,含有比B大15〜25原子%的Cr。然后, 混合并固化两种以上的FeCoB系合金粉末,形成靶材。