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公开(公告)号：US08449752B2
公开(公告)日：2013-05-28
申请号：US12569973
申请日：2009-09-30
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163
摘要： Methods for fabrication of magnetic write heads, and more specifically to fabrication of magnetic poles and trailing magnetic pole steps. A write pole may first be patterned on a substrate. Then a side gap material may be patterned along sidewall portions of the write pole. Thereafter, a masking layer may be deposited and patterned to expose a portion of the write pole. A trailing magnetic pole step may be formed on the exposed portion of the write pole.
摘要翻译： 用于制造磁写头的方法，更具体地说是制造磁极和后磁极台阶。 写极可以首先在衬底上图案化。 然后，侧面间隙材料可以沿着写入极的侧壁部分被图案化。 此后，可以沉积和图案化掩模层以暴露写入极的一部分。 可以在写入极的暴露部分上形成尾部磁极台阶。
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公开(公告)号：US20110076393A1
公开(公告)日：2011-03-31
申请号：US12569973
申请日：2009-09-30
IPC分类号： G11B5/17
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163
摘要： Methods for fabrication of magnetic write heads, and more specifically to fabrication of magnetic poles and trailing magnetic pole steps. A write pole may first be patterned on a substrate. Then a side gap material may be patterned along sidewall portions of the write pole. Thereafter, a masking layer may be deposited and patterned to expose a portion of the write pole. A trailing magnetic pole step may be formed on the exposed portion of the write pole.
摘要翻译： 用于制造磁写头的方法，更具体地说是制造磁极和后磁极台阶。 写极可以首先在衬底上图案化。 然后，侧面间隙材料可以沿着写入极的侧壁部分被图案化。 此后，可以沉积和图案化掩模层以暴露写入极的一部分。 可以在写入极的暴露部分上形成尾部磁极台阶。
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3.发明申请公开(公告)号：US20110075299A1
公开(公告)日：2011-03-31
申请号：US12569962
申请日：2009-09-30
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , G11B5/6005
摘要： Embodiments provide a write pole and a magnetic shield for write heads. The write pole includes a trailing step, while the magnetic shield includes a slanted bump. The slanted bump and the trailing step provides maximize magnetic flux for writing to a magnetic media such as a magnetic storage disk in a hard disk drive, while avoiding saturation. One embodiment of a method for forming the write pole includes depositing non-magnetic gap material on the write pole and trailing step. An ion beam milling process is used to form a taper in the non-magnetic gap material. The magnetic shield is then deposited on the taper, forming the slanted bump of the shield.
摘要翻译： 实施例提供写磁头的写极和磁屏蔽。 写入极包括后续步骤，而磁屏蔽包括倾斜的凸起。 倾斜凸起和后续步骤提供最大化的磁通量，以便在硬盘驱动器中的磁性介质（例如磁存储盘）上写入，同时避免饱和。 用于形成写入极的方法的一个实施例包括在写入极和后续步骤上沉积非磁隙材料。 使用离子束铣削工艺在非磁隙材料中形成锥形。 磁屏蔽然后沉积在锥形上，形成屏蔽的倾斜凸起。
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4.发明授权Method for manufacturing a perpendicular magnetic write head having a tapered write pole 有权一种具有锥形写入极的垂直磁性写入头的制造方法公开(公告)号：US08318031B2
公开(公告)日：2012-11-27
申请号：US12748182
申请日：2010-03-26
申请人： Aron Pentek , Thomas J. A. Roucoux , Yi Zheng
发明人： Aron Pentek , Thomas J. A. Roucoux , Yi Zheng
IPC分类号： B44C1/22
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315
摘要： A method for manufacturing a magnetic write head having a write pole with a tapered leading edge and a tapered trailing edge. The method includes forming a non-magnetic bump player over a surface, forming a mask over the non-magnetic bump layer and performing a first ion milling to form a tapered back edge on the non-magnetic bump layer. A magnetic write pole material is then deposited over the surface and over the non-magnetic bump layer. Then a non-magnetic step structure is formed over the magnetic write pole material and an ion milling is performed to form a taper on the upper surface of the write pole. The write pole lateral dimensions can then be defined, and a non-magnetic bump formed over the tapered portion of the upper surface of the write pole. Another ion milling can then be performed to extend the taper of the surface of the write pole.
摘要翻译： 一种用于制造具有带有锥形前缘和锥形后缘的写极的磁写头的方法。 所述方法包括在表面上形成非磁性碰撞播放器，在非磁性凸块层上形成掩模，并执行第一离子铣削以在非磁性凸块层上形成锥形后缘。 然后将磁性写入磁极材料沉积在表面上并在非磁性凸起层上方。 然后在磁性写入磁极材料上形成非磁性阶梯结构，并且执行离子铣削以在写入极的上表面上形成锥形。 然后可以限定写入极横向尺寸，并且在写入极的上表面的锥形部分上形成非磁性凸块。 然后可以执行另一种离子铣削来延伸写极的表面的锥度。
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5.发明授权公开(公告)号：US08498078B2
公开(公告)日：2013-07-30
申请号：US12634533
申请日：2009-12-09
申请人： Donald G. Allen , Liubo Hong , Aron Pentek , Thomas J. A. Roucoux , Sue S. Zhang , Yi Zheng
发明人： Donald G. Allen , Liubo Hong , Aron Pentek , Thomas J. A. Roucoux , Sue S. Zhang , Yi Zheng
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/31
摘要： Methods for fabrication of tapered magnetic poles with a non-magnetic front bump layer. A magnetic pole may have a plurality of tapered surfaces at or near an air bearing surface (ABS), wherein a thickness of the write pole increases in a direction away from the ABS. A non-magnetic front bump layer may be formed on one or more of the tapered surfaces of the magnetic pole at a distance from the ABS. The front bump layer may increase the separation distance between a shield layer and the magnetic pole near the tapered surface, thereby improving the performance of the write head.
摘要翻译： 用非磁性前凸块层制造锥形磁极的方法。 磁极可以在空气轴承表面（ABS）处或附近具有多个锥形表面，其中写入极的厚度在远离ABS的方向上增加。 可以在与ABS相距一定距离处的磁极的一个或多个锥形表面上形成非磁性前凸块层。 前凸块层可以增加在锥形表面附近的屏蔽层和磁极之间的间隔距离，从而提高写入头的性能。
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6.发明申请MAGNETIC WRITE HEAD HAVING AN ELECTROPLATED WRITE POLE WITH A LEADING EDGE TAPER 审中-公开具有导线边缘的电镀写入磁头的磁头公开(公告)号：US20130020204A1
公开(公告)日：2013-01-24
申请号：US13187381
申请日：2011-07-20
申请人： Donald G. Allen , Liubo Hong , Aron Pentek , Thomas J. A. Roucoux , Junsheng Yang , Yi Zheng , Qiping Zhong , Honglin Zhu
发明人： Donald G. Allen , Liubo Hong , Aron Pentek , Thomas J. A. Roucoux , Junsheng Yang , Yi Zheng , Qiping Zhong , Honglin Zhu
CPC分类号： C25D5/022 , C25D5/48 , G11B5/3116 , G11B5/3163
摘要： A method for manufacturing a magnetic write head having a tapered leading edge. The method includes depositing a sacrificial non-magnetic layer to a thickness that is at least as great as the thickness of the write pole to be formed. The sacrificial non-magnetic layer is then masked and ion milled so as to form a tapered edge on the sacrificial non-magnetic layer that extends through the thickness of the non-magnetic fill layer. A magnetic material is then deposited and planarized by chemical mechanical polishing. The remaining magnetic material forms the entirety of the magnetic write pole so that there is no need to deposit additional magnetic layers further construct the write pole.
摘要翻译： 一种用于制造具有锥形前缘的磁写头的方法。 该方法包括将牺牲非磁性层沉积至至少与待形成的写极的厚度一样大的厚度。 然后对牺牲非磁性层进行掩模和离子研磨，以在牺牲非磁性层上形成延伸穿过非磁性填充层的厚度的锥形边缘。 然后通过化学机械抛光沉积和平坦化磁性材料。 剩余的磁性材料形成整个磁性写入磁极，使得不需要沉积另外的磁性层进一步构造写入极。
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7.发明授权Systems having writer with deeper wrap around shield and methods for making the same 有权具有较深的环绕屏蔽的作者的系统和使其相同的方法公开(公告)号：US08634161B2
公开(公告)日：2014-01-21
申请号：US12975157
申请日：2010-12-21
IPC分类号： G11B5/23
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315 , G11B5/3163
摘要： A method according to one embodiment includes etching an underlayer positioned under a main pole for reducing a thickness thereof and creating an undercut under the main pole; adding a gap material along sides of the main pole and in the undercut; and forming a shield along at least a portion of the gap material. A magnetic head according to one embodiment includes a main pole; an underlayer positioned under the main pole and spaced therefrom, thereby defining an undercut therebetween; a first layer of gap material extending along sides of the main pole and in the undercut; a second layer of gap material extending continuously along the underlayer under the main pole; and a shield encircling the main pole, wherein the shield extends between the first and second layers of gap material in the undercut. Additional systems and methods are also presented.
摘要翻译： 根据一个实施例的方法包括蚀刻位于主极下方的底层以减小其厚度并在主极下方产生底切; 在主杆的侧面和底切处添加间隙材料; 以及沿所述间隙材料的至少一部分形成屏蔽。 根据一个实施例的磁头包括主极; 位于主极下方并与其间隔开的底层，从而在其间限定底切; 第一层间隙材料沿主极和底切部分的侧面延伸; 沿着主极下方的底层连续延伸的第二层间隙材料; 以及围绕所述主极的屏蔽件，其中所述屏蔽件在所述底切部中在所述第一和第二间隙材料层之间延伸。 还介绍了其他系统和方法。
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8.发明申请METHOD FOR MANUFACTURING A PERPENDICULAR MAGNETIC WRITE HEAD USING NOVEL REACTIVE ION ETCHING CHEMISTRY 审中-公开使用新型反应离子蚀刻化学品制造一个完整磁性写头的方法公开(公告)号：US20130082027A1
公开(公告)日：2013-04-04
申请号：US13251058
申请日：2011-09-30
申请人： Guomin Mao , Donald G. Allen , Aron Pentek , Thomas J. A. Roucoux , Yi Zheng
发明人： Guomin Mao , Donald G. Allen , Aron Pentek , Thomas J. A. Roucoux , Yi Zheng
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116
摘要： A method for manufacturing a magnetic write head for magnetic data recording. The method includes forming a depositing a magnetic write pole material and forming a mask structure over the write pole material that includes a polymer mask under-layer, a dielectric hard mask formed over the polymer mask under-layer and a photoresist mask formed over the dielectric hard mask. The image of the photoresist mask is transferred onto the underlying dielectric hard mask and then a reactive ion etching is performed to transfer the image of the dielectric hard mask onto the polymer mask under-layer. This reactive ion etching is performed in an atmosphere chemistry that includes both an oxygen containing gas and a nitrogen containing gas.
摘要翻译： 一种用于制造用于磁数据记录的磁写头的方法。 该方法包括形成磁性写入极材料的沉积，并在包括聚合物掩模底层的写入极材料上形成掩模结构，在聚合物掩模底层上形成的电介质硬掩模和形成在电介质上的光致抗蚀剂掩模 硬面膜 将光致抗蚀剂掩模的图像转印到下面的电介质硬掩模上，然后进行反应离子蚀刻，以将电介质硬掩模的图像转印到聚合物掩模底层上。 该反应离子蚀刻在包含含氧气体和含氮气体的气氛化学中进行。
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公开(公告)号：US20110134569A1
公开(公告)日：2011-06-09
申请号：US12634533
申请日：2009-12-09
申请人： Donald G. Allen , Liubo Hong , Aron Pentek , Thomas J. A. Roucoux , Sue S. Zhang , Yi Zheng
发明人： Donald G. Allen , Liubo Hong , Aron Pentek , Thomas J. A. Roucoux , Sue S. Zhang , Yi Zheng
IPC分类号： G11B5/10
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/31
摘要： Methods for fabrication of tapered magnetic poles with a non-magnetic front bump layer. A magnetic pole may have a plurality of tapered surfaces at or near and air bearing surface (ABS), wherein a thickness of the write pole increases in a direction away from the ABS. A non-magnetic front bump layer may be formed on one or more of the tapered surfaces of the magnetic pole at a distance from the ABS. The front bump layer may increase the separation distance between a shield layer and the magnetic pole near the tapered surface, thereby improving the performance of the write head.
摘要翻译： 用非磁性前凸块层制造锥形磁极的方法。 磁极可以在空气轴承表面（ABS）处或附近具有多个锥形表面，其中写入极的厚度在远离ABS的方向上增加。 可以在与ABS相距一定距离处的磁极的一个或多个锥形表面上形成非磁性前凸块层。 前凸块层可以增加在锥形表面附近的屏蔽层和磁极之间的间隔距离，从而提高写入头的性能。
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