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公开(公告)号：US20100117377A1
公开(公告)日：2010-05-13
申请号：US12615359
申请日：2009-11-10
CPC分类号： E05B17/0029 , E05C9/02 , Y10T292/0808 , Y10T292/0824 , Y10T292/0845 , Y10T292/0964 , Y10T292/1021 , Y10T292/1038
摘要： In a pod used in an FIMS system, an engaged portion is provided on the outer surface of the lid of a pod. A through hole is provided in a flange portion that is provided around the pod opening and in which the lid is to be received. The through-hole allows access to the engaged portion from the external space. A latch mechanism is supported on the pod body side surface of the flange portion in such a way that it can slide in a direction parallel to the side wall of the flange. The engagement portion of the latch mechanism reaches the engaged portion through the aforementioned through-hole. Movement of the latch mechanism brings the engagement portion into an engaging state and a disengaged state.
摘要翻译： 在用于FIMS系统的荚中，在荚的盖的外表面上设置一个啮合部分。 在设置在容器开口周围的凸缘部分设有通孔，盖子将被容纳在该通孔中。 通孔允许从外部空间接合被接合部分。 闩锁机构以能够沿与凸缘的侧壁平行的方向滑动的方式支撑在凸缘部的荚体主体侧表面上。 闩锁机构的接合部分通过上述通孔到达接合部分。 闩锁机构的移动使接合部分进入接合状态和脱离状态。
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公开(公告)号：US06984839B2
公开(公告)日：2006-01-10
申请号：US10301841
申请日：2002-11-22
CPC分类号： H01L21/67265 , G01V8/12 , H01L21/67772 , Y10S414/137
摘要： A wafer processing apparatus on which a pod having an opening is detachably mounted is provided with a door unit and a mapping unit provided with a transmitting type sensor having an emitter and a detector forming a slot therebetween. The emitter and the detector are moved toward the opening in the pod and are plunged into the interior of the pod after a door is opened by the door unit, and the slot between the emitter and the detector crosses an end portion of a wafer to thereby detect the presence or absence of the wafer. Thereby, a mechanism portion liable to produce dust which may adhere to the wafer and cause the contamination thereof can be disposed separately from the pod.
摘要翻译： 具有可拆卸地安装有开口的容器的晶片处理装置设置有门单元和映射单元，该单元设置有具有发射器的传输型传感器和在其间形成狭槽的检测器。 发射器和检测器朝向容器中的开口移动，并且在门被门单元打开之后被插入到容器的内部，并且发射器和检测器之间的槽与晶片的端部相交，由此 检测晶片的存在或不存在。 因此，可以与容器分开设置容易产生可能附着在晶片上并导致其污染的灰尘的机构部分。
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公开(公告)号：US08322759B2
公开(公告)日：2012-12-04
申请号：US12615359
申请日：2009-11-10
CPC分类号： E05B17/0029 , E05C9/02 , Y10T292/0808 , Y10T292/0824 , Y10T292/0845 , Y10T292/0964 , Y10T292/1021 , Y10T292/1038
摘要： In a pod used in an FIMS system, an engaged portion is provided on the outer surface of the lid of a pod. A through hole is provided in a flange portion that is provided around the pod opening and in which the lid is to be received. The through-hole allows access to the engaged portion from the external space. A latch mechanism is supported on the pod body side surface of the flange portion in such a way that it can slide in a direction parallel to the side wall of the flange. The engagement portion of the latch mechanism reaches the engaged portion through the aforementioned through-hole. Movement of the latch mechanism brings the engagement portion into an engaging state and a disengaged state.
摘要翻译： 在用于FIMS系统的荚中，在荚的盖的外表面上设置一个啮合部分。 在设置在容器开口周围的凸缘部分设有通孔，盖子将被容纳在该通孔中。 通孔允许从外部空间接合被接合部分。 闩锁机构以能够沿与凸缘的侧壁平行的方向滑动的方式支撑在凸缘部的荚体主体侧表面上。 闩锁机构的接合部分通过上述通孔到达接合部分。 闩锁机构的移动使接合部分进入接合状态和脱离状态。
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公开(公告)号：US08186927B2
公开(公告)日：2012-05-29
申请号：US12471987
申请日：2009-05-26
IPC分类号： B65G49/07
CPC分类号： H01L21/67772 , H01L21/67276
摘要： A transfer chamber is partitioned into a second chamber in which a transfer robot moving through an opening portion which can be opened/closed by a door is arranged, and a minute first chamber which serves as a FIMS system and includes a door capable of retaining a lid of a pod. The second chamber maintains a state in which an inert gas constantly circulates owing to minute nitrogen while having a pressure higher than that inside the first chamber. The first chamber is normally sealed while an oxide gas is suppressed in advance. In addition, at a time of transferring wafers, a partial pressure of the oxide gas is lowered with use of a downflow which is caused by the inert gas. Further, the first chamber and the second chamber are communicated with each other after a level of the partial pressure is confirmed with use of an oxygen level meter. As described above, an existing amount of the oxide gas is reduced in the so-called transfer chamber in semiconductor processing equipment in which the FIMS system is secured.
摘要翻译： 传送室被分隔成第二室，其中布置有移动通过可由门打开/关闭的开口部分的传送机器人，以及用作FIMS系统的微小的第一室，并且包括能够保持 荚的盖子 第二室保持这样的状态，其中惰性气体由于微小的氮气而不断地循环，同时压力高于第一室内的压力。 通常密封第一室，同时预先抑制氧化物气体。 此外，在转移晶片时，使用由惰性气体引起的向下流动，氧化物气体的分压降低。 此外，在使用氧水位计确认分压水平之后，第一室和第二室彼此连通。 如上所述，在确保FIMS系统的半导体加工设备中，在所谓的转移室中，氧化物气体的存在量减少。
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公开(公告)号：US20100133270A1
公开(公告)日：2010-06-03
申请号：US12624579
申请日：2009-11-24
IPC分类号： B65D51/00
CPC分类号： H01L21/67772 , Y10T292/0808 , Y10T292/0824 , Y10T292/0845 , Y10T292/1021 , Y10T292/1038
摘要： The FIMS system is for use with a pod composed of a lid having an engaged portion provided on the outer surface thereof and a pod body having a latch mechanism including an engagement portion that engages the engaged portion as it moves along a predetermined axis to fix the lid to the pod. The FIMS system has a latch mechanism drive means for driving the latch mechanism along a certain axis and an engagement portion position sensor that can generate a signal indicating whether the engagement portion is at an engagement position or non-engagement position when the latch mechanism drive means drives the latch mechanism. The latch mechanism drive means and the engagement portion position sensor are provided in the vicinity of a first opening portion of the FIMS system.
摘要翻译： FIMS系统用于由盖子组成的盒盖，盖子具有设置在其外表面上的接合部分，以及盒体，其具有闩锁机构，该闩锁机构包括接合部分，该接合部分沿着预定轴线移动时与接合部分接合， 盖到荚。 FIMS系统具有用于沿着某个轴线驱动闩锁机构的闩锁机构驱动装置和接合部位置传感器，当闩锁机构驱动装置可以产生指示接合部分是否处于接合位置或非接合位置的信号 驱动闩锁机构。 闩锁机构驱动装置和接合部位置传感器设置在FIMS系统的第一开口部分附近。
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公开(公告)号：US20090297298A1
公开(公告)日：2009-12-03
申请号：US12471987
申请日：2009-05-26
IPC分类号： B65G49/07
CPC分类号： H01L21/67772 , H01L21/67276
摘要： A transfer chamber is partitioned into a second chamber in which a transfer robot moving through an opening portion which can be opened/closed by a door is arranged, and a minute first chamber which serves as a FIMS system and includes a door capable of retaining a lid of a pod. The second chamber maintains a state in which an inert gas constantly circulates owing to minute nitrogen while having a pressure higher than that inside the first chamber. The first chamber is normally sealed while an oxide gas is suppressed in advance. In addition, at a time of transferring wafers, a partial pressure of the oxide gas is lowered with use of a downflow which is caused by the inert gas. Further, the first chamber and the second chamber are communicated with each other after a level of the partial pressure is confirmed with use of an oxygen level meter. As described above, an existing amount of the oxide gas is reduced in the so-called transfer chamber in semiconductor processing equipment in which the FIMS system is secured.
摘要翻译： 传送室被分隔成第二室，其中布置有移动通过可由门打开/关闭的开口部分的传送机器人，以及用作FIMS系统的微小的第一室，并且包括能够保持 荚的盖子 第二室保持这样的状态，其中惰性气体由于微小的氮气而不断地循环，同时压力高于第一室内的压力。 通常密封第一室，同时预先抑制氧化物气体。 此外，在转移晶片时，使用由惰性气体引起的向下流动，氧化物气体的分压降低。 此外，在使用氧水位计确认分压水平之后，第一室和第二室彼此连通。 如上所述，在确保FIMS系统的半导体加工设备中，在所谓的转移室中，氧化物气体的存在量减少。
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公开(公告)号：US06883770B1
公开(公告)日：2005-04-26
申请号：US09572458
申请日：2000-05-17
IPC分类号： H01L21/00 , H01L21/677 , F16M13/00
CPC分类号： H01L21/67775 , H01L21/67772
摘要： A positioning member and a movable member that is to be brought into contact with the positioning member are arranged in one and the other of the load port and the semiconductor manufacture apparatus, respectively. Two pairs of such positioning members and movable members are provided. A groove (preferably V-shaped) into which the movable member is to be fitted is provided in a surface of one of the positioning member that contacts with the movable member. Furthermore, a mechanism for making it possible to adjust the position by moving the movable member in an up-and-down direction is provided to adjust the position of the movable member to thereby make it possible to perform the positional adjustment between the semiconductor manufacture apparatus and the load port. In a preferred embodiment, the positioning member is a roller which may rotate about its own shaft.
摘要翻译： 与定位构件接触的定位构件和可动构件分别设置在负载端口和半导体制造装置中的另一个中。 提供两对这样的定位构件和可动构件。 在与可动构件接触的定位构件中的一个的表面设置有可移动构件将要装配的凹槽（优选V形）。 此外，提供了一种用于通过沿上下方向移动可动件来调节位置的机构，以调整可移动部件的位置，从而可以在半导体制造装置 和负载端口。 在优选实施例中，定位构件是可围绕其自身轴旋转的辊。
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公开(公告)号：US06390145B1
公开(公告)日：2002-05-21
申请号：US09494405
申请日：2000-01-31
IPC分类号： B65D8530
CPC分类号： H01L21/67376 , B65D81/2015 , H01L21/67373 , H01L21/67772 , Y10S414/139
摘要： A clean box has a container including a container body opened at one surface and a lid for closing the opening of the container body. An annular groove is formed in at least one of the container body and the lid so as to surround the opening. An elastic seal member is disposed within the annular groove along its whole length. A cross-section in a width direction of the elastic seal member has relatively thick end portions and a relatively thin intermediate portion in its dimension in a depth direction of the annular groove. Thus, when the lid closes the opening of the container body, an annular suction space is defined along the intermediate portion of the seal member. Also, the suction space is sealed by elastic deformation of the both end portions of the seal member between the container body and the lid. Further, the clean box has an intake/exhaust port mechanism for evacuation/release of the suction space from the outside.
摘要翻译： 清洁箱具有容器，该容器包括在一个表面上开口的容器主体和用于封闭容器主体的开口的盖。 在容器主体和盖中的至少一个中形成环形槽，以围绕开口。 弹性密封件沿其整个长度设置在环形槽内。 弹性密封件的宽度方向上的横截面在环形槽的深度方向上具有相对较厚的端部和相对较薄的中间部分。 因此，当盖关闭容器主体的开口时，沿着密封构件的中间部分限定环形抽吸空间。 此外，通过密封构件的两个端部在容器主体和盖之间的弹性变形，吸引空间被密封。 此外，清洁箱具有用于从外部排出/释放吸入空间的进气/排气口机构。
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公开(公告)号：US08528947B2
公开(公告)日：2013-09-10
申请号：US12491574
申请日：2009-06-25
CPC分类号： H01L21/67772 , Y10T292/0808 , Y10T292/0824 , Y10T292/0845 , Y10T292/1021 , Y10T292/1038
摘要： In a pod used in an FIMS system, diffusion of dust particles or the like adhering on the lid of the pod to the interior of the system is reduced. An engaged portion is provided inside the outer surface of the lid of the pod, and a flange portion provided around a pod opening to which the lid can be fitted is provided with an insertion hole that allows access to the engaged portion from the exterior space. A latch mechanism is supported on the pod body side surface of the flange portion in such a way that the latch mechanism can slide along a direction parallel to the side wall of the flange. An engagement portion of the latch mechanism reaches the engaged portion through the insertion hole, and the state of the latch mechanism changes between an engaged state and a disengaged state with movement of the latch mechanism.
摘要翻译： 在用于FIMS系统的荚中，减少了附着在荚的盖上的灰尘颗粒等的扩散到系统的内部。 一个啮合部分设置在荚的盖子的外表面内部，并且设置在可以装配盖子的荚壳开口周围的凸缘部分设置有允许从外部空间进入被接合部分的插入孔。 闩锁机构被支撑在凸缘部分的荚体主体侧表面上，使得闩锁机构可以沿着平行于凸缘的侧壁的方向滑动。 闩锁机构的接合部分通过插入孔到达接合部分，并且闩锁机构的状态随着闩锁机构的移动而在接合状态和脱离状态之间变化。
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公开(公告)号：US08876173B2
公开(公告)日：2014-11-04
申请号：US13041786
申请日：2011-03-07
CPC分类号： E05F11/02 , Y10S292/11 , Y10S292/25 , Y10T292/0803 , Y10T292/0805 , Y10T292/0808 , Y10T292/0811 , Y10T292/0824 , Y10T292/0845 , Y10T292/0859 , Y10T292/0886 , Y10T292/1021 , Y10T292/1038
摘要： The substrate storage pod includes an engagement portion in an outer side surface of a lid of the pod, and an insertion slot through which the engagement portion can be accessed from an external space; the insertion slot is formed in a flange portion arranged around the periphery of an opening in the pod and into which the lid can be fitted, and a latch mechanism supported so as to be slidable in a direction parallel to a flange side wall in a pod main body-surface of the flange portion. An engaging portion of the latch mechanism reaches the engagement portion via the insertion slot. The engagement portion is switched between an engaged state and a non-engaged state in response to movement of the latch mechanism.
摘要翻译： 所述基板收容容器在所述容器的盖的外侧面上具有接合部，所述插入槽能够从外部空间接合所述卡合部; 插入槽形成在布置在容器中的开口的周边周围的凸缘部分中，并且盖可以被装配到该凸缘部分中;以及闩锁机构，该闩锁机构被支撑以能够在平行于壳体中的凸缘侧壁的方向上滑动 凸缘部分的主体表面。 闩锁机构的接合部分经由插入槽到达接合部分。 响应于闩锁机构的移动，接合部分在接合状态和非接合状态之间切换。
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