公开(公告)号：US20110222137A1

公开(公告)日：2011-09-15

申请号：US12999854

申请日：2010-12-17

申请人： Tsuyoshi Matsumoto ,  Norinao Kouma ,  Osamu Tsuboi ,  Hiroshi Miyata

发明人： Tsuyoshi Matsumoto ,  Norinao Kouma ,  Osamu Tsuboi ,  Hiroshi Miyata

IPC分类号： G02B26/08

CPC分类号： G02B26/0841

摘要： A micro-mirror array including a plurality of micro-mirror elements and each of the micro-mirror elements includes a mirror rotating around two axes and a support unit connected to an outer frame and supporting the mirror. The support unit extends between the mirror of the micro-mirror elements including the support unit and one of two mirrors adjacent to the mirror, and both ends of the support unit are connected to the outer frame.

摘要翻译： 包括多个微镜元件和每个微镜元件的微镜阵列包括围绕两个轴线旋转的镜子和连接到外框架并支撑镜子的支撑单元。 支撑单元在包括支撑单元的微反射镜元件的反射镜和与反射镜相邻的两个反射镜中的一个之间延伸，并且支撑单元的两端连接到外框架。

公开(公告)号：US08218219B2

公开(公告)日：2012-07-10

申请号：US12999854

申请日：2010-12-17

申请人： Tsuyoshi Matsumoto ,  Norinao Kouma ,  Osamu Tsuboi ,  Hiroshi Miyata

发明人： Tsuyoshi Matsumoto ,  Norinao Kouma ,  Osamu Tsuboi ,  Hiroshi Miyata

IPC分类号： G02B26/08

CPC分类号： G02B26/0841

摘要： A micro-mirror array including a plurality of micro-mirror elements and each of the micro-mirror elements includes a mirror rotating around two axes and a support unit connected to an outer frame and supporting the mirror. The support unit extends between the mirror of the micro-mirror elements including the support unit and one of two mirrors adjacent to the mirror, and both ends of the support unit are connected to the outer frame.

摘要翻译： 包括多个微镜元件和每个微镜元件的微镜阵列包括围绕两个轴线旋转的镜子和连接到外框架并支撑镜子的支撑单元。 支撑单元在包括支撑单元的微反射镜元件的反射镜和与反射镜相邻的两个反射镜中的一个之间延伸，并且支撑单元的两端连接到外框架。

公开(公告)号：US09348135B2

公开(公告)日：2016-05-24

申请号：US12555246

申请日：2009-09-08

申请人： Tsuyoshi Matsumoto ,  Norinao Kouma ,  Osamu Tsuboi

发明人： Tsuyoshi Matsumoto ,  Norinao Kouma ,  Osamu Tsuboi

IPC分类号： G02B26/08

CPC分类号： G02B26/0841 ,  B81B2201/042

摘要： A micro movable device includes: a micro movable substrate including a micro movable unit, the micro movable unit including a frame section, a movable section, and a coupling section which couples the frame section and the movable section to each other; a support base; a first spacer and a second spacer which are provided between the frame section of the micro movable substrate and the base, the first and second spacers joining the frame section and the base to each other; and a fixation member provided between the frame section of the micro movable substrate and the base, the fixation member including a spacer portion which joins the frame section and the base to each other and an adhesive portion which covers the spacer portion and joins the frame section and the base to each other, the fixation member being provided between the first and second spacers.

摘要翻译： 微型可移动装置包括：微型可移动基板，包括微型可移动单元，微型可移动单元包括框架部分，可移动部分和将框架部分和可移动部分彼此连接的联接部分; 支持基地 第一间隔件和第二间隔件，设置在微移动基板的框架部分和基座之间，第一和第二间隔件将框架部分和基座彼此接合; 以及固定构件，其设置在所述微动移动基板的框架部与所述基座之间，所述固定构件包括将所述框架部与所述基部连结的间隔部，以及覆盖所述间隔部的粘合部， 并且所述基座彼此相对，所述固定构件设置在所述第一和第二间隔件之间。

公开(公告)号：US07952033B2

公开(公告)日：2011-05-31

申请号：US12039186

申请日：2008-02-28

申请人： Yoshihiro Mizuno ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi

发明人： Yoshihiro Mizuno ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi

IPC分类号： H05K1/03

CPC分类号： B81C1/00698 ,  Y10T29/49117

摘要： A microstructure comprises a laminate structure having a first conductor, a second conductor, and an intervening insulator located between the first and the second conductors. The first conductor includes opposite faces in relation to the second conductor, side faces, and edge parts which form the boundaries of the aforementioned opposite faces and side faces. The second conductor includes an extended face extending beyond the edge parts exceeding the first conductor. The insulation film includes an area covering at least part of an edge part and/or at least part of a side face.

摘要翻译： 微结构包括具有第一导体，第二导​​体和位于第一和第二导体之间的中间绝缘体的层压结构。 第一导体包括相对于第二导体的相对面，侧面和形成上述相对面和侧面的边界的边缘部分。 第二导体包括延伸超过超过第一导体的边缘部分的延伸面。 绝缘膜包括覆盖边缘部分的至少一部分和/或侧面的至少一部分的区域。

公开(公告)号：US07871687B2

公开(公告)日：2011-01-18

申请号：US11902011

申请日：2007-09-18

申请人： Norinao Kouma ,  Yoshihiro Mizuno ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi ,  Ippei Sawaki

发明人： Norinao Kouma ,  Yoshihiro Mizuno ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi ,  Ippei Sawaki

IPC分类号： B32B3/06 ,  G02B7/182 ,  H01L23/58 ,  G01P3/44 ,  G01P15/097

CPC分类号： B81C1/00682 ,  B81B2203/0136 ,  Y10T428/24025 ,  Y10T428/2457 ,  Y10T428/24612

摘要： A microstructure device is made by processing a material substrate consisting of e.g. a first process layer, a second process layer and a middle layer arranged between the first and the second process layers. The microstructure device includes a first structural part and a second structural part that has a portion facing the first structural part via a gap. The first and the second structural parts are connected to each other by a connecting part extending across the gap. This connecting part is formed in the first process layer to be in contact with the middle layer. The microstructure device also includes a protective part extending from the first structural part toward the second structural part or vice versa. The protective part is formed in the first or second process layer to be in contact with the middle layer.

摘要翻译： 微结构装置是通过加工由例如玻璃， 布置在第一和第二处理层之间的第一处理层，第二处理层和中间层。 微结构装置包括第一结构部分和第二结构部分，其具有经由间隙面对第一结构部分的部分。 第一和第二结构部件通过跨越间隙延伸的连接部分相互连接。 该连接部形成在第一处理层中以与中间层接触。 微结构装置还包括从第一结构部件朝向第二结构部件延伸的保护部件，反之亦然。 保护部分形成在第一或第二处理层中以与中间层接触。

公开(公告)号：US20100208347A1

公开(公告)日：2010-08-19

申请号：US12614903

申请日：2009-11-09

申请人： Norinao Kouma ,  Osamu Tsuboi ,  Tsuyoshi Matsumoto

发明人： Norinao Kouma ,  Osamu Tsuboi ,  Tsuyoshi Matsumoto

IPC分类号： G02B27/00 ,  H02N1/00

CPC分类号： G02B26/0841 ,  G01J3/4535 ,  H02N1/006

摘要： A micro movable device includes a movable member, a stationary portion, and connecting portions each connected to the movable member and the stationary portion. The movable member includes a pair of electrodes. The stationary portion includes a pair of electrodes cooperating with the electrodes of the movable member to generate a driving force for translating the movable member in its thickness direction. The connection points at which the respective connecting portions are connected to the movable member are spaced from each other. The electrodes of the movable member are positioned between two mutually spaced connection points, as viewed along the spacing direction of the two connection points.

摘要翻译： 微型可移动装置包括可移动部件，固定部分和连接到可移动部件和固定部分的连接部分。 可动构件包括一对电极。 固定部分包括与可动构件的电极配合的一对电极，以产生用于在可移动构件的厚度方向上平移的驱动力。 各连接部分连接到可移动部件的连接点彼此间隔开。 当沿着两个连接点的间隔方向观察时，可动构件的电极位于两个相互间隔的连接点之间。

公开(公告)号：US20100007940A1

公开(公告)日：2010-01-14

申请号：US12484456

申请日：2009-06-15

申请人： Osamu Tsuboi ,  Norinao Kouma ,  Yoshihiro Mizuno ,  Hiromitsu Soneda ,  Hisao Okuda ,  Tsuyoshi Matsumoto

发明人： Osamu Tsuboi ,  Norinao Kouma ,  Yoshihiro Mizuno ,  Hiromitsu Soneda ,  Hisao Okuda ,  Tsuyoshi Matsumoto

IPC分类号： G02B26/08

CPC分类号： G02B26/0841

摘要： A micro oscillating device includes a first frame; an oscillating portion; a first twist coupling portion and a second twist coupling portion coupling the first frame and the oscillating portion to define a first shaft center of an oscillating operation of the oscillating portion; a second frame including a support base and an arm portion extended from the support base toward the oscillating portion; and a third twist coupling portion and a fourth twist coupling portion coupling the second frame and the first frame to define a second shaft center of an oscillating operation of the first frame, wherein the third twist coupling portion is coupled to the first frame and the arm portion between the oscillating portion and the support base, and the fourth twist coupling portion is coupled to the first frame and the support base or the arm portion between the oscillating portion and the support base.

摘要翻译： 微振荡装置包括：第一框架; 振荡部分; 第一扭转联接部分和第二扭转联接部分，其联接所述第一框架和所述振荡部分，以限定所述振荡部分的振荡操作的第一轴心; 第二框架，包括支撑基座和从支撑基部向振荡部分延伸的臂部分; 以及第三扭转联接部分和第四扭转联接部分，其联接所述第二框架和所述第一框架以限定所述第一框架的振荡操作的第二轴心，其中所述第三扭转联接部分联接到所述第一框架和所述臂 所述摆动部分与所述支撑基座之间的部分，所述第四扭转联接部分在所述振荡部分和所述支撑基座之间联接到所述第一框架和所述支撑基座或所述臂部分。

公开(公告)号：US20090267445A1

公开(公告)日：2009-10-29

申请号：US12249677

申请日：2008-10-10

申请人： Yoshihiro MIZUNO ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi ,  Ippei Sawaki

发明人： Yoshihiro MIZUNO ,  Norinao Kouma ,  Hisao Okuda ,  Hiromitsu Soneda ,  Tsuyoshi Matsumoto ,  Osamu Tsuboi ,  Ippei Sawaki

IPC分类号： H02N11/00 ,  B44C1/22

CPC分类号： G02B26/0841 ,  B81B3/0005 ,  B81C1/0096 ,  H02N1/008

摘要： A micro rocking device includes a frame, a rocking portion, a torsion connecting portion, and a second comb-like electrode, the rocking portion including a first comb-like electrode. The torsion connecting portion connects the frame and the rocking portion. The torsion connecting portion defines the axis of rotational displacement of the rocking portion. The second comb-like electrode attracts the first comb-like electrode and rotationally displaces the rocking portion. The first comb-like electrode has a plurality of first parallel electrode teeth which extend in the direction of the axis and which are spaced from each other in a direction crossing the extension direction. The second comb-like electrode has a plurality of second parallel electrode teeth which extend in the direction of the axis and which are spaced from each other in a direction crossing the extension direction.

摘要翻译： 微型摆动装置包括框架，摇摆部分，扭转连接部分和第二梳状电极，摇摆部分包括第一梳状电极。 扭转连接部分连接框架和摆动部分。 扭转连接部分限定摆动部分的旋转位移的轴线。 第二梳状电极吸引第一梳状电极并使摆动部分旋转移位。 第一梳状电极具有多个第一平行电极齿，该第一平行电极齿在轴线方向上延伸并且在与延伸方向交叉的方向上彼此间隔开。 第二梳状电极具有多个第二平行电极齿，该第二平行电极齿在轴线方向上延伸并且在与延伸方向交叉的方向上彼此间隔开。

公开(公告)号：US08390911B2

公开(公告)日：2013-03-05

申请号：US13225097

申请日：2011-09-02

申请人： Osamu Tsuboi ,  Norinao Kouma ,  Tsuyoshi Matsumoto

发明人： Osamu Tsuboi ,  Norinao Kouma ,  Tsuyoshi Matsumoto

IPC分类号： G02B26/08 ,  G02B26/10 ,  G02B26/12

CPC分类号： G02B26/0841

摘要： A micro movable element array includes a first frame; a second frame; a first movable part row including plural first movable parts and a second movable part row including plural second movable parts. The first movable parts include first movable main parts. The second movable parts include second movable main parts. The first and second frames are stacked such that the first and second movable part rows are opposed to each other. In the first movable part row, the first movable parts are located such that the first movable main parts are arranged in a first direction and the first movable main parts and gaps are disposed alternately. In the second movable part row, the second movable parts are located such that the second movable main parts are arranged in the first direction and the second movable main parts are opposed to the corresponding gaps.

摘要翻译： 微型可移动元件阵列包括第一框架; 第二帧; 包括多个第一可移动部分的第一可移动部分行和包括多个第二可移动部分的第二可移动部分行。 第一可移动部件包括第一可移动主要部件。 第二可移动部件包括第二可移动主体部件。 第一和第二框架被堆叠成使得第一和第二可移动部件行彼此相对。 在第一可动部分行中，第一可移动部分被定位成使得第一可移动主体部分沿第一方向布置，并且第一可移动主体部分和间隙交替设置。 在第二可移动部分行中，第二可移动部分被定位成使得第二可移动主体部分沿第一方向布置，并且第二可移动主体部分与相应的间隙相对。

公开(公告)号：US08320035B2

公开(公告)日：2012-11-27

申请号：US12458601

申请日：2009-07-16

申请人： Osamu Tsuboi ,  Norinao Kouma ,  Tsuyoshi Matsumoto

发明人： Osamu Tsuboi ,  Norinao Kouma ,  Tsuyoshi Matsumoto

IPC分类号： G02B26/08

CPC分类号： G02B26/0841 ,  G01C19/5719 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0831 ,  G02B6/3518

摘要： A micro-movable device includes a frame, a movable section including a body section, and a torsion coupling section for coupling the frame with the movable section to define an axis of oscillation of the movable section, wherein the frame includes a first extending portion and a second extending portion that are spaced apart from each other in a direction parallel to the axis and extend along the body section, and oppose the body section via a gap.

摘要翻译： 微型可移动装置包括框架，包括主体部分的可移动部分和用于将框架与可动部分联接以限定可动部分的振动轴线的扭转联接部分，其中框架包括第一延伸部分和 第二延伸部分，其在平行于轴线的方向上彼此间隔开并且沿着主体部分延伸，并且经由间隙与身体部分相对。