摘要:
A process control system includes a plurality of machine controllers for individually controlling a plurality of process chambers and a main controller for controlling the machine controllers. Each of the machine controllers has a function of transferring process data detected by its corresponding process chamber to the main controller. The main controller has a storage device for accumulating process data transferred from the machine controllers and a function of transferring the accumulated process data to a host computer when the main controller is in a predetermined control load state.
摘要:
A control apparatus includes a version information collection section for collecting version information based on a user's specification from a plurality of programs including a program for controlling substrate processing equipment for processing a substrate, a version information file for storing the version information collected by the version information collection section, and a display for displaying the version information.
摘要:
On a rear part side of a revolving frame (5) constituting an upper revolving structure (3), a counterweight (7) holding weight balance with a working mechanism (4) is provided, and on the front side of the counterweight (7), an engine (9) and an exhaust gas post-treatment device (21) for applying purification treatment to an exhaust gas of the engine (9) are provided. The exhaust gas post-treatment device (21) is configured by connecting a PM trapping filter device (22) and an NOx purifying device (23), and the PM trapping filter device (22) is mounted on the engine (9), while the NOx purifying device (23) is mounted on the counterweight (7). When the counterweight (7) is to be removed from the revolving frame (5), the NOx purifying device (23) is supported by a treatment device support bracket (26) mounted on the engine (9). As a result, the counterweight (7) can be removed while the PM trapping filter device (22) and the NOx purifying device (23) are connected.
摘要:
The operability when performing a combined arm-crowd and bucket operation can be improved. A hydraulic drive device for a hydraulic excavator includes: a bucket directional control valve and a second arm directional control valve, which are connected in parallel tandem with a first hydraulic pump; a first arm directional control valve that is connected to a second hydraulic pump; and a flow rate restriction device that restricts the flow rate of pressure oil supplied to the second arm directional control valve, during crowd operation of a bucket. This flow rate restriction device includes a variable throttle whose opening is controlled so as to become smaller as a bucket operating device is operated to the crowd side, the variable throttle being provided in a bypass path connecting to the supply port of the second arm directional control valve.
摘要:
Each spindle system turbine blade has front and rear surfaces relative to the rotational direction. The rear surface is a recessed columnar surface with a radius of curvature R1, while the front surface is a smooth continuous surface having a projecting columnar surface with a radius of curvature R2 larger than R1 and a flat surface between which a projecting columnar surface with a radius of curvature R3 larger than R1 is arranged. Among the three surfaces, the projecting columnar surface is at an inlet side of a channel straddling the projecting columnar surface, while the flat surface is at the outlet side. A space sandwiched between a facing front surface and rear surface of adjoining turbine blades forms a gas channel. Gas ejected from a nozzle flows in from an inlet in a direction along the arc-shaped curve of the recessed columnar surface and out an outlet.
摘要:
On the right front side of a revolving frame (5) constituting an upper revolving structure (3), an operating oil tank (11) and a fuel tank (12) are arranged. On the front side of this operating oil tank (11) and the fuel tank (12), an equipment accommodating case (13) forming an accommodating space (13A) inside is provided. In the accommodating space (13A) in the equipment accommodating case (13), a control valve unit (20) for controlling supply/discharge of the operating oil and a urea water tank (24) storing urea water for removing nitrogen oxides contained in an exhaust gas of the engine (8) are arranged together.
摘要:
On a rear part side of a revolving frame (5) constituting an upper revolving structure (3), a counterweight (7) holding weight balance with a working mechanism (4) is provided, and on the front side of the counterweight (7), an engine (9) and an exhaust gas post-treatment device (21) for applying purification treatment to an exhaust gas of the engine (9) are provided. The exhaust gas post-treatment device (21) is configured by connecting a PM trapping filter device (22) and an NOx purifying device (23), and the PM trapping filter device (22) is mounted on the engine (9), while the NOx purifying device (23) is mounted on the counterweight (7). When the counterweight (7) is to be removed from the revolving frame (5), the NOx purifying device (23) is supported by a treatment device support bracket (26) mounted on the engine (9). As a result, the counterweight (7) can be removed while the PM trapping filter device (22) and the NOx purifying device (23) are connected.
摘要:
A travel control device for a work vehicle includes: a hydraulic pump; a plurality of hydraulic motors connected to the hydraulic pump in parallel through a closed-circuit connection, that drive different wheels with pressure oil delivered from the hydraulic pump; a slip detection device that detects a slip occurring at each of the wheels; and a flow control device that reduces, upon detection of a slip occurring at any of the wheels by the slip detection device, a quantity of pressure oil supplied to a hydraulic motor for driving the wheel at which the slip has been detected, among the plurality of hydraulic motors.
摘要:
An aqueous urea tank structure is provided for a construction machine, in which a temperature rise of the aqueous urea within the tank can be suppressed and the load applied to the tank due to vibration of a vehicle body can be reduced. The aqueous urea tank structure including an aqueous urea tank which is disposed within a revolving upperstructure of a hydraulic excavator to store aqueous urea that purifies the exhaust gas discharged from an engine, wherein the aqueous urea tank structure further includes a securing member which encloses the periphery of the aqueous urea tank to secure the aqueous urea tank within the revolving upperstructure, and heat insulating materials which are interposed between the securing member and the aqueous urea tank to hold the aqueous urea tank. The securing member contains a box.
摘要:
A method of forming a resist pattern, including: step (1) in which a resist composition including a base component, a photobase generator component and an acid supply component is applied to a substrate to form a resist film; step (2) in which the resist film is subjected to exposure without being subjected to prebaking; step (3) in which baking is conducted after step (2), such that, at an exposed portion of the resist film, the base generated from the photobase generator component upon the exposure and an acid derived from the acid supply component are neutralized, and at an unexposed portion of the resist film, the solubility of the base component in an alkali developing solution is increased by the action of the acid derived from the acid supply component; and step (4) in which the resist film is subjected to an alkali development, thereby forming a negative-tone resist pattern.