公开(公告)号：US06465159B1

公开(公告)日：2002-10-15

申请号：US09340743

申请日：1999-06-28

申请人： Tuqiang Ni ,  Nancy Tran

发明人： Tuqiang Ni ,  Nancy Tran

IPC分类号： G03F736

CPC分类号： H01L21/31138 ,  H01L21/76802 ,  H01L21/76831

摘要： A robust method for etching an organic low-k insulating layer on a semiconductor device, as disclosed herein, includes introducing into a processing chamber a substrate with an organic insulating layer and an overlying mask layer having an aperture. A plasma is then developed within the chamber from an oxidizing gas and a passivation gas. The passivation gas is preferably either a silicon containing gas or a boron containing gas, or both. The ratio of the oxidizing gas to the passivation gas is preferably at least 10:1. In addition, an inert carrier gas may be provided. The plasma is then used to etch the organic insulating layer through the mask layer, thereby forming a via having essentially vertical sidewalls in the organic low-k insulating layer.

摘要翻译： 如本文所公开的，用于蚀刻半导体器件上的有机低k绝缘层的可靠方法包括将具有有机绝缘层的衬底和具有孔径的覆盖掩模层引入到处理室中。 然后在室内从氧化气体和钝化气体中形成等离子体。 钝化气体优选为含硅气体或含硼气体，或二者均为。 氧化气体与钝化气体的比率优选为10:1以上。 此外，可以提供惰性载气。 然后使用等离子体通过掩模层蚀刻有机绝缘层，从而在有机低k绝缘层中形成具有基本上垂直的侧壁的通孔。

公开(公告)号：US20060206643A1

公开(公告)日：2006-09-14

申请号：US11356810

申请日：2006-02-17

申请人： Richard Tran ,  Nancy Tran

发明人： Richard Tran ,  Nancy Tran

IPC分类号： G06F13/00

CPC分类号： G06F1/189 ,  G06F1/16 ,  G06F1/183 ,  G06F13/00 ,  G06F21/74 ,  G06F21/80 ,  G06F21/85 ,  G06F2003/0692

摘要： A computer system is provided including a variety of switch components for controlling the selective activation and deactivation of the computer systems' memory storage devices, network system and interface peripheral devices. The switching components may include a switch box having one or more switches for controlling activation and deactivation of various computer components. The switch components may also include a bracket assembly having an input port, output port and an intermediate manual switch for controlling the communication between a network and a computer's processor. The bracket assembly and switch box may also be constructed to control the transmission or restriction of power or data signals to a memory storage device or may control the transmission of power or data signals to one or more interface peripheral ports.

摘要翻译： 提供一种计算机系统，其包括用于控制计算机系统的存储设备，网络系统和接口外围设备的选择性激活和停用的各种开关组件。 开关组件可以包括具有用于控制各种计算机组件的激活和停用的一个或多个开关的开关盒。 开关组件还可以包括具有输入端口，输出端口和用于控制网络和计算机的处理器之间的通信的中间手动开关的支架组件。 托架组件和开关盒也可以被构造成控制向存储器存储设备的功率或数据信号的传输或限制，或者可以控制功率或数据信号到一个或多个接口外围端口的传输。

公开(公告)号：US06197388B1

公开(公告)日：2001-03-06

申请号：US09283831

申请日：1999-03-31

申请人： Thomas S. Choi ,  John P. Holland ,  Nancy Tran

发明人： Thomas S. Choi ,  John P. Holland ,  Nancy Tran

IPC分类号： H05H124

CPC分类号： H01L21/02071 ,  H01L21/02046 ,  H01L21/32136

摘要： A method for processing a substrate having an aluminum neodymium-containing layer is disclosed. The aluminum neodymium-containing layer has residual chlorine proximate to its etch surface. The method includes providing a first gas chemistry including HBr and SF6 which supplies a first plurality of fluorine ions, forming a first plasma from said first gas chemistry, passivating the etch surface of the aluminum neodymium-containing layer with the first plasma to cause a second plurality of fluorine ions to replace a first portion of the residual chlorine. This second plurality of fluorine ions is a subset of the first plurality of fluorine ions. The method further includes providing a second gas chemistry having hydrofluorocarbon and oxygen which provides a third plurality of fluorine ions and oxygen, forming a second plasma with the second gas chemistry, bombarding the etch surface of the aluminum neodymium-containing layer with the second plasma, causing a fourth plurality of fluorine ions to replace a second portion of the residual chlorine. This fourth plurality of fluorine ions is a subset of the third plurality of fluorine ions. The method additionally includes depositing a polymer material using a third plasma having hydrofluorocarbon to coat the etch surface of the aluminum neodymium-containing layer.

摘要翻译： 公开了一种用于处理具有含铝钕层的基板的方法。 含铝钕层具有接近其蚀刻表面的残留氯。 该方法包括提供包括HBr和SF6的第一气体化学物质，其供应第一多个氟离子，从所述第一气体化学物质形成第一等离子体，用第一等离子体钝化含铝钕层的蚀刻表面， 多个氟离子代替残留氯的第一部分。 该第二多个氟离子是第一多个氟离子的子集。 该方法还包括提供具有氢氟烃和氧气的第二气体化学物质，其提供第三多个氟离子和氧气，与第二气体化学物质形成第二等离子体，用第二等离子体轰击含铝钕层的蚀刻表面， 导致第四组氟离子代替残留氯的第二部分。 该第四多个氟离子是第三多个氟离子的子集。 该方法另外包括使用具有氢氟烃的第三等离子体沉积聚合物材料以涂覆含铝钕层的蚀刻表面。

公开(公告)号：US06982871B2

公开(公告)日：2006-01-03

申请号：US10873955

申请日：2004-06-22

申请人： Richard Tran ,  Nancy Tran

发明人： Richard Tran ,  Nancy Tran

IPC分类号： H05K5/00

CPC分类号： G06F1/181 ,  G06F1/189 ,  G06F1/26 ,  G06F1/3203 ,  G06F1/3287 ,  G06F3/0601 ,  G06F21/80 ,  G06F21/85 ,  G06F2003/0692 ,  Y02D10/171

摘要： A computer system including a switch box and bracket assembly including one or more manual switches are provided for controlling the selective activation and deactivation of the computer systems' memory storage devices and network system. Preferably, the computer system includes a wire harnesses including a network cable for connecting a network to the bracket assembly's input port, a relay cable for connecting the bracket assembly's output port to the computer's network port and a manual switch. Instead of network communications being transmitted directly from the network to the network port, the signals are rerouted through the bracket assembly's input port, manual switch and output port, and then routed to the computer's network port. Access to the network is then controlled by simple manual manipulation of a button, toggle or knob to create an open or closed circuit.

摘要翻译： 提供一种包括开关盒和支架组件的计算机系统，包括一个或多个手动开关，用于控制计算机系统的存储设备和网络系统的选择性激活和去激活。 优选地，计算机系统包括线束，其包括用于将网络连接到支架组件的输入端口的网络电缆，用于将支架组件的输出端口连接到计算机的网络端口的中继电缆和手动开关。 代替网络通信直接从网络传输到网络端口，信号通过支架组件的输入端口，手动切换和输出端口重新路由，然后路由到计算机的网络端口。 然后通过简单的手动操纵按钮，切换或旋钮来创建打开或闭合的电路来访问网络。

公开(公告)号：US20050216626A1

公开(公告)日：2005-09-29

申请号：US10808766

申请日：2004-03-24

申请人： Richard Tran ,  Nancy Tran

发明人： Richard Tran ,  Nancy Tran

IPC分类号： G06F1/16 ,  G06F1/18 ,  G06F3/06 ,  G06F13/00 ,  G06F21/00

CPC分类号： G06F21/80 ,  G06F1/189 ,  G06F3/0601 ,  G06F21/85 ,  G06F2003/0692

摘要： A computer system including a switch box is provided for controlling the selective activation and deactivation of the computer systems' memory storage devices. The switch box includes one or more pairs of switches with each pair including a power switch and a signal switch. The power switch selectively provides power to the corresponding power switches. Meanwhile, the signal switch selectively provides an open or closed circuit for allowing or restricting the transmission of data signals between the computers processor and memory storage device.

摘要翻译： 提供了包括开关盒的计算机系统，用于控制计算机系统的存储器件的选择性激活和去激活。 开关盒包括一对或多对开关，每对开关包括电源开关和信号开关。 电源开关选择性地为相应的电源开关提供电源。 同时，信号开关选择性地提供用于允许或限制计算机处理器和存储器存储装置之间的数据信号传输的打开或闭合电路。

公开(公告)号：US20050213300A1

公开(公告)日：2005-09-29

申请号：US10873955

申请日：2004-06-22

申请人： Richard Tran ,  Nancy Tran

发明人： Richard Tran ,  Nancy Tran

IPC分类号： G06F1/16 ,  G06F1/18 ,  G06F3/06 ,  G06F13/00 ,  G06F21/00

CPC分类号： G06F1/181 ,  G06F1/189 ,  G06F1/26 ,  G06F1/3203 ,  G06F1/3287 ,  G06F3/0601 ,  G06F21/80 ,  G06F21/85 ,  G06F2003/0692 ,  Y02D10/171

摘要： A computer system including a switch box and bracket assembly including one or more manual switches are provided for controlling the selective activation and deactivation of the computer systems' memory storage devices and network system. Preferably, the computer system includes a wire harnesses including a network cable for connecting a network to the bracket assembly's input port, a relay cable for connecting the bracket assembly's output port to the computer's network port and a manual switch. Instead of network communications being transmitted directly from the network to the network port, the signals are rerouted through the bracket assembly's input port, manual switch and output port, and then routed to the computer's network port. Access to the network is then controlled by simple manual manipulation of a button, toggle or knob to create an open or closed circuit.

摘要翻译： 提供一种包括开关盒和支架组件的计算机系统，包括一个或多个手动开关，用于控制计算机系统的存储设备和网络系统的选择性激活和去激活。 优选地，计算机系统包括线束，其包括用于将网络连接到支架组件的输入端口的网络电缆，用于将支架组件的输出端口连接到计算机的网络端口的中继电缆和手动开关。 代替网络通信直接从网络传输到网络端口，信号通过支架组件的输入端口，手动切换和输出端口重新路由，然后路由到计算机的网络端口。 然后通过简单的手动操纵按钮，切换或旋钮来创建打开或闭合的电路来访问网络。