Relative humidity sensor with integrated signal conditioning
    2.
    发明授权
    Relative humidity sensor with integrated signal conditioning 有权
    具有集成信号调理功能的相对湿度传感器

    公开(公告)号:US06724612B2

    公开(公告)日:2004-04-20

    申请号:US10192451

    申请日:2002-07-09

    IPC分类号: H01G438

    CPC分类号: G01D5/24 G01N27/225

    摘要: Methods of and systems providing high reliability relative humidity sensors having integrated signal conditioning are described, providing a series capacitive circuit including a humidity-sensitive dielectric, a common top plate and first and second bottom plates associated with a first and second capacitor, respectively. Changes in humidity affect the humidity-sensitive dielectric thereby causing changes in the capacitive value of said series capacitive circuit. The system includes a common top plate; a common humidity-sensitive dielectric formed under said common top plate; a first series capacitor Cx1 including a first bottom plate formed under said common humidity-sensitive dielectric opposite said common top plate; a second series capacitor Cx2 including a second bottom plate formed under said common humidity-sensitive dielectric opposite said common top plate; wherein said first series capacitor Cx1 and said second series capacitor Cx2 commonly share said dielectric and commonly share said common top plate and are arranged in a series capacitor circuit configuration within a semiconductor system. A sampling voltage source can provide a fixed voltage through said series capacitive circuit.

    摘要翻译: 描述了提供具有集成信号调理的高可靠性相对湿度传感器的方法和系统,其分别提供包括与第一和第二电容器相关联的湿度敏感电介质,公共顶板以及第一和第二底板的串联电容电路。 湿度的变化影响湿敏电介质,从而引起所述串联电容电路的电容值的变化。 该系统包括一个共同的顶板; 形成在所述公共顶板下方的共同的湿度敏感电介质; 第一串联电容器Cx1,包括形成在与所述公共顶板相对的所述公共温度敏感电介质下方的第一底板; 第二串联电容器Cx2,包括形成在与所述公共顶板相对的所述公共温度敏感电介质下方的第二底板; 其中所述第一串联电容器Cx1和所述第二串联电容器Cx2共同共享所述电介质并共同共享所述公共顶板并且被布置在半导体系统内的串联电容器电路配置中。 采样电压源可以通过所述串联电容电路提供固定电压。

    Temperature compensation circuit for a hall effect element
    3.
    发明授权
    Temperature compensation circuit for a hall effect element 失效
    霍尔效应元件的温度补偿电路

    公开(公告)号:US6104231A

    公开(公告)日:2000-08-15

    申请号:US277388

    申请日:1994-07-19

    IPC分类号: G01D5/18 G01R33/07 H03K3/42

    CPC分类号: G01R33/07

    摘要: A temperature compensation circuit is provided for use in conjunction with a Hall effect element in which the temperature compensating resistors, or epitaxial resistors, are not placed in the signal loop as portions of the feedback loops of amplifiers. The circuit therefore permits a higher degree of linearity and temperature compensation without inducing the problems that are normally caused by varying voltage potentials across the epitaxial resistors. One embodiment of the circuit also provides a means for clamping, or truncating the output voltage of the circuit to a preselected percentage of the supply voltage even though the supply voltage may vary during the operation of the device. The circuit utilizes several external trimmable resistors to perform final adjustment on the circuit in order to permit individual variations from component to component to be compensated.

    摘要翻译: 温度补偿电路与霍尔效应元件一起使用,其中温度补偿电阻器或外延电阻器不作为放大器的反馈回路的部分放置在信号回路中。 因此,电路允许更高程度的线性度和温度补偿,而不会引起通常由外延电阻器上的电压电位变化引起的问题。 该电路的一个实施例还提供了一种用于将电路的输出电压钳位或截断到电源电压的预选百分比的装置,即使电源电压在器件的操作期间可能变化。 该电路使用几个外部可调电阻器来对电路进行最终调整,以便允许补偿组件与组件之间的各种变化。

    Methods and systems for capacitive balancing of relative humidity sensors having integrated signal conditioning
    4.
    发明授权
    Methods and systems for capacitive balancing of relative humidity sensors having integrated signal conditioning 有权
    具有集成信号调理功能的相对湿度传感器的电容平衡方法和系统

    公开(公告)号:US06867602B2

    公开(公告)日:2005-03-15

    申请号:US10322152

    申请日:2002-12-18

    IPC分类号: G01D5/24 G01N27/22 G01R27/26

    CPC分类号: G01N27/225 G01D5/24

    摘要: Methods of and systems for balancing the capacitance of a common series capacitive circuit in a semiconductor-based sensor, such as a humidity sensor, are described. Relative humidity sensors can provide measurements via a series capacitive circuit including a humidity-sensitive dielectric separating a common top plate and first and second bottom plates associated with a first and second capacitor, Cx1 and Cx2. For proper operation, the common top plate should be in capacitive balance. Capacitive balance can be achieved by creating voids within and/or along the common top plate of the sensor. A system for creating voids can include a precision cutting instrument, a measuring device for enabling the measurement of capacitance of at least one of the common series capacitive circuit, Cx1 and Cx2, and power provided from a voltage source.

    摘要翻译: 对基于半导体的传感器(例如湿度传感器)中的公共串联电容电路的电容进行平衡的方法和系统进行说明。 相对湿度传感器可以通过串联电容电路提供测量,该串联电容电路包括分离公共顶板和与第一和第二电容器Cx1和Cx2相关联的第一和第二底板的湿度敏感电介质。 为了正常工作,普通顶板应处于电容平衡状态。 电容平衡可以通过在传感器的公共顶板内和/或沿传感器的共同顶板产生空隙来实现。 用于产生空隙的系统可以包括精密切割仪器,用于测量公共串联电容电路Cx1和Cx2中的至少一个的电容的测量装置以及从电压源提供的功率。

    Circuit for limiting an output voltage to a percent of a variable supply voltage
    5.
    发明授权
    Circuit for limiting an output voltage to a percent of a variable supply voltage 失效
    将输出电压限制到可变电源电压百分比的电路

    公开(公告)号:US06232832B1

    公开(公告)日:2001-05-15

    申请号:US08582237

    申请日:1996-01-03

    IPC分类号: G06G712

    摘要: A temperature compensation circuit is provided for use in conjunction with a Hall effect element in which the temperature compensating resistors, or epitaxial resistors, are not placed in the signal loop as portions of the feedback loops of amplifiers. The circuit therefore permits a higher degree of linearity and temperature compensation without inducing the problems that are normally caused by varying voltage potentials across the epitaxial resistors. One embodiment of the circuit also provides a means for clamping, or truncating the output voltage of the circuit to a preselected percentage of the supply voltage even though the supply voltage may vary during the operation of the device. The circuit utilizes several external trimmable resistors to perform final adjustment on the circuit in order to permit individual variations from component to component to be compensated.

    摘要翻译: 温度补偿电路与霍尔效应元件一起使用,其中温度补偿电阻器或外延电阻器不作为放大器的反馈回路的部分放置在信号回路中。 因此,电路允许更高程度的线性度和温度补偿,而不会引起通常由外延电阻器上的电压电位变化引起的问题。 该电路的一个实施例还提供了一种用于将电路的输出电压钳位或截断到电源电压的预选百分比的装置,即使电源电压在器件的操作期间可能变化。 该电路使用几个外部可调电阻器来对电路进行最终调整,以便允许补偿组件与组件之间的各种变化。