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公开(公告)号：US20060289809A1
公开(公告)日：2006-12-28
申请号：US11328735
申请日：2006-01-10
IPC分类号： G01J3/10
CPC分类号： G01N27/622 , G01N27/624 , G01N30/6095 , G01N30/62 , G01N30/64 , G01N30/66 , G01N30/70 , G01N30/7206 , G01N30/78 , G01N2030/025 , G01N2030/642 , G01N2030/645
摘要： Embodiments of the present invention relate to detector structures for use in a micro gas analyzer, preferably in a differential setup. The detector structures may comprise one or more detector types, such as photo-ionization (PID), electron capture (ECD), ion mobility (IMS), differential mobility (DMS), ion-trap mass spectrometer (ITMS), in which all are provided with ions and electrons from one vacuum ultra violet (VUV) source. This source may also provide ions for ion-based gas pumps.
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公开(公告)号：US07502109B2
公开(公告)日：2009-03-10
申请号：US11383723
申请日：2006-05-16
申请人： Ulrich Bonne , James Detry , Teresa Marta , Klein Johnson
发明人： Ulrich Bonne , James Detry , Teresa Marta , Klein Johnson
IPC分类号： G01J3/28
CPC分类号： G01J3/20 , G01F1/6845 , G01J3/02 , G01J3/0256 , G01J3/0291 , G01N21/05 , G01N21/65 , G01N21/658 , G01N27/02 , G01N2021/0346 , G01N2021/058 , G01N2021/651
摘要： An optical spectrometer having a multi-wafer structure. The structure may be fabricated with MEMS technology. The spectrometer may be integrated with a fluid analyzer. A reflective grating such as a diffraction or holographic grating situated on the circumference of a Rowland circle along with a point of light emission and a detector may be a configuration of the spectrometer. Some configurations may use an external light source where the light may be optically conveyed to the point of emission on the circle. There may be a Raman configuration where an interaction of light with a sample or an interactive film of a channel in a fluid analyzer is the point of light emission for the spectrometer. In some configurations of the spectrometer, the grating and/or the film may be reflective or transmissive.
摘要翻译： 具有多晶片结构的光谱仪。 该结构可以用MEMS技术制造。 光谱仪可以与流体分析仪集成。 位于Rowland圆周上的衍射或全息光栅以及发光点和检测器的反射光栅可以是光谱仪的配置。 一些配置可以使用外部光源，其中光可以光学地传送到圆上的发射点。 可以存在拉曼配置，其中光与流体分析仪中的通道的样品或交互膜的相互作用是光谱仪的发光点。 在光谱仪的一些配置中，光栅和/或膜可以是反射的或透射的。
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公开(公告)号：US20070095125A1
公开(公告)日：2007-05-03
申请号：US11262901
申请日：2005-10-31
申请人： Ulrich Bonne , Teresa Marta , Fouad Nusseibeh
发明人： Ulrich Bonne , Teresa Marta , Fouad Nusseibeh
IPC分类号： G01N30/02
CPC分类号： G01N21/3504 , G01N30/62 , G01N30/64 , G01N30/78 , G01N2030/025
摘要： A differential microdischarge detector system. The system comprises two microdischarge detectors (MDDs). One of the MDDs is connected to receive sample analytes to be measured, while the other MDD is connected to receive a reference sample that contains interfering gases and none or a much lower concentration of the sample analytes to be measured. The outputs of the two MDD's are fed to a circuit that generates either a difference or a ratio between the measurements of the two MDDs. In addition, the current, impedance or voltage across the electrodes of the two MDDs may be measured and processed to generate either a difference or a ratio signal, thus obtaining additional information about the sample gas analytes.
摘要翻译： 差分微放电检测系统。 该系统包括两个微放电检测器（MDD）。 其中一个MDD被连接以接收要测量的样品分析物，而另一个MDD被连接以接收包含干扰气体的参考样品，并且没有或低得多的样品分析物的浓度被测量。 两个MDD的输出被馈送到产生两个MDD的测量值之间的差值或比率的电路。 此外，可以测量和处理两个MDD的电极两端的电流，阻抗或电压，以产生差值或比率信号，从而获得关于样品气体分析物的附加信息。
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公开(公告)号：US20060262303A1
公开(公告)日：2006-11-23
申请号：US11383723
申请日：2006-05-16
申请人： Ulrich Bonne , James Detry , Teresa Marta , Klein Johnson
发明人： Ulrich Bonne , James Detry , Teresa Marta , Klein Johnson
IPC分类号： G01J3/28
CPC分类号： G01J3/20 , G01F1/6845 , G01J3/02 , G01J3/0256 , G01J3/0291 , G01N21/05 , G01N21/65 , G01N21/658 , G01N27/02 , G01N2021/0346 , G01N2021/058 , G01N2021/651
摘要： An optical spectrometer having a multi-wafer structure. The structure may be fabricated with MEMS technology. The spectrometer may be integrated with a fluid analyzer. A reflective grating such as a diffraction or holographic grating situated on the circumference of a Rowland circle along with a point of light emission and a detector may be a configuration of the spectrometer. Some configurations may use an external light source where the light may be optically conveyed to the point of emission on the circle. There may be a Raman configuration where an interaction of light with a sample or an interactive film of a channel in a fluid analyzer is the point of light emission for the spectrometer. In some configurations of the spectrometer, the grating and/or the film may be reflective or transmissive.
摘要翻译： 具有多晶片结构的光谱仪。 该结构可以用MEMS技术制造。 光谱仪可以与流体分析仪集成。 位于Rowland圆周上的衍射或全息光栅以及发光点和检测器的反射光栅可以是光谱仪的配置。 一些配置可以使用外部光源，其中光可以光学地传送到圆上的发射点。 可以存在拉曼配置，其中光与流体分析仪中的通道的样品或交互膜的相互作用是光谱仪的发光点。 在光谱仪的一些配置中，光栅和/或膜可以是反射的或透射的。
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公开(公告)号：US08128873B2
公开(公告)日：2012-03-06
申请号：US11923325
申请日：2007-10-24
IPC分类号： G01N7/00
CPC分类号： G01N21/8483
摘要： A highly sensitive fluid composition analyzer where a fluid may be placed in contact with a very small area on a material sensitized to change color in the presence of a specific type of compound, to be impinged with light. The light reflected, transmitted and/or scattered by the material may serve as input for the analyzer electronics. The fluid may be pre-concentrated prior to being brought in contact with the material. The area on the material may be a spot having an outside dimension of less than one millimeter.
摘要翻译： 一种高灵敏度的流体组成分析器，其中流体可以放置在与特定类型的化合物存在下变色的材料上的非常小的区域接触以被光照射的物质上。 由材料反射，透射和/或散射的光可以用作分析仪电子器件的输入。 流体可以在与材料接触之前被预浓缩。 材料上的区域可以是外部尺寸小于1毫米的斑点。
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公开(公告)号：US20090111191A1
公开(公告)日：2009-04-30
申请号：US11923325
申请日：2007-10-24
CPC分类号： G01N21/8483
摘要： A highly sensitive fluid composition analyzer where a fluid may be placed in contact with a very small area on a material sensitized to change color in the presence of a specific type of compound, to be impinged with light. The light reflected, transmitted and/or scattered by the material may serve as input for the analyzer electronics. The fluid may be pre-concentrated prior to being brought in contact with the material. The area on the material may be a spot having an outside dimension of less than one millimeter.
摘要翻译： 一种高灵敏度的流体组成分析器，其中流体可以放置在与特定类型的化合物存在下变色的材料上的非常小的区域接触以被光照射的物质上。 由材料反射，透射和/或散射的光可以用作分析仪电子器件的输入。 流体可以在与材料接触之前被预浓缩。 材料上的区域可以是外部尺寸小于1毫米的斑点。
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公开(公告)号：US20080010821A1
公开(公告)日：2008-01-17
申请号：US11781197
申请日：2007-07-20
CPC分类号： G01F5/00 , G01F1/684 , G01F1/6842 , G01F1/6845 , G01F1/6847 , G01F15/14 , G01F15/18 , G01F15/185 , G01N1/2247 , G01N25/18 , G01N25/488 , G01N33/0014 , G01N2001/2285 , Y10T29/49117 , Y10T29/4913 , Y10T29/49135 , Y10T29/49147 , Y10T29/49798
摘要： A flow sensor is provided having a substrate with a sensing element and flow channel aligned over the sensing element. The sensing element senses at least one property of a fluid. The flow channel is aligned by one or more guide elements formed in an alignment layer. The flow channel across the sensing area is accurately and precisely aligned due to the guide elements provided at the wafer-level, facilitating reliable, low-cost, and consistent results among multiple flow sensors. The flow sensor is adapted for use in harsh environments.
摘要翻译： 提供了一种流量传感器，其具有基底，该基底具有在感测元件上对准的感测元件和流动通道。 感测元件感测流体的至少一个性质。 流动通道由形成在对准层中的一个或多个引导元件对准。 由于提供在晶片级的引导元件，穿过感测区域的流动通道精确而准确地对准，从而促进了多个流量传感器之间的可靠，低成本和一致的结果。 流量传感器适用于恶劣环境。
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公开(公告)号：US20070235643A1
公开(公告)日：2007-10-11
申请号：US11394131
申请日：2006-03-30
申请人： Ulrich Bonne , Paul Bauhahn
发明人： Ulrich Bonne , Paul Bauhahn
IPC分类号： H01J49/00
CPC分类号： H01J49/12
摘要： A method and apparatus are provided for pumping a gas. The method includes the steps of ionizing the gas, separating the ionized gas into groups of positive and negative ions using positive and negative electric fields and separately pulling the groups of positive and negative ions along a channel using the negative and positive electric fields.
摘要翻译： 提供了一种用于泵送气体的方法和装置。 该方法包括使气体电离的步骤，使用正和负电场将电离气体分离成正离子和负离子，并且使用负电场和正电场分别沿着通道牵引正离子和负离子组。
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公开(公告)号：US07258003B2
公开(公告)日：2007-08-21
申请号：US10930546
申请日：2004-08-31
IPC分类号： G01F1/68
CPC分类号： G01F5/00 , G01F1/684 , G01F1/6842 , G01F1/6845 , G01F1/6847 , G01F15/14 , G01F15/18 , G01F15/185 , G01N1/2247 , G01N25/18 , G01N25/488 , G01N33/0014 , G01N2001/2285 , Y10T29/49117 , Y10T29/4913 , Y10T29/49135 , Y10T29/49147 , Y10T29/49798
摘要： A flow sensor is provided having a substrate with a sensing element and flow channel aligned over the sensing element. The sensing element senses at least one property of a fluid. The flow channel is aligned by one or more guide elements formed in an alignment layer. The flow channel across the sensing area is accurately and precisely aligned due to the guide elements provided at the wafer-level, facilitating reliable, low-cost, and consistent results among multiple flow sensors. The flow sensor is adapted for use in harsh environments.
摘要翻译： 提供了一种流量传感器，其具有基底，该基底具有在感测元件上对准的感测元件和流动通道。 感测元件感测流体的至少一个性质。 流动通道由形成在对准层中的一个或多个引导元件对准。 由于提供在晶片级的引导元件，穿过感测区域的流动通道精确而准确地对准，从而促进了多个流量传感器之间的可靠，低成本和一致的结果。 流量传感器适用于恶劣环境。
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公开(公告)号：US07222639B2
公开(公告)日：2007-05-29
申请号：US11025758
申请日：2004-12-29
申请人： Ulrich Bonne , Cleopatra Cabuz , Eugen I. Cabuz , Stephen J. Kemp , John T. Adams , Tzu-Yu Wang , Sybrandus B. V. Munsterhuis , Gerrit J. Baarda
发明人： Ulrich Bonne , Cleopatra Cabuz , Eugen I. Cabuz , Stephen J. Kemp , John T. Adams , Tzu-Yu Wang , Sybrandus B. V. Munsterhuis , Gerrit J. Baarda
IPC分类号： G05D16/06
CPC分类号： F16K31/402 , F16K31/02 , F16K31/385 , F23N1/005 , F23N2035/18 , F23N2035/20 , F23N2035/24 , Y10T137/7761 , Y10T137/87917
摘要： A gas valve body with a first flow chamber and, a second flow chamber including and a main valve positioned in line and between the first flow chamber and the second flow chamber. The main valve can be opened by creating a pressure differential across the main valve. An electrostatically controlled pilot valve is provided for controlling the pressure differential across the main valve for “on-ff” operation. The electrostatically controlled pilot valve may also be operated to “modulate” the pressure differential across the main valve along a range of pressure differential values.
摘要翻译： 一种具有第一流动室的气体阀体，以及包括第一流动室和第二流动室的第二流动室和第二流动室。 可以通过在主阀上形成压差来打开主阀。 提供静电控制的先导阀，用于控制主阀上的压差用于“on-ff”操作。 静电控制先导阀还可以被操作以沿着一定范围的压力差来“调制”主阀上的压力差。
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