公开(公告)号：US20060099054A1

公开(公告)日：2006-05-11

申请号：US11210918

申请日：2005-08-23

申请人： Gerald Friedman ,  Michael Bufano ,  Christopher Hofmeister ,  Ulysses Gilchrist ,  William Fosnight

发明人： Gerald Friedman ,  Michael Bufano ,  Christopher Hofmeister ,  Ulysses Gilchrist ,  William Fosnight

IPC分类号： H01L21/677

CPC分类号： H01L21/677 ,  B65G47/50 ,  H01L21/67276 ,  H01L21/67769 ,  H01L21/67772 ,  H01L21/67775 ,  Y10S414/14

摘要： A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier at the load port interface. The carrier holding station is arranged to provide a fast swap section for replacement of the substrate transport carrier from the carrier holding station.

摘要翻译： 提供了一种基板处理装置。 该装置具有壳体，低端口接口和载体保持站。 壳体具有用于处理基板的处理装置。 负载端口接口连接到外壳，用于将基板装载到处理设备中。 托架保持站连接到外壳。 载体保持站用于在负载端口接口处保持至少一个基板传输载体。 载体保持站布置成提供用于从载体保持站更换基板传输载体的快速互换部分。

公开(公告)号：US20060088272A1

公开(公告)日：2006-04-27

申请号：US11207231

申请日：2005-08-19

申请人： Ulysses Gilchrist ,  William Fosnight ,  Christopher Hofmeister ,  Gerald Friedman ,  Michael Bufano

发明人： Ulysses Gilchrist ,  William Fosnight ,  Christopher Hofmeister ,  Gerald Friedman ,  Michael Bufano

IPC分类号： G02B6/00

CPC分类号： H01L21/67763 ,  H01L21/67326 ,  H01L21/67353 ,  H01L21/67369 ,  H01L21/67373 ,  H01L21/67376 ,  H01L21/67383 ,  H01L21/67389 ,  H01L21/67393 ,  H01L21/67772 ,  H01L21/67778 ,  H01L21/6779 ,  Y10S414/139

摘要： A substrate transport apparatus is provided. The apparatus has a casing and a door. The casing is adapted to form a controlled environment therein. The casing has supports therein for holding at least one substrate in the casing. The casing defines a substrate transfer opening through which a substrate transport system accesses the substrate in the casing. The door is connected to the casing for closing the substrate transfer opening in the casing. The casing has structure forming a fast swap element allowing replacement of the substrate from the apparatus with another substrate without retraction of the substrate transport system and independent of substrate loading in the casing.

摘要翻译： 提供了基板输送装置。 该装置具有外壳和门。 壳体适于在其中形成受控的环境。 壳体具有用于在壳体中保持至少一个基板的支撑。 壳体限定衬底传送开口，衬底传送系统通过该衬底传送系统访问壳体中的衬底。 门连接到壳体以封闭壳体中的基板传送开口。 壳体具有形成快速互换元件的结构，其允许用另一个基板从设备更换基板，而不会退回基板输送系统，而与壳体中的基板负载无关。

公开(公告)号：US20060104712A1

公开(公告)日：2006-05-18

申请号：US11211236

申请日：2005-08-24

申请人： Michael Bufano ,  Gerald Friedman ,  Christopher Hofmeister ,  Ulysses Gilchrist ,  William Fosnight

发明人： Michael Bufano ,  Gerald Friedman ,  Christopher Hofmeister ,  Ulysses Gilchrist ,  William Fosnight

IPC分类号： E01C1/00

CPC分类号： H01L21/67715 ,  H01L21/67736 ,  H01L21/67775

摘要： An exemplary embodiment a substrate transport system is provided. The system has a guideway and at least one transport vehicle. The transport vehicle is adapted for holding at least one substrate and capable of being supported from and moving along the guideway. The guideway comprises at least one travel lane for the vehicle and at least one access lane offset from the travel lane allowing the vehicle selectable access on and off the travel lane.

摘要翻译： 提供了一种示例性实施例的基板输送系统。 该系统具有导轨和至少一个运输车辆。 运输车辆适于保持至少一个基底并且能够被支撑并沿导轨移动。 导轨包括用于车辆的至少一个行驶车道和从行驶车道偏移的至少一个通道，允许车辆可选择地接近行驶车道和离开行车道。

公开(公告)号：US20080080963A1

公开(公告)日：2008-04-03

申请号：US11803077

申请日：2007-05-11

申请人： Michael Bufano ,  Ulysses Gilchrist ,  William Fosnight ,  Christopher Hofmeister ,  Daniel Babbs ,  Robert May

发明人： Michael Bufano ,  Ulysses Gilchrist ,  William Fosnight ,  Christopher Hofmeister ,  Daniel Babbs ,  Robert May

IPC分类号： B65B35/00

CPC分类号： H01L21/6732 ,  H01L21/67017 ,  H01L21/67276 ,  H01L21/67379 ,  H01L21/67386 ,  H01L21/67715 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67769 ,  H01L21/67775 ,  H01L21/67778

摘要： A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.

公开(公告)号：US20080063496A1

公开(公告)日：2008-03-13

申请号：US11891835

申请日：2007-08-13

申请人： Michael Bufano ,  Ulysses Gilchrist ,  William Fosnight ,  Christopher Hofmeister ,  Daniel Babbs ,  Robert May

发明人： Michael Bufano ,  Ulysses Gilchrist ,  William Fosnight ,  Christopher Hofmeister ,  Daniel Babbs ,  Robert May

IPC分类号： B65G1/00

CPC分类号： H01L21/67733 ,  H01L21/67017 ,  H01L21/67126 ,  H01L21/67201 ,  H01L21/67276 ,  H01L21/67376 ,  H01L21/67379 ,  H01L21/67386 ,  H01L21/677 ,  H01L21/67706 ,  H01L21/67715 ,  H01L21/67724 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67736 ,  H01L21/67757 ,  H01L21/67766 ,  H01L21/67769 ,  H01L21/67772 ,  H01L21/67775

摘要： In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.

摘要翻译： 根据示例性实施例，半导体工件处理系统具有至少一个用于处理半导体工件的处理工具，用于将至少一个半导体工件保持在其中以用于传送至至少一个处理工具和从该至少一个处理工具传送的容器和第一传送部分 定义旅行方向。 第一运输部分具有与集装箱接合的部件，沿着行进方向将容器支撑和运输到至少一个加工工具和从该至少一个加工工具运送。 当由第一输送部支撑时，容器以行进方向以基本上恒定的速度基本上连续输送。 第二传送部分连接到至少一个处理工具，用于将容器运送到至少一个处理工具和从该至少一个处理工具传送。

公开(公告)号：US20070189880A1

公开(公告)日：2007-08-16

申请号：US11594365

申请日：2006-11-07

申请人： Michael Bufano ,  Ulysses Gilchrist ,  William Fosnight ,  Christopher Hofmeister ,  Daniel Babbs ,  Robert May

发明人： Michael Bufano ,  Ulysses Gilchrist ,  William Fosnight ,  Christopher Hofmeister ,  Daniel Babbs ,  Robert May

IPC分类号： H01L21/677

CPC分类号： H01L21/67769 ,  H01L21/67376 ,  H01L21/67386 ,  H01L21/67715 ,  H01L21/67724 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67778

摘要： A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.

摘要翻译： 一种半导体工件处理系统，具有至少一个用于处理工件的处理装置，主输送系统，辅助输送系统以及第一输送系统和第二输送系统之间的一个或多个接口。 主要和次要运输系统各自具有基本上恒定速度的一个或多个部分和与等速段相通的队列部分。

公开(公告)号：US20070201967A1

公开(公告)日：2007-08-30

申请号：US11556584

申请日：2006-11-03

申请人： Michael Bufano ,  Ulysses Gilchrist ,  William Fosnight ,  Christopher Hofmeister ,  Daniel Babbs ,  Robert May

发明人： Michael Bufano ,  Ulysses Gilchrist ,  William Fosnight ,  Christopher Hofmeister ,  Daniel Babbs ,  Robert May

IPC分类号： B65H1/00

CPC分类号： H01L21/67379 ,  H01L21/67715 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67772 ,  H01L21/67775

摘要： A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.

摘要翻译： 一种半导体工件处理系统，具有至少一个用于处理工件的处理装置，主输送系统，辅助输送系统以及第一输送系统和第二输送系统之间的一个或多个接口。 主要和次要运输系统各自具有基本上恒定速度的一个或多个部分和与等速段相通的队列部分。

公开(公告)号：US20050135906A1

公开(公告)日：2005-06-23

申请号：US10727353

申请日：2003-12-03

申请人： William Fosnight ,  Michael Bufano ,  Gerald Friedman ,  Robert Sullivan

发明人： William Fosnight ,  Michael Bufano ,  Gerald Friedman ,  Robert Sullivan

IPC分类号： B65G1/00 ,  H01L20060101 ,  H01L21/677

CPC分类号： H01L21/67706 ,  H01L21/6773 ,  H01L21/67769 ,  Y10S414/14

摘要： An automated material handling system that includes an extractor/buffer apparatus capable of simultaneously accessing multiple Work-In-Process (WIP) parts, thereby providing a highly efficient interface between WIP storage locations and transport equipment. The extractor/buffer apparatus includes multiple extractor/buffer modules, each module being configured to interface with a location for holding WIP parts that is a number of WIP parts deep. Each module includes a platform for holding multiple WIP parts. Further, multiple modules may be disposed side-by-side to form an extractor/buffer apparatus capable of handling multiple rows of WIP parts.

摘要翻译： 一种自动化材料处理系统，其包括能够同时访问多个在制品（WIP）部件的提取器/缓冲装置，从而在WIP存储位置和运输设备之间提供高效的接口。 提取器/缓冲装置包括多个提取器/缓冲器模块，每个模块被配置为与用于保持WIP部分的WIP部分的位置进行深度接触。 每个模块包括一个用于容纳多个WIP零件的平台。 此外，多个模块可以并排布置以形成能够处理多行WIP部件的提取器/缓冲装置。

公开(公告)号：US20050095087A1

公开(公告)日：2005-05-05

申请号：US10697528

申请日：2003-10-30

申请人： Robert Sullivan ,  Clint Haris ,  Michael Bufano ,  Gerald Friedman ,  Christopher Hofmeister

发明人： Robert Sullivan ,  Clint Haris ,  Michael Bufano ,  Gerald Friedman ,  Christopher Hofmeister

IPC分类号： H01L21/677 ,  H01L21/687 ,  B65G1/00

CPC分类号： H01L21/68707 ,  B65G13/00 ,  B65G37/02 ,  H01L21/6773 ,  H01L21/67736

摘要： A semiconductor workpiece processing system comprising at least one processing tool, a container, a first transport section, and a second transport section. The processing tool is used for processing semiconductor workpieces. The container is used for holding at least one semiconductor workpiece therein for transporting two and from the processing tool. The first transport section is connected to the processing tool for transporting the container to and from the processing tool. The second transport section is connected to the first transport section for transporting the container to and from the processing tool. The first transport section is vehicle based having a transport vehicle capable of holding the container and moving along a first track of the first transport section. The second transport section is not vehicle based and has a second track with at least one support element thereon adapted to interface with the container for movably supporting the container from the second track and allowing the container to move relative to the first track. The first track and second track are disposed proximate to each other to allow the container to moved therebetween in one move.

摘要翻译： 一种半导体工件处理系统，包括至少一个处理工具，容器，第一传送部分和第二传送部分。 该加工工具用于处理半导体工件。 容器用于将至少一个半导体工件保持在其中以便从处理工具传送两个。 第一运输部分连接到处理工具，用于将容器运送到加工工具和从加工工具运输。 第二输送部连接到第一输送部，用于将容器运送到加工工具和从处理工具输送。 第一运输部是基于车辆的，具有能够保持容器并沿着第一运送部的第一轨道移动的运送车辆。 第二传送部分不是基于车辆的，并且具有其上具有至少一个支撑元件的第二轨道，其适于与容器接合，用于从第二轨道可移动地支撑容器并允许容器相对于第一轨道移动。 第一轨道和第二轨道彼此靠近设置，以允许容器在其间移动。

公开(公告)号：US07101138B2

公开(公告)日：2006-09-05

申请号：US10727353

申请日：2003-12-03

申请人： William John Fosnight ,  Michael Bufano ,  Gerald Friedman ,  Robert Sullivan

发明人： William John Fosnight ,  Michael Bufano ,  Gerald Friedman ,  Robert Sullivan

IPC分类号： B65G65/02

CPC分类号： H01L21/67706 ,  H01L21/6773 ,  H01L21/67769 ,  Y10S414/14

摘要： An automated material handling system that includes an extractor/buffer apparatus capable of simultaneously accessing multiple Work-In-Process (WIP) parts, thereby providing a highly efficient interface between WIP storage locations and transport equipment. The extractor/buffer apparatus includes multiple extractor/buffer modules, each module being configured to interface with a location for holding WIP parts that is a number of WIP parts deep. Each module includes a platform for holding multiple WIP parts. Further, multiple modules may be disposed side-by-side to form an extractor/buffer apparatus capable of handling multiple rows of WIP parts.

摘要翻译： 一种自动化材料处理系统，其包括能够同时访问多个在制品（WIP）部件的提取器/缓冲装置，从而在WIP存储位置和运输设备之间提供高效的接口。 提取器/缓冲装置包括多个提取器/缓冲器模块，每个模块被配置为与用于保持WIP部分的WIP部分的位置进行深度接触。 每个模块包括一个用于容纳多个WIP零件的平台。 此外，多个模块可以并排布置以形成能够处理多行WIP部件的提取器/缓冲装置。