Semiconductor-on-insulator device having a laterally-graded channel
region and method of making
    2.
    发明授权
    Semiconductor-on-insulator device having a laterally-graded channel region and method of making 失效
    具有横向梯度通道区域的绝缘体上半导体器件及其制造方法

    公开(公告)号:US5670389A

    公开(公告)日:1997-09-23

    申请号:US585137

    申请日:1996-01-11

    摘要: A silicon-on-insulator semiconductor device (40) having laterally-graded channel regions (23A, 24A) and a method of making the silicon-on-insulator semiconductor device (40). The silicon-on-insulator semiconductor device (40) has a gate structure (16) having sidewalls (19, 21) on a semiconductor layer (12). Lightly doped regions (26A, 27A) extend through an entire thickness of a portion of the semiconductor layer (12) under the sidewalls (19, 21). A laterally-graded channel region (23A) is formed below the gate structure (16) and abutting one (26A) of the lightly doped regions. A source (33) is formed in a first (26A) of the lightly doped regions and a drain region (34) is formed in a second (27A) of the lightly doped regions.

    摘要翻译: 具有横向梯度沟道区(23A,24A)的绝缘体上半导体器件(40)以及制造绝缘体上硅半导体器件(40)的方法。 绝缘体上硅半导体器件(40)具有在半导体层(12)上具有侧壁(19,21)的栅极结构(16)。 轻掺杂区域(26A,27A)在侧壁(19,21)下延伸穿过半导体层(12)的一部分的整个厚度。 在栅极结构(16)的下方形成横向梯度的沟道区(23A),并邻接一个(26A)的轻掺杂区。 源极(33)形成在轻掺杂区域的第一(26A)中,并且在第二(27A)轻掺杂区域中形成漏极区域(34)。

    Method of forming an isolation oxide for silicon-on-insulator technology
    3.
    发明授权
    Method of forming an isolation oxide for silicon-on-insulator technology 失效
    形成绝缘体上硅技术的隔离氧化物的方法

    公开(公告)号:US5780352A

    公开(公告)日:1998-07-14

    申请号:US553801

    申请日:1995-10-23

    摘要: A method of forming an isolation oxide (30) on a silicon-on-insulator (SOI) substrate (21) includes disposing a mask layer (26, 27) over a region of a silicon layer (24) of the SOI substrate (21). The isolation oxide (30) is grown in a different region (28) of the silicon layer (24). The isolation oxide (30) is grown to a depth (32) within the silicon layer (24) of less than or equal to a thickness (29) of the silicon layer (24). After removing the mask layer (26, 27), the isolation oxide (30) is further grown in the different region (28) of the silicon layer (24) such that the isolation oxide (30) is coupled to a buried electrically insulating layer (23) within the SOI substrate (21). The buried electrically insulating layer (23) and the isolation oxide (30) electrically isolate an active region (43) of a semiconductor device (20).

    摘要翻译: 在绝缘体上硅(SOI)衬底(21)上形成隔离氧化物(30)的方法包括在SOI衬底(21)的硅层(24)的区域上设置掩模层(26,27) )。 隔离氧化物(30)生长在硅层(24)的不同区域(28)中。 隔离氧化物(30)生长到硅层(24)内的深度(32)小于或等于硅层(24)的厚度(29)。 在去除掩模层(26,27)之后,隔离氧化物(30)进一步生长在硅层(24)的不同区域(28)中,使得隔离氧化物(30)与掩埋电绝缘层 (23)内。 埋入的电绝缘层(23)和隔离氧化物(30)电绝缘半导体器件(20)的有源区(43)。