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公开(公告)号:US07426067B1
公开(公告)日:2008-09-16
申请号:US10322195
申请日:2002-12-17
申请人: Victor M. Bright , Jeffrey Elam , Francois Fabreguette , Steven M. George , Nils Hoivik , Yung-Cheng Lee , Ryan Linderman , Marie Tripp
发明人: Victor M. Bright , Jeffrey Elam , Francois Fabreguette , Steven M. George , Nils Hoivik , Yung-Cheng Lee , Ryan Linderman , Marie Tripp
IPC分类号: G02B26/08
CPC分类号: B81C1/0096 , B81B3/0005 , B81B2207/115 , B81C1/00674 , B81C2201/112 , Y10S359/90
摘要: A micro-electromechanical device or MEMS having a conformal layer of material deposited by atomic layer deposition is discussed. The layer may provide physical protection to moving components of the device, may insulate electrical components of the device, may present a biocompatible surface interface to a biological system, and may otherwise improve such devices. The layer may also comprise a combination of multiple materials each deposited with great control to allow creating layers of customizable properties and to allow creating layers having multiple independent functions, such as providing physical protection from wear and providing electrical insulation.
摘要翻译: 讨论了具有通过原子层沉积沉积的材料的保形层的微机电装置或MEMS。 该层可以为装置的移动部件提供物理保护,可以使装置的电气部件绝缘,可以向生物系统提供生物相容的表面界面,并且可以改进这种装置。 该层还可以包括多种材料的组合,每种材料沉积有很大的控制以允许产生可定制性质的层,并且允许产生具有多个独立功能的层,例如提供物理保护免受磨损和提供电绝缘。