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公开(公告)号：US4828964A
公开(公告)日：1989-05-09
申请号：US93360
申请日：1987-09-04
申请人： William R. Brunsvold , Willard E. Conley , Scott L. Jacobs , George L. Mack , David P. Merritt , Ann M. Uptmor
发明人： William R. Brunsvold , Willard E. Conley , Scott L. Jacobs , George L. Mack , David P. Merritt , Ann M. Uptmor
IPC分类号： G03F7/09
摘要： A composition for use in a process for the deposition of patterned thin metal films on integrated circuit substrates, the composition comprising an admixture of a thermoplastic polyimide resin and a coumarin dye dissolved in a substituted phenol solvent. Optionally a polar solvent having a boiling point greater than 160.degree. C. and a low boiling organic compound (70.degree.-150.degree. C.) may be incorporated in the composition.
摘要翻译： 一种用于在集成电路基板上沉积图案化的金属薄膜的方法的组合物，该组合物包含溶解在取代的苯酚溶剂中的热塑性聚酰亚胺树脂和香豆素染料的混合物。 任选地，可以将沸点大于160℃的极性溶剂和低沸点有机化合物（70-150℃）并入组合物中。
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公开(公告)号：US06764551B2
公开(公告)日：2004-07-20
申请号：US09971820
申请日：2001-10-05
申请人： David B. Riggs , Rajarao Jammy , John Kim , Stephen M. Lucarini , George L. Mack , Christopher Parks
发明人： David B. Riggs , Rajarao Jammy , John Kim , Stephen M. Lucarini , George L. Mack , Christopher Parks
IPC分类号： B08B704
CPC分类号： H01L21/02046 , B08B7/00
摘要： A process for removing dopant ions from a semiconductor substrate includes exposing the substrate to a non-aqueous organic solvent in liquid and/or vapor form.
摘要翻译： 从半导体衬底去除掺杂剂离子的方法包括将衬底暴露于液体和/或蒸汽形式的非水有机溶剂中。
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公开(公告)号：US07967978B2
公开(公告)日：2011-06-28
申请号：US11608863
申请日：2006-12-11
摘要： An apparatus for preconditioning a filter media includes a reservoir containing a liquid; a pump operatively connected and in fluid communication with the reservoir; a filter housing operatively connected and in fluid communication with the reservoir and the pump, and having a filter media disposed therein; a control unit operatively connected to the pump; and wherein the pump is operable to circulate the liquid through the filter media to wet and remove air from the filter media prior to installation of the filter media in a processing application.
摘要翻译： 用于预处理过滤介质的装置包括容纳液体的储存器; 可操作地连接并与储存器流体连通的泵; 过滤器壳体，其可操作地连接并与储存器和泵流体连通，并且具有设置在其中的过滤介质; 可操作地连接到所述泵的控制单元; 并且其中所述泵可操作以使所述液体循环通过所述过滤介质，以在将所述过滤介质安装在处理应用中之前湿过滤介质中的空气。
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公开(公告)号：US20080135498A1
公开(公告)日：2008-06-12
申请号：US11608863
申请日：2006-12-11
摘要： An apparatus for preconditioning a filter media includes a reservoir containing a liquid; a pump operatively connected and in fluid communication with the reservoir; a filter housing operatively connected and in fluid communication with the reservoir and the pump, and having a filter media disposed therein; a control unit operatively connected to the pump; and wherein the pump is operable to circulate the liquid through the filter media to wet and remove air from the filter media prior to installation of the filter media in a processing application.
摘要翻译： 用于预处理过滤介质的装置包括容纳液体的储存器; 可操作地连接并与储存器流体连通的泵; 过滤器壳体，其可操作地连接并与储存器和泵流体连通，并且具有设置在其中的过滤介质; 可操作地连接到所述泵的控制单元; 并且其中所述泵可操作以使所述液体循环通过所述过滤介质，以在将所述过滤介质安装在处理应用中之前湿过滤介质中的空气。
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