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    Method for coating the quartz burner of an HID lamp
    1.
    发明授权
    Method for coating the quartz burner of an HID lamp 失效
    用于涂覆HID灯的石英燃烧器的方法

    公开(公告)号：US07306830B2

    公开(公告)日：2007-12-11

    申请号：US10502408

    申请日：2003-01-28

    申请人： Wolfgang Moehl ,  Lars Bewig ,  Thomas Kuepper ,  Wolfram Maring ,  Christopher Moelle

    发明人： Wolfgang Moehl ,  Lars Bewig ,  Thomas Kuepper ,  Wolfram Maring ,  Christopher Moelle

    IPC分类号： H05H1/24 ,  H01J61/40

    CPC分类号： C03C17/3417 ,  H01J61/35

    摘要： In order to improve the energy balance of an HID lamp, the quartz burner, preferably the inside thereof, is coated with a UV reflecting layer system by alternatingly applying amorphous thin layers made at least of titanium oxide and silicon oxide having the respective general stoichiometry TiOy and SiOx by means of a plasma impulse chemical vapor deposition (PICVD) method at a high power density and increased substrate temperatures ranging from 100° to 400° C., using small growth rates ranging from 1 nm/sec to 100 nm/sec so as to form an interference layer system having a thickness of less than 1200 nm and a minimized UV-active defective spot rate ranging from 0.1 to 1 percent.

    摘要翻译： 为了提高HID灯的能量平衡，石英燃烧器，优选其内部，通过交替地施加至少由氧化钛和氧化硅制成的非晶薄层，涂覆有一般的化学计量的TiO 通过等离子体脉冲化学气相沉积（PICVD）方法在高功率密度和100°至400°C范围内提高的衬底温度下， 使用范围从1nm /秒到100nm / sec的小增长率，以便形成厚度小于1200nm的干涉层系统和0.1至1％范围内的最小化UV有源缺陷点率。