Formulations for environmentally friendly photoresist film layers
    1.
    发明授权
    Formulations for environmentally friendly photoresist film layers 有权
    环保光致抗蚀剂膜层的配方

    公开(公告)号:US08394575B2

    公开(公告)日:2013-03-12

    申请号:US12894930

    申请日:2010-09-30

    IPC分类号: G03F7/004

    CPC分类号: G03F7/038 G03F7/0045

    摘要: Environmentally friendly thick film layers for a micro-fluid ejection head and micro-fluid ejection heads are disclosed. The environmentally friendly thick film layer includes a negative photoresist layer derived from a composition comprising a multi-functional epoxy compound, a low molecular weight polymeric difunctional epoxy compound, a monomeric difunctional epoxy compound, a methide-based photoacid generator that does not contain antimony, a chromophore and an aryl ketone solvent. Optionally the photoresist layer contains an adhesion enhancer. The negative photoresist layer is environmentally friendly and provides good resolution, well defined critical dimensions, straight side walls, and a large processing window.

    摘要翻译: 公开了用于微流体喷射头和微流体喷射头的环保厚膜层。 环保厚膜层包括衍生自包含多官能环氧化合物,低分子量聚合双官能环氧化合物,单体双官能环氧化合物,不含锑的甲基化光酸产生剂的组合物的负性光致抗蚀剂层, 发色团和芳基酮溶剂。 任选地,光致抗蚀剂层含有粘合增强剂。 负光致抗蚀剂层是环境友好的并且提供良好的分辨率,良好限定的临界尺寸,直的侧壁和大的加工窗口。

    FORMULATIONS FOR ENVIRONMENTALLY FRIENDLY PHOTORESIST FILM LAYERS
    2.
    发明申请
    FORMULATIONS FOR ENVIRONMENTALLY FRIENDLY PHOTORESIST FILM LAYERS 有权
    环境友好的光电薄膜层的配方

    公开(公告)号:US20120082933A1

    公开(公告)日:2012-04-05

    申请号:US12894930

    申请日:2010-09-30

    IPC分类号: G03F7/004

    CPC分类号: G03F7/038 G03F7/0045

    摘要: Environmentally friendly thick film layers for a micro-fluid ejection head and micro-fluid ejection heads are disclosed. The environmentally friendly thick film layer includes a negative photoresist layer derived from a composition comprising a multi-functional epoxy compound, a low molecular weight polymeric difunctional epoxy compound, a monomeric difunctional epoxy compound, a methide-based photoacid generator that does not contain antimony, a chromophore and an aryl ketone solvent. Optionally the photoresist layer contains an adhesion enhancer. The negative photoresist layer is environmentally friendly and provides good resolution, well defined critical dimensions, straight side walls, and a large processing window.

    摘要翻译: 公开了用于微流体喷射头和微流体喷射头的环保厚膜层。 环保厚膜层包括衍生自包含多官能环氧化合物,低分子量聚合双官能环氧化合物,单体双官能环氧化合物,不含锑的甲基化光酸产生剂的组合物的负性光致抗蚀剂层, 发色团和芳基酮溶剂。 任选地,光致抗蚀剂层含有粘合增强剂。 负光致抗蚀剂层是环境友好的并且提供良好的分辨率,良好限定的临界尺寸,直的侧壁和大的加工窗口。

    Spray coatable adhesive for bonding silicon dies to rigid substrates
    3.
    发明授权
    Spray coatable adhesive for bonding silicon dies to rigid substrates 有权
    用于将硅模具粘合到刚性基材上的喷涂可涂层粘合剂

    公开(公告)号:US08785524B2

    公开(公告)日:2014-07-22

    申请号:US13168063

    申请日:2011-06-24

    IPC分类号: C08K5/06 C08K5/07 C08L63/02

    摘要: A spray coatable adhesive composition used for bonding silicon dies to a rigid substrate, preferable a silicon substrate is disclosed. The adhesive composition includes an epoxy based resin, a thermal acid generator, a photoacid generator and a solvent. The epoxy based resin includes a mixture of a solid bisphenol A epoxy resin and a liquid or semi-liquid hydrogenated bisphenol A epoxy resin at a weight ratio ranging from about 80:20 to about 65:35. The adhesive composition has a low viscosity which allows it to be spray coated on a rigid substrate and form thin film adhesive which allows silicon dies to be bonded with precise placement on the silicon substrate.

    摘要翻译: 公开了一种用于将硅模具接合到刚性基板的喷涂可涂层粘合剂组合物,优选的是硅衬底。 粘合剂组合物包括环氧树脂,热酸发生剂,光致酸产生剂和溶剂。 环氧基树脂包括固体双酚A环氧树脂和液体或半液体氢化双酚A环氧树脂的混合物,其重量比为约80:20至约65:35。 粘合剂组合物具有低粘度,其允许将其喷涂在刚性基材上并形成薄膜粘合剂,其允许将硅模具精确地放置在硅基材上。

    SPRAY COATABLE ADHESIVE FOR BONDING SILICON DIES TO RIGID SUBSTRATES
    4.
    发明申请
    SPRAY COATABLE ADHESIVE FOR BONDING SILICON DIES TO RIGID SUBSTRATES 有权
    用于将硅胶粘结到刚性基材上的喷涂胶粘剂

    公开(公告)号:US20110319513A1

    公开(公告)日:2011-12-29

    申请号:US13168063

    申请日:2011-06-24

    IPC分类号: C09J163/00

    摘要: A spray coatable adhesive composition used for bonding silicon dies to a rigid substrate, preferable a silicon substrate is disclosed. The adhesive composition includes an epoxy based resin, a thermal acid generator, a photoacid generator and a solvent. The epoxy based resin includes a mixture of a solid bisphenol A epoxy resin and a liquid or semi-liquid hydrogenated bisphenol A epoxy resin at a weight ratio ranging from about 80:20 to about 65:35. The adhesive composition has a low viscosity which allows it to be spray coated on a rigid substrate and form thin film adhesive which allows silicon dies to be bonded with precise placement on the silicon substrate.

    摘要翻译: 公开了一种用于将硅模具接合到刚性基板的喷涂可涂层粘合剂组合物,优选的是硅衬底。 粘合剂组合物包括环氧树脂,热酸发生剂,光致酸产生剂和溶剂。 环氧基树脂包括固体双酚A环氧树脂和液体或半液体氢化双酚A环氧树脂的混合物,其重量比为约80:20至约65:35。 粘合剂组合物具有低粘度,其允许将其喷涂在刚性基材上并形成薄膜粘合剂,其允许将硅模具精确地放置在硅基材上。