公开(公告)号：US08518832B1

公开(公告)日：2013-08-27

申请号：US13169588

申请日：2011-06-27

申请人： Xiaoyu Yang ,  Xianzhong Zeng ,  Yan Chen ,  Yunhe Huang ,  Jinqiu Zhang ,  Yang Xiang ,  Ching-Huang Lu

发明人： Xiaoyu Yang ,  Xianzhong Zeng ,  Yan Chen ,  Yunhe Huang ,  Jinqiu Zhang ,  Yang Xiang ,  Ching-Huang Lu

IPC分类号： H01L21/311 ,  H01L21/461

CPC分类号： B81C1/00849 ,  B81B2203/0118 ,  B81C1/0015 ,  B81C2201/0132 ,  G03F7/40 ,  H01L21/31133

摘要： A process is provided for etching a mask layer and removal of residue from a structure having an area sheltered from directional etching. The structure has a shape that forms a silhouette area obstructed from being etched by anisotropic bombardment originating from a first direction, and a mask formed over the mask layer over the structure; A first etch process removes at least a part of the mask layer and retains at least a part of mask layer in the sheltered area. A second etch process removes at least a part of the mask layer in the sheltered area by hydrogen based microwave plasma etching.

摘要翻译： 提供了一种用于蚀刻掩模层并从具有从定向蚀刻遮蔽的区域的结构中除去残余物的方法。 该结构具有形成通过来自第一方向的各向异性轰击而被阻挡而不被蚀刻的轮廓区域的形状，以及在该结构上形成在掩模层上的掩模; 第一蚀刻工艺去除掩模层的至少一部分并且将掩模层的至少一部分保留在遮蔽区域中。 第二蚀刻工艺通过基于氢的微波等离子体蚀刻去除遮蔽区域中的掩模层的至少一部分。

公开(公告)号：US09202480B2

公开(公告)日：2015-12-01

申请号：US12579316

申请日：2009-10-14

申请人： Xiaohai Xiang ,  Yun-Fei Li ,  Jinqiu Zhang ,  Hongping Yuan ,  Xianzhong Zeng ,  Hai Sun

发明人： Xiaohai Xiang ,  Yun-Fei Li ,  Jinqiu Zhang ,  Hongping Yuan ,  Xianzhong Zeng ,  Hai Sun

IPC分类号： B44C1/22 ,  C03C15/00 ,  H01L21/4763 ,  G11B5/31 ,  G11B5/127

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  Y10T428/11

摘要： Various embodiments of the subject disclosure provide a double patterning process that uses two patterning steps to produce a write structure having a nose shape with sharp corners. In one embodiment, a method for forming a write structure on a multi-layer structure comprising a substrate and an insulator layer on the substrate is provided. The method comprises forming a hard mask layer over the insulator layer, performing a first patterning process to form a pole and yoke opening in the hard mask layer, performing a second patterning process to remove rounded corners of the pole and yoke opening in the hard mask layer, removing a portion of the insulator layer corresponding to the pole and yoke opening in the hard mask layer to form a trench in the insulator layer, and filling the trench with a magnetic material.

摘要翻译： 本发明公开的各种实施例提供一种双重图案化工艺，其使用两个图案化步骤来产生具有尖角的鼻子形状的写入结构。 在一个实施例中，提供了一种用于在包括衬底和衬底上的绝缘体层的多层结构上形成写结构的方法。 该方法包括在绝缘体层上形成硬掩模层，执行第一图案化工艺以在硬掩模层中形成极和轭开口，执行第二图案化处理以去除硬掩模中的极和轭开口的圆角 去除与硬掩模层中的极和轭开口相对应的绝缘体层的一部分，以在绝缘体层中形成沟槽，并用磁性材料填充沟槽。

公开(公告)号：US08563146B1

公开(公告)日：2013-10-22

申请号：US13169710

申请日：2011-06-27

申请人： Jinqiu Zhang ,  Ying Hong ,  Hai Sun ,  Hongping Yuan ,  Guanghong Luo ,  Xiaoyu Yang ,  Hongmei Han ,  Lingyun Miao

发明人： Jinqiu Zhang ,  Ying Hong ,  Hai Sun ,  Hongping Yuan ,  Guanghong Luo ,  Xiaoyu Yang ,  Hongmei Han ,  Lingyun Miao

IPC分类号： G11B5/33

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3163

摘要： A method for fabricating a magnetic transducer having an air-bearing surface (ABS). An underlayer having a first and second regions and a bevel connecting these regions is provided. The first region is thicker and closer to the ABS than the second region. An intermediate layer conformal with the underlayer is provided. A hard mask layer having a top surface perpendicular to the ABS is formed on the intermediate layer. Part of the hard mask and intermediate layers are removed to provide a trench. The trench has a bottom surface and sidewalls having a first angle between the bottom surface and the intermediate layer and a second angle corresponding to the hard mask layer. A pole is provided in the trench. The pole has a pole tip, a yoke distal, and a bottom bevel. At least the yoke includes sidewalls having sidewall angles corresponding to the first and second angles.

摘要翻译： 一种制造具有空气轴承表面（ABS）的磁换能器的方法。 提供具有第一和第二区域的底层以及连接这些区域的斜面。 第一区域比第二区域更厚且更接近ABS。 提供与底层共形的中间层。 在中间层上形成具有垂直于ABS的顶表面的硬掩模层。 除去硬掩模和中间层的一部分以提供沟槽。 沟槽具有底表面和在底表面和中间层之间具有第一角度的侧壁和对应于硬掩模层的第二角度。 在沟槽中设置一个极点。 杆具有极尖，轭远端和底斜面。 至少轭包括具有对应于第一和第二角度的侧壁角的侧壁。

公开(公告)号：US08451563B1

公开(公告)日：2013-05-28

申请号：US13331208

申请日：2011-12-20

申请人： Jinqiu Zhang ,  Feng Liu ,  Shaoping Li ,  Ming Sun

发明人： Jinqiu Zhang ,  Feng Liu ,  Shaoping Li ,  Ming Sun

IPC分类号： G11B5/17 ,  G11B5/127

CPC分类号： G11B5/112 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163 ,  Y10T29/49044

摘要： A method fabricates a side shield for a magnetic transducer having a nonmagnetic layer and an ABS location corresponding to an ABS. The nonmagnetic layer has a pole trench therein. The pole trench has a shape and location corresponding to the pole. A wet etchable layer is deposited. Part of the wet etchable layer resides in the pole trench. A pole is formed. The pole has a bottom and a top wider than the bottom in the pole tip region. Part of the pole in the pole tip region is in the pole trench on at least part of the wet etchable layer. At least parts of the wet etchable layer and the nonmagnetic layer are removed, forming an air bridge. The air bridge is between part of the pole at the ABS location and an underlying layer. Side shield layer(s) that substantially fill the air bridge are deposited.

摘要翻译： 一种制造用于具有对应于ABS的非磁性层和ABS位置的磁换能器的侧屏蔽的方法。 非磁性层在其中具有极沟槽。 极沟具有对应于极的形状和位置。 沉积湿蚀刻层。 湿蚀刻层的一部分位于极沟槽中。 一个极点形成。 电极具有底部和顶部宽于电极尖端区域中的底部。 极尖区域中的极的一部分在至少部分湿蚀刻层的极沟中。 去除湿蚀刻层和非磁性层的至少一部分，形成空气桥。 空气桥在ABS位置的极点的一部分和下层之间。 基本上填充空气桥的侧面屏蔽层被沉积。

公开(公告)号：US08018678B1

公开(公告)日：2011-09-13

申请号：US12324442

申请日：2008-11-26

申请人： Jinqiu Zhang ,  Tsung Yuan Chen ,  Steven C. Rudy

发明人： Jinqiu Zhang ,  Tsung Yuan Chen ,  Steven C. Rudy

IPC分类号： G11B5/147

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163 ,  G11B5/3166 ,  G11B5/3169

摘要： A method for providing a perpendicular magnetic recording (PMR) head is disclosed. The method comprises: providing a stop layer; providing an insulating layer over the stop layer; forming a pole trench in the insulating layer by performing a reactive ion etching (RIE) process in the insulating layer over the stop layer; forming an electronic lapping guide (ELG) in the insulating layer by performing the RIE process in the insulating layer over the stop layer; and providing a PMR pole in which at least a portion of the PMR pole resides in the pole trench.

摘要翻译： 公开了一种用于提供垂直磁记录（PMR）头的方法。 该方法包括：提供停止层; 在停止层上提供绝缘层; 通过在所述绝缘层上在停止层上进行反应离子蚀刻（RIE）工艺，在所述绝缘层中形成极沟槽; 通过在所述阻挡层上的所述绝缘层中进行RIE处理，在所述绝缘层中形成电子研磨导向器（ELG）; 以及提供PMR极，其中PMR极的至少一部分位于极沟中。

公开(公告)号：US07286329B1

公开(公告)日：2007-10-23

申请号：US10788656

申请日：2004-02-27

申请人： Yingjian Chen ,  Wei Zhang ,  Mohamad T. Krounbi ,  Satoru Araki ,  Jinqiu Zhang

发明人： Yingjian Chen ,  Wei Zhang ,  Mohamad T. Krounbi ,  Satoru Araki ,  Jinqiu Zhang

IPC分类号： G11B5/39

CPC分类号： G01R31/318357 ,  G11B5/3932

摘要： A magnetic sensor is disclosed having a shallow contiguous junction. Such a sensor is can greatly increase yield for mass-produced heads, especially for large wafers. The magnetic bias layers can be aligned with a free layer of the sensor, improving performance. Milling may be terminated prior to penetration of an antiferromagnetic layer, so that for example the antiferromagnetic layer may extend significantly beyond the free and pinned layers of the sensor.

摘要翻译： 公开了一种具有浅连续结的磁传感器。 这种传感器可以大大提高批量生产头部的产量，特别是对于大型晶片。 磁偏置层可以与传感器的自由层对准，从而提高性能。 铣削可以在穿透反铁磁层之前终止，使得例如反铁磁层可以显着地延伸超过传感器的自由和固定层。

公开(公告)号：US08663915B2

公开(公告)日：2014-03-04

申请号：US12595824

申请日：2008-04-11

申请人： Lance D. Miller ,  Bing Lim ,  Jinqiu Zhang

发明人： Lance D. Miller ,  Bing Lim ,  Jinqiu Zhang

IPC分类号： C12Q1/68

CPC分类号： G01N33/57423 ,  A61K31/7088 ,  A61K38/1709 ,  G01N33/57407 ,  G01N33/57415 ,  G01N33/57419 ,  G01N33/57492 ,  G01N2500/04 ,  G01N2800/50

摘要： The present invention relates to methods of controlling tumorigenesis, including preventing, inhibiting, arresting or reversing tumorigenesis. The present invention also provides methods of treatment, prevention and diagnosis of neoblastoma, including cancer, such as metastatic cancer. In one method one or more cells having a predisposition to turn tumorigenic are identifyied. In the one or more cells an altered amount, an altered subcellular localisation or an altered activity of a Rab binding protein is detected. In a method of diagnosing the risk of developing a neoplasmt at least one of the expression level, the activity level and the subcellular localisation of a Rab binding protein is determined. In an in-vitro method of identifying a compound capable of forming a complex with a Rab binding protein the components that form the respective complex are contacted with each other. In a method of determining whether a neoplasm is sensitive to an alteration of intracellular calcium levels, at least one of the expression and the activity of a Rab binding protein is determined. An altered expression or an altered activity of the Rab binding protein is an indication that the neoplasm is sensitive to an alteration of intracellular calcium levels.

摘要翻译： 本发明涉及控制肿瘤发生的方法，包括预防，抑制，阻止或逆转肿瘤发生。 本发明还提供了治疗，预防和诊断包括癌症在内的新生血管瘤如转移性癌症的方法。 在一种方法中，鉴定出具有转变成致瘤性倾向的一种或多种细胞。 在一个或多个细胞中，检测到改变的量，改变的亚细胞定位或改变的Rab结合蛋白的活性。 在诊断发展赘生物的风险的方法中，确定Rab结合蛋白的表达水平，活性水平和亚细胞定位中的至少一个。 在鉴定能够与Rab结合蛋白形成复合物的化合物的体外方法中，形成相应复合物的组分彼此接触。 在确定肿瘤是否对细胞内钙水平的改变敏感的方法中，确定Rab结合蛋白的表达和活性中的至少一种。 Rab结合蛋白的改变的表达或改变的活性表明肿瘤对细胞内钙水平的改变敏感。

公开(公告)号：US08277669B1

公开(公告)日：2012-10-02

申请号：US12643954

申请日：2009-12-21

申请人： Tsung Yuan Chen ,  Yimin Guo ,  Jinqiu Zhang ,  Ut Tran

发明人： Tsung Yuan Chen ,  Yimin Guo ,  Jinqiu Zhang ,  Ut Tran

IPC分类号： B44C1/22

CPC分类号： G11B5/3116 ,  G11B5/315 ,  G11B5/3163 ,  Y10T29/49046

摘要： A method and system for providing a pole of magnetic transducer having an air-bearing surface (ABS) are described. Leading shield and planarization stop layers are provided. Portions of the planarization stop and shield layers distal from the ABS location are removed, providing a depression forming a bevel. The bevel has an angle greater than zero and less than ninety degrees. An intermediate layer having a top surface substantially perpendicular to the ABS location is provided. Part of the intermediate layer is removed, forming a trench having a bottom corresponding to the leading shield and a location and profile corresponding to the pole. A nonmagnetic layer is provided at least partially in the trench. The pole with a leading edge bevel corresponding to the bevel is provided in the trench. A capping layer covering the pole is provided, at least part of the intermediate layer removed, and a wrap-around shield provided.

摘要翻译： 描述了一种用于提供具有空气轴承表面（ABS）的磁换能器极的方法和系统。 提供了领先的屏蔽和平坦化停止层。 除去远离ABS位置的平坦化停止和屏蔽层的部分，提供形成斜面的凹陷。 斜面角度大于零，小于九十度。 提供具有基本上垂直于ABS位置的顶表面的中间层。 中间层的一部分被去除，形成具有对应于前屏蔽的底部的沟槽和对应于极的位置和轮廓。 至少部分地在沟槽中提供非磁性层。 在沟槽中设置有与斜面相对应的前缘斜面的极。 提供覆盖极的覆盖层，去除中间层的至少一部分和设置的环绕护罩。

公开(公告)号：US08104166B1

公开(公告)日：2012-01-31

申请号：US10741857

申请日：2003-12-19

申请人： Jinqiu Zhang ,  Ming Zhao ,  Mohamad T. Krounbi ,  Henry Yuan ,  Lien-Chang Wang

发明人： Jinqiu Zhang ,  Ming Zhao ,  Mohamad T. Krounbi ,  Henry Yuan ,  Lien-Chang Wang

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3163 ,  B82Y25/00 ,  G01R33/093 ,  G11B5/398 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method is provided for fabricating a read element with leads that overlay a top surface of a sensor of the read element. The method includes forming a mask over a sensor layer, then using the mask to define the sensor from the sensor layer. The mask is then narrowed and a lead layer is formed that overlays both ends of the top surface of the sensor without covering a center portion of the top surface.

摘要翻译： 提供了一种制造读取元件的方法，该元件具有覆盖读取元件的传感器的顶表面的引线。 该方法包括在传感器层上形成掩模，然后使用掩模从传感器层定义传感器。 然后使掩模变窄，并且形成覆盖传感器顶表面两端的引线层，而不覆盖顶表面的中心部分。

公开(公告)号：US07639457B1

公开(公告)日：2009-12-29

申请号：US10788765

申请日：2004-02-27

申请人： Yingjian Chen ,  Wei Zhang ,  Jinqiu Zhang ,  Haifeng Wang ,  Satoru Araki ,  Mohamad T. Krounbi

发明人： Yingjian Chen ,  Wei Zhang ,  Jinqiu Zhang ,  Haifeng Wang ,  Satoru Araki ,  Mohamad T. Krounbi

IPC分类号： G11B5/39 ,  G11B5/127

CPC分类号： G11B5/3909 ,  B82Y10/00 ,  B82Y25/00 ,  G01R33/098 ,  G11B5/3163 ,  G11B5/3932 ,  G11B2005/3996 ,  H01F10/3272

摘要： A magnetic sensor is disclosed comprising an antiferromagnetic layer; a first ferromagnetic layer disposed over the antiferromagnetic layer, the first ferromagnetic layer having a magnetization that is pinned by the antiferromagnetic layer; a second ferromagnetic layer disposed over the first ferromagnetic layer, the second ferromagnetic layer having a magnetization that rotates due to an applied magnetic field; a third ferromagnetic layer disposed adjacent to an end of the second ferromagnetic layer, the third ferromagnetic layer having a primarily in-plane magnetization providing a magnetic field to stabilize the end of the second ferromagnetic layer; an amorphous, metallic, nonmagnetic underlayer disposed adjacent to the antiferromagnetic layer; and a crystalline seed layer disposed between the underlayer and the third ferromagnetic layer, the seed layer having a crystalline structure that promotes the in-plane magnetization of the third ferromagnetic layer.

摘要翻译： 公开了一种磁传感器，其包括反铁磁层; 设置在所述反铁磁层上的第一铁磁层，所述第一铁磁层具有由所述反铁磁层固定的磁化; 设置在所述第一铁磁层上的第二铁磁层，所述第二铁磁层具有由施加的磁场旋转的磁化; 与所述第二铁磁层的端部相邻设置的第三铁磁层，所述第三铁磁层具有主要的面内磁化，提供磁场以稳定所述第二铁磁层的端部; 邻近反铁磁层设置的无定形金属非磁性底层; 以及设置在所述底层和所述第三铁磁层之间的结晶种子层，所述种子层具有促进所述第三铁磁层的平面内磁化的晶体结构。