Abstract:
Probe including a cantilever having a movable end and formed from an elastic body, an electroconductive sensing needle arranged at the movable end of the cantilever, and a field effect transistor arranged at the movable end of the cantilever and having a gate electrode electronically connected to the electroconductive sensing needle. The probe may further comprise another field effect transistor formed on the cantilever and having its drain electrically connected to the sensing needle. The probe may be used in an information recording/reproduction apparatus.
Abstract:
A probe for detecting minute physical behavior comprises a lever member, particularly in the form of a cantilever, formed of a monocrystalline silicon layer and a tip in the form of one-end-supported beam which is bowed and formed upon the lever member. The probe is manufactured by forming a film of a material with low density and high elasticity on the silicon layer of an SOI substrate, then oxidizing part of the silicon layer and removing the oxidized portion to form a tip with the material as a so-called bird's beak, and finally the SOI substrate is worked to form the cantilever shape of the lever member. The probe can be used for an information recording/reproducing device with good traceability even in high speed scanning over a recording medium.
Abstract:
A projection having a micro-aperture is formed by formiNg a dent having a pointed front end on a substrate, then depositing a light blocking material on the substrate except the front end of the dent, and peeling off the light blocking material from the substrate. The projection is suited as an optical probe of scanning near-field optical microscope (SNOM) for detecting or emitting light through the micro-aperture. For this purpose, the projection is formed on the end of a cantilever or on the end of an optical fiber. The dent having a pointed front end can be formed typically by patterned crystal-axis-anisotropic etching of a silicon substrate and subsequent thermal oxidation of the silicon surface.
Abstract:
A projection having a micro-aperture on the tip is formed. Firstly, a projection or a dent is formed on a substrate. Then, a film is formed on the surface of the projection or of the opposite side of the dent so as to make the film thin at and near the tip of the projection or the dent. The film is subsequently etched to expose the tip, which is further etched to produce a micro-aperture. Preferably, the film is formed of a thermo-plastic material such as glass, especially phospho-silicate glass to produce a viscous flow under heated conditions. The probe having a micro-aperture can be used for a surface scanner, an aligner or an information processor.
Abstract:
An image forming apparatus includes an image bearing member, a medium transport member, an image transfer member, a first detection member detecting widthwise deviation of the image bearing member, a first deviation correcting member tiltable relative to the width direction and supporting the image bearing member, a first correction control section tilting the first deviation correcting member to correct deviation of the image bearing member, a second detection member detecting widthwise deviation of the transport member, a second deviation correcting member tiltable relative to the width direction and supporting the transport member, and a second correction control section tilting the second deviation correcting member to correct deviation of the transport member. A width-direction moving amount of the image bearing member per unit time when the first deviation correcting member is tilted is larger than that of the transport member per unit time when the second deviation correcting member is tilted.
Abstract:
An oscillator device includes at least one movable element supported for oscillatory motion around a rotational axis, and a first rectifying member for suppressing generation of a spiral airflow during oscillation of the movable element, the first rectifying member being provided to occupy a space of at least a portion of a spiral airflow generating region which might otherwise be created when the first rectifying member is not provided there.
Abstract:
A plurality of pixel portions (12) are formed on a silicon substrate (11). A photoelectric converter portion (10) constituting each of the pixel portions (12) is electrically isolated by an element isolation portion (13) comprising an insulating film formed on the silicon substrate (11). The photoelectric converter portion (10) partitioned by the element isolation portion (13) is so formed that a crystal orientation of the sides in contact with the element isolation portion (13) corresponds to a direction. This makes it possible to reduce dark current caused by stress in the vicinity of the interface of the element isolation portion (13) and maintain high sensitivity even if the pixel portions (12) are made smaller in size.
Abstract:
An optical deflector includes an oscillating system and a driving system for driving the oscillating system, the oscillating system including a first oscillator, a first torsion spring, a second oscillator, a second torsion spring and a supporting member, the first oscillator including a first movable element having a light deflecting element configured to deflect light, the second oscillator including a second movable element having a mass adjusting member configured to adjust a mass, wherein the first movable element is resiliently supported by the second movable element through the first torsion spring, for torsional oscillation about an oscillation axis, wherein the second movable element is resiliently supported by the supporting member through the second torsional spring, for torsional oscillation about the oscillation axis, and wherein the oscillating system has at least two natural oscillation modes having different frequencies, about the oscillation axis.
Abstract:
An oscillator device includes a supporting base plate, a supporting member, a movable plate supported by the supporting member for oscillating motion relative to the supporting base plate, a first functional device having a first function, a second functional device having a second function, a first wiring connected to the first functional device and formed on a first surface of the supporting member, and a second wiring connected to the second functional device and formed on a second surface of the supporting member different from the first surface thereof where the first wiring is formed, such that the width of the wirings on the supporting member can be made wide.
Abstract:
The tiltable-body apparatus including a frame member, a tiltable body, and a pair of torsion springs having a twisting longitudinal axis. The torsion springs are disposed along the twisting longitudinal axis opposingly with the tiltable body being interposed, support the tiltable body flexibly and rotatably about the twisting longitudinal axis relative to the frame member, and include a plurality of planar portions, compliant directions of which intersect each other when viewed along a direction of the twisting longitudinal axis. A center of gravity of the tiltable body is positioned on the twisting longitudinal axis of the torsion springs.