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公开(公告)号：US07224432B2
公开(公告)日：2007-05-29
申请号：US11127292
申请日：2005-05-12
CPC分类号： G03F7/70766 , H01L21/682
摘要： A stage device including a movable stage, a plate-like base which supports the stage, and a mass body which moves to cancel a reaction force acting on the base according to a movement of the movable stage. The plate-like base has a plurality of surfaces, and the stage and mass body are supported by different ones of the surfaces of the plate-like base.
摘要翻译： 一种舞台装置，包括可移动舞台，支撑舞台的板状底座以及根据活动舞台的运动而移动以消除作用在底座上的反作用力的质量体。 板状基部具有多个表面，台状体和主体由板状基体的不同表面支撑。
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公开(公告)号：US20050254036A1
公开(公告)日：2005-11-17
申请号：US11127292
申请日：2005-05-12
CPC分类号： G03F7/70766 , H01L21/682
摘要： A stage device includes a movable stage, a base which supports the stage, and a mass body which moves to cancel a reaction force acting on the base as the stage moves. The base has a plurality of surfaces, and the stage and mass body are supported by different ones of the surfaces of the base. In addition, when the mass body is arranged in the base, the stage device can be more downsized.
摘要翻译： 舞台装置包括可移动舞台，支撑舞台的底座以及当舞台移动时移动以抵消作用在底座上的反作用力的质量体。 基座具有多个表面，并且台架和质量体由基座的不同表面支撑。 此外，当质量体布置在基座中时，能够使载物台装置更小型化。
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公开(公告)号：US20050219501A1
公开(公告)日：2005-10-06
申请号：US11094311
申请日：2005-03-31
CPC分类号： G03F7/70858 , G03B27/58 , G03F7/70716
摘要： A moving element to be propelled across a stator includes a coil unit, including coils, for generating a force to propel the moving unit, and a cooling unit for cooling the coil unit. A thermal conductive member, arranged between the cooling unit and the coil unit, transmits heat away from the coil unit. In addition, a housing unit houses the coil unit, the cooling unit and the thermal conductive member.
摘要翻译： 要跨越定子推进的移动元件包括用于产生推动移动单元的力的线圈单元，以及用于冷却线圈单元的冷却单元。 布置在冷却单元和线圈单元之间的导热构件将热量从线圈单元传递出去。 此外，壳体单元容纳线圈单元，冷却单元和导热构件。
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公开(公告)号：US07301602B2
公开(公告)日：2007-11-27
申请号：US11094311
申请日：2005-03-31
CPC分类号： G03F7/70858 , G03B27/58 , G03F7/70716
摘要： A moving element to be propelled across a stator includes a coil unit, including coils, for generating a force to propel the moving unit, and a cooling unit for cooling the coil unit. A thermal conductive member, arranged between the cooling unit and the coil unit, transmits heat away from the coil unit. In addition, a housing unit houses the coil unit, the cooling unit and the thermal conductive member.
摘要翻译： 要跨越定子推进的移动元件包括用于产生推动移动单元的力的线圈单元，以及用于冷却线圈单元的冷却单元。 布置在冷却单元和线圈单元之间的导热构件将热量从线圈单元传递出去。 此外，壳体单元容纳线圈单元，冷却单元和导热构件。
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5.发明授权Stage apparatus, exposure system using the same, and device manufacturing method 失效舞台装置，使用其的曝光系统和装置制造方法公开(公告)号：US07391495B2
公开(公告)日：2008-06-24
申请号：US10820120
申请日：2004-04-08
CPC分类号： G03F7/70816 , G03F7/70716 , G03F7/70775 , G03F7/70875
摘要： A stage apparatus includes a base having a reference surface, a moving unit which moves along the reference surface, a static bearing which is provided in the moving unit and which supports the moving unit such that the moving unit can move along the reference surface, and a temperature controller which is provided in the moving unit and which controls the temperature of gas supplied to the static bearing. In the stage apparatus, air fluctuation in the measurement area of interferometers due to gas exhausted from the static bearing and/or distortion caused by heat transmitted to a retainer of a target is suppressed, and the stage positioning accuracy is thereby increased.
摘要翻译： 舞台装置包括具有参考面的基座，沿着基准面移动的移动单元，设置在移动单元中并支撑移动单元的静态轴承，使得移动单元可以沿着参考表面移动，以及 温度控制器设置在移动单元中并且控制供应给静态轴承的气体的温度。 在舞台装置中，抑制了由静电轴承排出的气体的干涉仪的测量区域的空气变动和/或传递到目标的保持器的热引起的变形，从而增加了台的定位精度。
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6.发明授权Plane motor device with surrounding member surrounding coil unit and with cooling channel provided within surrounding member 失效平面电机装置，围绕线圈单元的周围构件，并在周围构件内设有冷却通道公开(公告)号：US07408276B2
公开(公告)日：2008-08-05
申请号：US10832361
申请日：2004-04-27
IPC分类号： H02K41/00
CPC分类号： H02K41/03 , H02K1/32 , H02K5/20 , H02K16/00 , H02K2201/18
摘要： A plane motor device that includes a stator unit, a movable unit movable along a plane above the stator unit, first and second coil units at one or both of the movable unit and the stator unit, in which coil units a current flows for driving the coil unit, and an enclosure partitioned into a plurality of separate regions. The enclosure encloses the first and second coil units in two respective regions of the plurality of separate regions. Each of the two regions has a cooling channel through which cooling refrigerant flows separately from the cooling channel of the other region.
摘要翻译： 一种平面电动机装置，包括定子单元，可沿着定子单元上方的平面移动的可移动单元，在可移动单元和定子单元中的一个或两个处的第一和第二线圈单元，其中电流流过的线圈单元用于驱动 线圈单元和分隔成多个单独区域的外壳。 外壳将第一和第二线圈单元包围在多个分离区域的两个相应区域中。 两个区域中的每一个具有冷却通道，冷却制冷剂通过该冷却通道与另一区域的冷却通道分开地流动。
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公开(公告)号：US08102500B2
公开(公告)日：2012-01-24
申请号：US11751225
申请日：2007-05-21
申请人： Hitoshi Sato , Yasuhito Sasaki , Keiji Emoto
发明人： Hitoshi Sato , Yasuhito Sasaki , Keiji Emoto
CPC分类号： G03F7/70858 , G03F7/70725
摘要： A stage device includes a base, and a stage movable portion being movable along a surface of the base. An interferometer measures a position of the stage movable portion, and at least one of a piping element and a wiring element is connected to the stage movable portion. An auxiliary member holds the piping element or the wiring element. The auxiliary member surrounds at least a portion of the piping element or the wiring element and is flexible, to be bent in accordance with the bending of the piping element or the wiring element, and a heat insulating material, held by the auxiliary member, reduces heat to be transferred from the piping element or the wiring element to a space through which measurement light of the interferometer passes.
摘要翻译： 舞台装置包括底座以及可沿着底座的表面移动的舞台可动部分。 干涉仪测量舞台可动部分的位置，并且管道元件和配线元件中的至少一个连接到舞台可移动部分。 辅助构件保持管道元件或布线元件。 辅助构件围绕管道元件或布线元件的至少一部分，并且是柔性的，根据管道元件或布线元件的弯曲而弯曲，并且由辅助构件保持的隔热材料减少 要从管道元件或布线元件转移到干涉仪的测量光通过的空间。
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8.发明授权Stage device including a heat insulating sheet supported by an auxiliary member 有权舞台装置包括由辅助构件支撑的隔热片公开(公告)号：US08891054B2
公开(公告)日：2014-11-18
申请号：US13325185
申请日：2011-12-14
申请人： Hitoshi Sato , Yasuhito Sasaki , Keiji Emoto
发明人： Hitoshi Sato , Yasuhito Sasaki , Keiji Emoto
CPC分类号： G03F7/70858 , G03F7/70725
摘要： A stage device includes a base and a stage movable portion that is movable along a surface of the base. An interferometer measures a position of the stage movable portion using measurement light. At least one of a piping element and a wiring element are connected to the stage movable portion. An auxiliary member, including a plurality of members connected with each other along an axial direction of the piping element, guides a bend of the at least one of the piping element and the wiring element. A plurality of heat insulating sheets are supported by the plurality of members of the auxiliary member. The plurality of heat insulating sheets are provided between a space through which the measurement light of the interferometer passes, and the at least one of the piping element and the wiring element.
摘要翻译： 舞台装置包括可沿基座的表面移动的基座和台可动部分。 干涉仪使用测量光来测量舞台可动部分的位置。 管道元件和配线元件中的至少一个连接到台可动部。 辅助构件包括沿着管道元件的轴向彼此连接的多个构件，引导管道元件和布线元件中的至少一个的弯曲部。 多个绝热片由辅助构件的多个构件支撑。 多个绝热片设置在干涉仪的测量光通过的空间与管道元件和布线元件中的至少一个之间。
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9.发明申请Stage device including a heat insulating sheet supported by an auxiliary member 审中-公开舞台装置包括由辅助构件支撑的隔热片公开(公告)号：US20120086931A1
公开(公告)日：2012-04-12
申请号：US13325185
申请日：2011-12-14
申请人： Hitoshi Sato , Yasuhito Sasaki , Keiji Emoto
发明人： Hitoshi Sato , Yasuhito Sasaki , Keiji Emoto
IPC分类号： G03B27/62
CPC分类号： G03F7/70858 , G03F7/70725
摘要： A stage device that includes a base. A stage movable portion is movable along a surface of the base. An interferometer measures a position of the stage movable portion using measurement light. At least one of a piping element and a wiring element are connected to the stage movable portion. An auxiliary member, including a plurality of members connected with each other, guides a bend of at least one of the piping element and the wiring element. A heat insulating sheet is supported by the auxiliary member. The heat insulating material is provided between a space through which the measurement light of the interferometer passes, and the at least one of the piping element and the wiring element.
摘要翻译： 包括基座的舞台装置。 平台可动部分可沿底座的表面移动。 干涉仪使用测量光来测量舞台可动部分的位置。 管道元件和配线元件中的至少一个连接到台可动部。 包括彼此连接的多个构件的辅助构件引导管道元件和布线元件中的至少一个的弯曲部。 隔热片由辅助构件支承。 绝热材料设置在干涉仪的测量光通过的空间与管道元件和布线元件中的至少一个之间。
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10.发明申请公开(公告)号：US20070273861A1
公开(公告)日：2007-11-29
申请号：US11751225
申请日：2007-05-21
申请人： Hitoshi Sato , Yasuhito Sasaki , Keiji Emoto
发明人： Hitoshi Sato , Yasuhito Sasaki , Keiji Emoto
IPC分类号： G03B27/58
CPC分类号： G03F7/70858 , G03F7/70725
摘要： A stage device including a base, a stage movable portion being movable along said base without contact thereto, an interferometer configured to measure a position of the stage movable portion, at least one of a piping element and a wiring element connected to the stage movable portion, and at least one of a heat insulating material and a heat collecting unit configured to reduce a heat to be transmitted from the piping element or wiring element to a space through which measurement light of the interferometer passes.
摘要翻译： 一种舞台装置，包括基座，舞台可移动部分可沿着所述基座移动而不与其接触;干涉仪，被配置为测量舞台可移动部分的位置，管道元件和连接到舞台可移动部分的配线元件中的至少一个 以及绝热材料和集热单元中的至少一种，其被配置为将从所述管道元件或布线元件传递的热量减少到所述干涉仪的测量光通过的空间。
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