公开(公告)号：US5656349A

公开(公告)日：1997-08-12

申请号：US725772

申请日：1991-07-02

申请人： Kenichi Gomi ,  Hideaki Tanaka ,  Hiroyuki Sugimoto ,  Shoichi Sawahata ,  Masaki Ohura ,  Yoshihiko Miyake ,  Yoshiki Kato ,  Hiroshi Yashiki ,  Youichi Inomata ,  Yoshihiro Moriguchi

发明人： Kenichi Gomi ,  Hideaki Tanaka ,  Hiroyuki Sugimoto ,  Shoichi Sawahata ,  Masaki Ohura ,  Yoshihiko Miyake ,  Yoshiki Kato ,  Hiroshi Yashiki ,  Youichi Inomata ,  Yoshihiro Moriguchi

IPC分类号： G11B5/41 ,  G11B5/60 ,  G11B5/72 ,  G11B5/82 ,  G11B5/84 ,  G11B5/66 ,  B05D5/12

CPC分类号： G11B5/6005 ,  G11B5/41 ,  G11B5/72 ,  G11B5/82 ,  G11B5/84 ,  Y10S428/90 ,  Y10T428/24355

摘要： A magnetic disk has a magnetic layer and a protective layer disposed on the magnetic layer. A multiplicity of lands having sizes within a predetermined range of sizes and generally equal heights within a predetermined range are formed on the surface of the protective layer at a density within a predetermined range. The lands serve to effectively remove contaminants attached to the floating surface of a magnetic head to ensure a desired sliding reliability and floating stability of the head during a long period of time even in the case of a high-density magnetic disk apparatus in which the extent of floating of the head is small. The reliability with which the magnetic disk apparatus operates is thereby improved. The lands are formed on the surface of the protective layer by a process of forming a mask of fine particles on the protective layer surface and etching the protective layer surface through this mask.

摘要翻译： 磁盘具有设置在磁性层上的磁性层和保护层。 在预定范围内的密度下，在保护层的表面上形成尺寸在预定范围内的大小和大致相同高度的尺寸的多个平台。 这些焊盘用于有效地去除附着在磁头的浮动表面上的污染物，以确保在长时间内所需的滑动可靠性和浮动稳定性，即使在高密度磁盘设备的情况下， 的头部浮动很小。 从而提高了磁盘装置的可靠性。 通过在保护层表面上形成微粒掩模并通过该掩模蚀刻保护层表面的工艺，在保护层的表面上形成焊盘。

公开(公告)号：US5690838A

公开(公告)日：1997-11-25

申请号：US460928

申请日：1995-06-05

申请人： Yoshihiro Moriguchi ,  Youichi Inomata ,  Hiroshi Yashiki ,  Yoshiki Kato ,  Kenichi Gomi ,  Hideaki Tanaka

发明人： Yoshihiro Moriguchi ,  Youichi Inomata ,  Hiroshi Yashiki ,  Yoshiki Kato ,  Kenichi Gomi ,  Hideaki Tanaka

IPC分类号： G11B5/60 ,  G11B5/72 ,  G11B5/84 ,  G11B23/50 ,  B44C1/22

CPC分类号： G11B5/6005 ,  G11B23/505 ,  G11B5/72 ,  G11B5/8408

摘要： A magnetic recording medium excellent in corrosion resistance and rubbing reliability is realized by forming a number of concavities and convexities on the surface of a protective layer formed on a substrate and applying dry etching with a noble gas after the formation of the concavities and convexities to form a modified layer having hydrophobic nature on the surface of the protective layer.

摘要翻译： 通过在形成在基板上的保护层的表面上形成多个凹凸并且在形成凹凸之后用惰性气体进行干蚀刻来实现耐腐蚀性和摩擦可靠性优异的磁记录介质，以形成 在保护层的表面上具有疏水性的改性层。

公开(公告)号：US5773124A

公开(公告)日：1998-06-30

申请号：US198592

申请日：1994-02-18

申请人： Fuminori Ishikawa ,  Hideaki Tanaka ,  Toshinori Hirano ,  Hiroko Saito ,  Kenichi Gomi ,  Hiroshi Yashiki ,  Youichi Inomata ,  Yoshihiro Moriguchi

发明人： Fuminori Ishikawa ,  Hideaki Tanaka ,  Toshinori Hirano ,  Hiroko Saito ,  Kenichi Gomi ,  Hiroshi Yashiki ,  Youichi Inomata ,  Yoshihiro Moriguchi

IPC分类号： G11B5/72

CPC分类号： G11B5/72 ,  Y10S428/90 ,  Y10S428/931 ,  Y10T428/24355 ,  Y10T428/24942 ,  Y10T428/24992 ,  Y10T428/30

摘要： This invention relates to the magnetic recording medium, its manufacturing method and the magnetic disk apparatus, in which the ferromagnetic thin film is formed on the substrate board, and the protective layer is provided on that. A Magnetic recording medium of the has at least one layer of the protective layer on the magnetic surface, which is characterized in that the surface of the protective layer is provided with the high noncontinuous large resistance layer, and the density of the surface of the protective layer is higher than other regions other than the said surface. The magnetic recording medium has the surface of the protective layer which contains at least one kind or more of the element of the inert gas element, the halogen element and hydrogen. Therefore, when making a lower flying height of the magnetic head is achieved, the slide durability over the long term is improved, particularly, the slide durability of the magnetic disk apparatus using the MR head can be improved.

摘要翻译： 磁记录介质及其制造方法和磁盘装置技术领域本发明涉及在基板上形成铁磁性薄膜的磁记录介质及其制造方法和磁盘装置，并且设置保护层。 磁性记录介质在磁性表面上具有至少一层保护层，其特征在于，保护层的表面设置有高不连续的大电阻层，并且保护层表面的密度 层比除了所述表面以外的其它区域高。 磁记录介质具有包含惰性气体元素，卤素元素和氢元素中的至少一种以上的保护层的表面。 因此，当实现磁头的较低飞行高度时，长期的滑动耐久性得到改善，特别是可以提高使用MR磁头的磁盘装置的滑动耐久性。

公开(公告)号：US5504646A

公开(公告)日：1996-04-02

申请号：US77874

申请日：1993-06-18

申请人： Hideaki Tanaka ,  Kenichi Gomi ,  Yoshihiko Miyake ,  Sigeru Sano ,  Youichi Inomata ,  Hiroshi Yashiki ,  Yoshiki Kato ,  Masaki Ohura

发明人： Hideaki Tanaka ,  Kenichi Gomi ,  Yoshihiko Miyake ,  Sigeru Sano ,  Youichi Inomata ,  Hiroshi Yashiki ,  Yoshiki Kato ,  Masaki Ohura

IPC分类号： G11B5/41 ,  G11B5/58 ,  G11B5/60 ,  G11B5/72 ,  G11B5/82 ,  G11B5/84 ,  G11B23/50

CPC分类号： G11B5/6005 ,  G11B23/505 ,  G11B5/72 ,  G11B5/82 ,  G11B5/8408 ,  G11B5/41 ,  G11B5/581 ,  Y10S428/90 ,  Y10T428/24355 ,  Y10T428/24537 ,  Y10T428/2457

摘要： There is provided a magnetic disk apparatus comprising: at least one magnetic disk having a magnetic layer and a surface protective layer on a substrate; a magnetic head which faces the magnetic disk in a rotating state with a micro gap and is supported by a slider; rotating means for rotating the magnetic disk; and a actuator for moving and positioning the magnetic head to a predetermined position on the magnetic disk, wherein a plurality of protrusions each having a flat surface are formed in at least a region on the surface of the magnetic disk where a contact start/stop operation can be executed. According to the above magnetic disk apparatus, since the frictional force between the disk and the head is small and the flying height of the head can be reduced and the good floating stability is obtained, so that the excellent recording and reproducing characteristics are derived. Further, protrusions are formed on the protective layer of the magnetic disk and the protrusion shapes are changed in a accordance with a radial position of the magnetic disk depending on the flying height of the magnetic head. According to the above magnetic disk apparatus, since the change of spacing can be set smaller than the change of the flying height, high recording density can be achieved.

摘要翻译： 提供一种磁盘装置，包括：在基板上具有磁性层和表面保护层的至少一个磁盘; 磁头，其在具有微小间隙的旋转状态下面对磁盘，并由滑块支撑; 用于旋转磁盘的旋转装置; 以及用于将磁头移动和定位到磁盘上的预定位置的致动器，其中在磁盘表面上的至少一个区域中形成有各自具有平坦表面的多个突起，其中接触开始/停止操作 可以执行。 根据上述磁盘装置，由于盘与头部之间的摩擦力小，能够降低头部的飞行高度，并且获得良好的浮动稳定性，从而导出良好的记录和再现特性。 此外，在磁盘的保护层上形成突起，并且根据磁头的飞行高度，根据磁盘的径向位置改变突起形状。 根据上述磁盘装置，由于可以将间隔的变化设定得小于飞行高度的变化，所以可以实现高的记录密度。

公开(公告)号：US5930073A

公开(公告)日：1999-07-27

申请号：US625159

申请日：1996-04-01

申请人： Hideaki Tanaka ,  Kenichi Gomi ,  Yoshihiko Miyake ,  Sigeru Sano ,  Youichi Inomata ,  Hiroshi Yashiki ,  Yoshiki Kato ,  Masaki Ohura

发明人： Hideaki Tanaka ,  Kenichi Gomi ,  Yoshihiko Miyake ,  Sigeru Sano ,  Youichi Inomata ,  Hiroshi Yashiki ,  Yoshiki Kato ,  Masaki Ohura

IPC分类号： G11B5/41 ,  G11B5/58 ,  G11B5/60 ,  G11B5/72 ,  G11B5/82 ,  G11B5/84 ,  G11B23/50 ,  G11B33/14

CPC分类号： G11B5/6005 ,  G11B23/505 ,  G11B5/72 ,  G11B5/82 ,  G11B5/8408 ,  G11B5/41 ,  G11B5/581 ,  Y10S428/90 ,  Y10T428/24355 ,  Y10T428/24537 ,  Y10T428/2457

摘要： There is provided a magnetic disk apparatus comprising: at least one magnetic disk having a magnetic layer and a surface protective layer on a substrate; a magnetic head which faces the magnetic disk in a rotating state with a micro gap and is supported by a slider; rotating means for rotating the magnetic disk; and a actuator for moving and positioning the magnetic head to a predetermined position on the magnetic disk, wherein a plurality of protrusions each having a flat surface are formed in at least a region on the surface of the magnetic disk where a contact start/stop operation can be executed. According to the above magnetic disk apparatus, since the frictional force between the disk and the head is small and the flying height of the head can be reduced and the good floating stability is obtained, so that the excellent recording and reproducing characteristics are derived. Further, protrusions are formed on the protective layer of the magnetic disk and the protrusion shapes are changed in a accordance with a radial position of the magnetic disk depending on the flying height of the magnetic head. According to the above magnetic disk apparatus, since the change of spacing can be set smaller than the change of the flying height, high recording density can be achieved.

摘要翻译： 提供一种磁盘装置，包括：在基板上具有磁性层和表面保护层的至少一个磁盘; 磁头，其在具有微小间隙的旋转状态下面对磁盘，并由滑块支撑; 用于旋转磁盘的旋转装置; 以及用于将磁头移动和定位到磁盘上的预定位置的致动器，其中在磁盘表面上的至少一个区域中形成有各自具有平坦表面的多个突起，其中接触开始/停止操作 可以执行。 根据上述磁盘装置，由于盘与头部之间的摩擦力小，能够降低头部的飞行高度，并且获得良好的浮动稳定性，从而导出良好的记录和再现特性。 此外，在磁盘的保护层上形成突起，并且根据磁头的飞行高度，根据磁盘的径向位置改变突起形状。 根据上述磁盘装置，由于可以将间隔的变化设定得小于飞行高度的变化，所以可以实现高的记录密度。

公开(公告)号：US06303205B1

公开(公告)日：2001-10-16

申请号：US09313283

申请日：1999-05-18

申请人： Hideaki Tanaka ,  Kenichi Gomi ,  Yoshihiko Miyake ,  Sigeru Sano ,  Youichi Inomata ,  Hiroshi Yashiki ,  Yoshiki Kato ,  Masaki Ohura

发明人： Hideaki Tanaka ,  Kenichi Gomi ,  Yoshihiko Miyake ,  Sigeru Sano ,  Youichi Inomata ,  Hiroshi Yashiki ,  Yoshiki Kato ,  Masaki Ohura

IPC分类号： B32B302

CPC分类号： G11B5/6005 ,  G11B5/41 ,  G11B5/581 ,  G11B5/72 ,  G11B5/82 ,  G11B5/8408 ,  G11B23/505 ,  Y10S428/90 ,  Y10T428/24355 ,  Y10T428/24537 ,  Y10T428/2457

摘要： A magnetic disk includes a substrate, a magnetic layer, and a protective layer. At least one region of a surface of the magnetic disk has protrusions. A height of each of the protrusions is not less than 5 nm and not greater than 40 nm, and is within ±30% of an average height of the protrusions. A density of the protrusions is not less than 200/mm2 and is not greater than 250,000/mm2. A width of a surface of each of the protrusions in a radial direction of the magnetic disk is not less than 0.1 &mgr;m and is not greater than 10 &mgr;m. The protrusions are discrete protrusions aligned in a spiral direction of the magnetic disk at a predetermined spacing in the radial direction of the magnetic disk. The at least one region of the surface of the magnetic disk includes flat areas between the protrusions. At least some of the flat areas extend continuously from an inner redius of the at least one region of the surface of the magnetic disk to an outer radius of t he at least one region of the surface of the magnetic disk.

摘要翻译： 磁盘包括基板，磁性层和保护层。 磁盘表面的至少一个区域具有突起。 每个突起的高度不小于5nm且不大于40nm，并且在突起的平均高度的±30％以内。 突起的密度不小于200 / mm 2，不大于250,000 / mm2。 每个突起在磁盘的径向方向上的宽度不小于0.1μm并且不大于10μm。 突起是在磁盘的径向方向上以预定间隔在磁盘的螺旋方向上对齐的离散突起。 磁盘表面的至少一个区域包括突起之间的平坦区域。 至少一些平坦区域从磁盘表面的至少一个区域的内部重新连续延伸到磁盘表面的至少一个区域的外半径。

公开(公告)号：US5411630A

公开(公告)日：1995-05-02

申请号：US149770

申请日：1993-11-10

申请人： Norikazu Nagase ,  Yoshihiro Moriguchi ,  Youichi Inomata ,  Hiroshi Yashiki ,  Masaki Ohura ,  Yoshiki Kato

发明人： Norikazu Nagase ,  Yoshihiro Moriguchi ,  Youichi Inomata ,  Hiroshi Yashiki ,  Masaki Ohura ,  Yoshiki Kato

IPC分类号： G11B5/72 ,  G11B5/82 ,  G11B5/84 ,  B44C1/22

CPC分类号： G11B5/8408 ,  G11B5/72 ,  G11B5/82

摘要： A method of forming projections on major surfaces of a disk comprises the steps of supporting the disk in a space, spraying a multiplicity of fine solid particles into the space, charging the sprayed fine solid particles with electricity of the same polarity so that the fine solid particles are floating in the space in a mutually separated state due to electric repellent forces acting between the fine solid particles, electrostatically depositing the fine solid particles charged with electricity on the surfaces of the disk, and etching the disk surfaces by using the deposited fine solid particles as masks, thereby forming a multiplicity of projections on the disk surfaces.

摘要翻译： 在盘的主表面上形成突起的方法包括以下步骤：将盘支撑在空间中，将多个细小固体颗粒喷射到该空间中，用相同极性的电为喷射的细固体颗粒充电，使得细固体 颗粒在相互分离的状态下漂浮在空间中，这是由于在微细固体颗粒之间作用的疏斥力，在盘的表面上静电沉积带电的细小固体颗粒，并通过使用沉积的细固体蚀刻盘表面 颗粒作为掩模，从而在盘表面上形成多个突起。

公开(公告)号：US6041465A

公开(公告)日：2000-03-28

申请号：US178433

申请日：1998-10-23

申请人： Hiroshi Yashiki ,  Yuusuke Inoue

发明人： Hiroshi Yashiki ,  Yuusuke Inoue

IPC分类号： B24B29/00 ,  B08B1/04 ,  G11B23/50 ,  H01L21/00 ,  A47L25/00

CPC分类号： H01L21/67046 ,  B08B1/04

摘要： A cleaning apparatus enables a workpiece to be rotated at a high speed over a long period, enables the outer and inner circumferences of the workpiece to be cleaned by a simple structure without provision of a special mechanism, and enables avoidance of formation of scratches in the radial direction of the workpiece. Chuck members 1-1 to 1-3 for chucking the outer periphery of a magnetic disk W are driven to rotate by a brush rotation mechanism 4 and are made to rock back and forth in the radial direction of the magnetic disk W by a rocking portion 6 of the brush rotation mechanism 4. Specifically, the rollers 12 of the chuck members 1-1 to 1-3 are formed by polyurethane foam and a plurality of circumferential grooves 14 are formed in the surface of the rollers 12. The rod-shaped brushes 3-1 and 3-2 are formed by attaching sponges 32 having a large number of bumps 30 to the front ends of shafts 31. The rocking portion 6 makes the sponges 32 rock back and forth so that the bumps 30 at the front end swing out to the inner circumference side of the magnetic disk W and the bumps 30 at the rear end swing out to the outer circumference side of the magnetic disk W.

摘要翻译： 清洁装置能够使工件能够长时间高速旋转，能够通过简单的结构清洁工件的外周和内周，而不需要特殊的机构，并且能够避免在工件中形成划痕 工件的径向。 用于卡住磁盘W的外周的卡盘构件1-1至1-3通过电刷旋转机构4驱动旋转，并且通过摆动部分使其在径向方向上前后摇动 具体来说，卡盘构件1-1至1-3的辊12由聚氨酯泡沫形成，并且在辊12的表面中形成多个周向槽14。杆状 刷子3-1和3-2通过将具有大量凸起30的海绵32附接到轴31的前端而形成。摇摆部6使海绵32前后摇动，使得前端的凸块30 摆动到磁盘W的内周侧，并且后端的凸起30摆动到磁盘W的外周侧。

公开(公告)号：US6074275A

公开(公告)日：2000-06-13

申请号：US135847

申请日：1998-08-18

申请人： Hiroshi Yashiki ,  Kouji Ishibashi

发明人： Hiroshi Yashiki ,  Kouji Ishibashi

IPC分类号： B24B37/04 ,  B24B49/04 ,  B24B49/00

CPC分类号： B24B37/08 ,  B24B37/345 ,  B24B49/04

摘要： A polishing system and a method of control of the same enabling reliable transfer of the workpieces into and out of the system while maintaining the precision of polishing of the workpieces. Provision is made of a polishing apparatus 1, a first transfer apparatus 2, a second transfer apparatus 3, and a control apparatus 4. In the polishing apparatus 1, workpieces W held in m number of holding holes 14 formed in n number of carriers 14 are polished on their two surfaces by a lower platen 10 and an upper platen 19. The control apparatus 4 finds the revolution angle of the carriers 14 when the workpieces reach the desired thickness, makes the carriers revolve until the revolution angle of a whole multiple of 360.degree./n closest to the revolution angle found, and then makes the polishing apparatus 1 stop. Further, it finds the rotation angle of the carriers after stopping and makes mounters 24 and 34 of a loader 23 and unloader 33 rotate by exactly that rotation angle so as to transfer the workpieces W into and out from the carriers 14.

摘要翻译： 抛光系统及其控制方法能够在保持工件的抛光精度的同时可靠地传送工件进出系统。 由抛光装置1，第一传送装置2，第二传送装置3和控制装置4构成。在抛光装置1中，保持在n个载体14中形成的m个保持孔14中的工件W 通过下压板10和上压板19在它们的两个表面上抛光。控制装置4当工件达到所需厚度时，找到载体14的转角，使载体旋转直到旋转角为整数倍 360°/ n最接近发现的转角，然后使抛光装置1停止。 此外，它在停止后找到载体的旋转角度，并且使装载机23和卸载器33的卸载器24和34旋转正好该旋转角度，以便将工件W传送到载体14中并从载体14移出。

公开(公告)号：US6062949A

公开(公告)日：2000-05-16

申请号：US201472

申请日：1998-11-30

申请人： Hiroshi Yashiki ,  Katsunori Nagao ,  Takamitsu Shimoide ,  Akihiko Yamaya

发明人： Hiroshi Yashiki ,  Katsunori Nagao ,  Takamitsu Shimoide ,  Akihiko Yamaya

IPC分类号： B24B37/07 ,  B24B49/02 ,  B24B49/00

CPC分类号： B24B37/08 ,  B24B37/005 ,  B24B37/042 ,  B24B49/02

摘要： A polishing amount control system and method for same which can quickly feed back the results of measurement of a coating layer of a workpiece to the next polishing work so as to improve the productivity of the workpieces and further enable high precision polishing work. The thicknesses of the plating layers of the two surfaces of a magnetic disk W polished by a double-side polishing apparatus 1 are measured by an X-ray thickness meter 2. The rotational speeds of the drive motors 15 and 18 of the double-side polishing apparatus 1 are controlled in accordance with the results of the measurement. Specifically, the polishing amounts of the plating layers of the upper surface and lower surface of the magnetic disk W polished next become within 1.8 .mu.m to 2.2 .mu.m by controlling the rotational speeds of the upper platen 13 and the lower platen 11. The thickness difference of the upper and lower surfaces of the same magnetic disk W become within -0.15 .mu.m to +0.15 .mu.m by controlling the rotational speed of one of the upper platen 13 and lower platen 11.

摘要翻译： 一种抛光量控制系统及其方法，可以将工件涂层的测量结果快速反馈到下一次抛光工作，从而提高工件的生产率，并进一步实现高精度的抛光加工。 通过X射线测厚仪2测定由双面研磨装置1研磨的磁盘W的两面的镀层厚度。双面驱动马达15,18的转速 抛光装置1根据测量结果进行控制。 具体而言，通过控制上压板13和下压板11的转速，接下来抛光的磁盘W的上表面和下表面的镀层的抛光量将在1.8μm至2.2μm之间。厚度 通过控制上压板13和下压板11之一的旋转速度，同一磁盘W的上表面和下表面的差异变为-0.15μm至+0.15μm之间。