摘要:
A method of fabricating a semiconductor device capable of increasing the selectivity of a low dielectric constant insulator film to an etching mask layer such as an etching stopper film without increasing the thickness of the etching mask layer is obtained. This method of fabricating a semiconductor device comprises steps of forming a first insulator film including a polymer film containing C and H, forming a first etching mask layer containing Si on a prescribed region of the first insulator film and plasma-etching the first insulator film with etching gas containing nitrogen and monochromated ion energy having a narrow energy width through a mask of the first etching mask layer.
摘要:
A solar cell module (1a) is constituted such that a solar cell panel (9) is held using a main frame member (10) that holds one side of the solar cell panel (9) and a sub-frame member (20) that holds an adjoining side that adjoins this one side, the main frame member (10) is constituted from a solar cell panel main holding portion (11), a main wall portion (12), and a main bottom piece (16), the sub-frame member (20) is constituted from a solar cell panel sub-holding portion (21), a sub-wall portion (22), and a sub-bottom piece (26), the sub-bottom piece (26) of the sub-frame member (20) is positioned above the main bottom piece (16) of the main frame member (10), the lower surface near the side end of this sub-bottom piece (26) abuts against the upper surface near the side end of the main bottom piece (16), and a water barrier piece (28) bent upward is formed at the inner side edge of this sub-bottom piece (26).
摘要:
The present invention provides an integrated wiring member (46, 47, 48) for a solar cell module, including a first wiring member, a second wiring member, and an insulating and protecting film for insulating the first wiring member and the second wiring member from each other. Herein, the first wiring member and the second wiring member are integrated with each other through the insulating and protecting film.
摘要:
Plasma etching with hydrogen bromide or bromine as an etching gas allows a precise control in attaining vertical etching or taper etching with a desired taper angle by controlling the temperature of a mass to be etched, which mass is usually a semiconductor wafer.
摘要:
There are provided a solar cell including a semiconductor substrate and a busbar electrode extending in a first direction and a finger electrode extending in a second direction on a first surface of the semiconductor substrate the finger electrode and the busbar electrode being electrically connected to each other, and a side portion of the busbar electrode being curved such that a width of the busbar electrode increases toward an end portion of the busbar electrode in a region near the end portion of the busbar electrode in the first direction a solar cell string, and a solar cell module.
摘要:
A solar cell module 1a is constituted from a main frame member 10a and a sub-frame member 20a that hold a solar cell panel 9. The main frame member 10a is constituted from a main outer wall 11, a main holding upper piece 12, a main holding lower piece 13, and a main bottom piece 16 and, also, the sub-frame member 20a is constituted from a sub-outer wall 21, a sub-holding upper piece 22, a sub-holding lower piece 23, a sub-base piece 24, a sub-inner wall 25, and a sub-bottom piece 26. Then, the main bottom piece 16 and the sub-bottom piece 26 are formed so as not to collide with each other, such that the projecting position heights of the pieces are different.
摘要:
Provided is a method for liquefying natural gas which can be readily adapted to LNG plants of all sizes without requiring expensive and special heat exchangers. The liquefaction of feed gas of natural gas and recycle natural gas is carried out with a single-component refrigerant or a mixed refrigerant in a high temperature stage, and with a substantially isentropic expansion in a low temperature stage, and a non-liquefied part of the recycle gas after the expansion step is pressurized with a compressor and recycled along with a recycle stream of non-liquefied par of the feed natural gas, the liquefied part by the refrigerant exchanging heat with the non-liquefied part stream produced from the substantially isentropic expansion, in a plate-fin heat exchanger or the like. The compressor is driven by the power obtained by the substantially isentropic expansion.
摘要:
An apparatus for controlling the pressure in a cargo tank 1 supplies BOG generated from liquefied natural gas stored in the cargo tank 1 to a burning system 6 through a compressor. In this apparatus, a reliquefaction plant 5 is disposed on the downstream side of first and second compressors 3 and 4 and on the upstream side of the cargo tank 1 so that BOG discharged from the second compressor 4 is liquefied by the reliquefaction plant 5 and the liquefied fluid is returned again into the cargo tank 1.
摘要:
An interconnection pattern made of an aluminum alloy, such as Al—Cu, on a semiconductor IC, is dry etched in an etching gas containing a chlorine component. A photo resist stripping process is carried out at a location down stream of the etching process using a conventional stripping gas, such as CF4+02, at room temperature. Before the resist-stripped substrate is exposed to open air, the substrate is heated in a vacuum to a temperature above 100° C., to remove residual chlorine components.
摘要:
A matrix type display device capable of receiving more than one video signal, which displays an image based on a first video signal with a smaller aspect ratio than an aspect ratio of a screen in width by inputting a second video signal in sync with a first video signal to at least a part of column drivers corresponding to a remaining portion on the screen where the image based on the first video signal is not displayed, so that the processing of the first and second video signals is started at the same time and carried out at the same timing. Consequently, the present matrix type display device can readily display a natural image based on an input video signal with a smaller aspect ratio than the that of the screen.