摘要:
A polymeric compound of the invention includes at least one monomer unit selected from the following formulae (I), (II), (III) and (IV): (wherein R1 is a hydrogen atom or a methyl group, R2 and R3 are each a hydrogen atom, a hydroxyl group or a —COOR4 group, where R4 is, e.g., a t-butyl group or a 2-tetrahydropyranyl group; R5 and R6 are each a hydrogen atom, a hydroxyl group or an oxo group; R7, R8 and R9 are each a hydrogen atom or a methyl group; R10 and R11 are each a hydrocarbon group having 1 to 8 carbon atoms; R12, R13 and R14 are each a hydrogen atom, a hydroxyl group or a methyl group, where if all of R12 to R14 are each a hydrogen atom or a hydroxyl group, R10 and R11 are not coincidentally methyl groups) [wherein, when the compound includes, for example, a monomer unit of Formula (III), the compound further includes at least one monomer unit selected from among, for example, a monomer unit represented by the following Formula (V): (wherein R15 and R16 are each a hydrogen atom, a hydroxyl group or a carboxyl group; R17 is a hydroxyl group, an oxo group or a carboxyl group; and R1 has the same meaning as defined above)]. This polymeric compound has high etching resistance, as well as satisfactory transparency, alkali-solubility and adhesion, and is therefore useful as a photoresist resin.
摘要翻译:本发明的高分子化合物包括至少一种选自下式(I),(II),(III)和(IV)的单体单元:(其中R 1是氢原子或甲基, 2>和R 3各自为氢原子,羟基或-COOR 4基团,其中R 4为例如叔丁基或2-四氢吡喃基; R 5为氢原子, R 6和R 6各自为氢原子,羟基或氧代基; R 7,R 8和R 9各自为氢原子或甲基; R 10和R 8为氢原子, 11>各自为具有1至8个碳原子的烃基; R 12,R 13和R 14各自为氢原子,羟基或甲基,其中如果全部R 12, 至R 14各自为氢原子或羟基,R 10和R 11不是甲基),其中,当该化合物包括例如式(III)的单体单元时, 该化合物还包括至少一种单体单元,其选自例如由下式(V)表示的单体单元:(其中 R 15和R 16各自为氢原子,羟基或羧基; R 17是羟基,氧代基或羧基; 和R 1具有与上述相同的含义]]。 该高分子化合物具有高耐蚀刻性,以及令人满意的透明度,碱溶性和粘附性,因此可用作光致抗蚀剂树脂。
摘要:
A polymeric compound includes at least one monomeric unit of the following formula (I): wherein R1 is a hydrogen atom or a methyl group; and each of R2 and R3 is independently a hydrogen atom or a hydroxyl group. The polymeric compound may include the monomeric unit and at least one monomeric unit selected from monomeric units represented by the following formulae (IIa) and (IIb): wherein R1 is a hydrogen atom or a methyl group; each of R4 and R5 is, for example, a hydrogen atom, a hydroxyl group, an oxo group, or a carboxyl group, wherein R4 and R5 are not concurrently hydrogen atoms; and each of R7 and R8 is independently a hydrogen atom, a hydroxyl group, or an oxo group. The polymeric compound have a high etching resistance in addition to satisfactory transparency, alkali-solubility, and adhesion.
摘要翻译:聚合化合物包括至少一种下式(I)的单体单元:其中R1是氢原子或甲基; R2和R3各自独立地为氢原子或羟基。 聚合化合物可以包括单体单元和选自下式(IIa)和(IIb)表示的单体单元的至少一种单体单元:其中R 1是氢原子或甲基; R4和R5各自为例如氢原子,羟基,氧代基或羧基,其中R4和R5不同时为氢原子; R 7和R 8各自独立地为氢原子,羟基或氧代基。 除了令人满意的透明性,碱溶性和粘合性之外,高分子化合物具有高的耐蚀刻性。
摘要:
A photoresist polymeric compound includes a monomer unit represented by following Formula (I): The polymeric compound may further include at least one of monomer units represented by Formulae (IIa) to (IIg) as described in the specification. The photoresist polymeric compound can exhibit high adhesion to substrates and can highly precisely form fine patterns.
摘要:
A photoresist polymeric compound includes a monomer unit represented by following Formula (I): The polymeric compound may further include at least one of monomer units represented by Formulae (IIa) to (IIg) as described in the specification. The photoresist polymeric compound can exhibit high adhesion to substrates and can highly precisely form fine patterns.
摘要:
An N-substituted benzimidazole-containing bridged alicyclic compound is provided. The compound is represented by following Formula (1-1): In the formula, Z3 represents a bridged alicyclic skeleton; Y11 represents a single bond or a divalent organic group; Y2 represents a single bond or a di- or tri-valent organic group; X3 represents a hydrogen atom or a reactive functional group; Ra represents a hydrogen atom or a hydrocarbon group; A3 represents a group represented by one of following Formulae (a) and (b): wherein R10 represents a monovalent organic group, wherein, in each of Formulae (a) and (b), the left side is to be bonded to Y11, and the right side is to be bonded to Y2; “n4” denotes an integer of 2 to 7; “m3” denotes an integer of 0 to 5; and “k2” denotes an integer of 0 to 2, wherein the total of “n4” and “m3” equals 2 to 7, and wherein two or more Y11s, Y2s, X3s, A3s, and R10s per molecule, and two or more X3s and Ras, if present per molecule, may be the same as or different from one another, respectively.
摘要:
A prepolymer is a reaction product of a compound A and a compound B, in which the compounds A and B each have two or more functional groups or sets of functional groups in one molecule and are capable of undergoing polymerization as a result of binding of the functional groups or sets of functional groups of one compound with the functional groups or sets of functional groups of the other compound to thereby form a high-molecular-weight polymer with a porous structure. The prepolymer has a weight-average molecular weight of about 200 to about 100000. The functional groups or sets of functional groups of the compound A are preferably each a carboxyl group or an amino group, and the functional groups or sets of functional groups of the compound B are preferably two amino groups, an amino group and a hydroxyl group, an amino group and a mercapto group, or two carboxyl groups.
摘要:
A photosemiconductor protective material comprising a chain olefin-cyclic olefin copolymer elastomer composed of a chain olefin and a cyclic olefin as polymerizable components is prepared. The elastomer may comprise an α-chain C2-4olefin and a polycyclic olefin as polymerizable components, and the molar ratio of the α-chain C2-4olefin relative to the polycyclic olefin may be 80/20 to 99/1 in a ratio of the α-chain C2-4olefin/the polycyclic olefin. The photosemiconductor protective material may further contain an organic silicon compound having a hydrolytically condensable group. The organic silicon compound may be a silane coupling agent having a (meth)acryloyl group. A photosemiconductor protective material 1 as the protective material is suitable as a solar cell encapsulant or filler 3 for encapsulating a solar cell 4. The photosemiconductor protective material has a high transparency and a high weather resistance and a proper elasticity and effectively protects a photosemiconductor.
摘要:
The present invention provides a polymer brush-type filler which contains polymer chains at a high density and with a broad molecular weight distribution. Specifically, the present invention provides fine particles for chromatography comprising graft polymer chains obtained by grafting polymer chains via polymerization initiating groups on the surface of solid particles, wherein the graft polymer chains include specific repeating units, have a specific number average molecular weight and a specific molecular weight distribution and also have a high density of 0.03 chains/nm2 or more and 0.70 chains/nm2 or less.