公开(公告)号：US06220913B1

公开(公告)日：2001-04-24

申请号：US09247084

申请日：1999-02-09

申请人： Yoshio Makita ,  Nobuhiko Takashima ,  Katsunosuke Ozawa ,  Tatsuo Yamaura ,  Satoshi Yoshikata ,  Masayuki Itakura

发明人： Yoshio Makita ,  Nobuhiko Takashima ,  Katsunosuke Ozawa ,  Tatsuo Yamaura ,  Satoshi Yoshikata ,  Masayuki Itakura

IPC分类号： H01J900

CPC分类号： H01J9/242 ,  H01J2329/8625

摘要： An automatic support pillar transfer mechanism is provided that enables an enlarged transfer range, reduced produce failure and mass-production. The touch sensors 17a to 7c are arranged on the moving section 12 to measure the plane orientation of the surface of the jig 7. The jig adjusting section 6 is driven based on the measurement results on the plane orientations of surfaces of the jig 7 to adjust the surface of the jig 7 in parallel. With plural support pillars 15 sucked and held at predetermined intervals by the jig 7 adjusted in parallel, the bonding agent coated substrate 14 attached on the moving section 12 is descended to coat the bonding agent 13 onto the one ends of the support pillars 15. The substrate 16 to which the support pillars 15 are transferred is attached to the moving section 12. Variations in plane orientation of surfaces of the substrate 16 are respectively measured by means of the touch sensors 5a to 5c. The jig adjusting section 6 is driven according to the variations in plane orientation of the surfaces of the substrate 16. With the surface of the jig 7 arranged in parallel to the surface of the substrate 16, the moving section 12 is descended to transfer the support pillars 15 onto the surface of the substrate 16.

摘要翻译： 提供了一种自动支撑柱传送机构，其能够扩大传送范围，减少产品故障和批量生产。 触摸传感器17a〜7c配置在移动部12上，测定夹具7的表面的面取向。夹具调整部6基于夹具7的表面的面取向的测定结果进行驱动， 夹具7的表面平行。 通过平行调整的夹具7以预定的间隔吸附并保持多个支撑柱15，附着在移动部12上的粘合剂涂布基板14下降以将粘合剂13涂覆在支撑柱15的一端上。 支撑柱15被传送到的基板16被附接到移动部分12.基板16的表面的平面取向的变化分别通过触摸传感器5a至5c来测量。 根据基板16的表面的平面取向的变化来驱动夹具调整部6.随着夹具7的表面与基板16的表面平行地配置，移动部12下降以将支撑体 支柱15到基板16的表面上。