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1.发明申请公开(公告)号：US20120140358A1
公开(公告)日：2012-06-07
申请号：US12960954
申请日：2010-12-06
IPC分类号： G11B5/187
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3163 , Y10T29/49032
摘要： A magnetic head includes a main magnetic pole, a shield having an end face located in a medium facing surface to wrap around an end face of the main magnetic pole, and a gap part provided between the main magnetic pole and the shield. The shield includes a bottom shield, two side shields, and a top shield. The gap part includes first and second gap layers. In a manufacturing method of the magnetic head, a mold is formed on the top surface of the bottom shield, the mold having a shape determined by photolithography and being intended to be removed later. Next, the two side shields are formed on the top surface of the bottom shield by performing plating without forming a seed layer. Next, the mold is removed and then the first gap layer, the main magnetic pole, the second gap layer, and the top shield are formed in succession.
摘要翻译： 磁头包括主磁极，屏蔽，其具有位于介质面向表面中的端面以围绕主磁极的端面，以及设置在主磁极和屏蔽之间的间隙部分。 屏蔽包括底部屏蔽，两个侧面屏蔽和顶部屏蔽。 间隙部分包括第一和第二间隙层。 在磁头的制造方法中，在底部屏蔽的顶面上形成有模具，该模具具有通过光刻法确定的形状并且稍后被去除。 接下来，通过进行电镀而不形成种子层，在底部屏蔽的顶表面上形成两个侧面屏蔽。 接下来，移除模具，然后依次形成第一间隙层，主磁极，第二间隙层和顶部屏蔽。
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2.发明申请公开(公告)号：US20120269048A1
公开(公告)日：2012-10-25
申请号：US13538996
申请日：2012-06-29
申请人： Hironori ARAKI , Yoshitaka SASAKI , Hiroyuki ITO , Shigeki TANEMURA , Kazuo ISHIZAKI , Takehiro HORINAKA
发明人： Hironori ARAKI , Yoshitaka SASAKI , Hiroyuki ITO , Shigeki TANEMURA , Kazuo ISHIZAKI , Takehiro HORINAKA
IPC分类号： G11B11/00
CPC分类号： G11B5/314 , G11B5/6088 , G11B2005/001 , G11B2005/0021 , Y10T29/49032
摘要： A manufacturing method for a heat-assisted magnetic recording head includes the step of forming an internal mirror that includes a reflecting film support body and a reflecting film. The reflecting film support body includes first and second inclined surfaces. The reflecting film includes first and second portions that are located on the first and second inclined surfaces, respectively. The step of forming the internal mirror includes the step of forming the reflecting film support body and the step of forming the reflecting film. The step of forming the reflecting film support body forms an initial support body, and performs two taper-etching processes on the initial support body so that the initial support body is provided with the first and second inclined surfaces.
摘要翻译： 一种热辅助磁记录头的制造方法，包括形成包括反射膜支撑体和反射膜的内反射镜的步骤。 反射膜支撑体包括第一和第二倾斜表面。 反射膜包括分别位于第一和第二倾斜表面上的第一和第二部分。 形成内反射镜的步骤包括形成反射膜支撑体的步骤和形成反射膜的步骤。 形成反射膜支撑体的步骤形成初始支撑体，并且在初始支撑体上执行两个锥形蚀刻处理，使得初始支撑体设置有第一和第二倾斜表面。
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3.发明申请公开(公告)号：US20100118438A1
公开(公告)日：2010-05-13
申请号：US12690381
申请日：2010-01-20
IPC分类号： G11B5/187
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3123 , G11B5/3163 , Y10T29/49032 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A thin-film magnetic head is manufactured as follows. First, a base insulating layer having a magnetic pole forming depression sunken into a form corresponding to the main magnetic pole layer is formed, a stop film for CMP is formed such as to fill the magnetic pole forming depression, and then a magnetic layer is formed on the stop film. Next, the magnetic layer is separated by forming a separation groove substantially surrounding the magnetic pole forming depression on the outside thereof, and thus separated magnetic layer is formed with a cover insulating film adapted to cover the whole upper face. The surface is polished by CMP until the stop film is exposed, so that the part of magnetic layer remaining on the inside of the magnetic pole forming depression is used as the main magnetic pole layer. Further, a recording gap layer, a write shield layer, and a thin-film coil are formed.
摘要翻译： 如下制造薄膜磁头。 首先，形成具有凹陷形成为与主磁极层对应的形状的磁极形成凹部的基底绝缘层，形成用于填充磁极形成凹部的用于CMP的停止膜，然后形成磁性层 在停止电影。 接下来，通过在其外侧形成基本上围绕磁极形成凹部的分离槽来分离磁性层，由此分离的磁性层形成有覆盖整个上表面的覆盖绝缘膜。 通过CMP抛光表面，直到停止膜露出，使得残留在磁极形成凹部内侧的磁性层的一部分被用作主磁极层。 此外，形成记录间隙层，写入屏蔽层和薄膜线圈。
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