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    Method of manufacturing magnetic head for perpendicular magnetic recording
    2.
    发明授权
    Method of manufacturing magnetic head for perpendicular magnetic recording 有权
    用于垂直磁记录的磁头制造方法

    公开(公告)号：US08221636B2

    公开(公告)日：2012-07-17

    申请号：US12149987

    申请日：2008-05-12

    申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

    发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

    IPC分类号： B44C1/22

    CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116

    摘要： A magnetic head includes a pole layer, and an encasing layer having a groove that accommodates the pole layer. A manufacturing method for the magnetic head includes the steps of forming a nonmagnetic layer that will later undergo formation of the groove therein and will thereby become the encasing layer; forming the groove in the nonmagnetic layer so that the nonmagnetic layer becomes the encasing layer; and forming the pole layer such that the pole layer is accommodated in the groove of the encasing layer. The nonmagnetic layer is formed of Al2O3. The step of forming the groove in the nonmagnetic layer includes the step of taper-etching the nonmagnetic layer by reactive ion etching with an etching gas containing at least BCl3 and N2 among BCl3, Cl2 and N2.

    摘要翻译： 磁头包括极层和具有容纳极层的凹槽的封装层。 磁头的制造方法包括以下步骤：形成将在其中形成凹槽的非磁性层，从而成为包层; 在非磁性层中形成凹槽，使得非磁性层成为包层; 以及形成所述极层，使得所述极层容纳在所述封装层的槽中。 非磁性层由Al2O3形成。 在非磁性层中形成槽的步骤包括通过在BCl 3，Cl 2和N 2中至少含有BCl 3和N 2的蚀刻气体的反应离子蚀刻来对非磁性层进行锥蚀刻的步骤。

    Magnetic head for perpendicular magnetic recording and method of manufacturing same
    5.
    发明申请
    Magnetic head for perpendicular magnetic recording and method of manufacturing same 有权
    用于垂直磁记录的磁头及其制造方法

    公开(公告)号：US20090059426A1

    公开(公告)日：2009-03-05

    申请号：US11896705

    申请日：2007-09-05

    申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

    发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Takehiro Horinaka

    IPC分类号： G11B5/127

    CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/3163 ,  Y10T29/49046

    摘要： A top surface of a pole layer of a magnetic head includes: a first portion having a first edge located in a medium facing surface and a second edge opposite thereto; and a second portion located farther from the medium facing surface than the first portion and connected to the first portion at the second edge. The distance from a substrate to an arbitrary point on the first portion increases with increasing distance from the medium facing surface to the arbitrary point. The angle of inclination of the first portion taken at the arbitrary point with respect to a direction perpendicular to the medium facing surface increases stepwise or continuously with increasing distance from the medium facing surface to the arbitrary point. The angle of inclination taken at the first edge is greater than zero degree. The second portion extends in a direction substantially perpendicular to the medium facing surface.

    摘要翻译： 磁头的极层的顶表面包括：第一部分，其具有位于介质相对表面中的第一边缘和与其相对的第二边缘; 以及位于比所述第一部分更远离所述介质面对表面并且在所述第二边缘处连接到所述第一部分的第二部分。 从基板到第一部分的任意点的距离随着从介质面向表面到任意点的距离的增加而增加。 相对于与面向介质的表面垂直的任意点处的第一部分的倾斜角度随着从介质面向表面到任意点的距离的增加而逐步或连续地增加。 在第一边缘处采取的倾斜角大于零度。 第二部分在基本上垂直于介质面向表面的方向上延伸。

    Magnetic head for perpendicular magnetic recording and method of manufacturing same
    6.
    发明申请
    Magnetic head for perpendicular magnetic recording and method of manufacturing same 有权
    用于垂直磁记录的磁头及其制造方法

    公开(公告)号：US20080316653A1

    公开(公告)日：2008-12-25

    申请号：US11812757

    申请日：2007-06-21

    申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Lijie Guan ,  Takehiro Horinaka

    发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Shigeki Tanemura ,  Kazuo Ishizaki ,  Lijie Guan ,  Takehiro Horinaka

    IPC分类号： G11B5/10

    CPC分类号： G11B5/3116 ,  G11B5/1278

    摘要： A magnetic head includes: a pole layer; a nonmagnetic layer disposed on part of the top surface of the pole layer; a gap layer disposed on the pole layer and the nonmagnetic layer; and a shield disposed on the gap layer. The top surface of the pole layer includes: a first portion having a first edge located in a medium facing surface and a second edge opposite thereto; and a second portion located farther from the medium facing surface than the first portion and connected to the first portion at the second edge. The first portion is inclined with respect to a direction orthogonal to the medium facing surface so that the distance from a substrate increases with increasing distance from the medium facing surface. The nonmagnetic layer has a bottom surface touching the second portion, and this bottom surface has an edge located at the second edge.

    摘要翻译： 磁头包括：极层; 设置在所述极层的顶表面的一部分上的非磁性层; 设置在所述极层和所述非磁性层上的间隙层; 以及设置在间隙层上的屏蔽件。 极层的顶表面包括：第一部分，其具有位于介质相对表面中的第一边缘和与其相对的第二边缘; 以及位于比所述第一部分更远离所述介质面对表面并且在所述第二边缘处连接到所述第一部分的第二部分。 第一部分相对于与介质相对表面正交的方向倾斜，使得距衬底的距离随着距离介质面向表面的距离的增加而增加。 非磁性层具有接触第二部分的底面，该底面具有位于第二边缘的边缘。

    Method of manufacturing magnetic head for perpendicular magnetic recording
    8.
    发明申请
    Method of manufacturing magnetic head for perpendicular magnetic recording 有权
    用于垂直磁记录的磁头制造方法

    公开(公告)号：US20090173714A1

    公开(公告)日：2009-07-09

    申请号：US12379044

    申请日：2009-02-11

    申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Takehiro Horinaka ,  Shigeki Tanemura

    发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Takehiro Horinaka ,  Shigeki Tanemura

    IPC分类号： B44C1/22

    CPC分类号： G11B5/1278 ,  G11B5/3116 ,  Y10T29/49032 ,  Y10T29/49034 ,  Y10T29/49041 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

    摘要： A magnetic head comprises: an encasing layer made of a nonmagnetic material and having a groove that opens in the top surface; a nonmagnetic metal layer made of a nonmagnetic metal material, disposed on the top surface of the encasing layer, and having a penetrating opening that is contiguous to the groove; and a pole layer made of a magnetic metal material and encased in the groove of the encasing layer and in the opening of the nonmagnetic metal layer. The pole layer has an end face located in a medium facing surface, the end face having a first portion and a second portion that is located farther from a substrate than the first portion and connected to the first portion. The first portion has a width that decreases as the distance from the substrate decreases. The second portion has a uniform width that defines the track width. In the medium facing surface, the nonmagnetic metal layer exists on both sides of the second portion, the sides being opposed to each other in the direction of track width.

    摘要翻译： 磁头包括：由非磁性材料制成并具有在顶表面上开口的凹槽的封装层; 由非磁性金属材料制成的非磁性金属层，设置在所述封装层的顶表面上，并且具有与所述凹槽相邻的穿透开口; 以及由磁性金属材料制成并封装在封装层的凹槽中和非磁性金属层的开口中的极层。 极层具有位于介质面对表面中的端面，端面具有第一部分和第二部分，其位于比第一部分更远离基板并且连接到第一部分。 第一部分具有随着距离衬底的距离减小而减小的宽度。 第二部分具有定义轨道宽度的均匀宽度。 在面向介质的表面中，非磁性金属层存在于第二部分的两侧，侧面在轨道宽度方向上彼此相对。

    Magnetic head for perpendicular magnetic recording and method of manufacturing same
    9.
    发明申请
    Magnetic head for perpendicular magnetic recording and method of manufacturing same 有权
    用于垂直磁记录的磁头及其制造方法

    公开(公告)号：US20060198049A1

    公开(公告)日：2006-09-07

    申请号：US11213863

    申请日：2005-08-30

    申请人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Takehiro Horinaka ,  Shigeki Tanemura

    发明人： Yoshitaka Sasaki ,  Hiroyuki Itoh ,  Hironori Araki ,  Takehiro Horinaka ,  Shigeki Tanemura

    IPC分类号： G11B5/147 ,  G11B5/127

    CPC分类号： G11B5/1278 ,  G11B5/3116 ,  Y10T29/49032 ,  Y10T29/49034 ,  Y10T29/49041 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

    摘要： A magnetic head comprises: an encasing layer made of a nonmagnetic material and having a groove that opens in the top surface; a nonmagnetic metal layer made of a nonmagnetic metal material, disposed on the top surface of the encasing layer, and having a penetrating opening that is contiguous to the groove; and a pole layer made of a magnetic metal material and encased in the groove of the encasing layer and in the opening of the nonmagnetic metal layer. The pole layer has an end face located in a medium facing surface, the end face having a first portion and a second portion that is located farther from a substrate than the first portion and connected to the first portion. The first portion has a width that decreases as the distance from the substrate decreases. The second portion has a uniform width that defines the track width. In the medium facing surface, the nonmagnetic metal layer exists on both sides of the second portion, the sides being opposed to each other in the direction of track width.

    摘要翻译： 磁头包括：由非磁性材料制成并具有在顶表面上开口的凹槽的封装层; 由非磁性金属材料制成的非磁性金属层，设置在所述封装层的顶表面上，并且具有与所述凹槽相邻的穿透开口; 以及由磁性金属材料制成并封装在封装层的凹槽中和非磁性金属层的开口中的极层。 极层具有位于介质相对表面中的端面，端面具有第一部分和第二部分，其位于比第一部分更远离基板并且连接到第一部分。 第一部分具有随着距离衬底的距离减小而减小的宽度。 第二部分具有定义轨道宽度的均匀宽度。 在面向介质的表面中，非磁性金属层存在于第二部分的两侧，侧面在轨道宽度方向上彼此相对。