公开(公告)号：US07513062B2

公开(公告)日：2009-04-07

申请号：US11054336

申请日：2005-02-09

申请人： Younes Achkire ,  Alexander N Lerner ,  Boris Govzman ,  Boris Fishkin ,  Michael N Sugarman ,  Rashid A Mavliev ,  Haoquan Fang ,  Shijian Li ,  Guy E Shirazi ,  Jianshe Tang

发明人： Younes Achkire ,  Alexander N Lerner ,  Boris Govzman ,  Boris Fishkin ,  Michael N Sugarman ,  Rashid A Mavliev ,  Haoquan Fang ,  Shijian Li ,  Guy E Shirazi ,  Jianshe Tang

IPC分类号： F26B3/00 ,  B08B3/00

CPC分类号： H01L21/02052 ,  H01L21/67034

摘要： In a first aspect, a first method of drying a substrate is provided. The first method includes the steps of (1) lifting a substrate through an air/fluid interface at a first rate; (2) directing a drying vapor at the air/fluid interface during lifting of the substrate; and (3) while a portion of the substrate remains in the air/fluid interface, reducing a rate at which a remainder of the substrate is lifted through the air/fluid interface to a second rate. The drying vapor may form an angle of about 23° with the air/fluid interface and/or the second rate may be about 2.5 mm/sec.

摘要翻译： 在第一方面中，提供了干燥基板的第一种方法。 第一种方法包括以下步骤：（1）以第一速率提升衬底通过空气/流体界面; （2）在提升衬底期间在空气/流体界面处引导干燥蒸汽; 和（3）当衬底的一部分保留在空气/流体界面中时，降低衬底的剩余部分通过空气/流体界面提升到第二速率的速率。 干燥蒸气可以与空气/流体界面形成约23°的角度和/或第二速率可以为约2.5mm / sec。

公开(公告)号：US06865937B2

公开(公告)日：2005-03-15

申请号：US10144684

申请日：2002-05-13

申请人： Alexander N Lerner ,  Harshad M Borgaonkar

发明人： Alexander N Lerner ,  Harshad M Borgaonkar

IPC分类号： B08B15/02 ,  G01F22/00

CPC分类号： B08B15/02

摘要： Methods and apparatus are provided for increasing the safety of a clogged or failed exhaust system. In accordance with a first embodiment, an apparatus is provided that includes (1) a tank adapted to contain a processing fluid; (2) an exhaust system coupled to the tank and adapted to exhaust a gas from the tank, the gas including a hazardous vapor of the processing fluid; (3) a sensor coupled to the exhaust system and adapted to detect a rate at which gas is exhausted from the tank; and (4) a fluid supply mechanism adapted to supply a diluting fluid to the tank so as to dilute the processing fluid contained by the tank if the rate at which gas is exhausted from the tank is less than a predetermined rate. Systems, methods and computer program products are provided in accordance with this and other embodiments.

摘要翻译： 提供了提高堵塞或故障排气系统安全性的方法和装置。 根据第一实施例，提供了一种装置，其包括：（1）适于容纳处理流体的罐; （2）排气系统，其耦合到所述罐并且适于从所述罐排出气体，所述气体包括所述处理流体的危险蒸汽; （3）耦合到排气系统并适于检测气体从罐排出的速率的传感器; 以及（4）如果从罐中排出气体的速率小于预定速率，则适于向罐提供稀释流体以便稀释由罐所容纳的处理流体的流体供应机构。 根据本实施例和其他实施例提供了系统，方法和计算机程序产品。