公开(公告)号：US06957749B2

公开(公告)日：2005-10-25

申请号：US10452798

申请日：2003-05-30

申请人： Younes Achkire ,  Jonathan S Frankel ,  Brian J Brown

发明人： Younes Achkire ,  Jonathan S Frankel ,  Brian J Brown

IPC分类号： H01L21/00 ,  B67D5/00 ,  B67D5/56 ,  C23C16/00

CPC分类号： H01L21/67057

摘要： In a first aspect, a liquid delivery system is provided that includes a first liquid delivery module adapted to store and dispense a first chemical and a second liquid delivery module adapted to store and dispense a second chemical. The liquid delivery system further includes at least one connecting mechanism coupled to the first and second delivery modules and adapted to couple the first and second delivery modules to a substrate processing device. Each delivery module includes a vessel including a first chamber and a second chamber. The vessel is configured to receive a liquid from a bulk supply and to receive a pressurized flow of gas from a gas source. Each liquid delivery module also includes a valve assembly operable to selectively permit fluid communication between the first chamber and the second chamber during a non-refill state and to prevent fluid communication between the first chamber and the second chamber during a refill state.

摘要翻译： 在第一方面，提供一种液体输送系统，其包括适于储存和分配第一化学品的第一液体输送模块和适于储存和分配第二化学品的第二液体输送模块。 液体输送系统还包括耦合到第一和第二输送模块的至少一个连接机构，并且适于将第一和第二输送模块耦合到基板处理装置。 每个输送模块包括一个包括第一室和第二室的容器。 容器构造成从大量供应源接收液体并且接收来自气体源的加压气体流。 每个液体输送模块还包括阀组件，可操作以在非再填充状态期间选择性地允许第一腔室和第二腔室之间的流体连通，并且在再填充状态期间防止第一腔室和第二腔室之间的流体连通。