Positive-Working Photoimageable Bottom Antireflective Coating
    3.
    发明申请
    Positive-Working Photoimageable Bottom Antireflective Coating 有权
    正面照相底部防反射涂层

    公开(公告)号:US20080038666A1

    公开(公告)日:2008-02-14

    申请号:US11876332

    申请日:2007-10-22

    IPC分类号: G03C1/00

    摘要: The present invention relates to a positive bottom photoimageable antireflective coating composition which is capable of being developed in an aqueous alkaline developer, wherein the antireflective coating composition comprises a polymer comprising at least one recurring unit with a chromophore group and one recurring unit with a hydroxyl and/or a carboxyl group, a vinyl ether terminated crosslinking agent, and optionally, a photoacid generator and/or an acid and/or a thermal acid generator. The invention further relates to a process for using such a composition.

    摘要翻译: 本发明涉及能够在含水碱性显影剂中显影的正底部可光成像抗反射涂料组合物,其中抗反射涂料组合物包含含有至少一个具有发色团的重复单元的聚合物和一个具有羟基的重复单元, /或羧基,乙烯基醚封端的交联剂,以及任选的光酸产生剂和/或酸和/或热酸发生剂。 本发明还涉及使用这种组合物的方法。

    Process for producing an image using a first minimum bottom antireflective coating composition
    4.
    发明申请
    Process for producing an image using a first minimum bottom antireflective coating composition 审中-公开
    使用第一最小底部抗反射涂料组合物制造图像的方法

    公开(公告)号:US20060199103A1

    公开(公告)日:2006-09-07

    申请号:US11416240

    申请日:2006-05-02

    IPC分类号: G03F7/004

    摘要: Disclosed is a process for forming an image on a substrate, comprising the steps of: (a) coating on the substrate a first layer of a radiation sensitive, antireflective composition; (b) coating a second layer of a photoresist composition onto the first layer of the antireflective composition; (c) selectively exposing the coated substrate from step (b) to actinic radiation; and (d) developing the exposed coated substrate from step (c) to form an image; wherein both the photoresist composition and the antireflective composition are exposed in step (c); both are developed in step (d) using a single developer; wherein the antireflective composition of step (a) is a first minimum bottom antireflective coating (B.A.R.C.) composition, having a solids content of up to about 8% solids, and a maximum coating thickness of the coated substrate of λ/2n wherein λ is the wavelength of the actinic radiation of step (c) and n is the refractive index of the B.A.R.C. composition.

    摘要翻译: 公开了一种在衬底上形成图像的方法,包括以下步骤:(a)在衬底上涂覆第一层辐射敏感的抗反射组合物; (b)将第二层光致抗蚀剂组合物涂覆到抗反射组合物的第一层上; (c)将涂覆的基材从步骤(b)选择性暴露于光化辐射; 和(d)将来自步骤(c)的曝光的涂覆的基底显影以形成图像; 其中在步骤(c)中曝光光致抗蚀剂组合物和抗反射组合物; 在步骤(d)中使用单个显影剂开发两者; 其中步骤(a)的抗反射组合物是第一最小底部抗反射涂层(BARC)组合物,其固体含量高达约8%固体,并且涂覆的基底的最大涂层厚度为λ/ 2n,其中λ为 步骤(c)的光化辐射的波长,n是BARC的折射率 组成。

    Developable undercoating composition for thick photoresist layers
    7.
    发明申请
    Developable undercoating composition for thick photoresist layers 审中-公开
    用于厚光致抗蚀剂层的可显影底涂层组合物

    公开(公告)号:US20070105040A1

    公开(公告)日:2007-05-10

    申请号:US11271775

    申请日:2005-11-10

    IPC分类号: G03C1/00

    CPC分类号: G03F7/0392 G03F7/095

    摘要: The present invention relates to an undercoating composition for a photoresist comprising a polymer which is insoluble in an aqueous alkali developer but becomes soluble prior to development, and a photoacid generator which produces a strong acid upon exposure to radiation, and further where the polymer is transparent at the exposure radiation. The invention also relates to a process for imaging the undercoating composition.

    摘要翻译: 本发明涉及一种用于光致抗蚀剂的底涂组合物,其包含不溶于碱性显影剂水溶液但在显影前变得可溶的聚合物,以及在暴露于辐射时产生强酸的光致酸产生剂,此外,聚合物是透明的 在曝光辐射下。 本发明还涉及底涂组合物成像的方法。

    CENTER CONVEYOR FRONT COUPLER FOR A DRAPER CUTTING PLATFORM
    9.
    发明申请
    CENTER CONVEYOR FRONT COUPLER FOR A DRAPER CUTTING PLATFORM 有权
    中央输送机前连接器,用于切割平台

    公开(公告)号:US20100011729A1

    公开(公告)日:2010-01-21

    申请号:US12173932

    申请日:2008-07-16

    IPC分类号: A01D61/02 B23Q3/00

    摘要: A draper cutting platform for use with an agricultural harvester includes a pair of side platform sections, with each side platform section including a side belt. A center platform section is disposed in an area between the side platform sections. The center platform section includes at least one alignment device and at least one latch. A center conveyor assembly is removably attached to the center platform section, and carries a center belt. The center conveyor assembly includes at least one mating alignment device and at least one mating latch.

    摘要翻译: 一种用于农业收割机的切割平台包括一对侧平台部分,每个侧平台部分包括侧带。 中心平台部分设置在侧平台部分之间的区域中。 中心平台部分包括至少一个对准装置和至少一个闩锁。 中心输送机组件可移除地附接到中心平台部分,并且携带中心带。 中心输送机组件包括至少一个配合对准装置和至少一个配合闩锁。

    Center conveyor front coupler for a draper cutting platform
    10.
    发明授权
    Center conveyor front coupler for a draper cutting platform 有权
    中央输送机前连接器,用于切割平台

    公开(公告)号:US07650736B1

    公开(公告)日:2010-01-26

    申请号:US12173932

    申请日:2008-07-16

    IPC分类号: A01D43/00

    摘要: A draper cutting platform for use with an agricultural harvester includes a pair of side platform sections, with each side platform section including a side belt. A center platform section is disposed in an area between the side platform sections. The center platform section includes at least one alignment device and at least one latch. A center conveyor assembly is removably attached to the center platform section, and carries a center belt. The center conveyor assembly includes at least one mating alignment device and at least one mating latch.

    摘要翻译: 一种用于农业收割机的切割平台包括一对侧平台部分,每个侧平台部分包括侧带。 中心平台部分设置在侧平台部分之间的区域中。 中心平台部分包括至少一个对准装置和至少一个闩锁。 中心输送机组件可移除地附接到中心平台部分,并且携带中心带。 中心输送机组件包括至少一个配合对准装置和至少一个配合闩锁。