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公开(公告)号：US06615655B1
公开(公告)日：2003-09-09
申请号：US10031148
申请日：2002-01-17
申请人： Yuichi Sakai , Akira Yamashita , Motohisa Taguchi , Tomoya Yamakawa , Masahiro Kawai , Kazuhiko Tsutsumi
发明人： Yuichi Sakai , Akira Yamashita , Motohisa Taguchi , Tomoya Yamakawa , Masahiro Kawai , Kazuhiko Tsutsumi
IPC分类号： G01F168
CPC分类号： G01F1/692 , G01F1/6845
摘要： A flow rate detecting element measuring the flow rates of various fluids, particularly the intake air of an internal combustion engine. The flow rate detecting element has a thin film layer including a support film and a protective film on one surface of a flat substrate, a heating resistance section and a comparative resistance section thermosensitive resistor having patterns and located between the support film and the protective film. The flat substrate has a recess which penetrates the flat substrate in the thickness direction thereof and facing the heating resistance section and the comparative resistance section. A fluid flow passage communicates with the recess which faces the comparative resistance section for fluid flow into the recess. Flow rate or velocity of a fluid can be measured accurately using the heating resistance section according to the fluid temperature reported by the comparative resistance section.
摘要翻译： 流量检测元件，其测量各种流体的流量，特别是内燃机的进气。 流量检测元件具有在平坦基板的一个表面上包括支撑膜和保护膜的薄膜层，具有图案并位于支撑膜和保护膜之间的加热电阻部分和比较电阻部分热敏电阻器。 平面基板具有在其平坦基板的厚度方向上贯通平板状基板的面向加热电阻部和比较电阻部的凹部。 流体流动通道与面向比较电阻部分的凹部连通，以使流体流入凹部。 可以使用根据比较电阻部报告的流体温度的加热电阻部分精确地测量流体的流速或速度。
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公开(公告)号：US06675644B2
公开(公告)日：2004-01-13
申请号：US09289393
申请日：1999-04-12
申请人： Tomoya Yamakawa , Masahiro Kawai , Yutaka Ohashi , Yuichi Sakai , Akira Yamashita , Kazuhiko Tsutsumi
发明人： Tomoya Yamakawa , Masahiro Kawai , Yutaka Ohashi , Yuichi Sakai , Akira Yamashita , Kazuhiko Tsutsumi
IPC分类号： G01F168
CPC分类号： G01F1/6845 , G01F1/692
摘要： A thermo-sensitive flow rate sensor that comprises a plate-like substrate, a part of which is removed so that a space is provided therein, a diaphragm portion formed like a thin layer above the space in such a manner as to be integral with the plate-like substrate, and a heating element constituted by a thermo-sensitive electrically resistant film formed on the diaphragm. Plural holes penetrating the diaphragm portion are bored in an outer peripheral portion of the heating element. Each of the plurality of holes is shaped in such a way as to have obtuse corner portions or to have substantially no corner portions. The thermo-sensitive flow rate sensor measures the flow rate of a fluid, which is to be measured, according to an amount of heat transferred to the fluid from a part heated by energizing the heating element.
摘要翻译： 一种热敏流量传感器，其包括板状基板，其一部分被移除以便在其中设置空间;隔膜部分，其形成为与空间上方的薄层形成为一体， 板状基板和由形成在隔膜上的热敏电阻膜构成的加热元件。 穿透隔膜部分的多个孔在加热元件的外周部分中钻孔。 多个孔中的每一个成形为具有钝角部分或基本上没有角部。 热敏流量传感器根据通过激励加热元件加热的部件传递到流体的热量来测量要测量的流体的流量。
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公开(公告)号：US5965811A
公开(公告)日：1999-10-12
申请号：US940964
申请日：1997-09-30
CPC分类号： G01P5/10 , G01F1/6845 , G01F1/692
摘要： A flow rate detecting element has a flat substrate 1 provided with a gap opening 18 on at least one side surface, a sensor section 15 including a heating resistance element 4 and a pair of temperature detecting resistance elements 5, 6 arranged on opposite sides of the heating resistance element and wrapped by an insulating supporting film 2 and an insulating protecting film 3 from above and below. The sensor section is arranged on a plane substantially parallel with a surface of the flat substrate and at least one end of the supporting film is held by the flat substrate to locate the sensor section over the gap, whereby the most part of the sensor section is disposed in a non-contact state with the flat substrate. A thin-film-shaped thermal conduction promoting member 11 is provided in a heat transmitting path of the sensor section between the heating resistance element and the pair of temperature detecting resistance elements, and has a higher thermal conductivity than the supporting film and the protecting film.
摘要翻译： 流量检测元件具有在至少一个侧面上设置有间隙开口18的平坦基板1，包括加热电阻元件4的传感器部15和布置在第二侧的相对侧的一对温度检测电阻元件5,6 加热电阻元件并由绝缘支撑膜2和绝缘保护膜3从上方和下方包裹。 传感器部分布置在与平坦基板的表面基本平行的平面上，并且支撑膜的至少一端由平坦基板保持，以将传感器部分定位在间隙上，由此传感器部分的大部分是 与平坦基板以非接触状态配置。 在传感器部分的传热路径中，在加热电阻元件和一对温度检测电阻元件之间设置有薄膜状导热促进元件11，并且具有比支撑膜和保护膜更高的热导率 。
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4.发明授权
公开(公告)号：US5936157A
公开(公告)日：1999-08-10
申请号：US968569
申请日：1997-11-12
CPC分类号： G01F1/692 , G01F1/6845
摘要： A thermosensitive flow rate detecting element having a flat substrate is provided with a gap having an opening on at least one side thereof for the flow of a fluid, an insulating support film provided on the one side of the substrate, a sensor unit which has a heating element for heating the fluid and a thermosensitive element for detecting temperature of the fluid provided in the upper position of the opening on the insulating support film, and a fluid temperature measuring element, provided at a distance from the sensor unit on the one side of the flat substrate, for detecting temperature of the fluid. The thermosensitive flow rate detecting element measures flow rate or flow velocity of the fluid on the basis of a temperature detected by the thermosensitive element, by keeping heating temperature of the heating element at a level higher than a temperature detected by the fluid temperature measuring element by a prescribed difference in temperature. A first notch is provided on the flat substrate near the fluid temperature measuring element and is formed by removing a part of the flat substrate from either side thereof so as not to reach the remaining side thereof.
摘要翻译： 具有平坦基板的热敏流量检测元件在其至少一侧具有用于流体流动的开口的间隙，设置在基板一侧的绝缘支撑膜，传感器单元，其具有 用于加热流体的加热元件和用于检测设置在绝缘支撑膜上的开口的上部位置的流体的温度的热敏元件和流体温度测量元件，该流体温度测量元件设置在距传感器单元一侧的距离 平板基板，用于检测流体的温度。 热敏流量检测元件通过将加热元件的加热温度保持在比流体温度测量元件检测到的温度高的水平，基于由热敏元件检测到的温度来测量流体的流速或流速，通过 规定的温差。 在液体温度测量元件附近的平坦基板上设置有第一凹口，并且通过从其任一侧去除一部分平坦基板形成，以便不到达其剩余侧面。
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公开(公告)号：US06725716B1
公开(公告)日：2004-04-27
申请号：US09414885
申请日：1999-10-08
IPC分类号： G01F168
CPC分类号： G01F1/6845 , G01F1/698
摘要： A thermo-sensitive flow rate sensor having a flow rate detecting device comprising: a plate-like substrate; a heating element and a temperature compensating element constituted by thermo-sensitive resistance films and formed on a top surface of the substrate in such a way as to be spaced apart from each other; and a low heat capacity portion formed by removing partially an area, in which the heating element is formed, of the substrate from a back surface side thereof. This thermo-sensitive flow rate sensor is used for measuring the flow velocity or flow rate of a measurement fluid according to a heat transfer phenomenon where a heat is transferred from the heating element or from a portion heated by the heating element to the measurement fluid. In this thermo-sensitive flow rate sensor, a diaphragm is constructed by forming at least one cavity by removing partially a region other than the area, in which the heating element and the temperature compensating element are formed, of the substrate from the back surface side thereof.
摘要翻译： 一种具有流量检测装置的热敏流量传感器，包括：板状基板; 加热元件和由热敏电阻膜构成的温度补偿元件，并以彼此间隔开的方式形成在基板的顶表面上; 以及通过从其背面侧部分地除去基板的形成有加热元件的区域而形成的低热容部分。 该热敏流量传感器用于根据传热现象来测量测量流体的流速或流量，其中热量从加热元件或从加热元件加热的部分传递到测量流体。 在该热敏流量传感器中，通过从基板的背面侧除去部分地除去形成有加热元件和温度补偿元件的区域以外的区域来形成至少一个空腔来构造隔膜 其中。
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6.发明授权Thermal flow sensor supporting element having a gradually increased portion between its distal ends 失效热流量传感器支撑元件在其远端之间具有逐渐增加的部分
公开(公告)号：US6079264A
公开(公告)日：2000-06-27
申请号：US935056
申请日：1997-09-22
CPC分类号： G01F1/6847 , G01F1/6845 , G01F1/692
摘要： A flow rate detector has a detection pipe (26) disposed in a fluid channel (21), a supporting member (27) for supporting a thermosensitive flow rate sensor (28) being provided in the detection pipe (26). The supporting member (27) has a sensor holding portion (27a) which has a predetermined width and a broadening portion (27b) which is adjacent to one end of the sensor holding portion (27a) and the width of which gradually increases from the distal end thereof toward the sensor holding portion (27a). The flow rate sensor (28) is built in a side surface of the sensor holding portion (27a) such that it is exposed in the detection pipe (26).
摘要翻译： 流量检测器具有设置在流体通道（21）中的检测管（26），用于支撑设置在检测管（26）中的热敏流量传感器（28）的支撑件（27）。 支撑构件（27）具有预定宽度的传感器保持部分（27a）和与传感器保持部分（27a）的一端相邻的宽度部分（27b），其宽度从远端 端部朝向传感器保持部（27a）。 流量传感器（28）内置在传感器保持部（27a）的侧面，使其暴露在检测管（26）中。
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公开(公告)号：US07786541B2
公开(公告)日：2010-08-31
申请号：US12067426
申请日：2006-08-30
IPC分类号： H01L29/84
CPC分类号： G01L9/0047 , G01L9/0048 , G01L9/0054 , G01L19/04
摘要： A semiconductor pressure sensor comprises a silicon support substrate (1), an insulating layer (2) formed on the silicon support substrate (1), and a silicon thin plate (3) formed on the insulating layer (2). A through-hole (1a) extending in the thickness direction of the silicon support substrate (1) is formed in the silicon support substrate (1). The silicon thin plate (3) located on an extension of the through-hole (1a) functions as a diaphragm (23) that is deformed by an external pressure. The insulating layer (2) remains over the entire lower surface of the diaphragm (23). The thickness of the insulating layer (2) decreases from the peripheral portion toward the central portion of the diaphragm (23). This provides the semiconductor pressure sensor capable of reducing both the offset voltage and the variation of output voltage caused by the variation of temperature and its fabrication method.
摘要翻译： 半导体压力传感器包括硅支撑基板（1），形成在硅支撑基板（1）上的绝缘层（2）和形成在绝缘层（2）上的硅薄板（3）。 在硅支撑基板（1）上形成在硅支撑基板（1）的厚度方向上延伸的通孔（1a）。 位于通孔（1a）的延伸部上的硅薄板（3）用作通过外部压力变形的隔膜（23）。 绝缘层（2）保持在隔膜（23）的整个下表面上。 绝缘层（2）的厚度从隔膜（23）的周边部分向中心部分减小。 这提供了半导体压力传感器能够降低偏移电压和由温度变化引起的输出电压的变化及其制造方法。
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公开(公告)号：US20090140355A1
公开(公告)日：2009-06-04
申请号：US12067426
申请日：2006-08-30
CPC分类号： G01L9/0047 , G01L9/0048 , G01L9/0054 , G01L19/04
摘要： A semiconductor pressure sensor comprises a silicon support substrate (1), an insulating layer (2) formed on the silicon support substrate (1), and a silicon thin plate (3) formed on the insulating layer (2). A through-hole (1a) extending in the thickness direction of the silicon support substrate (1) is formed in the silicon support substrate (1). The silicon thin plate (3) located on an extension of the through-hole (1a) functions as a diaphragm (23) that is deformed by an external pressure. The insulating layer (2) remains over the entire lower surface of the diaphragm (23). The thickness of the insulating layer (2) decreases from the peripheral portion toward the central portion of the diaphragm (23). This provides the semiconductor pressure sensor capable of reducing both the offset voltage and the variation of output voltage caused by the variation of temperature and its fabrication method.
摘要翻译： 半导体压力传感器包括硅支撑基板（1），形成在硅支撑基板（1）上的绝缘层（2）和形成在绝缘层（2）上的硅薄板（3）。 在硅支撑基板（1）上形成在硅支撑基板（1）的厚度方向上延伸的通孔（1a）。 位于通孔（1a）的延伸部上的硅薄板（3）用作通过外部压力变形的隔膜（23）。 绝缘层（2）保持在隔膜（23）的整个下表面上。 绝缘层（2）的厚度从隔膜（23）的周边部分向中心部分减小。 这提供了半导体压力传感器能够降低偏移电压和由温度变化引起的输出电压的变化及其制造方法。
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公开(公告)号：US09243533B2
公开(公告)日：2016-01-26
申请号：US14405547
申请日：2012-06-07
申请人： Akira Yamashita , Koichiro Nakatani
发明人： Akira Yamashita , Koichiro Nakatani
IPC分类号： F01N3/00 , F01N3/08 , B01D53/94 , F01N3/20 , F01N9/00 , F01N3/22 , F01N3/34 , F02D41/02 , F02D41/40
CPC分类号： F01N3/0814 , B01D53/94 , B01D53/9409 , B01D53/9477 , B01D53/9495 , B01D2251/2067 , B01D2255/20738 , B01D2255/50 , B01D2258/012 , F01N3/2013 , F01N3/2033 , F01N3/208 , F01N3/22 , F01N3/34 , F01N9/00 , F01N2610/02 , F01N2900/1602 , F01N2900/1622 , F02D41/024 , F02D41/405 , Y02T10/24 , Y02T10/26 , Y02T10/47
摘要： An engine system includes: an exhaust path through which an exhaust gas of an engine passes; an urea injection valve that injects urea into the exhaust path; a catalyst that is provided in the exhaust path on a downstream of the urea injection valve, and that selectively reduces NOx by using ammonia acting as a reducing agent, the ammonia being generated by hydrolyzing injected urea from the urea injection valve; a heating portion that is capable of heating the catalyst and the injected urea; and a control unit that performs first control, in which the urea injection valve injects urea, the heating portion heats the injected urea to generate ammonia, or second control, in which the heating portion increases a temperature of the catalyst to a temperature at which NOx can be reduced, on a basis of an amount of ammonia adsorbed on the catalyst.
摘要翻译： 发动机系统包括：发动机排气通过的排气路径; 尿素喷射阀，其将尿素喷射到排气路径中; 一种催化剂，其设置在尿素喷射阀下游的排气路径中，并且通过使用作为还原剂的氨选择性地还原NOx，该氨是通过从尿素喷射阀水解注入的尿素而产生的; 能够加热催化剂和注入的尿素的加热部分; 以及执行第一控制的控制单元，其中尿素喷射阀喷射尿素，加热部分加热喷射的尿素以产生氨，或第二控制，其中加热部分将催化剂的温度升高到NOx的温度 可以基于吸附在催化剂上的氨的量来还原。
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公开(公告)号：US08573253B2
公开(公告)日：2013-11-05
申请号：US11884129
申请日：2006-02-20
申请人： Nobuyuki Ogami , Nobuo Kobayashi , Akira Yamashita
发明人： Nobuyuki Ogami , Nobuo Kobayashi , Akira Yamashita
CPC分类号： F17C13/04 , F17C2201/0104 , F17C2205/0323 , F17C2205/0338 , F17C2205/0391 , Y10T137/8326 , Y10T137/86348 , Y10T137/86372 , Y10T137/87249
摘要： There is disclosed a valve assembly for a gas container capable of appropriately discharging a gas from the gas container, even if a valve of a discharge passage has a failure or the like. The valve assembly for the gas container disposed at the gas container has, as passages which allow the inside of the gas container to communicate with the outside, a filling passage which fills the gas container with the gas and a discharge passage which discharges the gas. Furthermore, the valve assembly has a filling-side valve disposed at the filling passage and configured to close this passage, a discharge-side valve disposed at the discharge passage and configured to close this passage, a communication path which connects a downstream side of the discharge-side valve to a downstream side of the filling-side valve, and a shut-off valve disposed at the communication path. When the discharge-side valve does not open due to the failure or the like, the shut-off valve is opened to allow the gas to flow through the filling passage, the communication path and the discharge passage in this order.
摘要翻译： 公开了一种能够适当地从气体容器排出气体的气体容器的阀组件，即使排出通路的阀具有故障等。 用于设置在气体容器中的气体容器的阀组件具有允许气体容器内部与外部连通的通道，填充有气体的气体容器的填充通道和排出气体的排出通道。 此外，阀组件具有设置在填充通道处并且构造成关闭该通道的填充侧阀，排出侧阀设置在排出通道处，并被构造成关闭该通道，连通路径 排出侧阀到填充侧阀的下游侧，以及截止阀，设置在连通路径。 当排出侧阀由于故障等而不打开时，截止阀打开以允许气体依次流过填充通道，连通路径和排出通道。
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