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    METHODS AND SYSTEMS FOR DYNAMICALLY GENERATING TAILORED LASER PULSES
    3.
    发明申请
    METHODS AND SYSTEMS FOR DYNAMICALLY GENERATING TAILORED LASER PULSES 有权
    动态生成定制激光脉冲的方法和系统

    公开(公告)号：US20090245302A1

    公开(公告)日：2009-10-01

    申请号：US12060076

    申请日：2008-03-31

    申请人： Brian W. Baird ,  Clint R. Vandergiessen ,  Steve Swaringen ,  Robert Hainsey ,  Yunlong Sun ,  Kelly J. Bruland ,  Andrew Hooper

    发明人： Brian W. Baird ,  Clint R. Vandergiessen ,  Steve Swaringen ,  Robert Hainsey ,  Yunlong Sun ,  Kelly J. Bruland ,  Andrew Hooper

    IPC分类号： H01S3/10

    CPC分类号： H01S3/1305 ,  B23K26/0622 ,  H01S3/0057 ,  H01S3/102

    摘要： Processing workpieces such as semiconductor wafers or other materials with a laser includes selecting a target to process that corresponds to a target class associated with a predefined temporal pulse profile. The temporal pulse profile includes a first portion that defines a first time duration, and a second portion that defines a second time duration. A method includes generating a laser pulse based on laser system input parameters configured to shape the laser pulse according to the temporal pulse profile, detecting the generated laser pulse, comparing the generated laser pulse to the temporal pulse profile, and adjusting the laser system input parameters based on the comparison.

    摘要翻译： 使用激光加工诸如半导体晶片或其他材料的工件包括选择对应于与预定义的时间脉冲轮廓相关联的目标类别的目标。 时间脉冲分布包括限定第一持续时间的第一部分和限定第二持续时间的第二部分。 一种方法包括：基于激光系统输入参数产生激光脉冲，所述激光系统输入参数被配置为根据时间脉冲分布来形成激光脉冲，检测所产生的激光脉冲，将所产生的激光脉冲与时间脉冲分布进行比较，以及调整激光系统输入参数 基于比较。

    Methods and systems for dynamically generating tailored laser pulses
    4.
    发明授权
    Methods and systems for dynamically generating tailored laser pulses 有权
    动态产生定制激光脉冲的方法和系统

    公开(公告)号：US08526473B2

    公开(公告)日：2013-09-03

    申请号：US12060076

    申请日：2008-03-31

    申请人： Brian W. Baird ,  Clint R. Vandergiessen ,  Steve Swaringen ,  Robert Hainsey ,  Yunlong Sun ,  Kelly J. Bruland ,  Andrew Hooper

    发明人： Brian W. Baird ,  Clint R. Vandergiessen ,  Steve Swaringen ,  Robert Hainsey ,  Yunlong Sun ,  Kelly J. Bruland ,  Andrew Hooper

    IPC分类号： H01L21/302 ,  H01S3/10 ,  B23K26/38

    CPC分类号： H01S3/1305 ,  B23K26/0622 ,  H01S3/0057 ,  H01S3/102

    摘要： Processing workpieces such as semiconductor wafers or other materials with a laser includes selecting a target to process that corresponds to a target class associated with a predefined temporal pulse profile. The temporal pulse profile includes a first portion that defines a first time duration, and a second portion that defines a second time duration. A method includes generating a laser pulse based on laser system input parameters configured to shape the laser pulse according to the temporal pulse profile, detecting the generated laser pulse, comparing the generated laser pulse to the temporal pulse profile, and adjusting the laser system input parameters based on the comparison.

    摘要翻译： 使用激光加工诸如半导体晶片或其他材料的工件包括选择对应于与预定义的时间脉冲轮廓相关联的目标类别的目标。 时间脉冲分布包括限定第一持续时间的第一部分和限定第二持续时间的第二部分。 一种方法包括：基于激光系统输入参数产生激光脉冲，所述激光系统输入参数被配置为根据时间脉冲分布来形成激光脉冲，检测所产生的激光脉冲，将所产生的激光脉冲与时间脉冲分布进行比较，以及调整激光系统输入参数 基于比较。

    Generating sets of tailored laser pulses
    5.
    发明申请
    Generating sets of tailored laser pulses 有权
    生成一组定制的激光脉冲

    公开(公告)号：US20050041976A1

    公开(公告)日：2005-02-24

    申请号：US10921765

    申请日：2004-08-18

    申请人： Yunlong Sun ,  Robert Hainsey

    发明人： Yunlong Sun ,  Robert Hainsey

    IPC分类号： B23K20060101 ,  B23K26/06 ,  B23K26/38 ,  H01S20060101 ,  H04J14/02

    CPC分类号： H01L23/5258 ,  B23K26/0613 ,  B23K26/0622 ,  B23K2101/40 ,  H01L2924/0002 ,  H01L2924/00

    摘要： In a master oscillator power amplifier, a driver (208) of a diode laser (202) is specially controlled to generate a set of two or more injection laser pulses that are injected into a power amplifier (204) operated in an unsaturated state to generate a set (50) of laser pulses (52) that replicate the temporal power profile of the injection laser pulses to remove a conductive link (22) and/or its overlying passivation layer (44) in a memory or other IC chip. Each set (50) includes at least one specially tailored pulse (52) and/or two or more pulses (50) having different temporal power profiles. The duration of the set (50) is short enough to be treated as a single “pulse” by conventional positioning systems (380) to perform on-the-fly link removal without stopping.

    摘要翻译： 在主振荡器功率放大器中，特别地控制二极管激光器（202）的驱动器（208），以产生注入到以不饱和状态操作的功率放大器（204）中的两个或更多个注入激光脉冲的集合，以产生 一组（50）激光脉冲（52），其复制所述注入激光脉冲的时间功率分布以去除存储器或其它IC芯片中的导电连接（22）和/或其上覆钝化层（44）。 每个组（50）包括具有不同时间功率分布的至少一个特别定制的脉冲（52）和/或两个或更多个脉冲（50）。 集合（50）的持续时间足够短以被常规定位系统（380）视为单个“脉冲”，以在不停止的情况下执行即时链路去除。

    Laser Chalcogenide Phase Change Device
    6.
    发明申请
    Laser Chalcogenide Phase Change Device 有权
    激光硫族化物相变装置

    公开(公告)号：US20090179201A1

    公开(公告)日：2009-07-16

    申请号：US11972660

    申请日：2008-01-11

    申请人： Andy E. Hooper ,  Allen Kawasaki ,  Robert Hainsey

    发明人： Andy E. Hooper ,  Allen Kawasaki ,  Robert Hainsey

    IPC分类号： H01L29/04 ,  H01L21/263

    CPC分类号： H01L23/5258 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A laser activated phase change device for use in an integrated circuit comprises a chalcogenide fuse configured to connect a first patterned metal line and a second patterned metal line and positioned between an inter layer dielectric and an over fuse dielectric. The fuse interconnects active semiconductor elements manufactured on a substrate. A method for activating the laser activated phase change device includes selecting a laser condition of a laser based on characteristics of the fuse and programming a phase-change of the fuse with the laser by direct photon absorption until a threshold transition temperature is met.

    摘要翻译： 用于集成电路的激光激活相变装置包括被配置为连接第一图案化金属线和第二图案化金属线并位于层间电介质和过熔断绝缘体之间的硫族化物保险丝。 熔丝将在衬底上制造的有源半导体元件互连。 用于激活激光激活相变装置的方法包括：基于熔丝的特性来选择激光的激光状态，并通过直接光子吸收来编程与激光器的熔丝的相变直到达到阈值转变温度。

    Photonic milling using dynamic beam arrays
    7.
    发明授权
    Photonic milling using dynamic beam arrays 失效
    使用动态光束阵列进行光子研磨

    公开(公告)号：US08178818B2

    公开(公告)日：2012-05-15

    申请号：US12235294

    申请日：2008-09-22

    申请人： Brian W. Baird ,  Kelly J. Bruland ,  Robert Hainsey

    发明人： Brian W. Baird ,  Kelly J. Bruland ,  Robert Hainsey

    IPC分类号： B23K26/02 ,  B23K26/04

    CPC分类号： B23K26/03

    摘要： A laser processing system includes a beam positioning system to align beam delivery coordinates relative to a workpiece. The beam positioning system generates position data corresponding to the alignment. The system also includes a pulsed laser source and a beamlet generation module to receive a laser pulse from the pulsed laser source. The beamlet generation module generates a beamlet array from the laser pulse. The beamlet array includes a plurality of beamlet pulses. The system further includes a beamlet modulator to selectively modulate the amplitude of each beamlet pulse in the beamlet array, and beamlet delivery optics to focus the modulated beamlet array onto one or more targets at locations on the workpiece corresponding to the position data.

    摘要翻译： 激光处理系统包括用于使输送坐标相对于工件对准的光束定位系统。 光束定位系统产生对准的位置数据。 该系统还包括脉冲激光源和子束产生模块，以从脉冲激光源接收激光脉冲。 子波束生成模块从激光脉冲生成小波阵列。 子束阵列包括多个子束脉冲。 该系统还包括一个子束调制器，用于选择性地调制子束阵列中的每个子束脉冲的振幅，以及子束传递光学器件，用于将调制的子束阵列聚焦到与位置数据对应的工件上的位置上的一个或多个目标上。

    METHOD AND APPARATUS FOR RELIABLY LASER MARKING ARTICLES
    8.
    发明申请
    METHOD AND APPARATUS FOR RELIABLY LASER MARKING ARTICLES 有权
    可靠的激光标记方法和装置

    公开(公告)号：US20110194574A1

    公开(公告)日：2011-08-11

    申请号：US12704293

    申请日：2010-02-11

    申请人： Haibin Zhang ,  Glenn Simenson ,  Robert Hainsey ,  David Barsic ,  Jeffrey Howerton ,  Wayne Crowther ,  Patrick Leonard

    发明人： Haibin Zhang ,  Glenn Simenson ,  Robert Hainsey ,  David Barsic ,  Jeffrey Howerton ,  Wayne Crowther ,  Patrick Leonard

    IPC分类号： H01S3/10 ,  B41J2/47

    CPC分类号： B41J2/442 ,  B41M5/262

    摘要： The invention is a method and apparatus for creating a color and optical density selectable visible mark on an anodized aluminum specimen. The method includes providing a laser marking system having a laser, laser optics and a controller operatively connected to said laser to control laser pulse parameters and a controller with stored laser pulse parameters, selecting the stored laser pulse parameters associated with the desired color and optical density, directing the laser marking system to produce laser pulses having laser pulse parameters associated with the desired color and optical density including temporal pulse widths greater than about 1 and less than about 1000 picoseconds to impinge upon said anodized aluminum.

    摘要翻译： 本发明是一种用于在阳极氧化铝样品上产生颜色和光密度可选择可见标记的方法和装置。 该方法包括提供激光打标系统，其具有激光器，激光光学器件和可操作地连接到所述激光器以控制激光脉冲参数的控制器和具有存储的激光脉冲参数的控制器，选择存储的与所需颜色和光密度相关联的激光脉冲参数 引导激光打标系统产生激光脉冲，该激光脉冲具有与所需颜色和光密度相关联的激光脉冲参数，包括大于约1皮秒并小于约1000皮秒的时间脉冲宽度以撞击所述阳极氧化铝。

    PHOTONIC MILLING USING DYNAMIC BEAM ARRAYS
    9.
    发明申请
    PHOTONIC MILLING USING DYNAMIC BEAM ARRAYS 失效
    使用动态光束阵列的光电铣削

    公开(公告)号：US20090242522A1

    公开(公告)日：2009-10-01

    申请号：US12235294

    申请日：2008-09-22

    申请人： Brian W. Baird ,  Kelly J. Bruland ,  Robert Hainsey

    发明人： Brian W. Baird ,  Kelly J. Bruland ,  Robert Hainsey

    IPC分类号： B23K26/00

    CPC分类号： B23K26/03

    摘要： A laser processing system includes a beam positioning system to align beam delivery coordinates relative to a workpiece. The beam positioning system generates position data corresponding to the alignment. The system also includes a pulsed laser source and a beamlet generation module to receive a laser pulse from the pulsed laser source. The beamlet generation module generates a beamlet array from the laser pulse. The beamlet array includes a plurality of beamlet pulses. The system further includes a beamlet modulator to selectively modulate the amplitude of each beamlet pulse in the beamlet array, and beamlet delivery optics to focus the modulated beamlet array onto one or more targets at locations on the workpiece corresponding to the position data.

    摘要翻译： 激光处理系统包括用于使输送坐标相对于工件对准的光束定位系统。 光束定位系统产生对准的位置数据。 该系统还包括脉冲激光源和子束产生模块，以从脉冲激光源接收激光脉冲。 子波束生成模块从激光脉冲生成小波阵列。 子束阵列包括多个子束脉冲。 该系统还包括一个子束调制器，用于选择性地调制子束阵列中的每个子束脉冲的振幅，以及子束传递光学器件，用于将调制的子束阵列聚焦到与位置数据对应的工件上的位置上的一个或多个目标上。

    Method and apparatus for reliably laser marking articles
    10.
    发明授权
    Method and apparatus for reliably laser marking articles 有权
    用于可靠地激光打标的方法和装置

    公开(公告)号：US08379679B2

    公开(公告)日：2013-02-19

    申请号：US12704293

    申请日：2010-02-11

    申请人： Haibin Zhang ,  Glenn Simenson ,  Robert Hainsey ,  David Barsic ,  Jeffrey Howerton ,  Wayne Crowther ,  Patrick Leonard

    发明人： Haibin Zhang ,  Glenn Simenson ,  Robert Hainsey ,  David Barsic ,  Jeffrey Howerton ,  Wayne Crowther ,  Patrick Leonard

    IPC分类号： H01S3/10 ,  H01S3/13

    CPC分类号： B41J2/442 ,  B41M5/262

    摘要： The invention is a method and apparatus for creating a color and optical density selectable visible mark on an anodized aluminum specimen. The method includes providing a laser marking system having a laser, laser optics and a controller operatively connected to said laser to control laser pulse parameters and a controller with stored laser pulse parameters, selecting the stored laser pulse parameters associated with the desired color and optical density, directing the laser marking system to produce laser pulses having laser pulse parameters associated with the desired color and optical density including temporal pulse widths greater than about 1 and less than about 1000 picoseconds to impinge upon said anodized aluminum.

    摘要翻译： 本发明是一种用于在阳极氧化铝样品上产生颜色和光密度可选择可见标记的方法和装置。 该方法包括提供激光打标系统，其具有激光器，激光光学器件和可操作地连接到所述激光器以控制激光脉冲参数的控制器和具有存储的激光脉冲参数的控制器，选择存储的与所需颜色和光密度相关联的激光脉冲参数 引导激光打标系统产生激光脉冲，该激光脉冲具有与所需颜色和光密度相关联的激光脉冲参数，包括大于约1皮秒并小于约1000皮秒的时间脉冲宽度以撞击所述阳极氧化铝。