公开(公告)号：US5173719A

公开(公告)日：1992-12-22

申请号：US630190

申请日：1990-12-19

申请人： Yuzo Taniguchi ,  Tooru Fukui ,  Mikihito Saito ,  Yoshiichi Hori ,  Takahiro Kamagata

发明人： Yuzo Taniguchi ,  Tooru Fukui ,  Mikihito Saito ,  Yoshiichi Hori ,  Takahiro Kamagata

IPC分类号： H01L21/66 ,  G01N21/93 ,  G01N21/956

CPC分类号： G01N21/956 ,  G01N21/93 ,  G01N21/95607

摘要： The present invention relates to a technique, in the inspection of a defect of a semiconductor memory or the like, in which chip comparison is separated from repetitive pattern comparison in a region of a wafer to be inspected whereby both the comparisons are rendered possible to perform in parallel in one and the same scanning.

摘要翻译： 本发明涉及一种技术，在检查半导体存储器等的缺陷中，其中芯片比较与要检查的晶片的区域中的重复图案比较分离，由此两个比较都可以执行 在同一扫描中并行。

公开(公告)号：US4731855A

公开(公告)日：1988-03-15

申请号：US720730

申请日：1985-04-08

申请人： Kyo Suda ,  Shigeharu Kimura ,  Shinobu Hase ,  Chusuke Munakata ,  Kanji Kinameri ,  Yoshitoshi Ito ,  Hiroto Nagatomo ,  Yuzo Taniguchi ,  Mikihito Saito

发明人： Kyo Suda ,  Shigeharu Kimura ,  Shinobu Hase ,  Chusuke Munakata ,  Kanji Kinameri ,  Yoshitoshi Ito ,  Hiroto Nagatomo ,  Yuzo Taniguchi ,  Mikihito Saito

IPC分类号： G01N21/956 ,  H01L21/26 ,  G06K9/00

CPC分类号： G01N21/956 ,  H01L21/26

摘要： A pattern defect inspection apparatus detects presence or absence of a defect in a pattern formed on a semiconductor wafer by scanning the pattern normally to the surface thereof by a coherent light beam of a predetermined spot size, detecting reflected diffraction lights generated thereby and processing the detected lights. It comprises an abnormal direction signal detector including photo-detectors having wide light receiving areas arranged in a plurality of spatial areas which the reflected diffraction lights from a normal pattern do not normally reach, a normal pattern detector including photo-detectors having large light receiving areas arranged in a plurality of spatial areas which the reflected diffraction lights from the normal pattern reach, and a defect discriminator for determining if the abnormal direction signals are due to a true defect or not in accordance with the signals from the abnormal direction signal detector and the normal pattern detector.

摘要翻译： 图案缺陷检查装置通过用预定光斑尺寸的相干光束将图案通常扫描到其表面来检测在半导体晶片上形成的图案中的缺陷的存在或不存在，检测由此产生的反射衍射光并且处理检测到的 灯光 它包括异常方向信号检测器，其包括具有布置在多个空间区域中的宽光接收区域的光检测器，正常图案的反射衍射光通常不能正常到达，包括光检测器的正常图案检测器具有大的光接收面积 布置在从正常图案到达的反射衍射光的多个空间区域中，以及用于根据来自异常方向信号检测器的信号和用于确定异常方向信号是否由于真实缺陷而导致的缺陷鉴别器 正常模式检测器

公开(公告)号：US06346772B1

公开(公告)日：2002-02-12

申请号：US09903495

申请日：2001-07-13

申请人： Masashi Nishiki ,  Ryohei Satoh ,  Yuzo Taniguchi ,  Shigeaki Suzuki ,  Michifumi Kawai ,  Masahito Ijuin ,  Akira Yabushita ,  Makoto Fukushima ,  Tomohiko Murase

发明人： Masashi Nishiki ,  Ryohei Satoh ,  Yuzo Taniguchi ,  Shigeaki Suzuki ,  Michifumi Kawai ,  Masahito Ijuin ,  Akira Yabushita ,  Makoto Fukushima ,  Tomohiko Murase

IPC分类号： H01J1749

CPC分类号： H05K3/062 ,  H01J9/02 ,  H01J11/12 ,  H01J11/22 ,  H01J11/24 ,  H01J2211/225 ,  H05K3/04 ,  H05K3/388 ,  H05K2201/0175 ,  H05K2201/0326 ,  H05K2203/025 ,  H05K2203/107

摘要： A gas discharge display device comprising a front side substrate having a plurality of first electrodes and a back side substrate having a plurality of second electrodes, wherein at least said first electrodes or second electrodes are formed by wet etching using a resist made of an inorganic material, is excellent in the ability to suppress the breakage of wiring in electrodes.

摘要翻译： 一种气体放电显示装置，包括具有多个第一电极的前侧基板和具有多个第二电极的背面基板，其中至少所述第一电极或第二电极通过使用由无机材料制成的抗蚀剂的湿蚀刻形成 能够抑制电极中的配线断裂的能力优异。

公开(公告)号：US06339653B1

公开(公告)日：2002-01-15

申请号：US09523380

申请日：2000-03-10

申请人： Seiji Ishikawa ,  Masao Sakata ,  Jun Nakazato ,  Sadao Shimoyashiro ,  Hiroto Nagatomo ,  Yuzo Taniguchi ,  Osamu Satou ,  Tsutomu Okabe ,  Yuzaburo Sakamoto ,  Kimio Muramatsu ,  Kazuhiko Matsuoka ,  Taizo Hashimoto ,  Yuichi Ohyama ,  Yutaka Ebara ,  Isao Miyazaki ,  Shuichi Hanashima

发明人： Seiji Ishikawa ,  Masao Sakata ,  Jun Nakazato ,  Sadao Shimoyashiro ,  Hiroto Nagatomo ,  Yuzo Taniguchi ,  Osamu Satou ,  Tsutomu Okabe ,  Yuzaburo Sakamoto ,  Kimio Muramatsu ,  Kazuhiko Matsuoka ,  Taizo Hashimoto ,  Yuichi Ohyama ,  Yutaka Ebara ,  Isao Miyazaki ,  Shuichi Hanashima

IPC分类号： G06K900

CPC分类号： G01N21/88 ,  G01N21/956 ,  H01L22/20 ,  H01L2924/0002 ,  H01L2924/00

摘要： The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.

摘要翻译： 本发明分别提供用于探测器和自动粒子检测机的数据分析台。 并且，在数据分析站中，以产品为基础描述芯片的配置的坐标与描述缺陷的位置的坐标相同。 此外，该站提供确定每个缺陷属于哪个芯片的功能。 这些数据分析站通过通信线连接。 本发明能够基于芯片分析数据，从而能够掌握每个芯片上的缺陷引起的芯片与芯片的产品特性之间的关系。

公开(公告)号：US06621217B2

公开(公告)日：2003-09-16

申请号：US10068939

申请日：2002-02-11

申请人： Masashi Nishiki ,  Ryohei Satoh ,  Yuzo Taniguchi ,  Shigeaki Suzuki ,  Michifumi Kawai ,  Masahito Ijuin ,  Akira Yabushita ,  Makoto Fukushima ,  Tomohiko Murase

发明人： Masashi Nishiki ,  Ryohei Satoh ,  Yuzo Taniguchi ,  Shigeaki Suzuki ,  Michifumi Kawai ,  Masahito Ijuin ,  Akira Yabushita ,  Makoto Fukushima ,  Tomohiko Murase

IPC分类号： H01J1749

CPC分类号： H05K3/062 ,  H01J9/02 ,  H01J11/12 ,  H01J11/22 ,  H01J11/24 ,  H01J2211/225 ,  H05K3/04 ,  H05K3/388 ,  H05K2201/0175 ,  H05K2201/0326 ,  H05K2203/025 ,  H05K2203/107

摘要： A gas discharge display device comprising a front side substrate having a plurality of first electrodes and a back side substrate having a plurality of second electrodes, wherein at least said first electrodes or second electrodes are formed by wet etching using a resist made of an inorganic material, is excellent in the ability to suppress the breakage of wiring in electrodes.

公开(公告)号：US06429586B1

公开(公告)日：2002-08-06

申请号：US09225552

申请日：1999-01-05

申请人： Masashi Nishiki ,  Ryohei Satoh ,  Yuzo Taniguchi ,  Shigeaki Suzuki ,  Michifumi Kawai ,  Masahito Ijuin ,  Akira Yabushita ,  Tomohiro Murase

发明人： Masashi Nishiki ,  Ryohei Satoh ,  Yuzo Taniguchi ,  Shigeaki Suzuki ,  Michifumi Kawai ,  Masahito Ijuin ,  Akira Yabushita ,  Tomohiro Murase

IPC分类号： H01J1749

CPC分类号： H01J9/241 ,  H01J9/02

摘要： A method of making a gas discharge display panel and a gas discharge display device using laser processing so that the manufacturing time to form wiring on a substrate thereof is significantly reduced. In order to achieve this, the gas discharge display panel is provided with a first substrate having a plurality of first electrodes and a plurality of second electrodes, and the first electrodes are laser processed to have a substantially rectangular shape. The second electrodes are formed on the first electrodes, and a second substrate having a plurality of third electrodes which is opposed to the first substrate is provided.

摘要翻译： 一种制造气体放电显示面板的方法和使用激光加工的气体放电显示装置，使得在其基板上形成布线的制造时间显着降低。 为了实现这一点，气体放电显示面板设置有具有多个第一电极和多个第二电极的第一基板，并且第一电极被激光处理以具有基本上矩形的形状。 第二电极形成在第一电极上，并且具有与第一基板相对的多个第三电极的第二基板。

公开(公告)号：US06261144B1

公开(公告)日：2001-07-17

申请号：US09164272

申请日：1998-10-01

申请人： Masashi Nishiki ,  Ryohei Satoh ,  Yuzo Taniguchi ,  Shigeaki Suzuki ,  Michifumi Kawai ,  Masahito Ijuin ,  Akira Yabushita ,  Makoto Fukushima ,  Tomohiko Murase

发明人： Masashi Nishiki ,  Ryohei Satoh ,  Yuzo Taniguchi ,  Shigeaki Suzuki ,  Michifumi Kawai ,  Masahito Ijuin ,  Akira Yabushita ,  Makoto Fukushima ,  Tomohiko Murase

IPC分类号： H01J900

CPC分类号： H05K3/062 ,  H01J9/02 ,  H01J11/12 ,  H01J11/22 ,  H01J11/24 ,  H01J2211/225 ,  H05K3/04 ,  H05K3/388 ,  H05K2201/0175 ,  H05K2201/0326 ,  H05K2203/025 ,  H05K2203/107

摘要： A gas discharge display device comprising a front side substrate having a plurality of first electrodes and a back side substrate having a plurality of second electrodes, wherein at least said first electrodes or second electrodes are formed by wet etching using a resist made of an inorganic material, is excellent in the ability to suppress the breakage of wiring in electrodes.

摘要翻译： 一种气体放电显示装置，包括具有多个第一电极的前侧基板和具有多个第二电极的背面基板，其中至少所述第一电极或第二电极通过使用由无机材料制成的抗蚀剂的湿蚀刻形成 能够抑制电极中的配线断裂的能力优异。

公开(公告)号：US5841893A

公开(公告)日：1998-11-24

申请号：US908550

申请日：1992-06-30

申请人： Seiji Ishikawa ,  Masao Sakata ,  Jun Nakazato ,  Sadao Shimoyashiro ,  Hiroto Nagatomo ,  Yuzo Taniguchi ,  Osamu Satou ,  Tsutomu Okabe ,  Yuzaburo Sakamoto ,  Kimio Muramatsu ,  Kazuhiko Matsuoka ,  Taizo Hashimoto ,  Yuichi Ohyama ,  Yutaka Ebara ,  Isao Miyazaki ,  Shuichi Hanashima

发明人： Seiji Ishikawa ,  Masao Sakata ,  Jun Nakazato ,  Sadao Shimoyashiro ,  Hiroto Nagatomo ,  Yuzo Taniguchi ,  Osamu Satou ,  Tsutomu Okabe ,  Yuzaburo Sakamoto ,  Kimio Muramatsu ,  Kazuhiko Matsuoka ,  Taizo Hashimoto ,  Yuichi Ohyama ,  Yutaka Ebara ,  Isao Miyazaki ,  Shuichi Hanashima

IPC分类号： H01L21/66 ,  G01N21/88 ,  G01N21/956 ,  G06K9/00

CPC分类号： G01N21/88 ,  G01N21/956 ,  H01L22/20 ,  H01L2924/0002

摘要： The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.

公开(公告)号：US06628817B2

公开(公告)日：2003-09-30

申请号：US09752674

申请日：2001-01-03

申请人： Seiji Ishikawa ,  Masao Sakata ,  Jun Nakazato ,  Sadao Shimoyashiro ,  Hiroto Nagatomo ,  Yuzo Taniguchi ,  Osamu Satou ,  Tsutomu Okabe ,  Yuzaburo Sakamoto ,  Kimio Muramatsu ,  Kazuhiko Matsuoka ,  Taizo Hashimoto ,  Yuichi Ohyama ,  Yutaka Ebara ,  Isao Miyazaki ,  Shuichi Hanashima

发明人： Seiji Ishikawa ,  Masao Sakata ,  Jun Nakazato ,  Sadao Shimoyashiro ,  Hiroto Nagatomo ,  Yuzo Taniguchi ,  Osamu Satou ,  Tsutomu Okabe ,  Yuzaburo Sakamoto ,  Kimio Muramatsu ,  Kazuhiko Matsuoka ,  Taizo Hashimoto ,  Yuichi Ohyama ,  Yutaka Ebara ,  Isao Miyazaki ,  Shuichi Hanashima

IPC分类号： G06K900

CPC分类号： G01N21/88 ,  G01N21/956 ,  H01L22/20 ,  H01L2924/0002 ,  H01L2924/00

摘要： The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.

公开(公告)号：US06330352B1

公开(公告)日：2001-12-11

申请号：US09525527

申请日：2000-03-15

申请人： Seiji Ishikawa ,  Masao Sakata ,  Jun Nakazato ,  Sadao Shimoyashiro ,  Hiroto Nagatomo ,  Yuzo Taniguchi ,  Osamu Satou ,  Tsutomu Okabe ,  Yuzaburo Sakamoto ,  Kimio Muramatsu ,  Kazuhiko Matsuoka ,  Taizo Hashimoto ,  Yuichi Ohyama ,  Yutaka Ebara ,  Isao Miyazaki ,  Shuichi Hanashima

发明人： Seiji Ishikawa ,  Masao Sakata ,  Jun Nakazato ,  Sadao Shimoyashiro ,  Hiroto Nagatomo ,  Yuzo Taniguchi ,  Osamu Satou ,  Tsutomu Okabe ,  Yuzaburo Sakamoto ,  Kimio Muramatsu ,  Kazuhiko Matsuoka ,  Taizo Hashimoto ,  Yuichi Ohyama ,  Yutaka Ebara ,  Isao Miyazaki ,  Shuichi Hanashima

IPC分类号： G06K900

CPC分类号： G01N21/88 ,  G01N21/956 ,  H01L22/20 ,  H01L2924/0002 ,  H01L2924/00

摘要： The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.