公开(公告)号：US08059278B2

公开(公告)日：2011-11-15

申请号：US12578997

申请日：2009-10-14

申请人： Zongtao Ge ,  Hideo Kanda ,  Takayuki Saito ,  Noboru Koizumi

发明人： Zongtao Ge ,  Hideo Kanda ,  Takayuki Saito ,  Noboru Koizumi

IPC分类号： G01B11/02

CPC分类号： G01M11/0271 ,  G01M11/025

摘要： The relative position of a test surface is sequentially changed from a reference position where a surface central axis is aligned with a measurement optical axis such that the measurement optical axis is sequentially moved to a plurality of annular regions obtained by dividing the test surface in a diametric direction. The test surface is rotated on a rotation axis whenever the relative position is changed. Measurement light composed of a plane wave is radiated to the rotating test surface, and a one-dimensional image sensor captures interference fringes at each of a plurality of rotational positions. The shape information of each annular region is calculated on the basis of the captured interference fringes at each rotational position, and the shape information is connected to calculate the shape information of the entire measurement region.

摘要翻译： 测试表面的相对位置从表面中心轴与测量光轴对准的参考位置顺序地改变，使得测量光轴顺序地移动到通过将测试表面分成直径而获得的多个环形区域 方向。 每当相对位置改变时，测试表面都会在旋转轴上旋转。 由平面波构成的测量光被照射到旋转测试表面，并且一维图像传感器在多个旋转位置中的每一个处捕获干涉条纹。 基于每个旋转位置处的捕获的干涉条纹来计算每个环形区域的形状信息，并且形状信息被连接以计算整个测量区域的形状信息。

公开(公告)号：US20100231923A1

公开(公告)日：2010-09-16

申请号：US12721084

申请日：2010-03-10

申请人： Zongtao GE ,  Masaaki Tomimizu ,  Hideo Kanda ,  Takayuki Saito ,  Noboru Koizumi ,  Seiji Mochitate ,  Shigeyuki Takano ,  Hiroyuki Iwazaki

发明人： Zongtao GE ,  Masaaki Tomimizu ,  Hideo Kanda ,  Takayuki Saito ,  Noboru Koizumi ,  Seiji Mochitate ,  Shigeyuki Takano ,  Hiroyuki Iwazaki

IPC分类号： G01B11/25

CPC分类号： G01B11/2441 ,  G01M11/0221 ,  G01M11/025 ,  G01M11/0271

摘要： A process of measuring a shape while changing the relative posture of an microscopic interferometer to a sample lens which is rotated about a rotation axis is divided into a process of measuring a top surface in a state where the sample lens is supported from a back surface and a process of measuring a back surface in a state where the sample lens is supported from the top surface. By combining first shape information of a flange side surface acquired by the process of measuring the top surface and second shape information of the flange side surface acquired by the process of measuring the back surface, the relative positional relation between the sample top surface and the sample back surface is calculated.

摘要翻译： 在将微型干涉仪相对于相对于旋转轴线旋转的样本透镜的相对姿势变化的同时测量形状的处理被划分为从背面支撑样本透镜的状态下测量顶面的处理， 在从上表面支撑样本透镜的状态下测量背面的处理。 通过组合通过测量上表面获得的凸缘侧表面的第一形状信息和通过测量背面的处理获得的凸缘侧表面的第二形状信息，样本顶表面和样本之间的相对位置关系 计算背面。

公开(公告)号：US07982882B2

公开(公告)日：2011-07-19

申请号：US12571993

申请日：2009-10-01

申请人： Zongtao Ge ,  Hideo Kanda ,  Takayuki Saito ,  Noboru Koizumi

发明人： Zongtao Ge ,  Hideo Kanda ,  Takayuki Saito ,  Noboru Koizumi

IPC分类号： G01B11/02

CPC分类号： G01B11/2441 ,  G01M11/025 ,  G01M11/0271

摘要： The relative position of a test surface is sequentially changed from a reference position where a surface central axis is aligned with a measurement optical axis such that the measurement optical axis is sequentially moved to a plurality of annular regions obtained by dividing the test surface in a diametric direction. The test surface is rotated on a rotation axis whenever the relative position is changed. Measurement light that travels while being converged by a Mirau objective interference optical system is radiated to the rotating test surface, and a one-dimensional image sensor captures interference fringes at each of a plurality of rotational positions. The shape information of each annular region is calculated on the basis of the captured interference fringes at each rotational position, and the shape information is connected to calculate the shape information of the entire measurement region.

摘要翻译： 测试表面的相对位置从表面中心轴与测量光轴对准的参考位置顺序地改变，使得测量光轴顺序地移动到通过将测试表面分成直径而获得的多个环形区域 方向。 每当相对位置改变时，测试表面都会在旋转轴上旋转。 在由Mirau物镜干涉光学系统会聚的同时行进的测量光被照射到旋转测试表面，并且一维图像传感器在多个旋转位置的每一个处捕获干涉条纹。 基于每个旋转位置处的捕获的干涉条纹来计算每个环形区域的形状信息，并且形状信息被连接以计算整个测量区域的形状信息。

公开(公告)号：US20100091299A1

公开(公告)日：2010-04-15

申请号：US12578997

申请日：2009-10-14

申请人： Zongtao GE ,  Hideo Kanda ,  Takayuki Saito ,  Noboru Koizumi

发明人： Zongtao GE ,  Hideo Kanda ,  Takayuki Saito ,  Noboru Koizumi

IPC分类号： G01B11/24

CPC分类号： G01M11/0271 ,  G01M11/025

摘要： The relative position of a test surface is sequentially changed from a reference position where a surface central axis is aligned with a measurement optical axis such that the measurement optical axis is sequentially moved to a plurality of annular regions obtained by dividing the test surface in a diametric direction. The test surface is rotated on a rotation axis whenever the relative position is changed. Measurement light composed of a plane wave is radiated to the rotating test surface, and a one-dimensional image sensor captures interference fringes at each of a plurality of rotational positions. The shape information of each annular region is calculated on the basis of the captured interference fringes at each rotational position, and the shape information is connected to calculate the shape information of the entire measurement region.

摘要翻译： 测试表面的相对位置从表面中心轴与测量光轴对准的参考位置顺序地改变，使得测量光轴顺序地移动到通过将测试表面分成直径而获得的多个环形区域 方向。 每当相对位置改变时，测试表面都会在旋转轴上旋转。 由平面波构成的测量光被照射到旋转测试表面，并且一维图像传感器在多个旋转位置中的每一个处捕获干涉条纹。 基于每个旋转位置处的捕获的干涉条纹来计算每个环形区域的形状信息，并且形状信息被连接以计算整个测量区域的形状信息。

公开(公告)号：US07538890B2

公开(公告)日：2009-05-26

申请号：US11144709

申请日：2005-06-06

申请人： Zongtao Ge ,  Takayuki Saito ,  Minoru Kurose

发明人： Zongtao Ge ,  Takayuki Saito ,  Minoru Kurose

IPC分类号： G01B11/02

CPC分类号： G01J9/02 ,  G01J1/4257 ,  G02B5/005

摘要： The light beam measurement apparatus comprises a beam splitter that divides a light beam emitted from a light source unit into two luminous fluxes, a semi-transmitting/reflecting surface that reflects part of one of the divided luminous fluxes back in the opposite direction to the direction of incidence as a sample luminous flux, and reflection-type reference light producing means that converts part of the luminous flux transmitted through the semi-transmitting/reflecting surface into a wavefront-shaped reference luminous flux and outputs this reference luminous flux; this light beam measurement apparatus can carry out both wavefront measurement and light beam spot characteristic measurement on a light beam simultaneously.

摘要翻译： 光束测量装置包括：分束器，其将从光源单元发射的光束分成两个光束;半透射/反射表面，其将一个分割光束的一部分反向与方向相反的方向 作为样品光通量的入射角，以及反射型参照光产生装置，其将通过半透射/反射表面透射的光束的一部分转换为波前参考光通量并输出该参考光通量; 该光束测量装置可以同时对光束进行波前测量和光束点特性测量。

公开(公告)号：US20050270543A1

公开(公告)日：2005-12-08

申请号：US11144709

申请日：2005-06-06

申请人： Zongtao Ge ,  Takayuki Saito ,  Minoru Kurose

发明人： Zongtao Ge ,  Takayuki Saito ,  Minoru Kurose

IPC分类号： G01B9/02 ,  G01J1/42 ,  G01J9/02 ,  G02B5/00

CPC分类号： G01J9/02 ,  G01J1/4257 ,  G02B5/005

摘要： The light beam measurement apparatus comprises a beam splitter that divides a light beam emitted from a light source unit into two luminous fluxes, a semi-transmitting/reflecting surface that reflects part of one of the divided luminous fluxes back in the opposite direction to the direction of incidence as a sample luminous flux, and reflection-type reference light producing means that converts part of the luminous flux transmitted through the semi-transmitting/reflecting surface into a wavefront-shaped reference luminous flux and outputs this reference luminous flux; this light beam measurement apparatus can carry out both wavefront measurement and light beam spot characteristic measurement on a light beam simultaneously.

摘要翻译： 光束测量装置包括：分束器，其将从光源单元发射的光束分成两个光束;半透射/反射表面，其将一个分割光束的一部分反向与方向相反的方向 作为样品光通量的入射角，以及反射型参照光产生装置，其将通过半透射/反射表面透射的光束的一部分转换为波前参考光通量并输出该参考光通量; 该光束测量装置可以同时对光束进行波前测量和光束点特性测量。

公开(公告)号：US07092104B2

公开(公告)日：2006-08-15

申请号：US10779599

申请日：2004-02-18

申请人： Masatoshi Hizuka ,  Hideo Kanda ,  Takayuki Saito

发明人： Masatoshi Hizuka ,  Hideo Kanda ,  Takayuki Saito

IPC分类号： G01B11/02

CPC分类号： G01B9/02022 ,  G01B9/02007 ,  G01B9/02069 ,  G01B9/02095 ,  G01B9/02096 ,  G01B11/162

摘要： In a speckle interferometer apparatus 2, an optical member mounting device 10 mounted with optical members including a pair of luminous flux outputting devices 9a, 9b, 9c, 9d is disposed on the object side of a main unit of an imaging device 3 while being separated from the imaging device 3. A light-transmitting area 14 is formed between the pair of luminous flux outputting devices 9a, 9b, 9c, 9d so as to transmit therethrough interference light from an object surface.

摘要翻译： 在散斑干涉仪装置2中，安装有包括一对光束输出装置9a，9b，9c，9d的光学构件的光学构件安装装置10设置在成像装置的主单元的物体侧 同时与成像装置3分离。 在一对光束输出装置9a，9b，9c，9d之间形成透光区域14，以便透射来自物体表面的干涉光。

公开(公告)号：US08573041B2

公开(公告)日：2013-11-05

申请号：US13314591

申请日：2011-12-08

申请人： Takayuki Saito ,  Takayuki Yogo ,  Shinya Igarashi ,  Hiromu Kikawa

发明人： Takayuki Saito ,  Takayuki Yogo ,  Shinya Igarashi ,  Hiromu Kikawa

IPC分类号： G01M15/04

CPC分类号： G01F1/6842 ,  G01F5/00 ,  H01L2224/48091 ,  H01L2924/00014

摘要： An arrangement of a mass intake air flow measurement device suitable for integrating a humidity sensing device as well as a temperature sensing device and a pressure sensing device is provided. A second bypass passage 501 bypassing a bypass passage 205 is formed and a humidity sensing device 500 is mounted in the second bypass passage 501. A second bypass passage inlet 502 and a second bypass passage outlet 503 formed in a wall surface of the bypass passage 205 are opened parallel to the direction of flow of air flowing in the bypass passage 205.

摘要翻译： 提供了一种适合于集成湿度感测装置以及温度感测装置和压力感测装置的大量进气流量测量装置的布置。 形成旁通旁路通路205的第二旁路通路501，在第二旁路通路501中安装湿度检测装置500.形成在旁通路205的壁面的第二旁路通路入口502和第二旁路通路出口503 平行于在旁路通路205中流动的空气的流动方向开口。

公开(公告)号：US08549901B2

公开(公告)日：2013-10-08

申请号：US13367939

申请日：2012-02-07

申请人： Takayuki Saito ,  Keiji Hanzawa ,  Takayuki Yogo

发明人： Takayuki Saito ,  Keiji Hanzawa ,  Takayuki Yogo

IPC分类号： G01M15/04

CPC分类号： G01F1/6842 ,  F02D41/187 ,  G01F5/00

摘要： In relation to a humidity sensor sensitive to water and contamination, a sensor implementation structure that achieves both protection performance against water and contaminants and measurement performance such as humidity responsiveness is provided. A sensor structure has a mass airflow measurement element that measures a mass airflow flowing in an intake pipe, a humidity sensing element that senses humidity of air flowing in the intake pipe, a housing structural component having a connector that carries out input/output to/from outside and a terminal component of the connector, and a bypass passage that is composed by using part of the housing structural component and takes in part of the air that flows in the intake pipe, the mass airflow measurement element being mounted in the bypass passage; wherein space is provided in the housing structural component in the vicinity of the bypass passage, the humidity sensing element is mounted in the space.

摘要翻译： 关于对水和污染物敏感的湿度传感器，提供了实现对水和污染物的保护性能以及诸如湿度响应性的测量性能的传感器实施结构。 传感器结构具有测量进气管中流动的质量气流的质量气流测量元件，感测进气管中流动的空气湿度的湿度感测元件，具有连接器的壳体结构部件，该连接器将输入/ 从连接器的外部和端子部件和旁通通路构成，所述旁通通路由使用所述壳体结构部件的一部分而占据所述进气管中流动的一部分空气，所述质量空气流量测量元件安装在所述旁路通路 ; 其中在所述外壳结构部件中在所述旁通通路附近设置空间，所述湿度感测元件安装在所述空间中。

公开(公告)号：US20120155101A1

公开(公告)日：2012-06-21

申请号：US13394100

申请日：2010-08-25

申请人： Akihiro Matsumoto ,  Tetsuya Suzuki ,  Tomoyuki Nakagawa ,  Akitaka Kanamori ,  Takayuki Saito ,  Kaname Miyagishima ,  Hiroki Fujimura

发明人： Akihiro Matsumoto ,  Tetsuya Suzuki ,  Tomoyuki Nakagawa ,  Akitaka Kanamori ,  Takayuki Saito ,  Kaname Miyagishima ,  Hiroki Fujimura

IPC分类号： B60Q1/00 ,  F21V21/00

CPC分类号： F21S45/47 ,  B60Q1/0094 ,  F21S41/141 ,  F21S41/147 ,  F21S41/19 ,  F21S41/192 ,  F21V29/004 ,  F21V29/70 ,  F21V29/763 ,  F21Y2115/10 ,  H01L33/58 ,  H01L33/60 ,  H01L33/644 ,  H01L2224/32013 ,  H01L2224/45144 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/00014 ,  H01L2924/00

摘要： A light-emitting apparatus is provided with: a light-emitting module; a control circuit unit configured to control the lighting of the light-emitting module; a heat-radiating substrate configured to support the light-emitting module and the control circuit unit in such a manner as to recover the heat produced by the light-emitting module and the control circuit unit; and a connection support unit mounted on the heat-radiating substrate in such a state as to support an electrically conductive member by which to electrically connect the light-emitting module and the control circuit unit.

摘要翻译： 发光装置具有：发光模块; 被配置为控制所述发光模块的点亮的控制电路单元; 散热基板，被配置为支撑发光模块和控制电路单元，以回收由发光模块和控制电路单元产生的热量; 以及安装在散热基板上的连接支撑单元，其状态为支撑用于电连接发光模块和控制电路单元的导电构件。