公开(公告)号：US20100309476A1

公开(公告)日：2010-12-09

申请号：US12856723

申请日：2010-08-16

Applicant: JAMES E. MILLERD

Inventor： JAMES E. MILLERD

IPC: G01B9/02

CPC classification number: G01B9/0201 ,  G01B9/02057 ,  G01B9/02065 ,  G01B9/02079 ,  G01B9/0209 ,  G01B11/2441 ,  G01B11/25 ,  G01B2290/70

Abstract: A phase-difference sensor measures the spatially resolved difference in phase between orthogonally polarized reference and test wavefronts. The sensor is constructed as a linear-carrier phase-mask aligned to and imaged on a linear-carrier detector array. Mireau and Fizeau polarization interferometric objectives are implemented with a thin conductive wire grid optically coupled to the objective beam splitter.

Abstract translation: 相位差传感器测量正交极化参考和测试波前的相位的空间分辨差异。 传感器被构造为与线性载波检测器阵列对准并成像的线性载波相位掩模。 Mireau和Fizeau偏振干涉仪目标通过光学耦合到物镜分束器的薄导电网格实现。

公开(公告)号：US07777895B2

公开(公告)日：2010-08-17

申请号：US11800840

申请日：2007-05-08

Applicant: Brian S. Medower ,  James E. Millerd

Inventor： Brian S. Medower ,  James E. Millerd

IPC: G01B11/02

CPC classification number: G01B9/0201 ,  G01B9/02022 ,  G01B9/02057 ,  G01B9/02065 ,  G01B9/02079 ,  G01B9/0209 ,  G01B9/02098 ,  G01B11/2441 ,  G01B11/25 ,  G01B2290/70 ,  G06T7/521

Abstract: A phase-difference sensor measures the spatially resolved difference in phase between orthogonally polarized reference and test wavefronts. The sensor is constructed as a linear-carrier phase-mask aligned to and imaged on a linear-carrier detector array. Each adjacent element of the phase-mask measures a predetermined relative phase shift between the orthogonally polarized reference and test beams. Thus, multiple phase-shifted interferograms can be synthesized at the same time by combining pixels with identical phase-shifts. The multiple phase-shifted interferograms can be combined to calculate standard parameters such as modulation index or average phase step. Any configuration of interferometer that produces orthogonally polarized reference and object beams may be combined with the phase-difference sensor of the invention to provide single-shot, simultaneous phase-shifting measurements.

Abstract translation: 相位差传感器测量正交极化参考和测试波前的相位的空间分辨差异。 传感器被构造为与线性载波检测器阵列对准并成像的线性载波相位掩模。 相位掩模的每个相邻元件测量正交极化参考和测试光束之间的预定相对相移。 因此，通过组合具有相同相移的像素，可以同时合成多个相移干涉图。 可以组合多个相移干涉图以计算标准参数，例如调制指数或平均相位步长。 可以将产生正交偏振的参考和物体光束的干涉仪的任何配置与本发明的相位差传感器组合以提供单次，同时的相移测量。

公开(公告)号：US07079251B2

公开(公告)日：2006-07-18

申请号：US10687308

申请日：2003-10-16

Applicant: James E. Millerd ,  Neal J. Brock ,  Larry Denneau, Jr.

Inventor： James E. Millerd ,  Neal J. Brock ,  Larry Denneau, Jr.

IPC: G01B9/02

CPC classification number: G01B9/02072 ,  G01B9/0207 ,  G01B9/02083 ,  G01B2290/70 ,  G01J3/2803 ,  G01J9/02 ,  G06T5/006 ,  G06T5/008 ,  G06T7/80

Abstract: A multi-channel imaging system is calibrated by measuring the geometric distortion in each sub-image, generating corresponding correction factors, and applying such factors to correct subsequent image data. In addition, intensity transfer-function arrays are measured at each pixel, and further used to correct for system and detector nonlinearities and nonuniformity between images. The procedure is repeated over a range of wavelengths to produce a complete set of correction coefficients and transfer functions. When the system is used for interferometric phase measurements, multiple measurements are preferably taken and a random phase offset in the reference path length is introduced at each measurement. The multiple phase data so derived are then averaged to reduce phase-dependent systematic measurement errors.

Abstract translation: 通过测量每个子图像中的几何失真来校准多通道成像系统，产生相应的校正因子，并应用这些因素来校正随后的图像数据。 此外，在每个像素处测量强度传递函数阵列，并进一步用于校正系统和检测器的非线性和图像之间的不均匀性。 该过程在波长范围内重复以产生一整套校正系数和传递函数。 当系统用于干涉测量时，优选进行多次测量，并在每次测量时引入参考路径长度的随机相位偏移。 然后平均如此导出的多相数据以减少相位依赖的系统测量误差。

公开(公告)号：US09746316B1

公开(公告)日：2017-08-29

申请号：US15049080

申请日：2016-02-21

Applicant: Brad Kimbrough ,  Erik Novak

Inventor： Brad Kimbrough ,  Erik Novak

IPC: G01B11/02 ,  G01B11/24

CPC classification number: G01B11/2441 ,  G01N21/8901

Abstract: A substrate is tested with an interferometer in-line in a roll-to-roll processing operation to detect defects and exclude them from further processing. A tilt is introduced in the illumination path of the interferometer to allow detection of best fringes in a selected measurement field of view (FOV) that is smaller than the camera FOV in the direction transverse to the fringes. At each acquisition frame, the measurement FOV is shifted to track the best-fringe position within the camera field of view based on irradiance acquired at the previous step. As a result, the system is able to accommodate substrate flutter and roller runout and maintain focus on the substrate that allows precise identification of defects and their isolation for subsequent processing.

公开(公告)号：US07580135B2

公开(公告)日：2009-08-25

申请号：US11821223

申请日：2007-06-22

Applicant: John Hayes

Inventor： John Hayes

IPC: G01B9/02

CPC classification number: G01B11/2441 ,  G01B9/02039 ,  G01B9/02057 ,  G01B9/02063

Abstract: The focus of the collimating lens in the optical train of a Fizeau interferometer is adjusted to change the power of the test beam illuminating the transmission sphere. As a result, the rays can be made sufficiently perpendicular to the reference surface to eliminate the chromatic focus shift and non-common path errors produced by a light source of wavelength different from the design wavelength of the transmission sphere. By making the position of the collimating lens relative to the beam expander adjustable along the optical axis over some small range, illumination sources of various wavelength can be used in the same interferometer.

Abstract translation: 调整Fizeau干涉仪的光学列中的准直透镜的焦点以改变照射透射球的测试光束的功率。 结果，可以使光线足够垂直于参考表面，以消除由与透射球的设计波长不同的波长的光源产生的色彩偏移和非共同路径误差。 通过使相对于光束扩展器的准直透镜的位置沿着光轴在一定范围内可调，各种波长的照明源可以在相同的干涉仪中使用。

公开(公告)号：US20070296978A1

公开(公告)日：2007-12-27

申请号：US11821223

申请日：2007-06-22

Applicant: John Hayes

Inventor： John Hayes

IPC: G01B11/02

CPC classification number: G01B11/2441 ,  G01B9/02039 ,  G01B9/02057 ,  G01B9/02063

Abstract: The focus of the collimating lens in the optical train of a Fizeau interferometer is adjusted to change the power of the test beam illuminating the transmission sphere. As a result, the rays can be made sufficiently perpendicular to the reference surface to eliminate the chromatic focus shift and non-common path errors produced by a light source of wavelength different from the design wavelength of the transmission sphere. By making the position of the collimating lens relative to the beam expander adjustable along the optical axis over some small range, illumination sources of various wavelength can be used in the same interferometer.

Abstract translation: 调整Fizeau干涉仪的光学列中的准直透镜的焦点以改变照射透射球的测试光束的功率。 结果，可以使光线足够垂直于参考表面，以消除由与透射球的设计波长不同的波长的光源产生的色彩偏移和非共同路径误差。 通过使相对于光束扩展器的准直透镜的位置沿着光轴在一定范围内可调，各种波长的照明源可以在相同的干涉仪中使用。

公开(公告)号：US07230717B2

公开(公告)日：2007-06-12

申请号：US10838694

申请日：2004-05-04

Applicant: Neal J. Brock ,  James E. Millerd ,  James C. Wyant ,  John B. Hayes

Inventor： Neal J. Brock ,  James E. Millerd ,  James C. Wyant ,  John B. Hayes

IPC: G01B11/02 ,  G01B9/02

CPC classification number: G01B9/02022 ,  G01B9/02057 ,  G01B9/02081 ,  G01B9/02083 ,  G01B2290/70

Abstract: A phase-difference sensor measures the spatially resolved difference in phase between orthogonally polarized reference and test wavefronts. The sensor is constructed as a pixelated phase-mask aligned to and imaged on a pixelated detector array. Each adjacent pixel of the phase-mask measures a predetermined relative phase shift between the orthogonally polarized reference and test beams. Thus, multiple phase-shifted interferograms can be synthesized at the same time by combining pixels with identical phase-shifts. The multiple phase-shifted interferograms can be combined to calculate standard parameters such as modulation index or average phase step. Any configuration of interferometer that produces orthogonally polarized reference and object beams may be combined with the phase-difference sensor of the invention to provide, single-shot, simultaneous phase-shifting measurements.

Abstract translation: 相位差传感器测量正交极化参考和测试波前的相位的空间分辨差异。 传感器被构造为与像素化检测器阵列对准并成像的像素化相位掩模。 相位掩模的每个相邻像素测量正交极化参考和测试光束之间的预定相对相移。 因此，通过组合具有相同相移的像素，可以同时合成多个相移干涉图。 可以组合多个相移干涉图以计算标准参数，例如调制指数或平均相位步长。 可以将产生正交极化参考和物体光束的干涉仪的任何配置与本发明的相位差传感器组合以提供单次同时相移测量。

公开(公告)号：US07057737B2

公开(公告)日：2006-06-06

申请号：US10652903

申请日：2003-08-29

Applicant: James E. Millerd ,  Neal J. Brock ,  John B. Hayes ,  James C. Wyant

Inventor： James E. Millerd ,  Neal J. Brock ,  John B. Hayes ,  James C. Wyant

IPC: G01B9/02

CPC classification number: G01B9/02022 ,  G01B9/02023 ,  G01B9/02024 ,  G01B9/02038 ,  G01B9/02057 ,  G01B9/02081 ,  G01B9/02097 ,  G01B2290/30 ,  G01B2290/70 ,  G01J9/02

Abstract: A polarizing point-diffraction plate is used to produce common-path test and reference wavefronts with mutually orthogonal polarizations from an input wavefront. The common-path test and reference wavefronts are collimated, phase shifted and interfered, and the resulting interferograms are imaged on a detector. The interference patterns are then processed using conventional algorithms to characterize the input light wavefront.

Abstract translation: 偏振点衍射板用于产生具有来自输入波前的相互正交偏振的共路径测试和参考波前。 公共路径测试和参考波前被准直，相移和干扰，并将所得的干涉图成像在检测器上。 然后使用常规算法处理干涉图案以表征输入光波前。

公开(公告)号：US09857169B1

公开(公告)日：2018-01-02

申请号：US15385143

申请日：2016-12-20

Applicant: 4D TECHNOLOGY CORPORATION

Inventor： Michael North Morris ,  James Millerd

IPC: G01B11/24 ,  G01B11/255 ,  G01B9/02

CPC classification number: G01B11/255 ,  G01B9/02065 ,  G01B9/02081 ,  G01B9/0209 ,  G01B2290/15 ,  G01B2290/70 ,  G01M11/005

Abstract: An interferometer includes a short-coherence source and an internal path-matching assembly contained within its housing. Because path matching occurs within the housing of the interferometer, it is removed from external environmental factors that affect measurements. Therefore, a single cateye measurement of an exemplary surface can be performed in advance and stored as a calibration for subsequent radius-of-curvature measurements. In one embodiment, a path-matching stage is incorporated into a dynamic interferometer where orthogonally polarized test and reference beams are fed to a dynamic imaging system. In another embodiment, orthogonal linearly polarized test and reference beams are injected into a remote dynamic interferometer by means of one single-mode polarization-maintaining optical fiber.

公开(公告)号：US07675628B2

公开(公告)日：2010-03-09

申请号：US11899883

申请日：2007-09-07

Applicant: James E. Millerd ,  Michael North-Morris

Inventor： James E. Millerd ,  Michael North-Morris

IPC: G01B9/02

CPC classification number: G01B9/02057 ,  G01B9/02002 ,  G01B9/02045 ,  G01B9/02065 ,  G01B9/0209 ,  G01B2290/70

Abstract: An optical device for characterizing a test surface combines a Fizeau interferometer with a polarization frequency-shifting element. Two substantially collinear, orthogonally polarized beams having respective frequencies differing by a predetermined frequency shift are generated by the polarization frequency-shifting element and projected into the Fizeau optical cavity to produce a pair of test beams and a pair of reference beams, wherein the beams in each pair have orthogonal polarization states and have frequencies differing by the predetermined frequency shift. A second, substantially equal frequency shift is introduced in the Fizeau cavity on either one of the pairs of test and reference beams, thereby generating a four-beam collinear output that produces an interferogram without tilt or short-coherence light. The invention may also be implemented by reversing the order of the Fizeau cavity and the polarization frequency-shifting element in the optical train.

Abstract translation: 用于表征测试表面的光学装置将Fizeau干涉仪与偏振频移元件组合。 通过偏振频移元件产生具有不同频率预定频移的两个基本上共线的正交偏振光束，并投射到菲索光学腔中以产生一对测试光束和一对参考光束，其中光束 每对具有正交偏振状态并且具有与预定频移不同的频率。 第二个基本上相等的频移在Fizeau腔中的任一个测试和参考光束中被引入，从而产生产生没有倾斜或短相干光的干涉图的四光束共线输出。 本发明还可以通过使光纤列中的Fizeau腔和极化频移元件的顺序颠倒来实现。