COMPOUND, THIN-FILM FORMING RAW MATERIAL, THIN-FILM, AND METHOD OF PRODUCING THIN-FILM

    公开(公告)号:US20240318304A1

    公开(公告)日:2024-09-26

    申请号:US18575951

    申请日:2022-06-27

    申请人: ADEKA CORPORATION

    IPC分类号: C23C16/18

    CPC分类号: C23C16/18

    摘要: A compound is represented by the following general formula (1), a thin-film forming raw material including the compound, a thin-film, and a method of producing a thin-film:






    wherein R1 to R4 each independently represent a hydrogen atom or an alkyl group having 1 to 5 carbon atoms, R5 and R6 each independently represent an alkyl group having 1 to 5 carbon atoms, A represents an alkanediyl group having 1 to 5 carbon atoms, L represents a group represented by the general formula (L-1) or (L-2) described herein, and M represents a hafnium atom, a zirconium atom, or a titanium atom, provided that in a case of a compound in which R5 and R6 each represent a methyl group, A represents an alkanediyl group having 2 carbon atoms, and M represents a titanium atom, L represents a group represented by the general formula (L-2).

    CURABLE RESIN COMPOSITION
    3.
    发明公开

    公开(公告)号:US20240317967A1

    公开(公告)日:2024-09-26

    申请号:US18262521

    申请日:2022-01-25

    申请人: ADEKA CORPORATION

    IPC分类号: C08K5/3415 C08G59/50

    CPC分类号: C08K5/3415 C08G59/5073

    摘要: A curing resin composition well balanced in curing properties and storage stability. The composition contains (A) an epoxy resin, (B) a curing agent, and (C) at least one of imide compounds represented by formulae (1-1), (1-2), and (1-3), wherein R11 represents an optionally substituted alkyl group with 1 to 10 carbon atoms, etc.; R1, R2, R3, and R4 each independently represent a hydrogen atom, an alkyl group with 1 to 10 carbon atoms, etc.; and R12 and R13 each independently represent a hydrogen atom, an optionally substituted alkyl group with 1 to 10 carbon atoms, etc.

    Resin composition, method for forming cured product, and cured product

    公开(公告)号:US11905388B2

    公开(公告)日:2024-02-20

    申请号:US17632685

    申请日:2020-08-11

    申请人: ADEKA CORPORATION

    CPC分类号: C08K3/08 C08G59/1488

    摘要: The present invention provides a resin composition that contains copper particles and a particular resin and that is capable of producing a cured product having a low volume resistance value, and a cured product obtained by curing the resin composition. The resin composition contains (A) copper particles having an average particle diameter of 0.1 to 20 μm, (B) a phosphoric acid-modified epoxy resin obtained by reacting a phosphoric acid (b1) with an epoxy compound (b2), and (C) a curing agent, wherein the content of the component (B) and the content of the component (C), based on 100 parts by mass of the total amount of the components (A) to (C), are 0.1 to 30 parts by mass and 0.1 to 5 parts by mass, respectively. Further, the cured product is obtained by curing the resin composition.

    ETCHING METHOD
    9.
    发明公开
    ETCHING METHOD 审中-公开

    公开(公告)号:US20240030037A1

    公开(公告)日:2024-01-25

    申请号:US18023158

    申请日:2021-08-23

    申请人: ADEKA CORPORATION

    IPC分类号: H01L21/311

    CPC分类号: H01L21/31122

    摘要: Provided is a method of etching a metal oxide film in a laminate including a substrate and the metal oxide film formed on a surface thereof by an atomic layer etching method, the method including: a first step of introducing, into a treatment atmosphere storing the laminate, at least one oxidizable compound selected from the group consisting of: an alcohol compound; an aldehyde compound; and an ester compound; and a second step of introducing an oxidizing gas into the treatment atmosphere after the first step.