公开(公告)号：US20120114453A1

公开(公告)日：2012-05-10

申请号：US13283630

申请日：2011-10-28

申请人： Tatsuji Ota ,  Masazumi Fukushima ,  Yasuhisa Ito

发明人： Tatsuji Ota ,  Masazumi Fukushima ,  Yasuhisa Ito

IPC分类号： B65G65/00

CPC分类号： H01L21/67733 ,  B65G1/0457 ,  B65G1/0464 ,  B65G2201/0297 ,  B66C19/00 ,  H01L21/67259 ,  H01L21/67706 ,  H01L21/67724 ,  H01L21/67736 ,  H01L21/67769

摘要： In a transport system, a local track is disposed so as to be below an overhead travelling vehicle track in parallel or substantially in parallel therewith, and furthermore above a loading port of a processing device from upstream of the loading port to downstream of the loading port. A local vehicle including a hoist travels along the local track. Below the local track, a first buffer is disposed upstream of the loading port of the processing device, and a second buffer is disposed downstream of the loading port of the processing device, and the overhead travelling vehicle and the local vehicle can both perform delivery and receipt of the article with the first buffer and the second buffer.

摘要翻译： 在运输系统中，局部轨道被布置成平行或基本平行于其的高架行驶车辆轨道下方，并且还包括处理装置的装载口从装载口的上游到装载口的下游 。 包括起重机在内的本地车辆沿着本地轨道行驶。 在本地轨道下方，第一缓冲器设置在处理装置的装载端口的上游，并且第二缓冲器设置在处理装置的装载端口的下游，并且架空行驶车辆和本地车辆都可以执行传送和 收到第一个缓冲区和第二个缓冲区的文章。

公开(公告)号：US20120093620A1

公开(公告)日：2012-04-19

申请号：US13379749

申请日：2010-06-23

申请人： Masanao Murata ,  Takashi Yamaji

发明人： Masanao Murata ,  Takashi Yamaji

IPC分类号： B65G1/10

CPC分类号： H01L21/67766 ,  B65G47/5181 ,  H01L21/67769

摘要： A stocker includes a main body provided with an opening; a port which is adjacent to the opening outside the main body and on which a FOUP can be placed; a plurality of rack portions arranged in one horizontal direction at each of a plurality of levels within the main body and configured such that articles moved by an internal movement apparatus can be put in place; a movable rack portion including a first buffer and a second buffer which are linked to each other; a shift mechanism that can be shifted between a first position where the first buffer is adjacent to the opening and a second position where the second buffer is adjacent to the opening; and a conveyor capable of moving the FOUP, via the opening, between the port and the first buffer or the second buffer positioned at a position adjacent to the opening.

摘要翻译： 贮存器包括设置有开口的主体; 与主体外侧的开口相邻并且可以放置有FOUP的端口; 在主体内的多个水平位置的一个水平方向上布置的多个齿条部分，并且被构造成使得可以将由内部移动装置移动的物品放置就位; 包括彼此连接的第一缓冲器和第二缓冲器的可移动齿条部分; 可以在第一缓冲器与开口相邻的第一位置和第二缓冲器与开口相邻的第二位置之间移动的换档机构; 以及能够通过开口在端口与位于与开口相邻的位置处的第一缓冲器或第二缓冲器之间移动FOUP的输送机。

公开(公告)号：US20100204826A1

公开(公告)日：2010-08-12

申请号：US12705545

申请日：2010-02-12

申请人： Kazutoshi Sawado ,  Yoshiaki Fujiwara ,  Masanao Murata ,  Takashi Yamaji ,  Naofumi Kirihata

发明人： Kazutoshi Sawado ,  Yoshiaki Fujiwara ,  Masanao Murata ,  Takashi Yamaji ,  Naofumi Kirihata

IPC分类号： H01L21/677

CPC分类号： H01L21/67766 ,  H01L21/67769

摘要： A transfer system includes: a first shelf blocking an original transfer path from a transfer position at which the transporting vehicle transfers the transported object to the port and which transfers the transported object with the transporting vehicle; a second shelf that puts the transported object; a displacing device which reciprocates the transported object with respect to the first shelf and the port in a first direction, toward and away from the processing apparatus, and reciprocates the transported object at a first direction position, away in the first direction by the transported object from the first shelf and the port, in a second direction crossing the first direction; and a communicating device receiving a first system signal indicating a transfer request from the transporting vehicle, which transmits a second system signal indicating a transfer permission to the transporting vehicle, which transmits the first system signal to the processing apparatus.

摘要翻译： 传送系统包括：第一搁架，其从运送车辆将运送物体传送到该端口的转移位置阻挡原始传送路径，并且与运送车辆传送被传送物体; 放置运送物体的第二个货架; 移动装置，其使所输送的物体相对于第一搁架和端口朝第一方向往复移动并且远离处理装置，并且使运送物体沿第一方向位置在第一方向上沿着第一方向往复运动， 从第一搁架和端口沿与第一方向交叉的第二方向; 以及通信装置，其向所述处理装置发送指示来自所述运输车辆的转移请求的第一系统信号，所述第一系统信号向所述运送车辆发送指示转运许可的第二系统信号。

公开(公告)号：US07651307B2

公开(公告)日：2010-01-26

申请号：US12167169

申请日：2008-07-02

申请人： Anthony C. Bonora ,  Michael Krolak ,  Roger G. Hine

发明人： Anthony C. Bonora ,  Michael Krolak ,  Roger G. Hine

IPC分类号： B65G1/133

CPC分类号： H01L21/67775 ,  H01L21/67736 ,  Y10S414/14

摘要： The present invention comprises a container transport and loading system. The system generally comprises a load port for presenting articles to a tool and a container transport system. In one embodiment, the load port includes a vertically movable FOUP advance plate assembly that is adapted to load and unload a FOUP from a conveyor that passes by the load port and move the FOUP horizontally. In another embodiment, the load port includes a vertically movable support structure that is adapted to load and unload a container from a shuttle that passes by the load port. The various embodiments of the load port and container transport system are improvements over conventional container transport systems. The present invention also includes a shuttle for simultaneously transporting multiple containers that a load port may load or unload a container from.

摘要翻译： 本发明包括一个集装箱运输和装载系统。 该系统通常包括用于将物品呈现给工具的装载端口和容器运输系统。 在一个实施例中，负载端口包括可垂直移动的FOUP提前板组件，其适于从通过负载端口的传送器加载和卸载FOUP并水平移动FOUP。 在另一个实施例中，负载端口包括可垂直移动的支撑结构，其适于从穿过负载端口的梭子加载和卸载容器。 负载端口和集装箱运输系统的各种实施例是相对于常规集装箱运输系统的改进。 本发明还包括用于同时运送多个容器的梭子，负载口可装载或卸载容器。

公开(公告)号：US08229587B2

公开(公告)日：2012-07-24

申请号：US12390395

申请日：2009-02-20

申请人： Karl Shieh ,  Michael A. Cookson ,  Norma B. Riley ,  Donald Rex Wright ,  Joseph John Fatula, Jr.

发明人： Karl Shieh ,  Michael A. Cookson ,  Norma B. Riley ,  Donald Rex Wright ,  Joseph John Fatula, Jr.

IPC分类号： G06F19/00

CPC分类号： G05B19/41885 ,  G05B2219/31334 ,  G05B2219/31466 ,  G05B2219/45031 ,  H01L21/67276 ,  Y02P90/16 ,  Y02P90/185 ,  Y02P90/26 ,  Y02P90/86

摘要： A semiconductor fabrication facility (fab) configuration module is defined to virtually model physical systems and attributes of a fab. A data acquisition module is defined to interface with the physical systems of the fab and gather operational data from the physical systems. A visualizer module is defined to collect and aggregate the operational data gathered from the physical systems. The visualizer module is further defined to process the operational data into a format suitable for visual rendering. The processed operational data is displayed within a visual context of the fab in a graphical user interface controlled by the visualizer module. An analyzer module is defined to analyze data collected by the visualizer module and to resolve queries regarding fab performance. An optimizer module is defined to control systems within the fab in response to data collected by the visualizer module, data generated by the analyzer module, or a combination thereof.

摘要翻译： 半导体制造设备（fab）配置模块被定义为虚拟模拟晶圆厂的物理系统和属性。 数据采集​​模块被定义为与物理系统的物理系统进行接口，并从物理系统收集操作数据。 定义了可视化模块，用于收集和汇总从物理系统收集的操作数据。 视觉化模块被进一步定义为将操作数据处理成适合于视觉呈现的格式。 经处理的操作数据显示在由可视化模块控制的图形用户界面中的晶圆厂的视觉上下文中。 分析器模块被定义为分析可视化模块收集的数据，并解析有关工厂性能的查询。 定义优化器模块以响应由可视化器模块收集的数据，由分析器模块生成的数据或其组合来控制晶圆厂内的系统。

公开(公告)号：US08196732B2

公开(公告)日：2012-06-12

申请号：US12848442

申请日：2010-08-02

申请人： Joseph John Fatula, Jr. ,  Roumen Iliev Deyanov ,  Kevin Tzou ,  Pablo Gonzalez ,  Robert Carlson ,  John Brooks Greene

发明人： Joseph John Fatula, Jr. ,  Roumen Iliev Deyanov ,  Kevin Tzou ,  Pablo Gonzalez ,  Robert Carlson ,  John Brooks Greene

IPC分类号： B65G49/06 ,  B66B17/04 ,  H01L21/677

CPC分类号： H01L21/67733 ,  B66C1/663 ,  B66C11/06 ,  B66C17/04 ,  H01L21/67736 ,  H01L21/67769

摘要： A transport mechanism is configured to transport a work piece carrier within a buffer in fabrication facility, comprising: a transporter configured to travel on two rails, wherein the transporter comprises (i) a flat belt hoist mechanism configured to lift and to lower one or more work piece carriers, and (ii) a gripper mechanism configured to capture and to release the one or more work piece carriers.

摘要翻译： 输送机构构造成在制造设施中的缓冲器内输送工件载体，包括：构造成在两个轨道上行进的运输机，其中所述运输机包括（i）平带式起重机构，其构造成提升和降低一个或多个 工件承载件，和（ii）构造成捕获并释放所述一个或多个工件承载件的夹持机构。

公开(公告)号：US20120000875A1

公开(公告)日：2012-01-05

申请号：US13170553

申请日：2011-06-28

申请人： Masayasu KAWABATA

发明人： Masayasu KAWABATA

IPC分类号： B66C1/66 ,  B66C19/00 ,  B66C1/10

CPC分类号： B66C1/28 ,  H01L21/67733 ,  H01L21/68707

摘要： A gripper device for a transport vehicle includes a base plate, a guide rail provided on an upper surface of the base plate, a pair of guide blocks arranged to be movable in a substantially horizontal direction toward and away from each other along the guide rail, and a pair of gripping parts. Each of the gripping parts includes a horizontal portion fixed to an upper surface of one of the guide blocks and arranged to extend substantially parallel to the upper surface of the base plate, a vertical portion arranged to extend downward from the horizontal portion to a position lower than that of the base plate, and a claw section provided on a lower end of the vertical portion and arranged to grip an object.

摘要翻译： 用于运输车辆的夹持装置包括基板，设置在基板的上表面上的导轨，一对引导块，其布置成沿着导轨相对于彼此大致水平的方向移动， 和一对抓握部件。 每个抓握部分包括固定到一个引导块的上表面并且布置成基本上平行于基板的上表面延伸的水平部分，垂直部分布置成从水平部分向下延伸到下部位置 以及设置在垂直部的下端并被配置为夹持物体的爪部。

公开(公告)号：US07784606B2

公开(公告)日：2010-08-31

申请号：US12331395

申请日：2008-12-09

申请人： Anthony C. Bonora ,  Michael Krolak ,  Roger G. Hine

发明人： Anthony C. Bonora ,  Michael Krolak ,  Roger G. Hine

IPC分类号： B65G15/00

CPC分类号： H01L21/67763 ,  B65G15/12 ,  B65G43/10 ,  B65G47/268 ,  B65G2201/0297 ,  H01L21/67706 ,  H01L21/6773

摘要： A conveyor and conveyor system is defined for moving a container used to hold semiconductor wafers. The conveyor includes a first belt having a first support surface for movably supporting the container and a second belt having a second support surface for movably supporting the container. The first belt and the second belt each have a raised guide. The conveyor further includes a drive assembly for moving at least the first belt and causing the container to move over the first and second belts when placed on the first and second support surfaces. Methods for making the conveyor and operating the conveyor are also defined herein.

摘要翻译： 输送机和输送机系统被定义为用于移动用于保持半导体晶片的容器。 所述输送机包括具有用于可移动地支撑所述容器的第一支撑表面的第一带和具有用于可移动地支撑所述容器的第二支撑表面的第二带。 第一带和第二带每个都具有升高的引导件。 输送机还包括用于移动至少第一带的驱动组件，并且当放置在第一和第二支撑表面上时使容器移动到第一和第二带上。 制造输送机和操作输送机的方法也在本文中定义。

公开(公告)号：US20100202861A1

公开(公告)日：2010-08-12

申请号：US12703739

申请日：2010-02-10

申请人： Kazutoshi Sawado ,  Yoshiaki Fujiwara ,  Masanao Murata ,  Takashi Yamaji ,  Naofumi Kirihata

发明人： Kazutoshi Sawado ,  Yoshiaki Fujiwara ,  Masanao Murata ,  Takashi Yamaji ,  Naofumi Kirihata

IPC分类号： B65G65/02 ,  B65G65/08

CPC分类号： H01L21/67724 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67775

摘要： A transfer system includes: a first shelf disposed to block an original transfer path from a transfer position at which the transporting vehicle transfers the transported object to the port and can transfer the transported object with the transporting vehicle; a second shelf which puts the transported object; a displacing device can reciprocate the transported object with respect to the first shelf and the port in a first direction, toward and away from the processing apparatus, and which can reciprocate the transported object at first direction position, which is away in the first direction by the transported object from the first shelf and the port, in a second direction crossing the first direction; and a communicating device which receives a transfer request from the transporting vehicle, which can transmit a transfer permission to the transporting vehicle.

摘要翻译： 传送系统包括：第一搁板，设置成阻止从传送位置传送传送路径的原始传送路径，传送车辆将传送的物体传送到端口并且可以与运送车辆传送被传送物体; 放置运送物体的第二个搁架; 位移装置可以使运送物体相对于第一搁架和端口沿着第一方向往复运动，朝向和远离处理装置，并且可以在第一方向位置使第一方向位置往复运动，该第一方向位置在第一方向位置 所述运送物体从所述第一搁架和所述端口沿与所述第一方向交叉的第二方向; 以及通信装置，其接收可以向所述运送车辆发送转让许可的来自所述运输车辆的转移请求。

公开(公告)号：US07762754B2

公开(公告)日：2010-07-27

申请号：US11964070

申请日：2007-12-26

申请人： Susumu Maetaki

发明人： Susumu Maetaki

IPC分类号： B65H1/00

CPC分类号： B66C1/62 ,  B65G9/002 ,  B65G37/02 ,  B65G2201/0297 ,  B66C1/36 ,  Y10S414/14

摘要： A storage apparatus (1) stores a transported object (220) from a transporting carriage (110), which travels along a track (120) installed on or near a ceiling (210) while gripping the transported object. The storage apparatus is provided with a rack portion (30), on which the transported object is put; and a support member (10), whose upper end is supported by the track or ceiling and whose lower end supports the rack portion. The support member selectively has one of first and second shapes. The first shape allows the transporting carriage to put the transported object onto the rack portion at the predetermined position. The second shape allows the rack portion to move away from a position below the track.

摘要翻译： 存储装置（1）存储来自运送托架（110）的输送物体（220），其沿着安装在天花板（210）上或附近的轨道（120）行进，同时夹持输送物体。 存储装置设置有被放置物体的齿条部分（30）; 和支撑构件（10），其上端由轨道或天花板支撑，并且其下端支撑齿条部分。 支撑构件选择性地具有第一和第二形状之一。 第一形状允许运输托架将运送的物体放置在预定位置的齿条部分上。 第二形状允许齿条部分远离轨道下方的位置移动。