SURFACE TREATING APPARATUS
    1.
    发明申请

    公开(公告)号:US20180317726A1

    公开(公告)日:2018-11-08

    申请号:US15968017

    申请日:2018-05-01

    申请人: Noriyoshi Sato

    IPC分类号: A47L11/14 B08B1/00

    摘要: A surface treating apparatus has a first sheet containing unit; a second sheet containing unit; and a sheet driving unit to pull out an elongated sheet from the first sheet containing unit and move it to the second sheet containing unit as the apparatus moves on a surface to be treated. A sheet contacting member contacts one side of the sheet moving from the first sheet containing unit to the second sheet containing unit and brings the other side of the sheet into contact with the surface to be treated when the apparatus moves thereon. The elongated sheet is moved to wipe or apply wax or the like on the surface to be treated as the apparatus moves on the surface while renewing the portion of the sheet to be brought into contact with the surface when desired.

    Plasma generator, ozone generator, substrate processing apparatus and manufacturing method of semiconductor device
    2.
    发明授权
    Plasma generator, ozone generator, substrate processing apparatus and manufacturing method of semiconductor device 有权
    等离子体发生器,臭氧发生器,基板加工装置及半导体装置的制造方法

    公开(公告)号:US07514377B2

    公开(公告)日:2009-04-07

    申请号:US10539569

    申请日:2003-12-26

    IPC分类号: H01L21/00

    摘要: To provide a generator capable of generating plasma and ozone with high efficiency and easy to handle, with a simple structure. An electrode part 10 is formed of electrodes 11 and 12 without dielectric material interposed therebetween. An arc-extinguishing capacitor 13 as a charge storage part for storing charge is connected in series to the electrode part 10. An AC power source 15 generating plasma by causing self-arc-extinguishing discharge between the electrodes 11 and 12 by applying AC voltage to charge and discharge the arc-extinguishing capacitor 13, is connected to both ends of a circuit in which the electrode part 10 and the arc-extinguishing capacitor 13 are connected in series. The arc-extinguishing capacitor 13 and one electrode 12 of the electrode part 10 connected thereto are unitized, for making the electrode part multi-polarized. A unit is constituted of a floating electrode serving as both of the one electrode 12 of the electrode part 10 and one electrode of the arc-extinguishing capacitor 13, an insulating material provided around the floating electrode and a grounding electrode provided around the insulating material.

    摘要翻译: 提供能够以简单的结构高效率且易于处理的能够产生等离子体和臭氧的发电机。 电极部分10由电极11和12形成,其间没有电介质材料。 作为用于存储电荷的电荷存储部分的灭弧电容器13与电极部分10串联连接。一种交流电源15,其通过在电极11和12之间施加交流电压而产生电弧而产生等离子体, 将灭弧电容器13的充放电连接到电极部10和灭弧电容器13串联连接的电路的两端。 将灭弧电容器13和与其连接的电极部10的一个电极12组合,用于使电极部分多极化。 单元由用作电极部分10的一个电极12和灭弧电容器13的一个电极的浮动电极,设置在浮动电极周围的绝缘材料和设置在绝缘材料周围的接地电极构成。