公开(公告)号：US09175184B2

公开(公告)日：2015-11-03

申请号：US14352446

申请日：2012-11-09

Applicant: SAES GETTERS S.P.A.

Inventor： Luca Mauri ,  Alessandro Gallitognotta ,  Alberto Coda

IPC: H01L31/0224 ,  C09D105/00 ,  H01J7/18 ,  H01J7/20 ,  C09D7/12

CPC classification number: C09D105/00 ,  C09D7/61 ,  C09D7/63 ,  H01J7/183 ,  H01J7/20

Abstract: A composition of precursors for the release of vapors of alkali or alkali-earth metals is described. The composition has at least a compound of alkali or alkali-earth metal, at least a reducing agent and optionally an absorbing material, all in the form of powders, dispersed in a viscous matrix of hybrid organic-inorganic type. Dispensers for the release of these metals obtained through the composition and micro-electronic devices are also described.

Abstract translation: 描述了用于释放碱金属或碱土金属蒸汽的前体组合物。 所述组合物至少具有分散在混合有机 - 无机类型的粘性基质中的粉末形式的至少一种碱金属或碱土金属，至少一种还原剂和任选的吸收材料。 还描述了通过组合物和微电子器件获得的用于释放这些金属的分配器。