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公开(公告)号:US20250070036A1
公开(公告)日:2025-02-27
申请号:US18805969
申请日:2024-08-15
Applicant: SHINKO ELECTRIC INDUSTRIES CO., LTD.
Inventor: Kei MURAYAMA
IPC: H01L23/538
Abstract: A semiconductor apparatus includes three or more semiconductor devices connected in parallel with each other and an interconnect substrate arranged on the semiconductor devices, wherein the semiconductor devices have respective control electrodes and are switched by a voltage applied to the control electrodes, wherein the interconnect substrate includes an insulating layer and a first interconnect pattern arranged on an opposite side of the insulating layer from the semiconductor devices and connecting the control electrodes of the semiconductor devices, wherein the first interconnect pattern includes a same number of interconnects of equal length as the semiconductor devices, and a voltage input point configured to receive a voltage applied to the control electrodes via the interconnects of equal length, and wherein the control electrodes of the semiconductor devices are connected to the voltage input point only by the interconnects of equal length, which extend in different directions from the voltage input point.
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公开(公告)号:US20250062231A1
公开(公告)日:2025-02-20
申请号:US18795429
申请日:2024-08-06
Applicant: SHINKO ELECTRIC INDUSTRIES CO., LTD.
Inventor: Takashi NISHIYAMA , Yoshiki AKIYAMA
IPC: H01L23/528 , H01L23/532 , H01L23/538
Abstract: A wiring substrate includes a first wiring layer, a first insulating layer, and a second wiring layer. The first insulating layer covers the first wiring layer. The second wiring layer is formed on an upper surface of the first insulating layer and is electrically connected to the first wiring layer. The upper surface of the first insulating layer includes a first roughened surface, and a second roughened surface having a greater roughness than the first roughened surface. The second roughened surface includes a wrinkle pattern resulting from buckling. A volume percent of the first wiring layer located in a first region that overlaps the first roughened surface in plan view is greater than a volume percent of the first wiring layer located in a second region that overlaps the second roughened surface in plan view.
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公开(公告)号:US20250054847A1
公开(公告)日:2025-02-13
申请号:US18798016
申请日:2024-08-08
Applicant: SHINKO ELECTRIC INDUSTRIES CO., LTD.
Inventor: Kensuke Uchida
IPC: H01L23/498 , H01L21/48 , H01L23/00
Abstract: A wiring board includes an insulating layer and a connection terminal that is formed on a surface of the insulating layer. The connection terminal includes a metal pad that is embedded in the insulating layer and a plated layer that covers an end face of the pad that is exposed on the surface of the insulating layer. The end face of the pad is depressed in a concave surface form to a position lower than the surface of the insulating layer and a surface of the plated layer on a side opposite to a surface making contact with the end face of the pad is depressed in the concave surface form toward the end face.
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公开(公告)号:US12198968B2
公开(公告)日:2025-01-14
申请号:US17871237
申请日:2022-07-22
Applicant: SHINKO ELECTRIC INDUSTRIES CO., LTD.
Inventor: Kentaro Kobayashi , Mizuki Watanabe , Kohei Yamaguchi , Atsuo Sato
IPC: H01L21/683 , B28B11/08 , C04B37/00 , H01J37/32
Abstract: The electrostatic chuck includes an insulating substrate having a placement surface on which a suction target object is placed and an opposite surface provided on an opposite side to the placement surface; and a gas hole penetrating from the opposite surface to the placement surface. The gas hole has a first hole portion extending from the opposite surface toward the placement surface, a second hole portion extending from the placement surface toward the opposite surface, and a third hole portion provided between the first hole portion and the second hole portion and formed to communicate the first hole portion and the second hole portion each other. The first hole portion is provided not to overlap with the second hole portion in a plan view.
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公开(公告)号:US20240385366A1
公开(公告)日:2024-11-21
申请号:US18663665
申请日:2024-05-14
Applicant: SHINKO ELECTRIC INDUSTRIES CO., LTD.
Inventor: Kazunao YAMAMOTO , Hisashi KANEDA
Abstract: An optical waveguide device includes an interconnect substrate, a first cladding layer disposed on the interconnect substrate, a core layer disposed on the first cladding layer, a second cladding layer disposed on the first cladding layer and selectively covering the core layer, and one or more elevated supports disposed on the first cladding layer and apart from the core layer, wherein one longitudinal-direction end of the core layer and the elevated supports are situated in a component mounting region exposed from the second cladding layer, and wherein the elevated supports are made of a same material as the core layer and have a same thickness as the core layer.
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公开(公告)号:US12133330B2
公开(公告)日:2024-10-29
申请号:US18047348
申请日:2022-10-18
Applicant: SHINKO ELECTRIC INDUSTRIES CO., LTD.
Inventor: Akihiro Takeuchi
CPC classification number: H05K1/113 , H05K1/09 , H05K1/181 , H05K2201/0376 , H05K2201/09227 , H05K2201/096 , H05K2201/09736 , H05K2201/10674
Abstract: A wiring substrate includes an insulating layer, a pad in a via hole piercing through the insulating layer and exposed at a first surface of the insulating layer, a via conductor on the pad in the via hole, and a wiring part on a second surface of the insulating layer facing away from the first surface. The wiring part is connected to the pad through the via conductor in the via hole.
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公开(公告)号:US20240332109A1
公开(公告)日:2024-10-03
申请号:US18612214
申请日:2024-03-21
Applicant: SHINKO ELECTRIC INDUSTRIES CO., LTD.
Inventor: Shinichiro Sekijima
CPC classification number: H01L23/3185 , H01L24/16 , H01L2224/16227 , H01L2924/18161 , H01L2924/3512
Abstract: A semiconductor device includes a wiring substrate, a semiconductor chip, and a sealing resin. The semiconductor chip is mounted on the wiring substrate. The sealing resin is filled in a gap between the wiring substrate and the semiconductor chip and extends to an upper surface of the semiconductor chip. The semiconductor chip includes a groove that is formed in an outer peripheral area that is located around a circumference of a predetermined area disposed on the upper surface of the semiconductor chip and that includes a peripheral edge of the upper surface of the semiconductor chip, and that captures an extending portion of the sealing resin extends.
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公开(公告)号:US20240297026A1
公开(公告)日:2024-09-05
申请号:US18590384
申请日:2024-02-28
Applicant: SHINKO ELECTRIC INDUSTRIES CO., LTD.
Inventor: Masahiro Sunohara , Riku Nishikawa , Shun Takagi , Sakura Ando
IPC: H01J37/32 , H01L21/683
CPC classification number: H01J37/32724 , H01L21/6833 , H01J2237/334
Abstract: A substrate fixing device includes a base plate, a heating portion provided on the base plate, a metal layer provided on the heating portion, and an electrostatic chuck provided on the metal layer. In the substrate fixing device, the metal layer is made of the same material as the base plate.
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公开(公告)号:US20240284593A1
公开(公告)日:2024-08-22
申请号:US18629124
申请日:2024-04-08
Applicant: SHINKO ELECTRIC INDUSTRIES CO., LTD.
Inventor: Hikaru Tanaka , Takashi Kasuga
IPC: H05K1/11 , H01L21/48 , H01L23/498 , H05K3/38
CPC classification number: H05K1/113 , H01L21/4857 , H01L23/49822 , H05K3/381
Abstract: A wiring substrate includes: a wiring layer; an insulating layer that is laminated on the wiring layer; an opening portion that passes through the insulating layer to the wiring layer; and an electric conductor film that is formed at the opening portion of the insulating layer. A surface of the insulating layer includes a smoothed portion that is not covered by the electric conductor film, and a roughened portion that includes an inner wall surface of the opening portion covered by the electric conductor film and that have surface roughness that is greater than surface roughness of the smoothed portion.
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公开(公告)号:US20240283121A1
公开(公告)日:2024-08-22
申请号:US18436391
申请日:2024-02-08
Applicant: SHINKO ELECTRIC INDUSTRIES CO., LTD.
Inventor: Hiroshi TANEDA , Yoko NAKABAYASHI , Noriyoshi SHIMIZU , Noritaka KATAGIRI , Tatsuki SUMI
CPC classification number: H01P3/121 , H01P11/002
Abstract: A waveguide substrate includes a core substrate through which first through holes and second through holes are formed, a first conductive layer covering an inner wall of the first through holes and both sides of the core substrate, a second conductive layer covering an inner wall of the second through holes and both sides of the core substrate, a first filler material filling a space surrounded by the first conductive layer inside the first through holes, a second filler material filling a space surrounded by the second conductive layer inside the second through holes, and third conductive layers disposed on respective sides of the core substrate, the third conductive layers overlapping the first and second through holes in a plan view, and the third conductive layers being electrically connected to the first and second conductive layers, wherein the second conductive layer overlaps the first through holes in the plan view.
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